Class information for:
Level 1: ARCHITECTURE TECH//3 DIMENSIONAL INTEGRATION//ELECTRON DEVICE LETTERS

Basic class information
Class id #P Avg. number of
references		 Database coverage
of references
13380 841 17.6 44%


Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
2 4 MATERIALS SCIENCE, MULTIDISCIPLINARY//PHYSICS, APPLIED//PHYSICS, CONDENSED MATTER 2836879
6 3       PHYSICS, APPLIED//IEEE TRANSACTIONS ON ELECTRON DEVICES//SILICON 155028
1385 2             POLYCRYSTALLINE SILICON//POLY SI//THIN FILM TRANSISTORS 8137
13380 1                   ARCHITECTURE TECH//3 DIMENSIONAL INTEGRATION//ELECTRON DEVICE LETTERS 841

Terms with highest relevance score


rank Term termType Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 ARCHITECTURE TECH address 72614 0% 100% 2
2 3 DIMENSIONAL INTEGRATION authKW 65350 0% 60% 3
3 ELECTRON DEVICE LETTERS journal 53155 2% 7% 21
4 ZONE MELTING RECRYSTALLIZATION authKW 52805 0% 36% 4
5 3 DIMENSIONAL LSIS authKW 36307 0% 100% 1
6 CCD IMAGING DEVICES authKW 36307 0% 100% 1
7 CENT S MAT SCI address 36307 0% 100% 1
8 DEV PLANNING TECH SERV MIYAMAE KU address 36307 0% 100% 1
9 EVAPORATED AMORPHOUS SILICON authKW 36307 0% 100% 1
10 FRONTIER PROGRAMS address 36307 0% 100% 1

Web of Science journal categories


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 Physics, Applied 8178 62% 0% 525
2 Materials Science, Coatings & Films 958 8% 0% 68
3 Engineering, Electrical & Electronic 563 17% 0% 145
4 Physics, Condensed Matter 473 14% 0% 120
5 Materials Science, Multidisciplinary 274 16% 0% 132
6 Electrochemistry 226 5% 0% 42
7 Crystallography 209 5% 0% 41
8 Instruments & Instrumentation 123 5% 0% 39
9 COMPUTER APPLICATIONS & CYBERNETICS 119 0% 0% 3
10 Physics, Multidisciplinary 41 5% 0% 42

Address terms


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 ARCHITECTURE TECH 72614 0% 100% 2
2 CENT S MAT SCI 36307 0% 100% 1
3 DEV PLANNING TECH SERV MIYAMAE KU 36307 0% 100% 1
4 FRONTIER PROGRAMS 36307 0% 100% 1
5 GOLDMAN FRONTIER SCI 36307 0% 100% 1
6 MAT SCI MAT CHARACTERIZAT BRANCH 36307 0% 100% 1
7 STANFORD ELE 36307 0% 100% 1
8 UNTERNEHMENSBEREICH BAUELEMENTE 36307 0% 100% 1
9 VLSI DEVICE TECHNOL BRANCH 36307 0% 100% 1
10 MICROSYST TECH 18152 0% 50% 1

Journals


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 ELECTRON DEVICE LETTERS 53155 2% 7% 21
2 JOURNAL OF APPLIED PHYSICS 7522 18% 0% 149
3 APPLIED PHYSICS LETTERS 5841 16% 0% 134
4 IEEE INTERNATIONAL SOLID STATE CIRCUITS CONFERENCE 5525 0% 4% 4
5 SEMICONDUCTORS AND SEMIMETALS 2566 1% 1% 6
6 IEEE ELECTRON DEVICE LETTERS 2286 3% 0% 24
7 SOLID STATE TECHNOLOGY 1943 1% 1% 10
8 JAPAN ANNUAL REVIEWS IN ELECTRONICS COMPUTERS & TELECOMMUNICATIONS 1851 0% 2% 3
9 JOURNAL OF THE ELECTROCHEMICAL SOCIETY 1603 4% 0% 37
10 JOURNAL OF CRYSTAL GROWTH 1148 4% 0% 32

Author Key Words


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class		 LCSH search Wikipedia search
1 3 DIMENSIONAL INTEGRATION 65350 0% 60% 3 Search 3+DIMENSIONAL+INTEGRATION Search 3+DIMENSIONAL+INTEGRATION
2 ZONE MELTING RECRYSTALLIZATION 52805 0% 36% 4 Search ZONE+MELTING+RECRYSTALLIZATION Search ZONE+MELTING+RECRYSTALLIZATION
3 3 DIMENSIONAL LSIS 36307 0% 100% 1 Search 3+DIMENSIONAL+LSIS Search 3+DIMENSIONAL+LSIS
4 CCD IMAGING DEVICES 36307 0% 100% 1 Search CCD+IMAGING+DEVICES Search CCD+IMAGING+DEVICES
5 EVAPORATED AMORPHOUS SILICON 36307 0% 100% 1 Search EVAPORATED+AMORPHOUS+SILICON Search EVAPORATED+AMORPHOUS+SILICON
6 IMITATING MAGMATIC ROCKS 36307 0% 100% 1 Search IMITATING+MAGMATIC+ROCKS Search IMITATING+MAGMATIC+ROCKS
7 INTELLIGENCE GLASS 36307 0% 100% 1 Search INTELLIGENCE+GLASS Search INTELLIGENCE+GLASS
8 ISOLATED SI EPITAXY 36307 0% 100% 1 Search ISOLATED+SI+EPITAXY Search ISOLATED+SI+EPITAXY
9 LASER INTENSITY PROFILING 36307 0% 100% 1 Search LASER+INTENSITY+PROFILING Search LASER+INTENSITY+PROFILING
10 LATERAL GRAPHOEPITAXY 36307 0% 100% 1 Search LATERAL+GRAPHOEPITAXY Search LATERAL+GRAPHOEPITAXY

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.


Rank Reference # ref.
in cl.		 Shr. of ref. in
cl.		 Citations
1 HORITA, S , FUKAO, K , ISHIWARA, H , (1990) STUDY OF SUBBOUNDARY GENERATION IN SILICON-ON-INSULATOR FILMS RECRYSTALLIZED BY A PSEUDOLINE ELECTRON-BEAM.JOURNAL OF APPLIED PHYSICS. VOL. 68. ISSUE 6. P. 2769 -2775 32 97% 2
2 MIAOULIS, IN , WONG, PY , YOON, SM , ROBINSON, RD , HESS, CK , (1992) THERMAL-ANALYSIS OF ZONE-MELTING RECRYSTALLIZATION OF SILICON-ON-INSULATOR STRUCTURES WITH AN INFRARED HEAT-SOURCE - AN OVERVIEW.JOURNAL OF THE ELECTROCHEMICAL SOCIETY. VOL. 139. ISSUE 9. P. 2687-2696 21 84% 10
3 GIVARGIZOV, EI , (1990) MECHANISMS OF ORIENTED CRYSTALLIZATION IN ARTIFICIAL EPITAXY (GRAPHOEPITAXY).THIN SOLID FILMS. VOL. 189. ISSUE 2. P. 389-396 19 95% 12
4 CULLIS, AG , (1985) TRANSIENT ANNEALING OF SEMICONDUCTORS BY LASER, ELECTRON-BEAM AND RADIANT HEATING TECHNIQUES.REPORTS ON PROGRESS IN PHYSICS. VOL. 48. ISSUE 8. P. 1155 -1233 84 27% 38
5 ROBINSON, RD , WONG, PY , MIAOULIS, IN , (1995) THERMAL EVALUATION OF ZONE-MELTING RECRYSTALLIZATION OF THIN-FILM STRUCTURES OVER A WIDE-RANGE OF MELTING-POINTS.JOURNAL OF MATERIALS RESEARCH. VOL. 10. ISSUE 4. P. 877-884 14 100% 0
6 GEIS, MW , SMITH, HI , CHEN, CK , (1986) CHARACTERIZATION AND ENTRAINMENT OF SUBBOUNDARIES AND DEFECT TRAILS IN ZONE-MELTING-RECRYSTALLIZED SI FILMS.JOURNAL OF APPLIED PHYSICS. VOL. 60. ISSUE 3. P. 1152 -1160 20 100% 35
7 HAZAMA, H , TAKAHASHI, M , KAMBAYASHI, S , KEMMOCHI, M , TSUCHIYA, K , IIDA, Y , YANO, K , INOUE, T , YOSHIMI, M , YOSHII, T , ET AL (1991) APPLICATION OF E-BEAM RECRYSTALLIZATION TO 3-LAYER IMAGE-PROCESSOR FABRICATION.IEEE TRANSACTIONS ON ELECTRON DEVICES. VOL. 38. ISSUE 1. P. 47-54 16 100% 4
8 HORITA, S , ISHIWARA, H , (1987) CHARACTERIZATION OF SILICON-ON-INSULATOR FILMS RECRYSTALLIZED BY AN OBLIQUELY SCANNED PSEUDOLINE ELECTRON-BEAM.JOURNAL OF APPLIED PHYSICS. VOL. 61. ISSUE 3. P. 1006-1014 22 88% 6
9 SMITH, HI , GEIS, MW , THOMPSON, CV , ATWATER, HA , (1983) SILICON-ON-INSULATOR BY GRAPHOEPITAXY AND ZONE-MELTING RECRYSTALLIZATION OF PATTERNED FILMS.JOURNAL OF CRYSTAL GROWTH. VOL. 63. ISSUE 3. P. 527-546 26 87% 55
10 ROBINSON, RD , MIAOULIS, IN , (1994) THERMAL PARAMETERS AFFECTING LOW-TEMPERATURE ZONE-MELTING RECRYSTALLIZATION OF FILMS.JOURNAL OF APPLIED PHYSICS. VOL. 75. ISSUE 3. P. 1771 -1782 15 83% 4

Classes with closest relation at Level 1


Rank Class id link
1 23350 EPITAXIAL AL2O3//AL2O3 ON SI//DENVER AEROSP TECH OPERAT
2 16870 LASER INDUCED SURFACE PROCESS//LAMP2009//WIDE BANDGAP OXIDES
3 6094 EXCIMER LASER CRYSTALLIZATION//LASER CRYSTALLIZATION//EXCIMER LASER ANNEALING
4 29679 MEMS POST PROCESSING//AE STZI SENSORTECHNOL ZENTRUM//ALUMINIUM INTERCONNECTS
5 10953 REBIC//HEAVILY DOPED POLYSILICON RESISTOR//MELTING SEGREGATION MODEL
6 32348 EFFECTIVE MEDIUM ANALYSIS EMA//ETCH RATE PROFILE//ETCH RATE PROFILING
7 18266 CERAM PHYS//RIN//PIEZOSPECTROSCOPY
8 8898 FREEFORM FABRICAT S//NEMISIS TEAM//LCVD
9 30345 HORIZONTAL CURRENT BIPOLAR TRANSISTOR HCBT//LATERAL BIPOLAR TRANSISTOR//ABT BAUELEMENTETECHNOL
10 12826 SIMOX//CONTACTLESS I V METHOD//BURIED OXIDE LAYER

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