Class information for:
Level 1: THERMOELASTIC DAMPING//MEMS RESONATOR//MICROMECHANICAL RESONATORS

Basic class information
Class id #P Avg. number of
references		 Database coverage
of references
8369 1261 22.9 56%


Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
2 4 MATERIALS SCIENCE, MULTIDISCIPLINARY//PHYSICS, APPLIED//PHYSICS, CONDENSED MATTER 2836879
376 3       SENSORS AND ACTUATORS A-PHYSICAL//JOURNAL OF MICROELECTROMECHANICAL SYSTEMS//MEMS 32422
308 2             JOURNAL OF MICROELECTROMECHANICAL SYSTEMS//MEMS//JOURNAL OF MICROMECHANICS AND MICROENGINEERING 18480
8369 1                   THERMOELASTIC DAMPING//MEMS RESONATOR//MICROMECHANICAL RESONATORS 1261

Terms with highest relevance score


rank Term termType Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 THERMOELASTIC DAMPING authKW 822392 3% 77% 44
2 MEMS RESONATOR authKW 508748 3% 51% 41
3 MICROMECHANICAL RESONATORS authKW 495840 4% 40% 51
4 SQUEEZE FILM DAMPING authKW 429844 3% 51% 35
5 ANCHOR LOSS authKW 296613 1% 88% 14
6 RESONATOR authKW 295760 11% 9% 133
7 THERMOELASTIC DISSIPATION authKW 220121 1% 91% 10
8 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS journal 214946 12% 6% 154
9 QUALITY FACTOR authKW 173917 7% 8% 85
10 SUPPORT LOSS authKW 172184 1% 89% 8

Web of Science journal categories


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 Instruments & Instrumentation 24643 44% 0% 551
2 Engineering, Electrical & Electronic 14259 61% 0% 775
3 Nanoscience & Nanotechnology 13500 35% 0% 442
4 Physics, Applied 6588 47% 0% 589
5 Mechanics 4928 22% 0% 280
6 Engineering, Mechanical 4755 20% 0% 256
7 Acoustics 2068 8% 0% 100
8 Materials Science, Multidisciplinary 842 21% 0% 261
9 Electrochemistry 43 2% 0% 28
10 Engineering, General 24 2% 0% 20

Address terms


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 CRANESSCI MEMS 79239 0% 55% 6
2 SIGNAL PROC VLSI 60529 0% 50% 5
3 SCOTTISH MICROELECT 58285 1% 14% 17
4 CRANESCI MEMS 48427 0% 100% 2
5 GMME CEMDATIC ETSIT 48427 0% 100% 2
6 MICROELECT EI 48427 0% 100% 2
7 MICROSYST PRECIS ENGN 43042 0% 44% 4
8 DYNAM MICROSYST 32283 0% 67% 2
9 ELECT DEVICE CO 32283 0% 67% 2
10 GRP NAM6 32283 0% 67% 2

Journals


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 214946 12% 6% 154
2 JOURNAL OF MICROMECHANICS AND MICROENGINEERING 89535 11% 3% 143
3 SENSORS AND ACTUATORS A-PHYSICAL 59341 12% 2% 156
4 MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 16624 4% 1% 48
5 IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL 8394 3% 1% 44
6 SENSORS AND ACTUATORS 2949 1% 1% 9
7 MICROFLUIDICS AND NANOFLUIDICS 2591 1% 1% 14
8 JOURNAL OF THERMAL STRESSES 2441 1% 1% 13
9 IEEE ELECTRON DEVICE LETTERS 2215 2% 0% 29
10 JOURNAL OF SOUND AND VIBRATION 1572 3% 0% 32

Author Key Words


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class		 LCSH search Wikipedia search
1 THERMOELASTIC DAMPING 822392 3% 77% 44 Search THERMOELASTIC+DAMPING Search THERMOELASTIC+DAMPING
2 MEMS RESONATOR 508748 3% 51% 41 Search MEMS+RESONATOR Search MEMS+RESONATOR
3 MICROMECHANICAL RESONATORS 495840 4% 40% 51 Search MICROMECHANICAL+RESONATORS Search MICROMECHANICAL+RESONATORS
4 SQUEEZE FILM DAMPING 429844 3% 51% 35 Search SQUEEZE+FILM+DAMPING Search SQUEEZE+FILM+DAMPING
5 ANCHOR LOSS 296613 1% 88% 14 Search ANCHOR+LOSS Search ANCHOR+LOSS
6 RESONATOR 295760 11% 9% 133 Search RESONATOR Search RESONATOR
7 THERMOELASTIC DISSIPATION 220121 1% 91% 10 Search THERMOELASTIC+DISSIPATION Search THERMOELASTIC+DISSIPATION
8 QUALITY FACTOR 173917 7% 8% 85 Search QUALITY+FACTOR Search QUALITY+FACTOR
9 SUPPORT LOSS 172184 1% 89% 8 Search SUPPORT+LOSS Search SUPPORT+LOSS
10 MICRORESONATORS 161041 4% 14% 46 Search MICRORESONATORS Search MICRORESONATORS

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.


Rank Reference # ref. in
cl.		 Shr. of ref. in
cl.		 Citations
1 ABDOLVAND, R , BAHREYNI, B , LEE, JEY , NABKI, F , (2016) MICROMACHINED RESONATORS: A REVIEW.MICROMACHINES. VOL. 7. ISSUE 9. P. - 138 55% 0
2 GHAFFARI, S , NG, EJ , AHN, CH , YANG, YS , WANG, SS , HONG, VA , KENNY, TW , (2015) ACCURATE MODELING OF QUALITY FACTOR BEHAVIOR OF COMPLEX SILICON MEMS RESONATORS.JOURNAL OF MICROELECTROMECHANICAL SYSTEMS. VOL. 24. ISSUE 2. P. 276 -288 35 78% 4
3 LI, P , HU, RF , (2011) A MODEL FOR SQUEEZE-FILM DAMPING OF PERFORATED MEMS DEVICES IN THE FREE MOLECULAR REGIME.JOURNAL OF MICROMECHANICS AND MICROENGINEERING. VOL. 21. ISSUE 2. P. - 29 91% 2
4 TAI, YP , LI, P , FANG, YM , (2014) THERMOELASTIC DAMPING IN TORSION MICRORESONATORS WITH COUPLING EFFECT BETWEEN TORSION AND BENDING.JOURNAL OF SOUND AND VIBRATION. VOL. 333. ISSUE 5. P. 1509 -1525 27 87% 3
5 FANG, YM , LI, P , (2015) THERMOELASTIC DAMPING IN THIN MICRORINGS WITH TWO-DIMENSIONAL HEAT CONDUCTION.PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES. VOL. 69. ISSUE . P. 198 -206 25 93% 1
6 VAN BEEK, JTM , PUERS, R , (2012) A REVIEW OF MEMS OSCILLATORS FOR FREQUENCY REFERENCE AND TIMING APPLICATIONS.JOURNAL OF MICROMECHANICS AND MICROENGINEERING. VOL. 22. ISSUE 1. P. - 37 51% 80
7 BASU, J , BHATTACHARYYA, TK , (2011) MICROELECTROMECHANICAL RESONATORS FOR RADIO FREQUENCY COMMUNICATION APPLICATIONS.MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS. VOL. 17. ISSUE 10-11. P. 1557 -1580 30 77% 19
8 FANG, YM , LI, P , WANG, Z , (2013) THERMOELASTIC DAMPING IN THE AXISYMMETRIC VIBRATION OF CIRCULAR MICROPLATE RESONATORS WITH TWO-DIMENSIONAL HEAT CONDUCTION.JOURNAL OF THERMAL STRESSES. VOL. 36. ISSUE 8. P. 830-850 22 92% 1
9 HAJHASHEMI, MS , RASOULI, A , BAHREYNI, B , (2014) PERFORMANCE OPTIMIZATION OF HIGH ORDER RF MICRORESONATORS IN THE PRESENCE OF SQUEEZED FILM DAMPING.SENSORS AND ACTUATORS A-PHYSICAL. VOL. 216. ISSUE . P. 266 -276 23 85% 1
10 LI, P , FANG, YM , XU, FF , (2014) ANALYTICAL MODELING OF SQUEEZE-FILM DAMPING FOR PERFORATED CIRCULAR MICROPLATES.JOURNAL OF SOUND AND VIBRATION. VOL. 333. ISSUE 9. P. 2688-2700 19 100% 3

Classes with closest relation at Level 1


Rank Class id link
1 5474 MEMS GYROSCOPE//GYROSCOPE//ANGULAR RATE SENSOR
2 24115 PHOTOTHERMAL VIBRATION//FLEXURALLY VIBRATING BAR//FLEXURAL VIBRATOR
3 6599 MODIFIED COUPLE STRESS THEORY//PULL IN INSTABILITY//PULL IN
4 16440 FBAR//FILM BULK ACOUSTIC RESONATOR//FILM BULK ACOUSTIC RESONATOR FBAR
5 2505 MICROCANTILEVER//CANTILEVER//CANTILEVER SENSOR
6 1129 OPTOMECHANICS//CAVITY OPTOMECHANICS//OPTOMECHANICAL SYSTEM
7 18482 MICROPHONE//SILICON MICROPHONE//CONDENSER MICROPHONE
8 8033 RF MEMS//RF MEMS SWITCH//DIELECTRIC CHARGING
9 6527 MICROMIRROR//VARIABLE OPTICAL ATTENUATOR VOA//VARIABLE OPTICAL ATTENUATOR
10 25979 NANOELECTROMECHANICAL SYSTEMS NEMS//NANOELECTROMECHANICAL NEM MEMORY//NANOELECTROMECHANICAL SWITCH

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