Class information for:
Level 1: CROSS KELVIN RESISTOR CKR//CROSS BRIDGE KELVIN RESISTOR CBKR//POLYMETAL

Basic class information
Class id #P Avg. number of
references		 Database coverage
of references
29312 188 13.5 51%


Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
2 4 MATERIALS SCIENCE, MULTIDISCIPLINARY//PHYSICS, APPLIED//PHYSICS, CONDENSED MATTER 2836879
6 3       PHYSICS, APPLIED//IEEE TRANSACTIONS ON ELECTRON DEVICES//SILICON 155028
746 2             BETA FESI2//SILICIDES//SERIES RESISTANCE 12475
29312 1                   CROSS KELVIN RESISTOR CKR//CROSS BRIDGE KELVIN RESISTOR CBKR//POLYMETAL 188

Terms with highest relevance score


rank Term termType Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 CROSS KELVIN RESISTOR CKR authKW 649690 2% 100% 4
2 CROSS BRIDGE KELVIN RESISTOR CBKR authKW 519751 2% 80% 4
3 POLYMETAL authKW 487268 2% 100% 3
4 POLYMETAL GATE authKW 365449 2% 75% 3
5 CROSS BRIDGE KELVIN RESISTORS authKW 324845 1% 100% 2
6 DIFFUSION BARRIER METAL authKW 324845 1% 100% 2
7 DUAL POLYMETAL GATE authKW 324845 1% 100% 2
8 LOW RESISTIVITY TUNGSTEN authKW 324845 1% 100% 2
9 W WNX POLY SI authKW 324845 1% 100% 2
10 50 NM NMOSFET authKW 162423 1% 100% 1

Web of Science journal categories


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 Engineering, Electrical & Electronic 2144 62% 0% 116
2 Physics, Applied 1916 64% 0% 120
3 Materials Science, Coatings & Films 662 14% 0% 26
4 Electrochemistry 216 10% 0% 18
5 Nanoscience & Nanotechnology 142 10% 0% 19
6 Physics, Condensed Matter 89 13% 0% 25
7 Instruments & Instrumentation 39 5% 0% 10
8 Materials Science, Multidisciplinary 26 12% 0% 22
9 Engineering, Manufacturing 11 2% 0% 3
10 Nuclear Science & Technology 1 2% 0% 3

Address terms


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 CHAIR SEMICOND CPDS 162423 1% 100% 1
2 DEVICE CHARACTERIZAT 162423 1% 100% 1
3 OVENS 162423 1% 100% 1
4 SEMICOND PROC PROGRAM 162423 1% 100% 1
5 PROC MODULE DEV 162421 1% 50% 2
6 PHYS ENERGY HARVEST 81210 1% 50% 1
7 TAIWAN SEMICOND MFG CO 81210 1% 50% 1
8 MEMORY RD 44202 4% 4% 7
9 ELECT COMP ENGN MICROELE 40604 1% 25% 1
10 NXP TSMC 40604 1% 25% 1

Journals


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 IEEE TRANSACTIONS ON ELECTRON DEVICES 19823 23% 0% 43
2 IEEE ELECTRON DEVICE LETTERS 8729 12% 0% 22
3 SHARP TECHNICAL JOURNAL 4059 1% 3% 1
4 JOURNAL OF THE ELECTROCHEMICAL SOCIETY 1549 9% 0% 17
5 SOLID-STATE ELECTRONICS 1324 5% 0% 9
6 IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING 930 2% 0% 3
7 ALTA FREQUENZA 895 1% 1% 1
8 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 614 4% 0% 8
9 ELECTRON DEVICE LETTERS 538 1% 0% 1
10 JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 414 5% 0% 9

Author Key Words


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class		 LCSH search Wikipedia search
1 CROSS KELVIN RESISTOR CKR 649690 2% 100% 4 Search CROSS+KELVIN+RESISTOR+CKR Search CROSS+KELVIN+RESISTOR+CKR
2 CROSS BRIDGE KELVIN RESISTOR CBKR 519751 2% 80% 4 Search CROSS+BRIDGE+KELVIN+RESISTOR+CBKR Search CROSS+BRIDGE+KELVIN+RESISTOR+CBKR
3 POLYMETAL 487268 2% 100% 3 Search POLYMETAL Search POLYMETAL
4 POLYMETAL GATE 365449 2% 75% 3 Search POLYMETAL+GATE Search POLYMETAL+GATE
5 CROSS BRIDGE KELVIN RESISTORS 324845 1% 100% 2 Search CROSS+BRIDGE+KELVIN+RESISTORS Search CROSS+BRIDGE+KELVIN+RESISTORS
6 DIFFUSION BARRIER METAL 324845 1% 100% 2 Search DIFFUSION+BARRIER+METAL Search DIFFUSION+BARRIER+METAL
7 DUAL POLYMETAL GATE 324845 1% 100% 2 Search DUAL+POLYMETAL+GATE Search DUAL+POLYMETAL+GATE
8 LOW RESISTIVITY TUNGSTEN 324845 1% 100% 2 Search LOW+RESISTIVITY+TUNGSTEN Search LOW+RESISTIVITY+TUNGSTEN
9 W WNX POLY SI 324845 1% 100% 2 Search W+WNX+POLY+SI Search W+WNX+POLY+SI
10 50 NM NMOSFET 162423 1% 100% 1 Search 50+NM+NMOSFET Search 50+NM+NMOSFET

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.


Rank Reference # ref.
in cl.		 Shr. of ref. in
cl.		 Citations
1 GUDMUNDSSON, V , HELLSTROM, PE , OSTLING, M , (2012) ERROR PROPAGATION IN CONTACT RESISTIVITY EXTRACTION USING CROSS-BRIDGE KELVIN RESISTORS.IEEE TRANSACTIONS ON ELECTRON DEVICES. VOL. 59. ISSUE 6. P. 1585-1591 15 94% 4
2 SRIRAM, S , BHASKARAN, M , REEVES, GK , HOLLAND, AS , (2009) ANALYTICAL AND FINITE-ELEMENT MODELING OF A CROSS KELVIN RESISTOR TEST STRUCTURE FOR LOW SPECIFIC CONTACT RESISTIVITY.IEEE TRANSACTIONS ON ELECTRON DEVICES. VOL. 56. ISSUE 10. P. 2250 -2254 9 90% 5
3 SUNG, MG , KIM, YS , KIM, SJ , JEONG, IK , CHOI, HS , KIM, MS , KIM, H , PARK, SK , (2012) LOW RESISTIVE TUNGSTEN DUAL POLY-METAL GATES WITH MULTI-DIFFUSION BARRIER METALS IN HIGH PERFORMANCE MEMORY DEVICES.SOLID-STATE ELECTRONICS. VOL. 69. ISSUE . P. 22 -26 9 82% 1
4 SUNG, MG , PARK, SK , ALI, AI , KIM, YS , (2013) OPTIMIZATION OF TUNGSTEN DUAL POLY-METAL GATES IN MEMORY DEVICES WITH TI/WN/WSIN BARRIER METAL.JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY. VOL. 13. ISSUE 9. P. 6455-6458 10 71% 0
5 BHASKARAN, M , SRIRAM, S , HOLLAND, AS , (2010) INTERFACIAL RESISTIVE PROPERTIES OF NICKEL SILICIDE THIN FILMS TO DOPED SILICON.JOURNAL OF THE ELECTROCHEMICAL SOCIETY. VOL. 157. ISSUE 8. P. H842 -H846 9 69% 3
6 STAVITSKI, N , KLOOTWIJK, JH , VAN ZEIJL, HW , KOVALGIN, AY , WOLTERS, RAM , (2009) CROSS-BRIDGE KELVIN RESISTOR STRUCTURES FOR RELIABLE MEASUREMENT OF LOW CONTACT RESISTANCES AND CONTACT INTERFACE CHARACTERIZATION.IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING. VOL. 22. ISSUE 1. P. 146-152 7 88% 15
7 OUSSALAH, S , DJEZZAR, B , JERISIAN, R , (2005) A COMPARATIVE STUDY OF DIFFERENT CONTACT RESISTANCE TEST STRUCTURES DEDICATED TO THE POWER PROCESS TECHNOLOGY.SOLID-STATE ELECTRONICS. VOL. 49. ISSUE 10. P. 1617 -1622 7 100% 6
8 SANTANDER, J , LOZANO, M , COLLADO, A , ULLAN, M , CABRUJA, E , (2000) ACCURATE CONTACT RESISTIVITY EXTRACTION ON KELVIN STRUCTURES WITH UPPER AND LOWER RESISTIVE LAYERS.IEEE TRANSACTIONS ON ELECTRON DEVICES. VOL. 47. ISSUE 7. P. 1431 -1439 8 100% 13
9 KOVALGIN, AY , TIGGELMAN, N , WOLTERS, RAM , (2012) AN AREA-CORRECTION MODEL FOR ACCURATE EXTRACTION OF LOW SPECIFIC CONTACT RESISTANCE.IEEE TRANSACTIONS ON ELECTRON DEVICES. VOL. 59. ISSUE 2. P. 426-432 11 50% 2
10 HOLLAND, AS , REEVES, GK , LEECH, PW , (2004) UNIVERSAL ERROR CORRECTIONS FOR FINITE SEMICONDUCTOR RESISTIVITY IN CROSS-KELVIN RESISTOR TEST STRUCTURES.IEEE TRANSACTIONS ON ELECTRON DEVICES. VOL. 51. ISSUE 6. P. 914-919 7 88% 14

Classes with closest relation at Level 1


Rank Class id link
1 3226 TISI2//TITANIUM SILICIDE//SALICIDE
2 16292 CVD W//TUNGSTEN THIN FILMS//CVD IRON
3 22649 W TI THIN FILMS//W 10TI ALLOY//W 10WTTI ALLOY
4 30685 ULTRASHALLOW JUNCTIONS//A REDUCTION METHOD//BORON CHEMICAL VAPOR DEPOSITION
5 4634 NICKEL SILICIDE//NISI//NI SILICIDE
6 6381 OHMIC CONTACT//PD GE//SOLID PHASE REGROWTH
7 29679 MEMS POST PROCESSING//AE STZI SENSORTECHNOL ZENTRUM//ALUMINIUM INTERCONNECTS
8 6002 BORON PENETRATION//NITRIDED OXIDE//OXYNITRIDATION
9 20525 SCHOTTKY BARRIER SB//SCHOTTKY BARRIER MOSFET//DOPANT SEGREGATION
10 3427 DIFFUSION BARRIER//CU METALLIZATION//TANTALUM NITRIDE

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