Class information for:
Level 1: NEUTRON DEPTH PROFILING//RANGE PARAMETERS//LATERAL STRAGGLING

Basic class information
Class id #P Avg. number of
references		 Database coverage
of references
11344 989 17.4 43%


Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
2 4 MATERIALS SCIENCE, MULTIDISCIPLINARY//PHYSICS, APPLIED//PHYSICS, CONDENSED MATTER 2836879
6 3       PHYSICS, APPLIED//IEEE TRANSACTIONS ON ELECTRON DEVICES//SILICON 155028
1826 2             TRANSIENT ENHANCED DIFFUSION//SHALLOW JUNCTION//NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 6197
11344 1                   NEUTRON DEPTH PROFILING//RANGE PARAMETERS//LATERAL STRAGGLING 989

Terms with highest relevance score


rank Term termType Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 NEUTRON DEPTH PROFILING authKW 232607 2% 42% 18
2 RANGE PARAMETERS authKW 98793 0% 80% 4
3 LATERAL STRAGGLING authKW 96476 1% 63% 5
4 RANGE STRAGGLING authKW 94542 1% 44% 7
5 LONGITUDINAL RANGE STRAGGLING authKW 92620 0% 100% 3
6 NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS journal 85412 30% 1% 295
7 PROJECTED RANGE authKW 84036 1% 39% 7
8 ION RANGES authKW 82327 0% 67% 4
9 ATSUGI SEMICOND address 69464 0% 75% 3
10 3D DISTRIBUTIONS authKW 61747 0% 100% 2

Web of Science journal categories


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 Nuclear Science & Technology 23795 45% 0% 449
2 Instruments & Instrumentation 12919 36% 0% 355
3 Physics, Nuclear 10829 31% 0% 311
4 Physics, Atomic, Molecular & Chemical 5886 31% 0% 305
5 Physics, Applied 1885 30% 0% 293
6 Physics, Condensed Matter 1134 19% 0% 191
7 Physics, Fluids & Plasmas 551 6% 0% 62
8 Engineering, Electrical & Electronic 260 12% 0% 118
9 Materials Science, Coatings & Films 193 4% 0% 36
10 Physics, Multidisciplinary 163 8% 0% 75

Address terms


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 ATSUGI SEMICOND 69464 0% 75% 3
2 DESIGN MODELING HIGH SPEED BIPOLAR MOS TRANSI 61747 0% 100% 2
3 SEMICOND INTEGRATED SYST 61747 0% 100% 2
4 CALIBRAT SERV 30873 0% 100% 1
5 COMPUTAT MAT GRP MS B285 30873 0% 100% 1
6 E FISHKILL IL SEMICOND DEV 30873 0% 100% 1
7 ESCOLA ENGN MET 30873 0% 100% 1
8 FOR UNGSZENTRUN 30873 0% 100% 1
9 HALBLEITER FESTKORGERPHYS 30873 0% 100% 1
10 IND NAFTE 30873 0% 100% 1

Journals


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 85412 30% 1% 295
2 RADIATION EFFECTS AND DEFECTS IN SOLIDS 23115 6% 1% 59
3 RADIATION EFFECTS LETTERS 11298 1% 4% 9
4 NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH 11047 3% 1% 31
5 NUCLEAR INSTRUMENTS & METHODS 1898 1% 1% 9
6 IEEE TRANSACTIONS ON ELECTRON DEVICES 1664 3% 0% 29
7 MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY 1184 2% 0% 17
8 SOLID STATE TECHNOLOGY 1052 1% 0% 8
9 APPLIED PHYSICS 930 0% 1% 3
10 JOURNAL OF PHYSICS D-APPLIED PHYSICS 744 2% 0% 23

Author Key Words


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class		 LCSH search Wikipedia search
1 NEUTRON DEPTH PROFILING 232607 2% 42% 18 Search NEUTRON+DEPTH+PROFILING Search NEUTRON+DEPTH+PROFILING
2 RANGE PARAMETERS 98793 0% 80% 4 Search RANGE+PARAMETERS Search RANGE+PARAMETERS
3 LATERAL STRAGGLING 96476 1% 63% 5 Search LATERAL+STRAGGLING Search LATERAL+STRAGGLING
4 RANGE STRAGGLING 94542 1% 44% 7 Search RANGE+STRAGGLING Search RANGE+STRAGGLING
5 LONGITUDINAL RANGE STRAGGLING 92620 0% 100% 3 Search LONGITUDINAL+RANGE+STRAGGLING Search LONGITUDINAL+RANGE+STRAGGLING
6 PROJECTED RANGE 84036 1% 39% 7 Search PROJECTED+RANGE Search PROJECTED+RANGE
7 ION RANGES 82327 0% 67% 4 Search ION+RANGES Search ION+RANGES
8 3D DISTRIBUTIONS 61747 0% 100% 2 Search 3D+DISTRIBUTIONS Search 3D+DISTRIBUTIONS
9 ACTIVITY BASED COURSE 61747 0% 100% 2 Search ACTIVITY+BASED+COURSE Search ACTIVITY+BASED+COURSE
10 ION BARRIER FILM 61747 0% 100% 2 Search ION+BARRIER+FILM Search ION+BARRIER+FILM

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.


Rank Reference # ref.
in cl.		 Shr. of ref. in
cl.		 Citations
1 TIAN, SY , (2003) PREDICTIVE MONTE CARLO ION IMPLANTATION SIMULATOR FROM SUB-KEV TO ABOVE 10 MEV.JOURNAL OF APPLIED PHYSICS. VOL. 93. ISSUE 10. P. 5893 -5904 35 81% 19
2 BRATCHENKO, MI , DYULDYA, SV , BAKAI, AS , (2009) ENHANCED PHENOMENOLOGICAL MODELS OF ION CHANNELING CONTRIBUTION TO DOPING PROFILES IN CRYSTALS.CONDENSED MATTER PHYSICS. VOL. 12. ISSUE 1. P. 35-49 18 75% 0
3 DOWNING, RG , LAMAZE, GP , LANGLAND, JK , HWANG, ST , (1993) NEUTRON DEPTH PROFILING - OVERVIEW AND DESCRIPTION OF NIST FACILITIES.JOURNAL OF RESEARCH OF THE NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY. VOL. 98. ISSUE 1. P. 109 -126 35 59% 52
4 BEHAR, M , FICHTNER, PFP , GRANDE, PL , ZAWISLAK, FC , (1995) RANGES IN SI AND LIGHTER MONO AND MULTIELEMENT TARGETS.MATERIALS SCIENCE & ENGINEERING R-REPORTS. VOL. 15. ISSUE 1-2. P. 1 -83 36 54% 31
5 LIANG, JH , (1999) A STUDY OF LONGITUDINAL AND TRANSVERSAL RANGE PARAMETERS OF ION-IMPLANTED 40-360 KEV MOLYBDENUM IN SILICON.JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS. VOL. 38. ISSUE 1A. P. 286-290 17 94% 1
6 POSSELT, M , SCHMIDT, B , MURTHY, CS , FEUDEL, T , SUZUKI, K , (1997) MODELING OF DAMAGE ACCUMULATION DURING ION IMPLANTATION INTO SINGLE-CRYSTALLINE SILICON.JOURNAL OF THE ELECTROCHEMICAL SOCIETY. VOL. 144. ISSUE 4. P. 1495 -1504 24 67% 19
7 HOBLER, G , (1996) CRITICAL ANGLES AND LOW-ENERGY LIMITS TO ION CHANNELING IN SILICON.RADIATION EFFECTS AND DEFECTS IN SOLIDS. VOL. 139. ISSUE 1. P. 21-85 19 83% 28
8 POSSELT, M , (1994) CRYSTAL-TRIM AND ITS APPLICATION TO INVESTIGATIONS ON CHANNELING EFFECTS DURING ION-IMPLANTATION.RADIATION EFFECTS AND DEFECTS IN SOLIDS. VOL. 130. ISSUE . P. 87-119 20 80% 56
9 SIMIONESCU, A , HOBLER, G , BOGEN, S , FREY, L , RYSSEL, H , (1995) MODEL FOR THE ELECTRONIC STOPPING OF CHANNELED IONS IN SILICON AROUND THE STOPPING POWER MAXIMUM.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS. VOL. 106. ISSUE 1-4. P. 47-50 16 100% 10
10 HOBLER, G , SIMIONESCU, A , PALMETSHOFER, L , TIAN, C , STINGEDER, G , (1995) BORON CHANNELING IMPLANTATIONS IN SILICON - MODELING OF ELECTRONIC STOPPING AND DAMAGE ACCUMULATION.JOURNAL OF APPLIED PHYSICS. VOL. 77. ISSUE 8. P. 3697-3703 18 86% 25

Classes with closest relation at Level 1


Rank Class id link
1 21285 SOFT ERROR MAPPING//HIGH ENERGY ION IMPLANTATION//DYNAMIC RANDOM ACCESS MEMORY
2 4687 STOPPING POWER//ENERGY LOSS//STOPPING FORCE
3 8986 IBIEC//AMORPHOUS POCKET//SOLID PHASE EPITAXIAL GROWTH
4 36089 CHARACTERISTIC TESTING METHOD//DIFFUS TEAM//GATE TURN OFF GTO THYRISTORS
5 8481 ION BEAM MIXING//NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS//BALLISTIC MIXING
6 771 TRANSIENT ENHANCED DIFFUSION//SHALLOW JUNCTION//SWAMP
7 14181 PLASMA DRIVEN PERMEATION//JOURNAL OF NUCLEAR MATERIALS//DEUTERON IMPLANTATION
8 4672 NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS//ION BEAM ANALYSIS//ELASTIC RECOIL DETECTION
9 17198 GATE CHARGING//PLASMA CHARGING DAMAGE//CHARGING DAMAGE
10 6921 MEV ION IMPLANTATION//COLD IMPLANTS//ELECTRON ANNEALING

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