Class information for:
Level 1: SCANNING CAPACITANCE MICROSCOPY//SSRM//INSYS

Basic class information
Class id #P Avg. number of
references		 Database coverage
of references
14198 785 17.0 65%


Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
2 4 MATERIALS SCIENCE, MULTIDISCIPLINARY//PHYSICS, APPLIED//PHYSICS, CONDENSED MATTER 2836879
279 3       SELF ASSEMBLED MONOLAYER//MOLECULAR ELECTRONICS//NANOSCIENCE & NANOTECHNOLOGY 42929
482 2             ATOMIC FORCE MICROSCOPY//ATOMIC FORCE MICROSCOPE//AFM 15691
14198 1                   SCANNING CAPACITANCE MICROSCOPY//SSRM//INSYS 785

Terms with highest relevance score


rank Term termType Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 SCANNING CAPACITANCE MICROSCOPY authKW 672333 4% 52% 33
2 SSRM authKW 605179 3% 68% 23
3 INSYS address 272432 5% 19% 36
4 SCANNING CAPACITANCE MICROSCOPE authKW 238243 1% 88% 7
5 CARRIER PROFILING authKW 233383 1% 100% 6
6 SCANNING SPREADING RESISTANCE MICROSCOPY SSRM authKW 200041 1% 86% 6
7 DIAMOND TIPS authKW 155589 1% 100% 4
8 SCANNING CAPACITANCE MICROSCOPY SCM authKW 155581 1% 50% 8
9 SCANNING SPREADING RESISTANCE MICROSCOPY authKW 146606 1% 54% 7
10 CARRIER SPILLING authKW 116691 0% 100% 3

Web of Science journal categories


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 Physics, Applied 10698 73% 0% 575
2 Nanoscience & Nanotechnology 6950 32% 0% 251
3 Engineering, Electrical & Electronic 3778 41% 0% 323
4 Microscopy 1272 4% 0% 35
5 Materials Science, Coatings & Films 851 8% 0% 62
6 Physics, Condensed Matter 641 17% 0% 131
7 Materials Science, Multidisciplinary 155 13% 0% 103
8 Instruments & Instrumentation 120 5% 0% 37
9 Materials Science, Characterization, Testing 114 2% 0% 13
10 Electrochemistry 112 4% 0% 30

Address terms


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 INSYS 272432 5% 19% 36
2 MAT COMPONENTS ANAL GRP 116691 0% 100% 3
3 CORP NANO DEVICES 51862 0% 67% 2
4 C A S 38897 0% 100% 1
5 COMPONENTS TECHNOL 38897 0% 100% 1
6 CORP NANODEVICES 38897 0% 100% 1
7 CREAT INITIAT SCI NANOMETER SCALE 38897 0% 100% 1
8 CREAT SCI NANOMETER SCALE 38897 0% 100% 1
9 CRISMAT LAMIPS COMMUN ENSICAENUMR CNRS 6508 38897 0% 100% 1
10 CRISMAT NXP SEMICOND 38897 0% 100% 1

Journals


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 68532 22% 1% 171
2 MICROELECTRONICS RELIABILITY 5015 4% 0% 30
3 APPLIED PHYSICS LETTERS 3237 12% 0% 97
4 MICROELECTRONIC ENGINEERING 2967 4% 0% 28
5 SOLID-STATE ELECTRONICS 2238 3% 0% 24
6 INSTITUTE OF PHYSICS CONFERENCE SERIES 1727 3% 0% 21
7 SOLID STATE TECHNOLOGY 1685 1% 0% 9
8 MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING 1411 1% 0% 11
9 JOURNAL OF THE ELECTROCHEMICAL SOCIETY 1046 4% 0% 29
10 ULTRAMICROSCOPY 983 2% 0% 12

Author Key Words


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class		 LCSH search Wikipedia search
1 SCANNING CAPACITANCE MICROSCOPY 672333 4% 52% 33 Search SCANNING+CAPACITANCE+MICROSCOPY Search SCANNING+CAPACITANCE+MICROSCOPY
2 SSRM 605179 3% 68% 23 Search SSRM Search SSRM
3 SCANNING CAPACITANCE MICROSCOPE 238243 1% 88% 7 Search SCANNING+CAPACITANCE+MICROSCOPE Search SCANNING+CAPACITANCE+MICROSCOPE
4 CARRIER PROFILING 233383 1% 100% 6 Search CARRIER+PROFILING Search CARRIER+PROFILING
5 SCANNING SPREADING RESISTANCE MICROSCOPY SSRM 200041 1% 86% 6 Search SCANNING+SPREADING+RESISTANCE+MICROSCOPY+SSRM Search SCANNING+SPREADING+RESISTANCE+MICROSCOPY+SSRM
6 DIAMOND TIPS 155589 1% 100% 4 Search DIAMOND+TIPS Search DIAMOND+TIPS
7 SCANNING CAPACITANCE MICROSCOPY SCM 155581 1% 50% 8 Search SCANNING+CAPACITANCE+MICROSCOPY+SCM Search SCANNING+CAPACITANCE+MICROSCOPY+SCM
8 SCANNING SPREADING RESISTANCE MICROSCOPY 146606 1% 54% 7 Search SCANNING+SPREADING+RESISTANCE+MICROSCOPY Search SCANNING+SPREADING+RESISTANCE+MICROSCOPY
9 CARRIER SPILLING 116691 0% 100% 3 Search CARRIER+SPILLING Search CARRIER+SPILLING
10 DOPANT PROFILING TECHNIQUES 116691 0% 100% 3 Search DOPANT+PROFILING+TECHNIQUES Search DOPANT+PROFILING+TECHNIQUES

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.


Rank Reference # ref.
in cl.		 Shr. of ref. in
cl.		 Citations
1 OLIVER, RA , (2008) ADVANCES IN AFM FOR THE ELECTRICAL CHARACTERIZATION OF SEMICONDUCTORS.REPORTS ON PROGRESS IN PHYSICS. VOL. 71. ISSUE 7. P. - 95 46% 82
2 CLARYSSE, T , VANHAEREN, D , HOFLIJK, I , VANDERVORST, W , (2004) CHARACTERIZATION OF ELECTRICALLY ACTIVE DOPANT PROFILES WITH THE SPREADING RESISTANCE PROBE.MATERIALS SCIENCE & ENGINEERING R-REPORTS. VOL. 47. ISSUE 5-6. P. 123 -206 56 81% 25
3 LANYI, S , (2010) ON THE LATERAL RESOLUTION OF SCANNING CAPACITANCE MICROSCOPE BASED C-V MEASUREMENTS.ULTRAMICROSCOPY. VOL. 110. ISSUE 10. P. 1343-1348 28 97% 0
4 WILLIAMS, CC , (1999) TWO-DIMENSIONAL DOPANT PROFILING BY SCANNING CAPACITANCE MICROSCOPY.ANNUAL REVIEW OF MATERIALS SCIENCE. VOL. 29. ISSUE . P. 471 -504 30 97% 151
5 KIMURA, K , KOBAYASHI, K , YAMADA, H , MATSUSHIGE, K , USUDA, K , (2006) TWO-DIMENSIONAL CARRIER PROFILING ON OPERATING SI METAL-OXIDE SEMICONDUCTOR FIELD-EFFECT TRANSISTOR BY SCANNING CAPACITANCE MICROSCOPY.JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B. VOL. 24. ISSUE 3. P. 1371-1376 30 86% 5
6 CHANG, MN , HU, CW , CHOU, TH , LEE, YJ , (2012) CONTRAST DISTORTION INDUCED BY MODULATION VOLTAGE IN SCANNING CAPACITANCE MICROSCOPY.APPLIED PHYSICS LETTERS. VOL. 101. ISSUE 8. P. - 21 88% 2
7 LANYI, S , (2008) SHAPE DEPENDENCE OF THE CAPACITANCE OF SCANNING CAPACITANCE MICROSCOPE PROBES.ULTRAMICROSCOPY. VOL. 108. ISSUE 8. P. 712-717 25 81% 0
8 GIANNAZZO, F , RAINERI, V , MIRABELLA, S , BRUNO, E , IMPELLIZZERI, G , PRIOLO, F , (2005) SCANNING CAPACITANCE MICROSCOPY TWO-DIMENSIONAL CARRIER PROFILING FOR ULTRA-SHALLOW JUNCTION CHARACTERIZATION IN DEEP SUBMICRON TECHNOLOGY.MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY. VOL. 124. ISSUE . P. 54-61 25 83% 3
9 DUHAYON, N , CLARYSSE, T , EYBEN, P , VANDERVORST, W , HELLEMANS, L , (2002) DETAILED STUDY OF SCANNING CAPACITANCE MICROSCOPY ON CROSS-SECTIONAL AND BEVELED JUNCTIONS.JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B. VOL. 20. ISSUE 2. P. 741-746 21 100% 18
10 YANEV, V , ROMMEL, M , BAUER, AJ , FREY, L , (2011) CHARACTERIZATION OF THICKNESS VARIATIONS OF THIN DIELECTRIC LAYERS AT THE NANOSCALE USING SCANNING CAPACITANCE MICROSCOPY.JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B. VOL. 29. ISSUE 1. P. - 17 89% 0

Classes with closest relation at Level 1


Rank Class id link
1 10286 KELVIN PROBE FORCE MICROSCOPY//ELECTROSTATIC FORCE MICROSCOPY//SCI CRYSTAL PHYS
2 12950 CHAIR QUANTUM RADIO PHYS//COBRA INTERUNIV//HYDROGEN TERMINATED SI111 1 X 1
3 20425 MICROWAVE MICROPROBE//MICROWAVE MICROSCOPE//NEAR FIELD MICROWAVE MICROSCOPY
4 36089 CHARACTERISTIC TESTING METHOD//DIFFUS TEAM//GATE TURN OFF GTO THYRISTORS
5 20163 CAPACITANCE VOLTAGE C V PROFILING//ELECTRICITY PROPERTIES//ELECTROCHEMICAL C V PROFILING
6 771 TRANSIENT ENHANCED DIFFUSION//SHALLOW JUNCTION//SWAMP
7 14404 BACKSCATTERED ELECTRONS//DOPANT CONTRAST//SCANNING
8 36570 NANOMETER SIZED SCHOTTKY CONTACT//KSRC//BRIDGE METAL ION
9 26484 ELECTROSTATICS BOUNDARY VALUE PROBLEM//VAN DER PAUW METHOD//C AS
10 11344 NEUTRON DEPTH PROFILING//RANGE PARAMETERS//LATERAL STRAGGLING

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