Class information for:
Level 1: METAL INSULATOR METAL MIM CAPACITOR//METAL INSULATOR METAL MIM//VOLTAGE COEFFICIENT OF CAPACITANCE VCC

Basic class information
Class id #P Avg. number of
references		 Database coverage
of references
19257 514 18.2 63%


Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
2 4 MATERIALS SCIENCE, MULTIDISCIPLINARY//PHYSICS, APPLIED//PHYSICS, CONDENSED MATTER 2836879
589 3       ATOMIC LAYER DEPOSITION//HFO2//HIGH K DIELECTRICS 15224
664 2             ATOMIC LAYER DEPOSITION//HFO2//HIGH K DIELECTRICS 13339
19257 1                   METAL INSULATOR METAL MIM CAPACITOR//METAL INSULATOR METAL MIM//VOLTAGE COEFFICIENT OF CAPACITANCE VCC 514

Terms with highest relevance score


rank Term termType Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 METAL INSULATOR METAL MIM CAPACITOR authKW 1884167 8% 77% 41
2 METAL INSULATOR METAL MIM authKW 1163930 7% 58% 34
3 VOLTAGE COEFFICIENT OF CAPACITANCE VCC authKW 894586 3% 94% 16
4 MIM CAPACITOR authKW 616761 6% 36% 29
5 TEMPERATURE COEFFICIENT OF CAPACITANCE TCC authKW 570295 2% 80% 12
6 VOLTAGE LINEARITY authKW 363861 1% 88% 7
7 VOLTAGE COEFFICIENT OF CAPACITANCE authKW 356437 1% 100% 6
8 CAPACITANCE DENSITY authKW 267319 2% 50% 9
9 METAL INSULATOR METAL CAPACITOR authKW 220010 2% 37% 10
10 TILAO authKW 190098 1% 80% 4

Web of Science journal categories


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 Engineering, Electrical & Electronic 4074 52% 0% 267
2 Physics, Applied 3768 55% 0% 281
3 Materials Science, Coatings & Films 980 10% 0% 53
4 Nanoscience & Nanotechnology 797 14% 0% 72
5 Physics, Condensed Matter 232 13% 0% 67
6 Electrochemistry 183 6% 0% 29
7 Materials Science, Multidisciplinary 158 15% 0% 79
8 Optics 107 7% 0% 38
9 Materials Science, Ceramics 33 2% 0% 10
10 Engineering, Manufacturing 13 1% 0% 6

Address terms


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 CHAIR NANOELECT DEVICES 178219 1% 100% 3
2 FAB TEAM 3 118812 0% 100% 2
3 NEW MAT EVALUAT 92937 3% 12% 13
4 MIXED SIGNAL GRP 79207 0% 67% 2
5 SILICON NANO DEVICE 59581 3% 6% 17
6 ADV PASS DEVICE DEV TEAM 59406 0% 100% 1
7 ASRC SPACE DEF 59406 0% 100% 1
8 CEA LETI D2NT 59406 0% 100% 1
9 CEA LETIMINATEC 59406 0% 100% 1
10 CHARTERED SILICON PARTNERS FAB 6 59406 0% 100% 1

Journals


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 IEEE ELECTRON DEVICE LETTERS 40179 15% 1% 78
2 MICROELECTRONIC ENGINEERING 7560 7% 0% 36
3 IEEE TRANSACTIONS ON ELECTRON DEVICES 5318 7% 0% 37
4 JOURNAL OF THE ELECTROCHEMICAL SOCIETY 1515 5% 0% 28
5 ECS SOLID STATE LETTERS 1483 1% 1% 3
6 IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY 1381 1% 0% 5
7 SOLID-STATE ELECTRONICS 849 2% 0% 12
8 MICROELECTRONICS RELIABILITY 841 2% 0% 10
9 IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMS 832 1% 0% 5
10 APPLIED PHYSICS LETTERS 770 8% 0% 39

Author Key Words


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class		 LCSH search Wikipedia search
1 METAL INSULATOR METAL MIM CAPACITOR 1884167 8% 77% 41 Search METAL+INSULATOR+METAL+MIM+CAPACITOR Search METAL+INSULATOR+METAL+MIM+CAPACITOR
2 METAL INSULATOR METAL MIM 1163930 7% 58% 34 Search METAL+INSULATOR+METAL+MIM Search METAL+INSULATOR+METAL+MIM
3 VOLTAGE COEFFICIENT OF CAPACITANCE VCC 894586 3% 94% 16 Search VOLTAGE+COEFFICIENT+OF+CAPACITANCE+VCC Search VOLTAGE+COEFFICIENT+OF+CAPACITANCE+VCC
4 MIM CAPACITOR 616761 6% 36% 29 Search MIM+CAPACITOR Search MIM+CAPACITOR
5 TEMPERATURE COEFFICIENT OF CAPACITANCE TCC 570295 2% 80% 12 Search TEMPERATURE+COEFFICIENT+OF+CAPACITANCE+TCC Search TEMPERATURE+COEFFICIENT+OF+CAPACITANCE+TCC
6 VOLTAGE LINEARITY 363861 1% 88% 7 Search VOLTAGE+LINEARITY Search VOLTAGE+LINEARITY
7 VOLTAGE COEFFICIENT OF CAPACITANCE 356437 1% 100% 6 Search VOLTAGE+COEFFICIENT+OF+CAPACITANCE Search VOLTAGE+COEFFICIENT+OF+CAPACITANCE
8 CAPACITANCE DENSITY 267319 2% 50% 9 Search CAPACITANCE+DENSITY Search CAPACITANCE+DENSITY
9 METAL INSULATOR METAL CAPACITOR 220010 2% 37% 10 Search METAL+INSULATOR+METAL+CAPACITOR Search METAL+INSULATOR+METAL+CAPACITOR
10 TILAO 190098 1% 80% 4 Search TILAO Search TILAO

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.


Rank Reference # ref.
in cl.		 Shr. of ref. in
cl.		 Citations
1 PADMANABHAN, R , BHAT, N , MOHAN, S , (2012) HIGH-PERFORMANCE METAL-INSULATOR-METAL CAPACITORS USING EUROPIUM OXIDE AS DIELECTRIC.IEEE TRANSACTIONS ON ELECTRON DEVICES. VOL. 59. ISSUE 5. P. 1364 -1370 29 81% 7
2 ZHU, B , LIU, WJ , WEI, L , DING, SJ , (2016) VOLTAGE-DEPENDENT CAPACITANCE BEHAVIOR AND UNDERLYING MECHANISMS IN METAL-INSULATOR-METAL CAPACITORS WITH AL2O3-ZRO2-SIO2 NANO-LAMINATES.JOURNAL OF PHYSICS D-APPLIED PHYSICS. VOL. 49. ISSUE 13. P. - 21 88% 1
3 PADMANABHAN, R , MOHAN, S , MOROZUMI, Y , KAUSHAL, S , BHAT, N , (2016) PERFORMANCE AND RELIABILITY OF TIO2/ZRO2/TIO2 (TZT) AND ALO-DOPED TZT MIM CAPACITORS.IEEE TRANSACTIONS ON ELECTRON DEVICES. VOL. 63. ISSUE 10. P. 3928 -3935 21 75% 0
4 ZHU, B , LIU, WJ , WEI, L , ZHANG, DW , JIANG, AQ , DING, SJ , (2015) VOLTAGE LINEARITY MODULATION AND POLARITY DEPENDENT CONDUCTION IN METAL-INSULATOR-METAL CAPACITORS WITH ATOMIC-LAYER-DEPOSITED AL2O3/ZRO2/SIO2 NANO-STACKS.JOURNAL OF APPLIED PHYSICS. VOL. 118. ISSUE 1. P. - 25 63% 1
5 PAVUNNY, SP , MISRA, P , SCOTT, JF , KATIYAR, RS , (2013) ADVANCED HIGH-K DIELECTRIC AMORPHOUS LAGDO3 BASED HIGH DENSITY METAL-INSULATOR-METAL CAPACITORS WITH SUB-NANOMETER CAPACITANCE EQUIVALENT THICKNESS.APPLIED PHYSICS LETTERS. VOL. 102. ISSUE 25. P. - 19 76% 4
6 MANGLA, O , GUPTA, V , (2016) STUDY OF ELECTRICAL PROPERTIES OF HAFNIUM OXIDE THIN FILM BASED METAL-INSULATOR-METAL CAPACITORS: PRE AND POST METALLIC ANNEALING.JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS. VOL. 27. ISSUE 12. P. 12527 -12532 15 88% 0
7 HUANG, CC , CHENG, CH , LIOU, BH , YEH, FS , CHIN, A , (2009) EFFECT OF TA2O5 DOPING ON ELECTRICAL CHARACTERISTICS OF SRTIO3 METAL-INSULATOR-METAL CAPACITORS.JAPANESE JOURNAL OF APPLIED PHYSICS. VOL. 48. ISSUE 8. P. - 18 86% 1
8 PASKALEVA, A , LEMBERGER, M , BAUER, AJ , WEINREICH, W , HEITMANN, J , ERBEN, E , SCHRODER, U , OBERBECK, L , (2009) INFLUENCE OF THE AMORPHOUS/CRYSTALLINE PHASE OF ZR1-XALXO2 HIGH-K LAYERS ON THE CAPACITANCE PERFORMANCE OF METAL INSULATOR METAL STACKS.JOURNAL OF APPLIED PHYSICS. VOL. 106. ISSUE 5. P. - 17 77% 11
9 TSAI, CY , CHIANG, KC , LIN, SH , HSU, KC , CHI, CC , CHIN, A , (2010) IMPROVED CAPACITANCE DENSITY AND RELIABILITY OF HIGH-K NI/ZRO2/TIN MIM CAPACITORS USING LASER-ANNEALING TECHNIQUE.IEEE ELECTRON DEVICE LETTERS. VOL. 31. ISSUE 7. P. 749-751 14 88% 16
10 MONDAL, S , SHIH, SJ , CHEN, FH , PAN, TM , (2012) STRUCTURAL AND ELECTRICAL CHARACTERISTICS OF LU2O3 DIELECTRIC EMBEDDED MIM CAPACITORS FOR ANALOG IC APPLICATIONS.IEEE TRANSACTIONS ON ELECTRON DEVICES. VOL. 59. ISSUE 6. P. 1750 -1756 17 71% 2

Classes with closest relation at Level 1


Rank Class id link
1 89 HFO2//HIGH K DIELECTRICS//HIGH K
2 9796 TANTALUM OXIDE//TA2O5//TANTALUM PENTOXIDE
3 28210 NEGATIVE CAPACITANCE//CHAIR NANOELECT MAT//NAM GGMBH
4 2435 ATOMIC LAYER DEPOSITION//ALD//MOLECULAR LAYER DEPOSITION
5 21911 POLYOXIDE//INTER POLY DIELECTRIC IPD//INTERPOLY OXIDE
6 6011 SPIRAL INDUCTOR//INDUCTORS//DE EMBEDDING
7 11937 PYROCHLORE//CUBIC PYROCHLORE//BZN
8 30953 ANTIFUSE//MULTITIME PROGRAMMABLE MTP//ONE TIME PROGRAMMABLE MEMORY
9 433 BST//BARIUM STRONTIUM TITANATE//TUNABILITY
10 28032 MIS TUNNEL DIODE//ANODIC OXIDE ANO//COMPOSED CAPACITOR

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