Class information for:
Level 1: SI OXIDATION//SILICON OXIDATION//SIO2 SI INTERFACE

Basic class information
Class id #P Avg. number of
references		 Database coverage
of references
3635 1940 24.3 64%


Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
2 4 MATERIALS SCIENCE, MULTIDISCIPLINARY//PHYSICS, APPLIED//PHYSICS, CONDENSED MATTER 2836879
6 3       PHYSICS, APPLIED//IEEE TRANSACTIONS ON ELECTRON DEVICES//SILICON 155028
474 2             FLASH MEMORY//SONOS//NEGATIVE BIAS TEMPERATURE INSTABILITY NBTI 15884
3635 1                   SI OXIDATION//SILICON OXIDATION//SIO2 SI INTERFACE 1940

Terms with highest relevance score


rank Term termType Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 SI OXIDATION authKW 158691 1% 92% 11
2 SILICON OXIDATION authKW 138552 1% 46% 19
3 SIO2 SI INTERFACE authKW 138469 1% 40% 22
4 LAYER BY LAYER OXIDATION authKW 121058 1% 77% 10
5 INTERFACIAL SILICON EMISSION authKW 94429 0% 100% 6
6 SILICON OXIDE authKW 81067 4% 7% 77
7 TRANSLATIONAL KINETIC ENERGY authKW 50360 0% 80% 4
8 OXYGEN MOLECULAR BEAM authKW 47214 0% 100% 3
9 SI THERMAL OXIDATION authKW 47214 0% 100% 3
10 SI001 OXIDATION authKW 47214 0% 100% 3

Web of Science journal categories


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with term
in class
1 Physics, Applied 13218 53% 0% 1025
2 Materials Science, Coatings & Films 13114 19% 0% 368
3 Physics, Condensed Matter 6701 32% 0% 615
4 Electrochemistry 1278 7% 0% 144
5 Chemistry, Physical 940 17% 0% 335
6 Materials Science, Multidisciplinary 532 15% 0% 286
7 Nanoscience & Nanotechnology 397 6% 0% 112
8 Engineering, Electrical & Electronic 346 10% 0% 201
9 Physics, Multidisciplinary 148 6% 0% 112
10 Microscopy 51 1% 0% 13

Address terms


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 THEORIE PHENOMENES PHYS ITP 20983 0% 67% 2
2 PPH ECUBLENS 19527 0% 21% 6
3 PLASMANT GRP 18991 0% 15% 8
4 JOINT ATOM TECHNOL 18576 1% 7% 18
5 SHIGA TECHNOL 17981 0% 29% 4
6 186031Z 15738 0% 100% 1
7 ABT HALBLEITER 15738 0% 100% 1
8 AD T NANOSTRUCT NANODEVICES CRAN 15738 0% 100% 1
9 ADV ISI TECHNOL 15738 0% 100% 1
10 ADV SIMULAT THEORET NEUROSCI 15738 0% 100% 1

Journals


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 JOURNAL OF THE ELECTROCHEMICAL SOCIETY 9978 7% 0% 139
2 SURFACE SCIENCE 9115 6% 0% 126
3 APPLIED SURFACE SCIENCE 6101 6% 0% 118
4 JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 5588 5% 0% 106
5 JOURNAL OF APPLIED PHYSICS 3364 8% 0% 155
6 JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS 3333 3% 0% 51
7 APPLIED PHYSICS LETTERS 3283 8% 0% 156
8 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 3278 3% 0% 55
9 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 2101 2% 0% 48
10 PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES 1931 1% 1% 20

Author Key Words


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class		 LCSH search Wikipedia search
1 SI OXIDATION 158691 1% 92% 11 Search SI+OXIDATION Search SI+OXIDATION
2 SILICON OXIDATION 138552 1% 46% 19 Search SILICON+OXIDATION Search SILICON+OXIDATION
3 SIO2 SI INTERFACE 138469 1% 40% 22 Search SIO2+SI+INTERFACE Search SIO2+SI+INTERFACE
4 LAYER BY LAYER OXIDATION 121058 1% 77% 10 Search LAYER+BY+LAYER+OXIDATION Search LAYER+BY+LAYER+OXIDATION
5 INTERFACIAL SILICON EMISSION 94429 0% 100% 6 Search INTERFACIAL+SILICON+EMISSION Search INTERFACIAL+SILICON+EMISSION
6 SILICON OXIDE 81067 4% 7% 77 Search SILICON+OXIDE Search SILICON+OXIDE
7 TRANSLATIONAL KINETIC ENERGY 50360 0% 80% 4 Search TRANSLATIONAL+KINETIC+ENERGY Search TRANSLATIONAL+KINETIC+ENERGY
8 OXYGEN MOLECULAR BEAM 47214 0% 100% 3 Search OXYGEN+MOLECULAR+BEAM Search OXYGEN+MOLECULAR+BEAM
9 SI THERMAL OXIDATION 47214 0% 100% 3 Search SI+THERMAL+OXIDATION Search SI+THERMAL+OXIDATION
10 SI001 OXIDATION 47214 0% 100% 3 Search SI001+OXIDATION Search SI001+OXIDATION

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.


Rank Reference # ref.
in cl.		 Shr. of ref. in
cl.		 Citations
1 OGAWA, S , TAKAKUWA, Y , (2006) RATE-LIMITING REACTIONS OF GROWTH AND DECOMPOSITION KINETICS OF VERY THIN OXIDES ON SI(001) SURFACES STUDIED BY REFLECTION HIGH-ENERGY ELECTRON DIFFRACTION COMBINED WITH AUGER ELECTRON SPECTROSCOPY.JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS. VOL. 45. ISSUE 9A. P. 7063-7079 61 77% 10
2 ENTA, Y , OSANAI, S , OGASAWARA, T , (2017) ACTIVATION ENERGY OF THERMAL DESORPTION OF SILICON OXIDE LAYERS ON SILICON SUBSTRATES.SURFACE SCIENCE. VOL. 656. ISSUE . P. 96 -100 34 100% 0
3 YOSHIGOE, A , TERAOKA, Y , (2010) IMMEDIATE PRODUCT AFTER EXPOSING SI(111)-7X7 SURFACE TO O-2 AT 300 K.JAPANESE JOURNAL OF APPLIED PHYSICS. VOL. 49. ISSUE 11. P. - 49 77% 2
4 PAMUNGKAS, MA , JOE, M , KIM, BH , LEE, KR , (2011) REACTIVE MOLECULAR DYNAMICS SIMULATION OF EARLY STAGE OF DRY OXIDATION OF SI (100) SURFACE.JOURNAL OF APPLIED PHYSICS. VOL. 110. ISSUE 5. P. - 42 84% 6
5 OGAWA, S , YOSHIGOE, A , ISHIDZUKA, S , TERAOKA, Y , TAKAKUWA, Y , (2007) SI(001) SURFACE LAYER-BY-LAYER OXIDATION STUDIED BY REAL-TIME PHOTOELECTRON SPECTROSCOPY USING SYNCHROTRON RADIATION.JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS. VOL. 46. ISSUE 5B. P. 3244 -3254 47 76% 7
6 HATTORI, T , (1995) CHEMICAL STRUCTURES OF THE SIO2/SI INTERFACE.CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES. VOL. 20. ISSUE 4. P. 339 -382 89 53% 74
7 WOLTERS, DR , ZEGERSVANDUIJNHOVEN, ATA , (1992) SILICON OXIDATION AND FIXED OXIDE CHARGE.JOURNAL OF THE ELECTROCHEMICAL SOCIETY. VOL. 139. ISSUE 1. P. 241 -249 59 88% 15
8 GUSEV, EP , LU, HC , GUSTAFSSON, T , GARFUNKEL, E , (1995) GROWTH-MECHANISM OF THIN SILICON-OXIDE FILMS ON SI(100) STUDIED BY MEDIUM-ENERGY ION-SCATTERING.PHYSICAL REVIEW B. VOL. 52. ISSUE 3. P. 1759 -1775 59 64% 144
9 FINK, CK , NAKAMURA, K , ICHIMURA, S , JENKINS, SJ , (2009) SILICON OXIDATION BY OZONE.JOURNAL OF PHYSICS-CONDENSED MATTER. VOL. 21. ISSUE 18. P. - 48 58% 17
10 OGAWA, S , TANG, JY , YOSHIGOE, A , ISHIDZUKA, S , TAKAKUWA, Y , (2016) ENHANCEMENT OF SIO2/SI(001) INTERFACIAL OXIDATION INDUCED BY THERMAL STRAIN DURING RAPID THERMAL OXIDATION.JOURNAL OF CHEMICAL PHYSICS. VOL. 145. ISSUE 11. P. - 30 81% 0

Classes with closest relation at Level 1


Rank Class id link
1 24686 LOW TEMPERATURE SILICON OXIDATION//DIRECTIONAL OXIDATION//HIGH RATE SILICON OXIDATION
2 33212 J AN SCI TECHNOL ORG//CYANIDE TREATMENT//DISPLAY TECHNOL DEV GRP
3 37271 GRAZING X RAY REFLECTOMETRY//ANOMALOUS DISPERSION EFFECT//BI POLAR DESIGN
4 28032 MIS TUNNEL DIODE//ANODIC OXIDE ANO//COMPOSED CAPACITOR
5 8494 HYDROGEN TERMINATION//NATIVE OXIDE//HYDRIDE SPECIES
6 23664 007 MICROMETER TECHNOLOGIES//05 MICROMETER TECHNOLOGIES//5 LAYERS OF METAL
7 19608 SI SIO2//GE INSULATOR STRUCTURE//MICROWAVE TRANSIENT PHOTOCONDUCTIVITY
8 6002 BORON PENETRATION//NITRIDED OXIDE//OXYNITRIDATION
9 34788 CERIUM MAGNETOPLUMBITE//EDS SPECTRA//ENAMEL INSERT RESTORATION
10 37264 SI O SUPERLATTICE//OXYGEN ATOMIC LAYER//CARRIER CONDUCTION MECHANISM

Go to start page