Class information for:
Level 2: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS//MEMS//JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Basic class information
Class id #P Avg. number of
references		 Database coverage
of references
308 18480 23.1 61%


Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
2 4 MATERIALS SCIENCE, MULTIDISCIPLINARY//PHYSICS, APPLIED//PHYSICS, CONDENSED MATTER 2836879
376 3       SENSORS AND ACTUATORS A-PHYSICAL//JOURNAL OF MICROELECTROMECHANICAL SYSTEMS//MEMS 32422
308 2             JOURNAL OF MICROELECTROMECHANICAL SYSTEMS//MEMS//JOURNAL OF MICROMECHANICS AND MICROENGINEERING 18480
2505 1                   MICROCANTILEVER//CANTILEVER//CANTILEVER SENSOR 2224
5474 1                   MEMS GYROSCOPE//GYROSCOPE//ANGULAR RATE SENSOR 1619
6527 1                   MICROMIRROR//VARIABLE OPTICAL ATTENUATOR VOA//VARIABLE OPTICAL ATTENUATOR 1473
6599 1                   MODIFIED COUPLE STRESS THEORY//PULL IN INSTABILITY//PULL IN 1465
6757 1                   STRIP BENDING TEST//BULGE TEST//MEMS PROD 1447
8033 1                   RF MEMS//RF MEMS SWITCH//DIELECTRIC CHARGING 1301
8369 1                   THERMOELASTIC DAMPING//MEMS RESONATOR//MICROMECHANICAL RESONATORS 1261
9281 1                   STICTION//TRACT POWER//MOLECULAR DEPOSITION FILM 1170
9810 1                   PRESSURE SENSOR//PIEZORESISTANCE//CAPACITIVE PRESSURE SENSOR 1118
11950 1                   ANISOTROPIC ETCHING//MICRONANOSYST ENGN//MEMS MICRO NANO SYST 943
13086 1                   MICROBOLOMETER//OPTICAL READOUT//THERMOPILE 861
13289 1                   MICROGRIPPER//MICROASSEMBLY//THERMAL ACTUATOR 848
17051 1                   FLUIDIC SELF ASSEMBLY//SELF ALIGNMENT//FLUIDIC SELF ASSEMBLY FSA 620
20023 1                   ELECTROSTATIC SUSPENSION//MICROMOTOR//ELECTROSTATIC MOTOR 480
20878 1                   TUNABLE OPTICAL FILTER//MICROMACHINED FILTER//SEMICONDUCTOR DBR 442
23036 1                   INERTIAL SWITCH//ACCELERATION SWITCH//INERTIAL MICROSWITCH 360
24115 1                   PHOTOTHERMAL VIBRATION//FLEXURALLY VIBRATING BAR//FLEXURAL VIBRATOR 323
25979 1                   NANOELECTROMECHANICAL SYSTEMS NEMS//NANOELECTROMECHANICAL NEM MEMORY//NANOELECTROMECHANICAL SWITCH 266
26276 1                   GAAS MMIC//POWER SENSOR//MICROWAVE POWER SENSOR 259

Terms with highest relevance score


rank Term termType Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with term
in class
1 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS journal 838241 6% 44% 1165
2 MEMS authKW 697092 7% 32% 1326
3 JOURNAL OF MICROMECHANICS AND MICROENGINEERING journal 612615 8% 26% 1433
4 SENSORS AND ACTUATORS A-PHYSICAL journal 597487 10% 19% 1896
5 MICROCANTILEVER authKW 304960 2% 59% 311
6 MICROELECTROMECHANICAL SYSTEMS MEMS authKW 295106 2% 47% 378
7 MODIFIED COUPLE STRESS THEORY authKW 259465 1% 89% 176
8 INSTRUMENTS & INSTRUMENTATION WoSSC 231901 35% 2% 6505
9 MICROMIRROR authKW 230191 1% 67% 208
10 MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS journal 174701 3% 18% 596

Web of Science journal categories


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with term
in class
1 Instruments & Instrumentation 231901 35% 2% 6505
2 Engineering, Electrical & Electronic 130673 49% 1% 9098
3 Nanoscience & Nanotechnology 109169 26% 1% 4863
4 Physics, Applied 70398 40% 1% 7467
5 Mechanics 27399 14% 1% 2608
6 Engineering, Mechanical 26531 13% 1% 2385
7 Materials Science, Multidisciplinary 18908 25% 0% 4554
8 Optics 4905 8% 0% 1505
9 Electrochemistry 2724 4% 0% 716
10 Engineering, General 2000 3% 0% 559

Address terms


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with term
in class
1 MEMS 70745 1% 21% 207
2 MECH ENGN 37235 14% 1% 2659
3 STATE TRANSDUCER TECHNOL 34093 1% 13% 159
4 SCI TECHNOL MICRO NANO FABRICAT 26105 0% 25% 64
5 SCI TECHNOL MICROSYST 23525 0% 36% 40
6 MICROELECT MICROSENSORS 20694 0% 37% 34
7 BERKELEY SENSOR ACTUATOR 19018 0% 15% 77
8 MICROELECT 18935 2% 3% 452
9 EXCELLENCE DESIGN ROBOT AUTOMAT 17936 0% 22% 49
10 MICROSYST 17187 1% 10% 109

Journals


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with term
in class
1 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 838241 6% 44% 1165
2 JOURNAL OF MICROMECHANICS AND MICROENGINEERING 612615 8% 26% 1433
3 SENSORS AND ACTUATORS A-PHYSICAL 597487 10% 19% 1896
4 MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 174701 3% 18% 596
5 SENSORS AND MATERIALS 27361 1% 13% 133
6 IEEE SENSORS JOURNAL 24964 2% 5% 300
7 JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS 24896 1% 13% 119
8 SENSORS AND ACTUATORS 23327 1% 15% 97
9 MICROELECTRONIC ENGINEERING 11842 1% 3% 275
10 SENSORS 10896 1% 3% 260

Author Key Words


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with term
in class		 LCSH search Wikipedia search
1 MEMS 697092 7% 32% 1326 Search MEMS Search MEMS
2 MICROCANTILEVER 304960 2% 59% 311 Search MICROCANTILEVER Search MICROCANTILEVER
3 MICROELECTROMECHANICAL SYSTEMS MEMS 295106 2% 47% 378 Search MICROELECTROMECHANICAL+SYSTEMS+MEMS Search MICROELECTROMECHANICAL+SYSTEMS+MEMS
4 MODIFIED COUPLE STRESS THEORY 259465 1% 89% 176 Search MODIFIED+COUPLE+STRESS+THEORY Search MODIFIED+COUPLE+STRESS+THEORY
5 MICROMIRROR 230191 1% 67% 208 Search MICROMIRROR Search MICROMIRROR
6 RF MEMS 163937 1% 61% 162 Search RF+MEMS Search RF+MEMS
7 ELECTROSTATIC ACTUATION 161780 1% 71% 139 Search ELECTROSTATIC+ACTUATION Search ELECTROSTATIC+ACTUATION
8 MICROELECTROMECHANICAL DEVICES 141648 1% 48% 180 Search MICROELECTROMECHANICAL+DEVICES Search MICROELECTROMECHANICAL+DEVICES
9 ELECTROSTATIC ACTUATOR 131274 1% 65% 122 Search ELECTROSTATIC+ACTUATOR Search ELECTROSTATIC+ACTUATOR
10 PULL IN 116873 0% 83% 85 Search PULL+IN Search PULL+IN

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.


Rank Reference # ref. in
cl.		 Shr. of ref. in
cl.		 Citations
1 ZHANG, WM , YAN, H , PENG, ZK , MENG, G , (2014) ELECTROSTATIC PULL-IN INSTABILITY IN MEMS/NEMS: A REVIEW.SENSORS AND ACTUATORS A-PHYSICAL. VOL. 214. ISSUE . P. 187 -218 271 88% 57
2 GOEDERS, KM , COLTON, JS , BOTTOMLEY, LA , (2008) MICROCANTILEVERS: SENSING CHEMICAL INTERACTIONS VIA MECHANICAL MOTION.CHEMICAL REVIEWS. VOL. 108. ISSUE 2. P. 522-542 149 86% 162
3 ABDOLVAND, R , BAHREYNI, B , LEE, JEY , NABKI, F , (2016) MICROMACHINED RESONATORS: A REVIEW.MICROMACHINES. VOL. 7. ISSUE 9. P. - 179 72% 0
4 BOISEN, A , DOHN, S , KELLER, SS , SCHMID, S , TENJE, M , (2011) CANTILEVER-LIKE MICROMECHANICAL SENSORS.REPORTS ON PROGRESS IN PHYSICS. VOL. 74. ISSUE 3. P. - 140 65% 170
5 JOHNSON, BN , MUTHARASAN, R , (2012) BIOSENSING USING DYNAMIC-MODE CANTILEVER SENSORS: A REVIEW.BIOSENSORS & BIOELECTRONICS. VOL. 32. ISSUE 1. P. 1 -18 122 82% 60
6 DELRIO, FW , COOK, RF , BOYCE, BL , (2015) FRACTURE STRENGTH OF MICRO- AND NANO-SCALE SILICON COMPONENTS.APPLIED PHYSICS REVIEWS. VOL. 2. ISSUE 2. P. - 144 68% 4
7 XIA, DZ , YU, C , KONG, L , (2014) THE DEVELOPMENT OF MICROMACHINED GYROSCOPE STRUCTURE AND CIRCUITRY TECHNOLOGY.SENSORS. VOL. 14. ISSUE 1. P. 1394 -1473 102 82% 21
8 ZOUGAGH, M , RIOS, A , (2009) MICRO-ELECTROMECHANICAL SENSORS IN THE ANALYTICAL FIELD.ANALYST. VOL. 134. ISSUE 7. P. 1274 -1290 120 82% 25
9 DEHROUYEH-SEMNANI, AM , MOSTAFAEI, H , NIKKHAH-BAHRAMI, M , (2016) FREE FLEXURAL VIBRATION OF GEOMETRICALLY IMPERFECT FUNCTIONALLY GRADED MICROBEAMS.INTERNATIONAL JOURNAL OF ENGINEERING SCIENCE. VOL. 105. ISSUE . P. 56 -79 74 91% 4
10 PENGWANG, E , RABENOROSOA, K , RAKOTONDRABE, M , ANDREFF, N , (2016) SCANNING MICROMIRROR PLATFORM BASED ON MEMS TECHNOLOGY FOR MEDICAL APPLICATION.MICROMACHINES. VOL. 7. ISSUE 2. P. - 91 77% 3

Classes with closest relation at Level 2


Rank Class id link
1 3568 JOURNAL OF THE AUDIO ENGINEERING SOCIETY//MICROSPEAKER//MICROPHONE
2 2642 THROUGH SILICON VIA TSV//WAFER BONDING//THROUGH SILICON VIA
3 2819 TACTILE SENSOR//TACTILE SENSING//CAPACITIVE SENSOR
4 3017 DIAZONIUM SALTS//SU 8//ELECTROGRAFTING
5 3274 FLUXGATE//FLUXGATE SENSOR//MAGNETIC SENSORS
6 482 ATOMIC FORCE MICROSCOPY//ATOMIC FORCE MICROSCOPE//AFM
7 2823 FLOW MEASUREMENT AND INSTRUMENTATION//THERMAL FLOW SENSOR//VORTEX FLOWMETER
8 1855 STRAIN GRADIENT PLASTICITY//GRADIENT ELASTICITY//DISLOCATION DYNAMICS
9 1256 SURFACE ACOUSTIC WAVE//IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL//QUARTZ CRYSTAL MICROBALANCE
10 3149 CLEANROOM//PHOTORESIST REMOVAL//MINIENVIRONMENT

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