Class information for:
Level 1: FREEFORM FABRICAT S//NEMISIS TEAM//LCVD

Basic class information
Class id #P Avg. number of
references		 Database coverage
of references
8898 1206 21.5 53%


Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
2 4 MATERIALS SCIENCE, MULTIDISCIPLINARY//PHYSICS, APPLIED//PHYSICS, CONDENSED MATTER 2836879
715 3       BETA DIKETONATE//DIMETHYLALUMINUM HYDRIDE//CHEMICAL VAPOR DEPOSITION 5470
2014 2             BETA DIKETONATE//DIMETHYLALUMINUM HYDRIDE//CHEMICAL VAPOR DEPOSITION 5470
8898 1                   FREEFORM FABRICAT S//NEMISIS TEAM//LCVD 1206

Terms with highest relevance score


rank Term termType Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 FREEFORM FABRICAT S address 180037 1% 89% 8
2 NEMISIS TEAM address 50636 0% 100% 2
3 LCVD authKW 39619 0% 26% 6
4 DIMETHYLGOLDIII COMPLEXES authKW 33756 0% 67% 2
5 8 MERCAPTOQUINOLATE authKW 25318 0% 100% 1
6 ADLAYER PHOTOCHEMISTRY authKW 25318 0% 100% 1
7 ADV MAT NANOSYST GRP address 25318 0% 100% 1
8 AKAD LAVRENTIV PROSPEKT 3 address 25318 0% 100% 1
9 BEAM GUIDE authKW 25318 0% 100% 1
10 BORON DOPING OF SILICON authKW 25318 0% 100% 1

Web of Science journal categories


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 Physics, Applied 8323 53% 0% 641
2 Materials Science, Coatings & Films 4310 14% 0% 168
3 Chemistry, Physical 1044 22% 0% 263
4 Physics, Condensed Matter 668 14% 0% 171
5 Materials Science, Multidisciplinary 633 19% 0% 227
6 Physics, Atomic, Molecular & Chemical 260 7% 0% 85
7 Engineering, Electrical & Electronic 215 10% 0% 125
8 Spectroscopy 169 4% 0% 47
9 Optics 159 6% 0% 75
10 Electrochemistry 153 4% 0% 44

Address terms


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 FREEFORM FABRICAT S 180037 1% 89% 8
2 NEMISIS TEAM 50636 0% 100% 2
3 ADV MAT NANOSYST GRP 25318 0% 100% 1
4 AKAD LAVRENTIV PROSPEKT 3 25318 0% 100% 1
5 CANADA CHAIR FREEFORM FABRICAT 25318 0% 100% 1
6 CHEM SOLID STATE SCI 25318 0% 100% 1
7 CHIM CHIM TECH 25318 0% 100% 1
8 COMPARTIMENTO ENEL 25318 0% 100% 1
9 ELECT ENGN SEMICOND PHOTON POB 6101 25318 0% 100% 1
10 ENGN CHEM MAT 1515 KAMAHAMACHO 25318 0% 100% 1

Journals


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING 11684 7% 1% 80
2 APPLIED SURFACE SCIENCE 4187 6% 0% 77
3 APPLIED PHYSICS LETTERS 3693 11% 0% 129
4 PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS 3647 2% 1% 28
5 APPLIED PHYSICS B-PHOTOPHYSICS AND LASER CHEMISTRY 3127 1% 1% 14
6 SOLID STATE TECHNOLOGY 3050 1% 1% 15
7 JOURNAL OF APPLIED PHYSICS 2307 8% 0% 101
8 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 1705 3% 0% 34
9 LASER CHEMISTRY 1643 0% 1% 5
10 ELECTRON DEVICE LETTERS 1338 0% 1% 4

Author Key Words


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class		 LCSH search Wikipedia search
1 LCVD 39619 0% 26% 6 Search LCVD Search LCVD
2 DIMETHYLGOLDIII COMPLEXES 33756 0% 67% 2 Search DIMETHYLGOLDIII+COMPLEXES Search DIMETHYLGOLDIII+COMPLEXES
3 8 MERCAPTOQUINOLATE 25318 0% 100% 1 Search 8+MERCAPTOQUINOLATE Search 8+MERCAPTOQUINOLATE
4 ADLAYER PHOTOCHEMISTRY 25318 0% 100% 1 Search ADLAYER+PHOTOCHEMISTRY Search ADLAYER+PHOTOCHEMISTRY
5 BEAM GUIDE 25318 0% 100% 1 Search BEAM+GUIDE Search BEAM+GUIDE
6 BORON DOPING OF SILICON 25318 0% 100% 1 Search BORON+DOPING+OF+SILICON Search BORON+DOPING+OF+SILICON
7 CARBON DIOXIDE CO2 LASERS 25318 0% 100% 1 Search CARBON+DIOXIDE+CO2+LASERS Search CARBON+DIOXIDE+CO2+LASERS
8 CHELATE DERIVATIVES OF DIMETHYLGOLDIII 25318 0% 100% 1 Search CHELATE+DERIVATIVES+OF+DIMETHYLGOLDIII Search CHELATE+DERIVATIVES+OF+DIMETHYLGOLDIII
9 CHEMICAL VAPOR DEPOSITION LASER IRRADIATION 25318 0% 100% 1 Search CHEMICAL+VAPOR+DEPOSITION+LASER+IRRADIATION Search CHEMICAL+VAPOR+DEPOSITION+LASER+IRRADIATION
10 CHEMISORBED AND PHYSISORBED SPECIES 25318 0% 100% 1 Search CHEMISORBED+AND+PHYSISORBED+SPECIES Search CHEMISORBED+AND+PHYSISORBED+SPECIES

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.


Rank Reference # ref. in
cl.		 Shr. of ref. in
cl.		 Citations
1 HERMAN, IP , (1989) LASER-ASSISTED DEPOSITION OF THIN-FILMS FROM GAS-PHASE AND SURFACE-ADSORBED MOLECULES.CHEMICAL REVIEWS. VOL. 89. ISSUE 6. P. 1323 -1357 170 55% 168
2 HAIGH, J , AYLETT, MR , (1988) PHOTO-INITIATED DEPOSITION AND ETCHING OF MATERIALS RELEVANT TO SEMICONDUCTOR-DEVICES.PROGRESS IN QUANTUM ELECTRONICS. VOL. 12. ISSUE 1. P. 1 -85 129 50% 10
3 DUTY, C , JEAN, D , LACKEY, WJ , (2001) LASER CHEMICAL VAPOUR DEPOSITION: MATERIALS, MODELLING, AND PROCESS CONTROL.INTERNATIONAL MATERIALS REVIEWS. VOL. 46. ISSUE 6. P. 271 -287 59 54% 30
4 TESLENKO, VV , (1990) LASER-INDUCED CHEMICAL-DEPOSITION FROM GAS-PHASE.USPEKHI KHIMII. VOL. 59. ISSUE 2. P. 177 -196 67 67% 0
5 MAXWELL, JL , WEBB, N , BRADSHAW, D , BLACK, MR , MASKALY, K , CHAVEZ, CA , ESPINOZA, M , VESSARD, S , ART, B , JOHNSON, S , ET AL (2014) ON "HOW TO START A FIRE'', OR TRANSVERSE FORCED-CONVECTION, HYPERBARIC LASER CHEMICAL VAPOR DEPOSITION OF FIBERS AND TEXTILES.TEXTILE RESEARCH JOURNAL. VOL. 84. ISSUE 18. P. 1976 -1986 22 88% 0
6 RYTZFROIDEVAUX, Y , SALATHE, RP , GILGEN, HH , (1985) LASER GENERATED MICROSTRUCTURES.APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING. VOL. 37. ISSUE 3. P. 121 -138 62 71% 71
7 BAUM, TH , COMITA, PB , (1992) LASER-INDUCED CHEMICAL VAPOR-DEPOSITION OF METALS FOR MICROELECTRONICS TECHNOLOGY.THIN SOLID FILMS. VOL. 218. ISSUE 1-2. P. 80 -94 55 53% 42
8 MAXWELL, JL , PEGNA, J , MESSIA, DV , (1998) REAL-TIME VOLUMETRIC GROWTH RATE MEASUREMENTS AND FEEDBACK CONTROL OF THREE-DIMENSIONAL LASER CHEMICAL VAPOR DEPOSITION.APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING. VOL. 67. ISSUE 3. P. 323-329 26 93% 9
9 DOWBEN, PA , SPENCER, JT , STAUF, GT , (1989) DEPOSITION OF THIN METAL AND METAL SILICIDE FILMS FROM THE DECOMPOSITION OF ORGANOMETALLIC COMPOUNDS.MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY. VOL. 2. ISSUE 4. P. 297 -323 76 46% 14
10 KOUTLAS, GN , VLACHOS, NS , (2003) NUMERICAL MODELING OF PYROLYTIC LASER-INDUCED CHEMICAL VAPOR DEPOSITION.JOURNAL OF APPLIED PHYSICS. VOL. 93. ISSUE 5. P. 3049-3056 25 71% 2

Classes with closest relation at Level 1


Rank Class id link
1 18399 LASER MICRO CLADDING//LASER INDUCED CHEMICAL LIQUID PHASE DEPOSITION//LCLD
2 24432 DIMETHYLALUMINUM HYDRIDE//DIMETHYLALUMINUMHYDRIDE DMAH//SELECTIVE AL CVD
3 16292 CVD W//TUNGSTEN THIN FILMS//CVD IRON
4 24018 PHYSICOCHIM MOLEC ORSAY//SURFACE STRUCTURE AND ROUGHNESS//ADSORBATE SUBSTRATE INTERACTIONS
5 23066 SYNCHROTRON RADIATION STIMULATED ETCHING//ADV SCI TECHNOL IND//VACUUM UV PHOTOSCI
6 32636 PHOTOCHEMICAL METALLORGANIC DEPOSITION//PHOTOCHEMICAL METAL ORGANIC DEPOSITION//DIRECT PATTERNING
7 25406 MSOS O P STRUCTURE//SI2H6 GAS//SEMI INSULATING POLYCRYSTALLINE SILICON
8 9262 METASTABLE ION DECAY//MULTIPHOTON IONIZATION DISSOCIATION//DICARBONYL CHELATES
9 27272 CHROMIUM BASED COATINGS//TG BASED TRANSPIRATION//ATMOSPHERIC DEPOSITION PROCESS
10 11277 PERFLUORINATED CARBOXYLATES//ZENTRUM MIKROTECHNOL//COPPER FILMS

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