Class information for:
Level 1: BACKSCATTERED ELECTRONS//DOPANT CONTRAST//SCANNING

Basic class information
Class id #P Avg. number of
references		 Database coverage
of references
14404 771 18.4 42%


Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
2 4 MATERIALS SCIENCE, MULTIDISCIPLINARY//PHYSICS, APPLIED//PHYSICS, CONDENSED MATTER 2836879
314 3       ULTRAMICROSCOPY//MICROSCOPY//JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 39933
2587 2             SCANNING//BACKSCATTERED ELECTRONS//MICROSCOPY 3648
14404 1                   BACKSCATTERED ELECTRONS//DOPANT CONTRAST//SCANNING 771

Terms with highest relevance score


rank Term termType Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 BACKSCATTERED ELECTRONS authKW 446723 5% 30% 38
2 DOPANT CONTRAST authKW 360030 1% 91% 10
3 SCANNING journal 309517 15% 7% 115
4 CATHODE LENS authKW 232953 1% 59% 10
5 TOPOGRAPHIC CONTRAST authKW 213852 1% 60% 9
6 SCANNING LOW ENERGY ELECTRON MICROSCOPY authKW 203673 1% 86% 6
7 INTEGRATED CIRCUIT ADV PROC TECHNOL address 158414 1% 100% 4
8 VERY LOW ENERGY STEM authKW 158414 1% 100% 4
9 LOW VOLTAGE SCANNING ELECTRON MICROSCOPY authKW 158402 1% 40% 10
10 MICROSCOPY WoSSC 125161 44% 1% 336

Web of Science journal categories


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 Microscopy 125161 44% 1% 336
2 Instruments & Instrumentation 4993 26% 0% 197
3 Physics, Applied 709 22% 0% 167
4 Engineering, General 346 6% 0% 43
5 Physics, Multidisciplinary 339 11% 0% 86
6 Materials Science, Characterization, Testing 265 2% 0% 19
7 Nanoscience & Nanotechnology 251 7% 0% 54
8 Materials Science, Multidisciplinary 93 11% 0% 86
9 Spectroscopy 75 3% 0% 26
10 Engineering, Electrical & Electronic 71 8% 0% 64

Address terms


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 INTEGRATED CIRCUIT ADV PROC TECHNOL 158414 1% 100% 4
2 SCI RUMENTS 95691 5% 7% 36
3 QUAL MANAGEMENT FAILURE ANAL 79207 0% 100% 2
4 SECT 5 11 79207 0% 100% 2
5 4481 39603 0% 100% 1
6 ANALYT HIGH TECHNOL 39603 0% 100% 1
7 AREA METROL MAT 39603 0% 100% 1
8 ARMINESUMR 7633 39603 0% 100% 1
9 ETUDES MAT MICROSCOPIE AVANCEE 39603 0% 100% 1
10 FEI ELECT OPT 39603 0% 100% 1

Journals


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 SCANNING 309517 15% 7% 115
2 SCANNING MICROSCOPY 28365 4% 2% 30
3 MICROSCOPY AND MICROANALYSIS 12884 3% 1% 24
4 SCANNING ELECTRON MICROSCOPY 10982 2% 2% 17
5 ULTRAMICROSCOPY 10749 5% 1% 39
6 JOURNAL OF ELECTRON MICROSCOPY 9389 3% 1% 21
7 MEASUREMENT TECHNIQUES USSR 9322 2% 2% 13
8 IZVESTIYA AKADEMII NAUK SERIYA FIZICHESKAYA 9316 4% 1% 28
9 MEASUREMENT TECHNIQUES 7374 2% 1% 19
10 JOURNAL OF MICROSCOPY-OXFORD 6829 3% 1% 21

Author Key Words


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class		 LCSH search Wikipedia search
1 BACKSCATTERED ELECTRONS 446723 5% 30% 38 Search BACKSCATTERED+ELECTRONS Search BACKSCATTERED+ELECTRONS
2 DOPANT CONTRAST 360030 1% 91% 10 Search DOPANT+CONTRAST Search DOPANT+CONTRAST
3 CATHODE LENS 232953 1% 59% 10 Search CATHODE+LENS Search CATHODE+LENS
4 TOPOGRAPHIC CONTRAST 213852 1% 60% 9 Search TOPOGRAPHIC+CONTRAST Search TOPOGRAPHIC+CONTRAST
5 SCANNING LOW ENERGY ELECTRON MICROSCOPY 203673 1% 86% 6 Search SCANNING+LOW+ENERGY+ELECTRON+MICROSCOPY Search SCANNING+LOW+ENERGY+ELECTRON+MICROSCOPY
6 VERY LOW ENERGY STEM 158414 1% 100% 4 Search VERY+LOW+ENERGY+STEM Search VERY+LOW+ENERGY+STEM
7 LOW VOLTAGE SCANNING ELECTRON MICROSCOPY 158402 1% 40% 10 Search LOW+VOLTAGE+SCANNING+ELECTRON+MICROSCOPY Search LOW+VOLTAGE+SCANNING+ELECTRON+MICROSCOPY
8 GRAIN CONTRAST 118810 0% 100% 3 Search GRAIN+CONTRAST Search GRAIN+CONTRAST
9 SLEEM 118810 0% 100% 3 Search SLEEM Search SLEEM
10 CHANNELING CONTRAST 105607 1% 67% 4 Search CHANNELING+CONTRAST Search CHANNELING+CONTRAST

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.


Rank Reference # ref.
in cl.		 Shr. of ref. in
cl.		 Citations
1 CHEE, AKW , (2016) QUANTITATIVE DOPANT PROFILING BY ENERGY FILTERING IN THE SCANNING ELECTRON MICROSCOPE.IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY. VOL. 16. ISSUE 2. P. 138 -148 21 84% 0
2 FRANK, L , HOVORKA, M , MIKMEKOVA, S , MIKMEKOVA, E , MULLEROVA, I , POKORNA, Z , (2012) SCANNING ELECTRON MICROSCOPY WITH SAMPLES IN AN ELECTRIC FIELD.MATERIALS. VOL. 5. ISSUE 12. P. 2731-2756 26 63% 1
3 HEJNA, J , (1994) DETECTION OF TOPOGRAPHIC CONTRAST IN THE SCANNING ELECTRON-MICROSCOPE AT LOW AND MEDIUM RESOLUTION BY DIFFERENT DETECTORS AND DETECTOR SYSTEMS.SCANNING MICROSCOPY. VOL. 8. ISSUE 2. P. 143-164 30 79% 5
4 TSURUMI, D , HAMADA, K , KAWASAKI, Y , (2013) OBSERVATION OF TWO-DIMENSIONAL P-TYPE DOPANT DIFFUSION ACROSS A P(+)-INP/N(-)-INGAAS INTERFACE USING SCANNING ELECTRON MICROSCOPY.JOURNAL OF APPLIED PHYSICS. VOL. 113. ISSUE 14. P. - 13 100% 1
5 KACZMAREK, D , DOMARADZKI, J , (2002) THE METHOD FOR THE RECONSTRUCTION OF COMPLEX IMAGES OF SPECIMENS USING BACKSCATTERED ELECTRONS.SCANNING. VOL. 24. ISSUE 2. P. 65-69 17 94% 1
6 TSURUMI, D , HAMADA, K , KAWASAKI, Y , (2012) HIGHLY REPRODUCIBLE SECONDARY ELECTRON IMAGING UNDER ELECTRON IRRADIATION USING HIGH-PASS ENERGY FILTERING IN LOW-VOLTAGE SCANNING ELECTRON MICROSCOPY.MICROSCOPY AND MICROANALYSIS. VOL. 18. ISSUE 2. P. 385-389 13 93% 0
7 FRANK, L , MULLEROVA, I , (2005) THE INJECTED-CHARGE CONTRAST MECHANISM IN SCANNED IMAGING OF DOPED SEMICONDUCTORS BY VERY SLOW ELECTRONS.ULTRAMICROSCOPY. VOL. 106. ISSUE 1. P. 28-36 15 94% 12
8 TSURUMI, D , HAMADA, K , KAWASAKI, Y , (2012) ENERGY-FILTERED SECONDARY-ELECTRON IMAGING FOR NANOSCALE DOPANT MAPPING BY APPLYING A REVERSE BIAS VOLTAGE.JAPANESE JOURNAL OF APPLIED PHYSICS. VOL. 51. ISSUE 10. P. - 13 87% 6
9 KLEIN, T , BUHR, E , FRASE, CG , (2012) TSEM: A REVIEW OF SCANNING ELECTRON MICROSCOPY IN TRANSMISSION MODE AND ITS APPLICATIONS.ADVANCES IN IMAGING AND ELECTRON PHYSICS, VOL 171. VOL. 171. ISSUE . P. 297 -356 28 38% 15
10 WALKER, CGH , ZAGGOUT, F , EL-GOMATI, MM , (2008) THE ROLE OF OXYGEN IN SECONDARY ELECTRON CONTRAST IN DOPED SEMICONDUCTORS USING LOW VOLTAGE SCANNING ELECTRON MICROSCOPY.JOURNAL OF APPLIED PHYSICS. VOL. 104. ISSUE 12. P. - 17 71% 8

Classes with closest relation at Level 1


Rank Class id link
1 13441 LAMACOP//SECONDARY ELECTRON EMISSION//SECONDARY ELECTRON YIELD
2 21494 VOLTAGE CONTRAST//E BEAM INSPECTION//ELECTRON BEAM TESTING
3 23119 SECONDARY EMISSION NOISE//ADVANCED LITHOGRAPHY//ALTERNATING APERTURE PHASE SHIFTING MASKS
4 20271 ENVIRONMENTAL SEM//ESEM//ENVIRONMENTAL SCANNING ELECTRON MICROSCOPE
5 9414 MEAN PENETRATION DEPTH//ELECTRON PROBE MICROANALYSIS//STANDARDLESS ANALYSIS
6 33176 ALPHA FRINGES//BODY TRANSLATION VECTOR//DIFFRACTION CONTRAST IMAGES
7 5528 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B//PROXIMITY EFFECT CORRECTION//ELECTRON BEAM LITHOGRAPHY
8 2063 SURFACE AND INTERFACE ANALYSIS//SURFACE EXCITATION//INELASTIC MEAN FREE PATH
9 11037 PHOTOEMISSION MICROSCOPY//SPECTROMICROSCOPY//XPEEM
10 25192 MOLECULAR OCCUPANCY//1 6 DIN DICARBAZOLYL 2 4 HEXADIYNE//ADHESION MECHANISM OF PHENOLIC RESIN AND POLYURETHANE TO STEEL

Go to start page