Class information for:
Level 1: STRIP BENDING TEST//BULGE TEST//MEMS PROD

Basic class information
Class id #P Avg. number of
references		 Database coverage
of references
6757 1447 25.5 62%


Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
2 4 MATERIALS SCIENCE, MULTIDISCIPLINARY//PHYSICS, APPLIED//PHYSICS, CONDENSED MATTER 2836879
376 3       SENSORS AND ACTUATORS A-PHYSICAL//JOURNAL OF MICROELECTROMECHANICAL SYSTEMS//MEMS 32422
308 2             JOURNAL OF MICROELECTROMECHANICAL SYSTEMS//MEMS//JOURNAL OF MICROMECHANICS AND MICROENGINEERING 18480
6757 1                   STRIP BENDING TEST//BULGE TEST//MEMS PROD 1447

Terms with highest relevance score


rank Term termType Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 STRIP BENDING TEST authKW 147706 0% 100% 7
2 BULGE TEST authKW 146401 2% 29% 24
3 MEMS PROD address 126605 0% 100% 6
4 SINGLE CRYSTAL SILICON authKW 120146 2% 19% 30
5 REACTION LAYER FATIGUE authKW 105504 0% 100% 5
6 POLYSILICON authKW 100156 3% 10% 47
7 MEMS authKW 93736 9% 3% 136
8 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS journal 86994 7% 4% 105
9 POLYSILICON MEMS authKW 84403 0% 100% 4
10 HIGH CYCLE FATIGUE TEST authKW 67521 0% 80% 4

Web of Science journal categories


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 Instruments & Instrumentation 13308 30% 0% 438
2 Nanoscience & Nanotechnology 9720 28% 0% 405
3 Materials Science, Multidisciplinary 6649 48% 0% 689
4 Physics, Applied 6647 44% 0% 637
5 Engineering, Electrical & Electronic 4396 33% 0% 482
6 Materials Science, Characterization, Testing 3670 6% 0% 93
7 Mechanics 3207 17% 0% 246
8 Engineering, Mechanical 1988 13% 0% 183
9 Metallurgy & Metallurgical Engineering 1560 12% 0% 170
10 Materials Science, Coatings & Films 1006 6% 0% 93

Address terms


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 MEMS PROD 126605 0% 100% 6
2 MICROSYST MAT GRP 63303 0% 100% 3
3 MEMS BUSINESS UNIT 54252 0% 43% 6
4 MAT SCI INTERCONNECT PACKAGING 47475 0% 75% 3
5 E ARZT 42202 0% 100% 2
6 MAHRS UNIT 42202 0% 100% 2
7 VISIONARY BUSINESS 42202 0% 100% 2
8 ESTERLINE SENSORS GRP 37979 0% 60% 3
9 MANOR ADT 28133 0% 67% 2
10 MECH RELIABIL MODELING 27126 0% 43% 3

Journals


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 86994 7% 4% 105
2 JOURNAL OF MICROMECHANICS AND MICROENGINEERING 40404 7% 2% 103
3 SENSORS AND ACTUATORS A-PHYSICAL 29008 8% 1% 117
4 EXPERIMENTAL MECHANICS 21898 4% 2% 53
5 MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 9056 3% 1% 38
6 SENSORS AND MATERIALS 7938 1% 2% 20
7 JOURNAL OF MATERIALS RESEARCH 3095 3% 0% 42
8 MICROELECTRONICS RELIABILITY 2515 2% 0% 29
9 FATIGUE & FRACTURE OF ENGINEERING MATERIALS & STRUCTURES 2312 1% 1% 18
10 ACTA MATERIALIA 2276 3% 0% 37

Author Key Words


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class		 LCSH search Wikipedia search
1 STRIP BENDING TEST 147706 0% 100% 7 Search STRIP+BENDING+TEST Search STRIP+BENDING+TEST
2 BULGE TEST 146401 2% 29% 24 Search BULGE+TEST Search BULGE+TEST
3 SINGLE CRYSTAL SILICON 120146 2% 19% 30 Search SINGLE+CRYSTAL+SILICON Search SINGLE+CRYSTAL+SILICON
4 REACTION LAYER FATIGUE 105504 0% 100% 5 Search REACTION+LAYER+FATIGUE Search REACTION+LAYER+FATIGUE
5 POLYSILICON 100156 3% 10% 47 Search POLYSILICON Search POLYSILICON
6 MEMS 93736 9% 3% 136 Search MEMS Search MEMS
7 POLYSILICON MEMS 84403 0% 100% 4 Search POLYSILICON+MEMS Search POLYSILICON+MEMS
8 HIGH CYCLE FATIGUE TEST 67521 0% 80% 4 Search HIGH+CYCLE+FATIGUE+TEST Search HIGH+CYCLE+FATIGUE+TEST
9 MEMS MATERIAL 67521 0% 80% 4 Search MEMS+MATERIAL Search MEMS+MATERIAL
10 SHOCK PROTECTION 67521 0% 80% 4 Search SHOCK+PROTECTION Search SHOCK+PROTECTION

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.


Rank Reference # ref. in
cl.		 Shr. of ref. in
cl.		 Citations
1 DELRIO, FW , COOK, RF , BOYCE, BL , (2015) FRACTURE STRENGTH OF MICRO- AND NANO-SCALE SILICON COMPONENTS.APPLIED PHYSICS REVIEWS. VOL. 2. ISSUE 2. P. - 129 61% 4
2 PANTANO, MF , ESPINOSA, HD , PAGNOTTA, L , (2012) MECHANICAL CHARACTERIZATION OF MATERIALS AT SMALL LENGTH SCALES.JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY. VOL. 26. ISSUE 2. P. 545 -561 86 54% 19
3 BAUMERT, EK , THEILLET, PO , PIERRON, ON , (2010) INVESTIGATION OF THE LOW-CYCLE FATIGUE MECHANISM FOR MICRON-SCALE MONOCRYSTALLINE SILICON FILMS.ACTA MATERIALIA. VOL. 58. ISSUE 8. P. 2854-2863 35 97% 19
4 ALSEM, DH , PIERRON, ON , STACH, EA , MUHLSTEIN, CL , RITCHIE, RO , (2007) MECHANISMS FOR FATIGUE OF MICRON-SCALE SILICON STRUCTURAL FILMS.ADVANCED ENGINEERING MATERIALS. VOL. 9. ISSUE 1-2. P. 15 -30 43 78% 54
5 BUDNITZKI, M , PIERRON, ON , (2009) HIGHLY LOCALIZED SURFACE OXIDE THICKENING ON POLYCRYSTALLINE SILICON THIN FILMS DURING CYCLIC LOADING IN HUMID ENVIRONMENTS.ACTA MATERIALIA. VOL. 57. ISSUE 10. P. 2944 -2955 39 87% 16
6 SRIKAR, VT , SPEARING, SM , (2003) A CRITICAL REVIEW OF MICROSCALE MECHANICAL TESTING METHODS USED IN THE DESIGN OF MICROELECTROMECHANICAL SYSTEMS.EXPERIMENTAL MECHANICS. VOL. 43. ISSUE 3. P. 238-247 49 70% 81
7 THEILLET, PO , STRAUB, T , EBERL, C , PIERRON, ON , (2013) COMPARISON OF THE STRESS DISTRIBUTION AND FATIGUE BEHAVIOR OF 10- AND 25-MU M-THICK DEEP-REACTIVE-ION-ETCHED SI KILOHERTZ RESONATORS.JOURNAL OF MICROELECTROMECHANICAL SYSTEMS. VOL. 22. ISSUE 2. P. 418 -429 30 91% 3
8 VAN SPENGEN, WM , (2012) STATIC CRACK GROWTH AND FATIGUE MODELING FOR SILICON MEMS.SENSORS AND ACTUATORS A-PHYSICAL. VOL. 183. ISSUE . P. 57-68 34 81% 4
9 BERGERS, LIJC , HOEFNAGELS, JPM , GEERS, MGD , (2014) ON-WAFER TIME-DEPENDENT HIGH REPRODUCIBILITY NANO-FORCE TENSILE TESTING.JOURNAL OF PHYSICS D-APPLIED PHYSICS. VOL. 47. ISSUE 49. P. - 44 58% 1
10 LE HUY, V , GASPAR, J , PAUL, O , KAMIYA, S , (2012) STATISTICAL CHARACTERIZATION OF FATIGUE LIFETIME OF POLYSILICON THIN FILMS.SENSORS AND ACTUATORS A-PHYSICAL. VOL. 179. ISSUE . P. 251 -262 30 83% 1

Classes with closest relation at Level 1


Rank Class id link
1 13289 MICROGRIPPER//MICROASSEMBLY//THERMAL ACTUATOR
2 8033 RF MEMS//RF MEMS SWITCH//DIELECTRIC CHARGING
3 1994 STRAIN GRADIENT PLASTICITY//DISLOCATION DYNAMICS//GRADIENT PLASTICITY
4 23036 INERTIAL SWITCH//ACCELERATION SWITCH//INERTIAL MICROSWITCH
5 15571 INTERFACIAL SHEARS//NON LOCAL STRESS CURVATURE RELATIONS//NON UNIFORM MISFIT STRAIN
6 6599 MODIFIED COUPLE STRESS THEORY//PULL IN INSTABILITY//PULL IN
7 16756 CHANNEL CRACKING//CHANNELING CRACK//FRAGMENTATION TESTING
8 9810 PRESSURE SENSOR//PIEZORESISTANCE//CAPACITIVE PRESSURE SENSOR
9 9281 STICTION//TRACT POWER//MOLECULAR DEPOSITION FILM
10 8729 SURFACE ELASTICITY//SVL//SURFACE EFFECTS

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