Class information for:
Level 1: RF MEMS//RF MEMS SWITCH//DIELECTRIC CHARGING

Basic class information
Class id #P Avg. number of
references		 Database coverage
of references
8033 1301 20.9 56%


Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
2 4 MATERIALS SCIENCE, MULTIDISCIPLINARY//PHYSICS, APPLIED//PHYSICS, CONDENSED MATTER 2836879
376 3       SENSORS AND ACTUATORS A-PHYSICAL//JOURNAL OF MICROELECTROMECHANICAL SYSTEMS//MEMS 32422
308 2             JOURNAL OF MICROELECTROMECHANICAL SYSTEMS//MEMS//JOURNAL OF MICROMECHANICS AND MICROENGINEERING 18480
8033 1                   RF MEMS//RF MEMS SWITCH//DIELECTRIC CHARGING 1301

Terms with highest relevance score


rank Term termType Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 RF MEMS authKW 1433702 10% 48% 127
2 RF MEMS SWITCH authKW 723213 3% 72% 43
3 DIELECTRIC CHARGING authKW 691257 3% 82% 36
4 CAPACITIVE SWITCH authKW 528829 2% 87% 26
5 MEMS SWITCH authKW 335444 2% 53% 27
6 VARIABLE CAPACITOR authKW 302788 2% 56% 23
7 RF MICROELECTROMECHANICAL SYSTEMS MEMS authKW 228946 2% 49% 20
8 MICROSWITCHES authKW 192722 2% 26% 31
9 MICRORELAY authKW 170324 1% 48% 15
10 DC CONTACT authKW 164283 1% 100% 7

Web of Science journal categories


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with term
in class
1 Engineering, Electrical & Electronic 24930 79% 0% 1029
2 Nanoscience & Nanotechnology 16016 38% 0% 488
3 Instruments & Instrumentation 12678 31% 0% 405
4 Physics, Applied 6829 47% 0% 609
5 Materials Science, Multidisciplinary 1489 26% 0% 336
6 Mechanics 1467 12% 0% 162
7 Engineering, Mechanical 1217 11% 0% 138
8 Telecommunications 624 6% 0% 83
9 Optics 145 6% 0% 76
10 Computer Science, Hardware & Architecture 119 2% 0% 26

Address terms


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 DISCIPLINE ELECT ELECT ENGN 93876 0% 100% 4
2 MEMS UNIT 93872 0% 67% 6
3 NLBB 83815 0% 71% 5
4 GRP MICRO NANOSYST 70407 0% 100% 3
5 MICROSCALE ANAL SYST 70407 0% 100% 3
6 MICRO NANO TECHNOL GRP 60070 1% 32% 8
7 ELECT ENGN PHYS SCI ENGN 53640 0% 57% 4
8 IMM ROMA 52804 0% 75% 3
9 MEMS RD 46938 0% 100% 2
10 NANOELECT DEVICE 46938 0% 100% 2

Journals


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 120192 9% 4% 117
2 JOURNAL OF MICROMECHANICS AND MICROENGINEERING 91704 11% 3% 147
3 MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 34325 5% 2% 70
4 IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES 15603 7% 1% 92
5 SENSORS AND ACTUATORS A-PHYSICAL 13571 6% 1% 76
6 MICROELECTRONICS RELIABILITY 12956 5% 1% 62
7 INTERNATIONAL JOURNAL OF MICROWAVE AND WIRELESS TECHNOLOGIES 10802 1% 3% 17
8 IEEE MICROWAVE MAGAZINE 7404 1% 2% 14
9 JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS 7252 1% 2% 17
10 IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS 7099 3% 1% 34

Author Key Words


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class		 LCSH search Wikipedia search
1 RF MEMS 1433702 10% 48% 127 Search RF+MEMS Search RF+MEMS
2 RF MEMS SWITCH 723213 3% 72% 43 Search RF+MEMS+SWITCH Search RF+MEMS+SWITCH
3 DIELECTRIC CHARGING 691257 3% 82% 36 Search DIELECTRIC+CHARGING Search DIELECTRIC+CHARGING
4 CAPACITIVE SWITCH 528829 2% 87% 26 Search CAPACITIVE+SWITCH Search CAPACITIVE+SWITCH
5 MEMS SWITCH 335444 2% 53% 27 Search MEMS+SWITCH Search MEMS+SWITCH
6 VARIABLE CAPACITOR 302788 2% 56% 23 Search VARIABLE+CAPACITOR Search VARIABLE+CAPACITOR
7 RF MICROELECTROMECHANICAL SYSTEMS MEMS 228946 2% 49% 20 Search RF+MICROELECTROMECHANICAL+SYSTEMS+MEMS Search RF+MICROELECTROMECHANICAL+SYSTEMS+MEMS
8 MICROSWITCHES 192722 2% 26% 31 Search MICROSWITCHES Search MICROSWITCHES
9 MICRORELAY 170324 1% 48% 15 Search MICRORELAY Search MICRORELAY
10 DC CONTACT 164283 1% 100% 7 Search DC+CONTACT Search DC+CONTACT

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.


Rank Reference # ref.
in cl.		 Shr. of ref. in
cl.		 Citations
1 ZHOU, W , HE, JB , HE, XP , YU, HJ , PENG, B , (2016) DIELECTRIC CHARGING INDUCED DRIFT IN MICRO DEVICE RELIABILITY-A REVIEW.MICROELECTRONICS RELIABILITY. VOL. 66. ISSUE . P. 1 -9 62 71% 0
2 VAN SPENGEN, WM , (2012) CAPACITIVE RF MEMS SWITCH DIELECTRIC CHARGING AND RELIABILITY: A CRITICAL REVIEW WITH RECOMMENDATIONS.JOURNAL OF MICROMECHANICS AND MICROENGINEERING. VOL. 22. ISSUE 7. P. - 52 76% 26
3 CHAKRABORTY, A , GUPTA, B , (2017) PARADIGM PHASE SHIFT.IEEE MICROWAVE MAGAZINE. VOL. 18. ISSUE 1. P. 22 -41 44 79% 0
4 BASU, A , ADAMS, GG , MCGRUER, NE , (2016) A REVIEW OF MICRO-CONTACT PHYSICS, MATERIALS, AND FAILURE MECHANISMS IN DIRECT-CONTACT RF MEMS SWITCHES.JOURNAL OF MICROMECHANICS AND MICROENGINEERING. VOL. 26. ISSUE 10. P. - 43 57% 0
5 REBEIZ, GM , PATEL, CD , HAN, SK , KO, CH , HO, KMJ , (2013) THE SEARCH FOR A RELIABLE MEMS SWITCH?.IEEE MICROWAVE MAGAZINE. VOL. 14. ISSUE 1. P. 57 -67 23 88% 25
6 TOLER, BF , COUTU, RA , MCBRIDE, JW , (2013) A REVIEW OF MICRO-CONTACT PHYSICS FOR MICROELECTROMECHANICAL SYSTEMS (MEMS) METAL CONTACT SWITCHES.JOURNAL OF MICROMECHANICS AND MICROENGINEERING. VOL. 23. ISSUE 10. P. - 41 48% 16
7 MULLONI, V , LORENZELLI, L , MARGESIN, B , BARBATO, M , MENEGHESSO, G , (2016) TEMPERATURE AS AN ACCELERATING FACTOR FOR LIFETIME ESTIMATION OF RF-MEMS SWITCHES.MICROELECTRONIC ENGINEERING. VOL. 160. ISSUE . P. 63 -67 18 100% 1
8 KOUTSOURELI, M , REIG, B , PAPANDREOU, E , POULAIN, C , SOUCHON, F , DEBORGIES, F , PAPAIOANNOU, G , (2016) FIELD EMISSION IN ACTUATION PADS OF RADIO FREQUENCY MICROELECTROMECHANICAL SYSTEMS OHMIC SWITCHES: A POTENTIAL CONTAMINATION MECHANISM.APPLIED PHYSICS LETTERS. VOL. 108. ISSUE 4. P. - 24 80% 0
9 BIRMPILIOTIS, D , CZARNECKI, P , KOUTSOURELI, M , PAPAIOANNOU, G , DE WOLF, I , (2016) ASSESSMENT OF DIELECTRIC CHARGING IN CAPACITIVE MEMS SWITCHES FABRICATED ON SI SUBSTRATE WITH THIN OXIDE FILM.MICROELECTRONIC ENGINEERING. VOL. 159. ISSUE . P. 209 -214 20 95% 0
10 SONG, YH , KIM, MW , LEE, JO , KO, SD , YOON, JB , (2013) COMPLEMENTARY DUAL-CONTACT SWITCH USING SOFT AND HARD CONTACT MATERIALS FOR ACHIEVING LOW CONTACT RESISTANCE AND HIGH RELIABILITY SIMULTANEOUSLY.JOURNAL OF MICROELECTROMECHANICAL SYSTEMS. VOL. 22. ISSUE 4. P. 846-854 22 88% 5

Classes with closest relation at Level 1


Rank Class id link
1 25979 NANOELECTROMECHANICAL SYSTEMS NEMS//NANOELECTROMECHANICAL NEM MEMORY//NANOELECTROMECHANICAL SWITCH
2 23036 INERTIAL SWITCH//ACCELERATION SWITCH//INERTIAL MICROSWITCH
3 14708 TUNABLE FILTERS//RECONFIGURABLE FILTER//CONSTANT ABSOLUTE BANDWIDTH
4 6599 MODIFIED COUPLE STRESS THEORY//PULL IN INSTABILITY//PULL IN
5 26276 GAAS MMIC//POWER SENSOR//MICROWAVE POWER SENSOR
6 6757 STRIP BENDING TEST//BULGE TEST//MEMS PROD
7 10699 PHASE SHIFTER//T R SWITCH//TRANSMIT RECEIVE T R SWITCH
8 8369 THERMOELASTIC DAMPING//MEMS RESONATOR//MICROMECHANICAL RESONATORS
9 9281 STICTION//TRACT POWER//MOLECULAR DEPOSITION FILM
10 6527 MICROMIRROR//VARIABLE OPTICAL ATTENUATOR VOA//VARIABLE OPTICAL ATTENUATOR

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