Class information for:
Level 1: EFFECTIVE MEDIUM ANALYSIS EMA//ETCH RATE PROFILE//ETCH RATE PROFILING

Basic class information
Class id #P Avg. number of
references		 Database coverage
of references
32348 140 15.7 38%


Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
2 4 MATERIALS SCIENCE, MULTIDISCIPLINARY//PHYSICS, APPLIED//PHYSICS, CONDENSED MATTER 2836879
6 3       PHYSICS, APPLIED//IEEE TRANSACTIONS ON ELECTRON DEVICES//SILICON 155028
648 2             OXYGEN PRECIPITATION//OXYGEN PRECIPITATES//GETTERING 13601
32348 1                   EFFECTIVE MEDIUM ANALYSIS EMA//ETCH RATE PROFILE//ETCH RATE PROFILING 140

Terms with highest relevance score


rank Term termType Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 EFFECTIVE MEDIUM ANALYSIS EMA authKW 218111 1% 100% 1
2 ETCH RATE PROFILE authKW 218111 1% 100% 1
3 ETCH RATE PROFILING authKW 218111 1% 100% 1
4 HIGH TEMPERATURE INSTABILITIES authKW 218111 1% 100% 1
5 IMPLANTATION OF SILICON OXIDE authKW 218111 1% 100% 1
6 ION BEAM HYDROGENATION authKW 218111 1% 100% 1
7 ION IMPLANTTATION authKW 218111 1% 100% 1
8 SIO2 PRECIPITATION authKW 218111 1% 100% 1
9 TWO DIMENSIONAL CORRELATION ANALYSIS 2DCA authKW 218111 1% 100% 1
10 VAPOR PHASE HYDROFLUORIC ACID RELEASE authKW 218111 1% 100% 1

Web of Science journal categories


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 Physics, Applied 1283 61% 0% 85
2 Materials Science, Coatings & Films 704 16% 0% 23
3 Physics, Condensed Matter 599 35% 0% 49
4 Materials Science, Multidisciplinary 159 26% 0% 36
5 Electrochemistry 85 7% 0% 10
6 Engineering, Electrical & Electronic 83 16% 0% 23
7 Nanoscience & Nanotechnology 60 8% 0% 11
8 Fisheries 12 2% 0% 3
9 Food Science & Technology 10 4% 0% 6
10 Chemistry, Physical 9 9% 0% 12

Address terms


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 SILICON MICROELECT GRP 72702 1% 33% 1
2 YIELD ENHANCEMENT TEAM 72702 1% 33% 1
3 ELE MAT PROC 54526 1% 25% 1
4 PHI 21809 1% 10% 1
5 VARIAN SEMICOND EQUIPMENT 21809 1% 10% 1
6 SEMICOND ELE 13630 1% 6% 1
7 MICROSYST TECHNOL OFF 9912 1% 5% 1
8 MICRO NANOSCOP MAT ELECT DEVICES 4360 1% 2% 1
9 ANALYT RUMENTAT IL 2505 1% 1% 1
10 ATOM ENERGY AUTHOR 2036 1% 1% 1

Journals


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 ARCHIVIO VETERINARIO ITALIANO 7328 1% 2% 2
2 INDUSTRIAL RESEARCH & DEVELOPMENT 3253 1% 1% 1
3 DOPOVIDI AKADEMII NAUK UKRAINSKOI RSR SERIYA A-FIZIKO-MATEMATICHNI TA TECHNICHNI NAUKI 3203 3% 0% 4
4 PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE 3125 12% 0% 17
5 SOVIET MICROELECTRONICS 2914 1% 1% 2
6 MARINE FISHERIES REVIEW 2624 1% 1% 2
7 ZENTRALBLATT FUR BAKTERIOLOGIE MIKROBIOLOGIE UND HYGIENE I ABTEILUNG ORIGINALE C-ALLGEMEINE ANGEWANDTE UND OKOLOGISCHE MIKROBIOLOGIE 1676 1% 1% 1
8 SOLID STATE PHENOMENA 887 2% 0% 3
9 JOURNAL OF THE ELECTROCHEMICAL SOCIETY 716 7% 0% 10
10 REVUE DE PHYSIQUE APPLIQUEE 659 1% 0% 2

Author Key Words


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class		 LCSH search Wikipedia search
1 EFFECTIVE MEDIUM ANALYSIS EMA 218111 1% 100% 1 Search EFFECTIVE+MEDIUM+ANALYSIS+EMA Search EFFECTIVE+MEDIUM+ANALYSIS+EMA
2 ETCH RATE PROFILE 218111 1% 100% 1 Search ETCH+RATE+PROFILE Search ETCH+RATE+PROFILE
3 ETCH RATE PROFILING 218111 1% 100% 1 Search ETCH+RATE+PROFILING Search ETCH+RATE+PROFILING
4 HIGH TEMPERATURE INSTABILITIES 218111 1% 100% 1 Search HIGH+TEMPERATURE+INSTABILITIES Search HIGH+TEMPERATURE+INSTABILITIES
5 IMPLANTATION OF SILICON OXIDE 218111 1% 100% 1 Search IMPLANTATION+OF+SILICON+OXIDE Search IMPLANTATION+OF+SILICON+OXIDE
6 ION BEAM HYDROGENATION 218111 1% 100% 1 Search ION+BEAM+HYDROGENATION Search ION+BEAM+HYDROGENATION
7 ION IMPLANTTATION 218111 1% 100% 1 Search ION+IMPLANTTATION Search ION+IMPLANTTATION
8 SIO2 PRECIPITATION 218111 1% 100% 1 Search SIO2+PRECIPITATION Search SIO2+PRECIPITATION
9 TWO DIMENSIONAL CORRELATION ANALYSIS 2DCA 218111 1% 100% 1 Search TWO+DIMENSIONAL+CORRELATION+ANALYSIS+2DCA Search TWO+DIMENSIONAL+CORRELATION+ANALYSIS+2DCA
10 VAPOR PHASE HYDROFLUORIC ACID RELEASE 218111 1% 100% 1 Search VAPOR+PHASE+HYDROFLUORIC+ACID+RELEASE Search VAPOR+PHASE+HYDROFLUORIC+ACID+RELEASE

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.


Rank Reference # ref.
in cl.		 Shr. of ref. in
cl.		 Citations
1 BELLANDI, E , SONCINI, V , (2012) SIO2 ETCH RATE MODIFICATION BY ION IMPLANTATION.THIN SOLID FILMS. VOL. 524. ISSUE . P. 75-80 4 80% 0
2 ALEXANDROVA, S , (1995) ARSENIC-RELATED DEFECTS IN SIO2.JOURNAL OF APPLIED PHYSICS. VOL. 78. ISSUE 3. P. 1514-1518 7 70% 1
3 CHARAVEL, R , RASKIN, JP , (2006) ETCH RATE MODIFICATION OF SIO2 BY ION DAMAGE.ELECTROCHEMICAL AND SOLID STATE LETTERS. VOL. 9. ISSUE 7. P. G245-G247 3 100% 9
4 VANOMMEN, AH , (1987) DIFFUSION OF GROUP-III AND GROUP-V ELEMENTS IN SIO2.APPLIED SURFACE SCIENCE. VOL. 30. ISSUE 1-4. P. 244-264 10 59% 22
5 AOYAMA, T , TASHIRO, H , SUZUKI, K , (1999) DIFFUSION OF BORON, PHOSPHORUS, ARSENIC, AND ANTIMONY IN THERMALLY GROWN SILICON DIOXIDE.JOURNAL OF THE ELECTROCHEMICAL SOCIETY. VOL. 146. ISSUE 5. P. 1879 -1883 7 47% 22
6 GOMENIUK, YV , LITOVSKI, RN , LYSENKO, VS , OSIYUK, IN , TYAGULSKI, IP , (1992) CURRENT STOCHASTICITY OF FIELD-EMISSION OF CHARGE FROM TRAPS IN THE TRANSITION LAYER OF IMPLANTED MIS STRUCTURES.APPLIED SURFACE SCIENCE. VOL. 59. ISSUE 2. P. 91-94 4 100% 0
7 ZHENG, P , KIM, SW , CONNELLY, D , KATO, K , DING, F , RUBIN, L , LIU, TJK , (2017) SUB-LITHOGRAPHIC PATTERNING VIA TILTED ION IMPLANTATION FOR SCALING BEYOND THE 7-NM TECHNOLOGY NODE.IEEE TRANSACTIONS ON ELECTRON DEVICES. VOL. 64. ISSUE 1. P. 231 -236 3 60% 0
8 KARAKOLTSIDIS, PA , CONSTANTINIDES, SM , (1995) THE EELS, ANGUILLA SPP, THEIR CHARACTERISTICS AND USES.FOOD REVIEWS INTERNATIONAL. VOL. 11. ISSUE 2. P. 347-361 7 47% 3
9 BARABAN, AP , MALYAVKA, LV , (1997) LONG-RANGE EFFECTS IN ION-IMPLANTED SILICON-SILICON-DIOXIDE STRUCTURES.TECHNICAL PHYSICS LETTERS. VOL. 23. ISSUE 10. P. 786 -787 3 100% 2
10 FRANCOIS-SAINT-CYR, HG , STEVIE, FA , MCKINLEY, JM , ELSHOT, K , CHOW, L , RICHARDSON, KA , (2003) DIFFUSION OF 18 ELEMENTS IMPLANTED INTO THERMALLY GROWN SIO2.JOURNAL OF APPLIED PHYSICS. VOL. 94. ISSUE 12. P. 7433-7439 7 32% 16

Classes with closest relation at Level 1


Rank Class id link
1 37655 PRIACANTHUS MACRACANTHUS//NORTH EASTERN TAIWAN//BIG EYE
2 37354 SI TASI2//SI TASI2 EUTECTIC IN SITU COMPOSITE//ELECTRON BEAM FLOATING ZONE MELTING
3 34788 CERIUM MAGNETOPLUMBITE//EDS SPECTRA//ENAMEL INSERT RESTORATION
4 36089 CHARACTERISTIC TESTING METHOD//DIFFUS TEAM//GATE TURN OFF GTO THYRISTORS
5 12826 SIMOX//CONTACTLESS I V METHOD//BURIED OXIDE LAYER
6 13380 ARCHITECTURE TECH//3 DIMENSIONAL INTEGRATION//ELECTRON DEVICE LETTERS
7 31721 GLASS BEAD DESTRUCTION//SOVIET PHYSICS SEMICONDUCTORS-USSR//STATE TORAT
8 6002 BORON PENETRATION//NITRIDED OXIDE//OXYNITRIDATION
9 21308 BEAM CHANNEL TRANSISTOR//MEMORY DEVICE BUSINESS//IMPURITY ENHANCED OXIDATION
10 29857 AMORPHOUS ALLOY LAYER//DATA SYST POUGHKEEPSIE//ELECTRON BEAM SOLIDIFICATION TREATMENT

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