Class information for:
Level 1: VOLTAGE CONTRAST//E BEAM INSPECTION//ELECTRON BEAM TESTING

Basic class information
Class id #P Avg. number of
references		 Database coverage
of references
21494 416 14.8 34%


Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
2 4 MATERIALS SCIENCE, MULTIDISCIPLINARY//PHYSICS, APPLIED//PHYSICS, CONDENSED MATTER 2836879
314 3       ULTRAMICROSCOPY//MICROSCOPY//JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 39933
2587 2             SCANNING//BACKSCATTERED ELECTRONS//MICROSCOPY 3648
21494 1                   VOLTAGE CONTRAST//E BEAM INSPECTION//ELECTRON BEAM TESTING 416

Terms with highest relevance score


rank Term termType Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 VOLTAGE CONTRAST authKW 320282 3% 36% 12
2 E BEAM INSPECTION authKW 293606 1% 100% 4
3 ELECTRON BEAM TESTING authKW 239771 2% 47% 7
4 ELECTRON BEAM INSPECTION authKW 165152 1% 75% 3
5 NONVISUAL DEFECTS authKW 146803 0% 100% 2
6 ELECTRON BEAM TESTER authKW 97867 0% 67% 2
7 SOREP address 97867 0% 67% 2
8 64MDRAM authKW 73401 0% 100% 1
9 ADV PROC DEVICE DEV GRP address 73401 0% 100% 1
10 ANALYZER GEOMETRY authKW 73401 0% 100% 1

Web of Science journal categories


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 Microscopy 12094 19% 0% 77
2 Engineering, Electrical & Electronic 1898 40% 0% 167
3 Physics, Applied 1709 42% 0% 174
4 Nanoscience & Nanotechnology 1555 21% 0% 88
5 Instruments & Instrumentation 898 15% 0% 63
6 Optics 580 17% 0% 69
7 Computer Science, Hardware & Architecture 301 5% 0% 21
8 Engineering, Manufacturing 63 2% 0% 10
9 Physics, Multidisciplinary 50 7% 0% 28
10 Engineering, General 49 3% 0% 13

Address terms


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 SOREP 97867 0% 67% 2
2 ADV PROC DEVICE DEV GRP 73401 0% 100% 1
3 ATSUGI ELECT COMMUN INTEGRATED ELE 73401 0% 100% 1
4 E BEAM INSPECT 73401 0% 100% 1
5 ETUD SEPARAT ISOTOP CHEM PHYS 73401 0% 100% 1
6 INTEGRATED CIRCUIT ADV PROC ENGN 36700 0% 50% 1
7 PLICAT SYST 36700 0% 50% 1
8 CC SYST S 7338 0% 10% 1
9 ELE COMMUN ENGN 7338 0% 10% 1
10 ELEKTROTECH GRUNDLAGEN INFORMAT 4586 0% 6% 1

Journals


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 SCANNING ELECTRON MICROSCOPY 51449 6% 3% 27
2 SCANNING 24955 6% 1% 24
3 SCANNING MICROSCOPY 11445 3% 1% 14
4 MICROELECTRONIC ENGINEERING 9886 9% 0% 37
5 SIEMENS FORSCHUNGS-UND ENTWICKLUNGSBERICHTE-SIEMENS RESEARCH AND DEVELOPMENT REPORTS 9562 1% 2% 6
6 JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS 6263 3% 1% 14
7 IEEE DESIGN & TEST OF COMPUTERS 6018 2% 1% 9
8 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 5688 9% 0% 36
9 IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING 2992 2% 1% 8
10 ELECTRONICSWEEK 2620 0% 4% 1

Author Key Words


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class		 LCSH search Wikipedia search
1 VOLTAGE CONTRAST 320282 3% 36% 12 Search VOLTAGE+CONTRAST Search VOLTAGE+CONTRAST
2 E BEAM INSPECTION 293606 1% 100% 4 Search E+BEAM+INSPECTION Search E+BEAM+INSPECTION
3 ELECTRON BEAM TESTING 239771 2% 47% 7 Search ELECTRON+BEAM+TESTING Search ELECTRON+BEAM+TESTING
4 ELECTRON BEAM INSPECTION 165152 1% 75% 3 Search ELECTRON+BEAM+INSPECTION Search ELECTRON+BEAM+INSPECTION
5 NONVISUAL DEFECTS 146803 0% 100% 2 Search NONVISUAL+DEFECTS Search NONVISUAL+DEFECTS
6 ELECTRON BEAM TESTER 97867 0% 67% 2 Search ELECTRON+BEAM+TESTER Search ELECTRON+BEAM+TESTER
7 64MDRAM 73401 0% 100% 1 Search 64MDRAM Search 64MDRAM
8 ANALYZER GEOMETRY 73401 0% 100% 1 Search ANALYZER+GEOMETRY Search ANALYZER+GEOMETRY
9 CAD BASED TESTING 73401 0% 100% 1 Search CAD+BASED+TESTING Search CAD+BASED+TESTING
10 COMPUTER AIDED DESIGN CAD DATABASE 73401 0% 100% 1 Search COMPUTER+AIDED+DESIGN+CAD+DATABASE Search COMPUTER+AIDED+DESIGN+CAD+DATABASE

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.


Rank Reference # ref.
in cl.		 Shr. of ref. in
cl.		 Citations
1 PLIES, E , (1990) SECONDARY-ELECTRON ENERGY ANALYZERS FOR ELECTRON-BEAM TESTING.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT. VOL. 298. ISSUE 1-3. P. 142 -155 30 55% 8
2 THONG, JTL , (1992) TRANSIT-TIME EFFECT IN ELECTRON-BEAM TESTING VOLTAGE MEASUREMENTS.MEASUREMENT SCIENCE AND TECHNOLOGY. VOL. 3. ISSUE 9. P. 827 -837 15 100% 2
3 THONG, JTL , NIXON, WC , (1990) AN ELECTRON-OPTICAL PHASE-SHIFT ELEMENT FOR HIGH-SPEED ELECTRON-BEAM TESTING.MEASUREMENT SCIENCE AND TECHNOLOGY. VOL. 1. ISSUE 4. P. 337 -344 14 100% 0
4 GIRARD, P , (1991) VOLTAGE CONTRAST.JOURNAL DE PHYSIQUE IV. VOL. 1. ISSUE C6. P. 259-270 17 74% 1
5 CLAUBERG, R , BEHA, H , BLACHA, A , SEITZ, HK , (1990) PICOSECOND PHOTOEMISSION PROBING OF INTEGRATED-CIRCUITS - CAPABILITIES, LIMITATIONS, AND APPLICATIONS.IBM JOURNAL OF RESEARCH AND DEVELOPMENT. VOL. 34. ISSUE 2-3. P. 173-188 14 88% 2
6 WINKLER, D , SCHMITT, R , BRUNNER, M , LISCHKE, B , (1990) FLEXIBLE PICOSECOND PROBING OF INTEGRATED-CIRCUITS WITH CHOPPED ELECTRON-BEAMS.IBM JOURNAL OF RESEARCH AND DEVELOPMENT. VOL. 34. ISSUE 2-3. P. 189-203 13 93% 3
7 CLAUBERG, R , BLACHA, A , SEITZ, HK , (1990) VOLTAGE DETECTOR AND SUBMICROMETER FOCUSING UNIT FOR PHOTOEMISSION PROBING.REVIEW OF SCIENTIFIC INSTRUMENTS. VOL. 61. ISSUE 3. P. 1044-1054 12 100% 0
8 WINKLER, D , SCHMITT, R , BRUNNER, M , LISCHKE, B , (1988) BLANKING SYSTEM FOR ELECTRON-BEAM TESTING WITH PICOSECOND TIME RESOLUTION.OPTIK. VOL. 78. ISSUE 4. P. 165-172 14 93% 3
9 GOPINATH, A , (1987) VOLTAGE MEASUREMENT IN THE SCANNING ELECTRON-MICROSCOPE.ADVANCES IN ELECTRONICS AND ELECTRON PHYSICS. VOL. 69. ISSUE . P. 1-53 14 93% 3
10 NAKAMAE, K , FUJIOKA, H , URA, K , (1990) ANALYSIS OF WAVE-FORM DISTORTION DUE TO THE TRANSIT-TIME EFFECT IN STROBOSCOPIC SCANNING ELECTRON-MICROSCOPY.MEASUREMENT SCIENCE AND TECHNOLOGY. VOL. 1. ISSUE 9. P. 894 -902 11 100% 3

Classes with closest relation at Level 1


Rank Class id link
1 14404 BACKSCATTERED ELECTRONS//DOPANT CONTRAST//SCANNING
2 13441 LAMACOP//SECONDARY ELECTRON EMISSION//SECONDARY ELECTRON YIELD
3 16154 PROD DESIGN TECHNOL//CORE LENS//THIN LENS APPROXIMATION
4 12989 ELECTRO OPTIC SAMPLING//ELECTROOPTIC MEASUREMENTS//ELECTROOPTIC PROBING
5 5528 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B//PROXIMITY EFFECT CORRECTION//ELECTRON BEAM LITHOGRAPHY
6 37148 SINTERED CARBIDES//COMPOSITE CASTS//EXTENDED FOCAL IMAGING
7 20392 CANONICAL ABERRATION THEORY//OPT PHYS ELECT ENGN//MAGNETIC SPECTROMETERS
8 21792 IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY//MCM TESTING//THERMAL ENGN TECHNOL
9 21482 CARL EMILY FUCHS MICROELECT//CEFIM//HOT CARRIER LUMINESCENCE
10 34716 CLIP7//CUSTOM LSI//PRIMAL DUAL METHOD FOR OPTIMIZATION

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