Class information for:
Level 2: BETA DIKETONATE//DIMETHYLALUMINUM HYDRIDE//CHEMICAL VAPOR DEPOSITION

Basic class information
Class id #P Avg. number of
references		 Database coverage
of references
2014 5470 21.9 55%


Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
2 4 MATERIALS SCIENCE, MULTIDISCIPLINARY//PHYSICS, APPLIED//PHYSICS, CONDENSED MATTER 2836879
715 3       BETA DIKETONATE//DIMETHYLALUMINUM HYDRIDE//CHEMICAL VAPOR DEPOSITION 5470
2014 2             BETA DIKETONATE//DIMETHYLALUMINUM HYDRIDE//CHEMICAL VAPOR DEPOSITION 5470
8898 1                   FREEFORM FABRICAT S//NEMISIS TEAM//LCVD 1206
8977 1                   SRDPM2//BETA DIKETONATE//TIT BUO2DPM2 1199
11277 1                   PERFLUORINATED CARBOXYLATES//ZENTRUM MIKROTECHNOL//COPPER FILMS 994
16292 1                   CVD W//TUNGSTEN THIN FILMS//CVD IRON 662
18399 1                   LASER MICRO CLADDING//LASER INDUCED CHEMICAL LIQUID PHASE DEPOSITION//LCLD 553
24432 1                   DIMETHYLALUMINUM HYDRIDE//DIMETHYLALUMINUMHYDRIDE DMAH//SELECTIVE AL CVD 312
24465 1                   STATE ADV TECHNOL PLATINUM MET//IRIDIUM ACETYLACETONATE COMPLEXES//AV NIKOLAEV INORGAN CHEM 311
27272 1                   CHROMIUM BASED COATINGS//TG BASED TRANSPIRATION//ATMOSPHERIC DEPOSITION PROCESS 233

Terms with highest relevance score


rank Term termType Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with term
in class
1 BETA DIKETONATE authKW 89413 1% 26% 61
2 DIMETHYLALUMINUM HYDRIDE authKW 69750 0% 83% 15
3 CHEMICAL VAPOR DEPOSITION journal 55961 2% 10% 100
4 LASER MICRO CLADDING authKW 51937 0% 85% 11
5 SRDPM2 authKW 50729 0% 91% 10
6 MOCVD authKW 47984 3% 6% 152
7 PERFLUORINATED CARBOXYLATES authKW 44899 0% 62% 13
8 MATERIALS SCIENCE, COATINGS & FILMS WoSSC 41066 20% 1% 1092
9 FREEFORM FABRICAT S address 39681 0% 89% 8
10 VOLATILE COMPLEXES authKW 30379 0% 78% 7

Web of Science journal categories


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with term
in class
1 Materials Science, Coatings & Films 41066 20% 1% 1092
2 Physics, Applied 23763 43% 0% 2347
3 Chemistry, Inorganic & Nuclear 6071 13% 0% 692
4 Physics, Condensed Matter 4787 17% 0% 940
5 Electrochemistry 3760 8% 0% 414
6 Materials Science, Multidisciplinary 3468 20% 0% 1109
7 Chemistry, Physical 2830 18% 0% 969
8 Crystallography 1189 5% 0% 252
9 Nanoscience & Nanotechnology 741 5% 0% 268
10 Engineering, Electrical & Electronic 600 9% 0% 480

Address terms


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 FREEFORM FABRICAT S 39681 0% 89% 8
2 ZENTRUM MIKROTECHNOL 24996 0% 41% 11
3 AV NIKOLAEV INORGAN CHEM 18232 1% 7% 45
4 SUPERCONDUCTING PROD DEV 16741 0% 100% 3
5 STATE ADV TECHNOL PLATINUM MET 16077 0% 41% 7
6 UMR CNRS UNIV 5798 12554 0% 75% 3
7 MPG DEV 11161 0% 100% 2
8 NEMISIS TEAM 11161 0% 100% 2
9 PHYS 1SC25 11161 0% 100% 2
10 PROC SEQUENCE INTEGRAT 11161 0% 100% 2

Journals


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 CHEMICAL VAPOR DEPOSITION 55961 2% 10% 100
2 APPLIED SURFACE SCIENCE 12814 5% 1% 288
3 JOURNAL OF STRUCTURAL CHEMISTRY 12634 2% 2% 118
4 JOURNAL OF THE ELECTROCHEMICAL SOCIETY 11735 5% 1% 255
5 THIN SOLID FILMS 6993 4% 1% 218
6 JOURNAL DE PHYSIQUE IV 6616 2% 1% 112
7 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 6254 2% 1% 128
8 APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING 4897 2% 1% 112
9 APPLIED PHYSICS LETTERS 4363 6% 0% 308
10 SOLID STATE TECHNOLOGY 4282 1% 2% 38

Author Key Words


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class		 LCSH search Wikipedia search
1 BETA DIKETONATE 89413 1% 26% 61 Search BETA+DIKETONATE Search BETA+DIKETONATE
2 DIMETHYLALUMINUM HYDRIDE 69750 0% 83% 15 Search DIMETHYLALUMINUM+HYDRIDE Search DIMETHYLALUMINUM+HYDRIDE
3 LASER MICRO CLADDING 51937 0% 85% 11 Search LASER+MICRO+CLADDING Search LASER+MICRO+CLADDING
4 SRDPM2 50729 0% 91% 10 Search SRDPM2 Search SRDPM2
5 MOCVD 47984 3% 6% 152 Search MOCVD Search MOCVD
6 PERFLUORINATED CARBOXYLATES 44899 0% 62% 13 Search PERFLUORINATED+CARBOXYLATES Search PERFLUORINATED+CARBOXYLATES
7 VOLATILE COMPLEXES 30379 0% 78% 7 Search VOLATILE+COMPLEXES Search VOLATILE+COMPLEXES
8 TIT BUO2DPM2 27902 0% 100% 5 Search TIT+BUO2DPM2 Search TIT+BUO2DPM2
9 LIQUID SOURCE 27892 0% 50% 10 Search LIQUID+SOURCE Search LIQUID+SOURCE
10 COPPER FILMS 27722 0% 38% 13 Search COPPER+FILMS Search COPPER+FILMS

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.


Rank Reference # ref. in
cl.		 Shr. of ref. in
cl.		 Citations
1 VERTOPRAKHOV, VN , KRUPODER, SA , (2000) PREPARATION OF THIN COPPER FILMS FROM THE VAPOUR PHASE OF VOLATILE COPPER(I) AND COPPER(II) DERIVATIVES BY THE CVD METHOD.USPEKHI KHIMII. VOL. 69. ISSUE 12. P. 1149 -1177 206 72% 6
2 LESKELA, M , MOLSA, H , NIINISTO, L , (1993) CHEMICAL-VAPOR-DEPOSITION OF HIGH-T(C) SUPERCONDUCTING THIN-FILMS.SUPERCONDUCTOR SCIENCE & TECHNOLOGY. VOL. 6. ISSUE 9. P. 627 -656 166 66% 99
3 RICKERBY, J , STEINKE, JHG , (2002) CURRENT TRENDS IN PATTERNING WITH COPPER.CHEMICAL REVIEWS. VOL. 102. ISSUE 5. P. 1525 -1549 101 74% 95
4 HERMAN, IP , (1989) LASER-ASSISTED DEPOSITION OF THIN-FILMS FROM GAS-PHASE AND SURFACE-ADSORBED MOLECULES.CHEMICAL REVIEWS. VOL. 89. ISSUE 6. P. 1323 -1357 185 60% 168
5 WATSON, IM , (1997) METAL-ORGANIC CVD OF THE HIGH-T-C SUPERCONDUCTOR YBA2CU3O7-DELTA.CHEMICAL VAPOR DEPOSITION. VOL. 3. ISSUE 1. P. 9 -26 121 64% 38
6 SPENCER, JT , (1994) CHEMICAL-VAPOR-DEPOSITION OF METAL-CONTAINING THIN-FILM MATERIALS FROM ORGANOMETALLIC COMPOUNDS.PROGRESS IN INORGANIC CHEMISTRY, VOL 41. VOL. 41. ISSUE . P. 145 -237 167 48% 80
7 GORDON, PG , KUREK, A , BARRY, ST , (2015) TRENDS IN COPPER PRECURSOR DEVELOPMENT FOR CVD AND ALD APPLICATIONS.ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY. VOL. 4. ISSUE 1. P. N3188 -N3197 42 88% 7
8 OTWAY, DJ , REES, WS , (2000) GROUP 2 ELEMENT BETA-DIKETONATE COMPLEXES: SYNTHETIC AND STRUCTURAL INVESTIGATIONS.COORDINATION CHEMISTRY REVIEWS. VOL. 210. ISSUE . P. 279 -328 66 81% 83
9 HAMPDENSMITH, MJ , KODAS, TT , (1995) CHEMICAL-VAPOR-DEPOSITION OF METALS .1. AN OVERVIEW OF CVD PROCESSES.CHEMICAL VAPOR DEPOSITION. VOL. 1. ISSUE 1. P. 8-23 87 67% 112
10 MISHRA, S , DANIELE, S , (2015) METAL-ORGANIC DERIVATIVES WITH FLUORINATED LIGANDS AS PRECURSORS FOR INORGANIC NANOMATERIALS.CHEMICAL REVIEWS. VOL. 115. ISSUE 16. P. 8379 -8448 132 26% 5

Classes with closest relation at Level 2


Rank Class id link
1 3506 RAPID THERMAL PROCESSING//RAPID THERMAL PROCESSING RTP//WAFER TEMPERATURE UNIFORMITY
2 527 SURFACE & COATINGS TECHNOLOGY//MATERIALS SCIENCE, COATINGS & FILMS//TITANIUM NITRIDE
3 664 ATOMIC LAYER DEPOSITION//HFO2//HIGH K DIELECTRICS
4 2485 ELECTROMIGRATION//ELECTROMIGRATION EM//SOLID STATE DEWETTING
5 3523 PHOTOGALVANIC CELL//QUADRICYCLANE//POWER POINT
6 746 BETA FESI2//SILICIDES//SERIES RESISTANCE
7 3596 HINOKITIOL//BETA THUJAPLICIN//TROPOLONE
8 3819 CRO2//CHROMIUM OXIDE//CHROMIUM DIOXIDE
9 1077 PLASMA ETCHING//JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A//JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
10 1385 POLYCRYSTALLINE SILICON//POLY SI//THIN FILM TRANSISTORS

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