Class information for:
Level 1: SECONDARY EMISSION NOISE//ADVANCED LITHOGRAPHY//ALTERNATING APERTURE PHASE SHIFTING MASKS

Basic class information

Class id #P Avg. number of
references
Database coverage
of references
23119 358 15.9 37%



Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes

The table includes all classes above and classes immediately below the current class.



Cluster id Level Cluster label #P
2 4 MATERIALS SCIENCE, MULTIDISCIPLINARY//PHYSICS, APPLIED//PHYSICS, CONDENSED MATTER 2836879
314 3       ULTRAMICROSCOPY//MICROSCOPY//JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 39933
725 2             ULTRAMICROSCOPY//MICROSCOPY//ELECTRON HOLOGRAPHY 12666
23119 1                   SECONDARY EMISSION NOISE//ADVANCED LITHOGRAPHY//ALTERNATING APERTURE PHASE SHIFTING MASKS 358

Terms with highest relevance score



rank Term termType Chi square Shr. of publ. in
class containing
term
Class's shr. of
term's tot. occurrences
#P with
term in
class
1 SECONDARY EMISSION NOISE authKW 272938 1% 80% 4
2 ADVANCED LITHOGRAPHY authKW 266539 1% 63% 5
3 ALTERNATING APERTURE PHASE SHIFTING MASKS authKW 255881 1% 100% 3
4 BEASTLI authKW 255881 1% 100% 3
5 CONTRAST TO GRADIENT authKW 255881 1% 100% 3
6 SCANNING journal 219589 18% 4% 66
7 DIGITAL SCAN authKW 191909 1% 75% 3
8 INFORMATION PASSING CAPACITY authKW 191909 1% 75% 3
9 ACTIVE IMAGE PROCESSING authKW 170587 1% 100% 2
10 HYSTERESIS SMOOTHING authKW 170587 1% 100% 2

Web of Science journal categories



Rank Term Chi square Shr. of publ. in
class containing
term
Class's shr. of
term's tot. occurrences
#P with
term in
class
1 Microscopy 89954 54% 1% 194
2 Instruments & Instrumentation 1754 22% 0% 80
3 Engineering, Electrical & Electronic 121 13% 0% 47
4 Physics, Multidisciplinary 91 9% 0% 32
5 Biology 85 5% 0% 18
6 Nanoscience & Nanotechnology 67 6% 0% 20
7 Physics, Applied 63 11% 0% 41
8 Engineering, Manufacturing 46 2% 0% 8
9 Optics 35 6% 0% 20
10 Crystallography 12 2% 0% 8

Address terms



Rank Term Chi square Shr. of publ. in
class containing
term
Class's shr. of
term's tot. occurrences
#P with
term in
class
1 AUTOMAT CONTROL MICRO MECHATRON SYST AS2M 85294 0% 100% 1
2 HITACHI TECHNO 85294 0% 100% 1
3 IC DESIGN HOUSE 85294 0% 100% 1
4 MED BIOMETR EPIDEMIOL COMP SCI 85294 0% 100% 1
5 NANO SCALE METROL GRP 85294 0% 100% 1
6 RUMENTS 53300 1% 13% 5
7 NANOTECHNOL PROD BUSINESS GRP 34888 1% 14% 3
8 INFORMAT DESIGN 30319 1% 9% 4
9 CD METROL 28430 0% 33% 1
10 ELECT BEAM 28430 0% 33% 1

Journals



Rank Term Chi square Shr. of publ. in
class containing
term
Class's shr. of
term's tot. occurrences
#P with
term in
class
1 SCANNING 219589 18% 4% 66
2 MICRON AND MICROSCOPICA ACTA 55553 3% 5% 12
3 JOURNAL OF ELECTRON MICROSCOPY TECHNIQUE 26332 4% 2% 15
4 JOURNAL OF ELECTRON MICROSCOPY 24318 6% 1% 23
5 JOURNAL OF MICROSCOPY-OXFORD 10836 5% 1% 18
6 JOURNAL OF MICROSCOPY 6559 4% 1% 14
7 ULTRAMICROSCOPY 5496 5% 0% 19
8 IEEE CIRCUITS AND DEVICES MAGAZINE 5477 1% 2% 3
9 INSTITUTE OF PHYSICS CONFERENCE SERIES 4213 6% 0% 22
10 IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING 2662 2% 0% 7

Author Key Words



Rank Term Chi square Shr. of publ. in
class containing
term
Class's shr. of
term's tot. occurrences
#P with
term in
class
LCSH search Wikipedia search
1 SECONDARY EMISSION NOISE 272938 1% 80% 4 Search SECONDARY+EMISSION+NOISE Search SECONDARY+EMISSION+NOISE
2 ADVANCED LITHOGRAPHY 266539 1% 63% 5 Search ADVANCED+LITHOGRAPHY Search ADVANCED+LITHOGRAPHY
3 ALTERNATING APERTURE PHASE SHIFTING MASKS 255881 1% 100% 3 Search ALTERNATING+APERTURE+PHASE+SHIFTING+MASKS Search ALTERNATING+APERTURE+PHASE+SHIFTING+MASKS
4 BEASTLI 255881 1% 100% 3 Search BEASTLI Search BEASTLI
5 CONTRAST TO GRADIENT 255881 1% 100% 3 Search CONTRAST+TO+GRADIENT Search CONTRAST+TO+GRADIENT
6 DIGITAL SCAN 191909 1% 75% 3 Search DIGITAL+SCAN Search DIGITAL+SCAN
7 INFORMATION PASSING CAPACITY 191909 1% 75% 3 Search INFORMATION+PASSING+CAPACITY Search INFORMATION+PASSING+CAPACITY
8 ACTIVE IMAGE PROCESSING 170587 1% 100% 2 Search ACTIVE+IMAGE+PROCESSING Search ACTIVE+IMAGE+PROCESSING
9 HYSTERESIS SMOOTHING 170587 1% 100% 2 Search HYSTERESIS+SMOOTHING Search HYSTERESIS+SMOOTHING
10 PAMDLE 170587 1% 100% 2 Search PAMDLE Search PAMDLE

Core articles

The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.



Rank Reference # ref.
in cl.
Shr. of ref. in
cl.
Citations
1 OHO, E , (2002) DIGITAL IMAGE-PROCESSING TECHNOLOGY USEFUL FOR SCANNING, ELECTRON MICROSCOPY AND ITS PRACTICAL APPLICATIONS.ADVANCES IN IMAGING AND ELECTRON PHYSICS, VOL 122. VOL. 122. ISSUE . P. 251-327 34 74% 1
2 SUZUKI, K , OHO, E , (2013) FEATURE EVALUATION OF COMPLEX HYSTERESIS SMOOTHING AND ITS PRACTICAL APPLICATIONS TO NOISY SEM IMAGES.SCANNING. VOL. 35. ISSUE 5. P. 292-301 14 100% 1
3 OHO, E , (1999) DIGITAL IMAGE PROCESSING TECHNOLOGY FOR SCANNING ELECTRON MICROSCOPY.ADVANCES IN IMAGING AND ELECTRON PHYSICS, VOL 105. VOL. 105. ISSUE . P. 77 -140 29 69% 0
4 GEBERT, A , PREISS, G , (1998) A SIMPLE METHOD FOR THE ACQUISITION OF HIGH-QUALITY DIGITAL IMAGES FROM ANALOG SCANNING ELECTRON MICROSCOPES.JOURNAL OF MICROSCOPY. VOL. 191. ISSUE . P. 297 -302 15 88% 18
5 SIM, KS , LIM, MS , YEAP, ZX , (2016) PERFORMANCE OF SIGNAL-TO-NOISE RATIO ESTIMATION FOR SCANNING ELECTRON MICROSCOPE USING AUTOCORRELATION LEVINSON-DURBIN RECURSION MODEL.JOURNAL OF MICROSCOPY. VOL. 263. ISSUE 1. P. 64 -77 8 100% 0
6 SIM, KS , NORHISHAM, S , (2016) NONLINEAR LEAST SQUARES REGRESSION FOR SINGLE IMAGE SCANNING ELECTRON MICROSCOPE SIGNAL-TO-NOISE RATIO ESTIMATION.JOURNAL OF MICROSCOPY. VOL. 264. ISSUE 2. P. 159 -174 10 77% 0
7 SIM, KS , NORHISHAM, S , (2016) AUTOREGRESSIVE LINEAR LEAST SQUARE SINGLE SCANNING ELECTRON MICROSCOPE IMAGE SIGNAL-TO-NOISE RATIO ESTIMATION.SCANNING. VOL. 38. ISSUE 6. P. 771 -782 9 82% 0
8 OHO, E , SUZUKI, K , (2012) HIGHLY ACCURATE SNR MEASUREMENT USING THE COVARIANCE OF TWO SEM IMAGES WITH THE IDENTICAL VIEW.SCANNING. VOL. 34. ISSUE 1. P. 43-50 8 100% 1
9 SIM, KS , TSO, CP , TAN, YY , LIM, WK , (2007) REAL-TIME IMAGE QUALITY ASSESSMENT WITH MIXED LAGRANGE TIME DELAY ESTIMATION AUTOREGRESSIVE (MLTDEAR) MODEL.JOURNAL OF MICROSCOPY-OXFORD. VOL. 226. ISSUE 3. P. 230-243 9 100% 0
10 KIANI, MA , SIM, KS , NIA, ME , TSO, CP , (2015) SIGNAL-TO-NOISE RATIO ENHANCEMENT ON SEM IMAGES USING A CUBIC SPLINE INTERPOLATION WITH SAVITZKY-GOLAY FILTERS AND WEIGHTED LEAST SQUARES ERROR.JOURNAL OF MICROSCOPY. VOL. 258. ISSUE 2. P. 140 -150 11 65% 1

Classes with closest relation at Level 1



Rank Class id link
1 14404 BACKSCATTERED ELECTRONS//DOPANT CONTRAST//SCANNING
2 26626 LIPID DEMONSTRATION//RESISTIVE METHOD//COMPRESSED SPINAL CORD INJURY
3 2772 ULTRAMICROSCOPY//ABERRATION CORRECTION//MICROSCOPY
4 10021 MICROSCOPY//ULTRAMICROSCOPY//EFTEM
5 37216 AU MICROELECTRODE//FUEL CELL SOLID STATE CHEM//HOT STAGE
6 20392 CANONICAL ABERRATION THEORY//OPT PHYS ELECT ENGN//MAGNETIC SPECTROMETERS
7 32339 HIRANO BODIES//TMEM132A//INTRANEURONAL INCLUSIONS
8 33808 ACLAR R FILM//BIS CARBOXYPHTHALIMIDES//CAMERA MAGAZINE
9 26061 SNR ESTIMATION//SIGNAL TO NOISE RATIO SNR ESTIMATION//DATA AIDED DA
10 33090 ECT USE SCI EQUIPMENT DIAGNOST STRUCT P//SUB MICRO SYST TECH//NUCLEAR MICROFILTER

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