Class information for:
Level 1: TANTALUM OXIDE//TA2O5//TANTALUM PENTOXIDE

Basic class information
Class id #P Avg. number of
references		 Database coverage
of references
9796 1119 22.3 63%


Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
2 4 MATERIALS SCIENCE, MULTIDISCIPLINARY//PHYSICS, APPLIED//PHYSICS, CONDENSED MATTER 2836879
589 3       ATOMIC LAYER DEPOSITION//HFO2//HIGH K DIELECTRICS 15224
664 2             ATOMIC LAYER DEPOSITION//HFO2//HIGH K DIELECTRICS 13339
9796 1                   TANTALUM OXIDE//TA2O5//TANTALUM PENTOXIDE 1119

Terms with highest relevance score


rank Term termType Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 TANTALUM OXIDE authKW 749193 8% 31% 88
2 TA2O5 authKW 515420 6% 27% 69
3 TANTALUM PENTOXIDE authKW 501342 4% 44% 42
4 TANTALUM PENTOXIDE TA2O5 authKW 235829 1% 79% 11
5 TANTALUM OXIDE FILMS authKW 167128 1% 88% 7
6 TA2O5 THIN FILMS authKW 133700 1% 70% 7
7 HIGH K STACK authKW 122786 1% 75% 6
8 TANTALUM ETHOXIDE authKW 122786 1% 75% 6
9 TA2O51 XTIO2X authKW 109146 0% 100% 4
10 THIN TA2O5 FILM authKW 109146 0% 100% 4

Web of Science journal categories


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 Materials Science, Coatings & Films 9078 21% 0% 232
2 Physics, Applied 7813 53% 0% 598
3 Materials Science, Multidisciplinary 1664 29% 0% 323
4 Physics, Condensed Matter 1644 22% 0% 241
5 Engineering, Electrical & Electronic 788 18% 0% 197
6 Electrochemistry 775 8% 0% 85
7 Nanoscience & Nanotechnology 516 8% 0% 91
8 Materials Science, Ceramics 349 4% 0% 43
9 Chemistry, Physical 223 12% 0% 139
10 Optics 133 6% 0% 67

Address terms


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 SCI TECHNOL SYNTH GROWTH ANAL ELECT MAT 40927 0% 50% 3
2 ADV INTERCONNECTS SYST TECHNOL 36381 0% 67% 2
3 DPT MATIERE CONDENSEE MAT FONCT 36381 0% 67% 2
4 ADV PROC INTEGRAT NAKAHARA KU 27286 0% 100% 1
5 CVD BUSINESS UNIT 27286 0% 100% 1
6 DIELE ETCH ENGN GRP 27286 0% 100% 1
7 ELE ON DEVICES BUSINESS UNIT 27286 0% 100% 1
8 ELECT ENGN MYONGJI PHOTON ELECT EMBEDDED S 27286 0% 100% 1
9 ELECT MAT DEVICES PACKAGING 27286 0% 100% 1
10 GAZIBABA BB 27286 0% 100% 1

Journals


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 THIN SOLID FILMS 4259 7% 0% 76
2 JOURNAL OF THE ELECTROCHEMICAL SOCIETY 3642 6% 0% 64
3 JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 2502 5% 0% 54
4 MICROELECTRONICS RELIABILITY 2231 2% 0% 24
5 APPLIED SURFACE SCIENCE 2030 5% 0% 52
6 MICROELECTRONIC ENGINEERING 1265 2% 0% 22
7 IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY PART B-ADVANCED PACKAGING 1132 0% 1% 4
8 RESULTS IN PHYSICS 1075 0% 1% 4
9 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 1071 2% 0% 24
10 ADVANCED MATERIALS FOR OPTICS AND ELECTRONICS 1066 0% 1% 3

Author Key Words


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class		 LCSH search Wikipedia search
1 TANTALUM OXIDE 749193 8% 31% 88 Search TANTALUM+OXIDE Search TANTALUM+OXIDE
2 TA2O5 515420 6% 27% 69 Search TA2O5 Search TA2O5
3 TANTALUM PENTOXIDE 501342 4% 44% 42 Search TANTALUM+PENTOXIDE Search TANTALUM+PENTOXIDE
4 TANTALUM PENTOXIDE TA2O5 235829 1% 79% 11 Search TANTALUM+PENTOXIDE+TA2O5 Search TANTALUM+PENTOXIDE+TA2O5
5 TANTALUM OXIDE FILMS 167128 1% 88% 7 Search TANTALUM+OXIDE+FILMS Search TANTALUM+OXIDE+FILMS
6 TA2O5 THIN FILMS 133700 1% 70% 7 Search TA2O5+THIN+FILMS Search TA2O5+THIN+FILMS
7 HIGH K STACK 122786 1% 75% 6 Search HIGH+K+STACK Search HIGH+K+STACK
8 TANTALUM ETHOXIDE 122786 1% 75% 6 Search TANTALUM+ETHOXIDE Search TANTALUM+ETHOXIDE
9 TA2O51 XTIO2X 109146 0% 100% 4 Search TA2O51+XTIO2X Search TA2O51+XTIO2X
10 THIN TA2O5 FILM 109146 0% 100% 4 Search THIN+TA2O5+FILM Search THIN+TA2O5+FILM

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.


Rank Reference # ref. in
cl.		 Shr. of ref. in
cl.		 Citations
1 CHANELIERE, C , AUTRAN, JL , DEVINE, RAB , BALLAND, B , (1998) TANTALUM PENTOXIDE (TA2O5) THIN FILMS FOR ADVANCED DIELECTRIC APPLICATIONS.MATERIALS SCIENCE & ENGINEERING R-REPORTS. VOL. 22. ISSUE 6. P. 269 -322 125 69% 434
2 EZHILVALAVAN, S , TSENG, TY , (1999) PREPARATION AND PROPERTIES OF TANTALUM PENTOXIDE (TA2O5) THIN FILMS FOR ULTRA LARGE SCALE INTEGRATED CIRCUITS (ULSIS) APPLICATION - A REVIEW.JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS. VOL. 10. ISSUE 1. P. 9 -31 50 71% 91
3 GRAHN, JV , HELLBERG, PE , OLSSON, E , (1998) EFFECT OF GROWTH TEMPERATURE ON THE PROPERTIES OF EVAPORATED TANTALUM PENTOXIDE THIN FILMS ON SILICON DEPOSITED USING OXYGEN RADICALS.JOURNAL OF APPLIED PHYSICS. VOL. 84. ISSUE 3. P. 1632 -1642 34 89% 27
4 ATANASSOVA, E , (1999) THIN RF SPUTTERED AND THERMAL TA2O5 ON SI FOR HIGH DENSITY DRAM APPLICATION.MICROELECTRONICS RELIABILITY. VOL. 39. ISSUE 8. P. 1185 -1217 35 81% 44
5 BHANDARI, A , KANDARI, AS , AGARWAL, MK , LINGWAL, V , PANWAR, NS , (2010) SINTERING PROCESS DEPENDENT DIELECTRIC PROPERTIES OF [TA2O5]1-X-[TIO2]X, FOR THE COMPOSITIONS NEAR X=0.08.FERROELECTRICS LETTERS SECTION. VOL. 37. ISSUE 3. P. 43 -54 27 82% 0
6 DIMITROVA, T , ARSHAK, K , ATANASSOVA, E , (2001) CRYSTALLIZATION EFFECTS IN OXYGEN ANNEALED TA2O5 THIN FILMS ON SI.THIN SOLID FILMS. VOL. 381. ISSUE 1. P. 31 -38 27 100% 33
7 DEVAN, RS , HO, WD , CHEN, CH , SHIU, HW , HO, CH , CHENG, CL , WU, SY , LIOU, Y , MA, YR , (2009) HIGH ROOM-TEMPERATURE PHOTOLUMINESCENCE OF ONE-DIMENSIONAL TA2O5 NANOROD ARRAYS.NANOTECHNOLOGY. VOL. 20. ISSUE 44. P. - 31 66% 17
8 DEVAN, RS , LIN, CL , LIN, JH , WEN, TK , PATIL, RA , MA, YR , (2013) EFFECTIVE PHOTOLUMINESCENCE IN A LARGE-AREA ARRAY OF TA2O5 NANODOTS.JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY. VOL. 13. ISSUE 2. P. 1001 -1005 24 80% 1
9 SPASSOV, D , ATANASSOVA, E , (1998) THERMAL TA2O5 FILMS AS A GATE INSULATOR FOR THIN FILM CAPACITORS.INTERNATIONAL JOURNAL OF ELECTRONICS. VOL. 84. ISSUE 5. P. 453 -466 30 97% 5
10 IVANOV, MV , PEREVALOV, TV , ALIEV, VS , GRITSENKO, VA , KAICHEV, VV , (2011) ELECTRONIC STRUCTURE OF DELTA-TA2O5 WITH OXYGEN VACANCY: AB INITIO CALCULATIONS AND COMPARISON WITH EXPERIMENT.JOURNAL OF APPLIED PHYSICS. VOL. 110. ISSUE 2. P. - 22 76% 36

Classes with closest relation at Level 1


Rank Class id link
1 19257 METAL INSULATOR METAL MIM CAPACITOR//METAL INSULATOR METAL MIM//VOLTAGE COEFFICIENT OF CAPACITANCE VCC
2 19324 NIOBIUM OXIDE//NB2O5//NIOBIUM PENTOXIDE
3 36761 INDIVIDUAL NANOFIBERS//LOW BACKGROUND SYSTEM//NANOGRADIENT COATINGS
4 89 HFO2//HIGH K DIELECTRICS//HIGH K
5 22040 ZIRCONIUM OXYNITRIDE//TINXOY//TITANIUM OXYNITRIDE
6 15660 CHEMICAL VAPOR TRANSPORT//CHEMICAL VAPOR TRANSPORT CVT//CHEMICAL TRANSPORT REACTIONS
7 21911 POLYOXIDE//INTER POLY DIELECTRIC IPD//INTERPOLY OXIDE
8 18296 ADV COATINGS EXPT//ZRO2 FILMS//TETRAGONAL AND MONOCLINIC PHASES
9 14564 RU//RUO2//RUTHENIUM DIOXIDE
10 2435 ATOMIC LAYER DEPOSITION//ALD//MOLECULAR LAYER DEPOSITION

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