Class information for: |
Basic class information |
Class id | #P | Avg. number of references |
Database coverage of references |
---|---|---|---|
16807 | 635 | 21.0 | 82% |
Hierarchy of classes |
The table includes all classes above and classes immediately below the current class. |
Cluster id | Level | Cluster label | #P |
---|---|---|---|
2 | 4 | MATERIALS SCIENCE, MULTIDISCIPLINARY//PHYSICS, APPLIED//PHYSICS, CONDENSED MATTER | 2836879 |
178 | 3 | GAN//PHYSICS, APPLIED//GALLIUM NITRIDE | 57874 |
20 | 2 | GAN//GALLIUM NITRIDE//NITRIDES | 36496 |
16807 | 1 | SOCIOTECHNO SCI TECHNOL//SEMICONDUCTOR ELECTROLYTE CONTACTS//MAT STUDY TESTING | 635 |
Terms with highest relevance score |
rank | Term | termType | Chi square | Shr. of publ. in class containing term |
Class's shr. of term's tot. occurrences |
#P with term in class |
---|---|---|---|---|---|---|
1 | SOCIOTECHNO SCI TECHNOL | address | 507903 | 2% | 81% | 13 |
2 | SEMICONDUCTOR ELECTROLYTE CONTACTS | authKW | 153873 | 1% | 80% | 4 |
3 | MAT STUDY TESTING | address | 96722 | 2% | 15% | 13 |
4 | GLOBAL SOLAR INITIAT | address | 96172 | 0% | 100% | 2 |
5 | NAT MAT STUDY TESTING | address | 96172 | 0% | 100% | 2 |
6 | SEMICOND TECHNOL SCI | address | 96172 | 0% | 100% | 2 |
7 | SOCIO TECHNO SCI TECHNOL | address | 96172 | 0% | 100% | 2 |
8 | TWO BODY INTERATOMIC POTENTIAL | authKW | 96172 | 0% | 100% | 2 |
9 | GAN | authKW | 84242 | 14% | 2% | 92 |
10 | N GAN | authKW | 75256 | 1% | 26% | 6 |
Web of Science journal categories |
Rank | Term | Chi square | Shr. of publ. in class containing term |
Class's shr. of term's tot. occurrences |
#P with term in class |
---|---|---|---|---|---|
1 | Physics, Applied | 6632 | 65% | 0% | 410 |
2 | Materials Science, Coatings & Films | 3172 | 16% | 0% | 104 |
3 | Materials Science, Multidisciplinary | 1116 | 31% | 0% | 197 |
4 | Nanoscience & Nanotechnology | 962 | 14% | 0% | 88 |
5 | Physics, Condensed Matter | 775 | 20% | 0% | 126 |
6 | Engineering, Electrical & Electronic | 640 | 20% | 0% | 130 |
7 | Electrochemistry | 377 | 7% | 0% | 45 |
8 | Chemistry, Physical | 41 | 9% | 0% | 55 |
9 | Optics | 3 | 3% | 0% | 16 |
10 | Microscopy | 2 | 0% | 0% | 2 |
Address terms |
Rank | Term | Chi square | Shr. of publ. in class containing term |
Class's shr. of term's tot. occurrences |
#P with term in class |
---|---|---|---|---|---|
1 | SOCIOTECHNO SCI TECHNOL | 507903 | 2% | 81% | 13 |
2 | MAT STUDY TESTING | 96722 | 2% | 15% | 13 |
3 | GLOBAL SOLAR INITIAT | 96172 | 0% | 100% | 2 |
4 | NAT MAT STUDY TESTING | 96172 | 0% | 100% | 2 |
5 | SEMICOND TECHNOL SCI | 96172 | 0% | 100% | 2 |
6 | SOCIO TECHNO SCI TECHNOL | 96172 | 0% | 100% | 2 |
7 | ARMAMENT TECH PROD | 48086 | 0% | 100% | 1 |
8 | CHUNG CHENG TEHNOL | 48086 | 0% | 100% | 1 |
9 | DOT METR TECHNOL | 48086 | 0% | 100% | 1 |
10 | DUKIJN GU | 48086 | 0% | 100% | 1 |
Journals |
Rank | Term | Chi square | Shr. of publ. in class containing term |
Class's shr. of term's tot. occurrences |
#P with term in class |
---|---|---|---|---|---|
1 | MRS INTERNET JOURNAL OF NITRIDE SEMICONDUCTOR RESEARCH | 31187 | 3% | 4% | 18 |
2 | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 5951 | 7% | 0% | 42 |
3 | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 3497 | 6% | 0% | 35 |
4 | JOURNAL OF ELECTRONIC MATERIALS | 3061 | 4% | 0% | 25 |
5 | JAPANESE JOURNAL OF APPLIED PHYSICS | 2345 | 4% | 0% | 28 |
6 | APPLIED PHYSICS LETTERS | 2193 | 11% | 0% | 72 |
7 | GEC JOURNAL OF TECHNOLOGY | 1922 | 0% | 4% | 1 |
8 | MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1863 | 3% | 0% | 17 |
9 | JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1807 | 5% | 0% | 34 |
10 | SOLID-STATE ELECTRONICS | 1554 | 3% | 0% | 18 |
Author Key Words |
Rank | Term | Chi square | Shr. of publ. in class containing term |
Class's shr. of term's tot. occurrences |
#P with term in class |
LCSH search | Wikipedia search |
---|---|---|---|---|---|---|---|
1 | SEMICONDUCTOR ELECTROLYTE CONTACTS | 153873 | 1% | 80% | 4 | Search SEMICONDUCTOR+ELECTROLYTE+CONTACTS | Search SEMICONDUCTOR+ELECTROLYTE+CONTACTS |
2 | TWO BODY INTERATOMIC POTENTIAL | 96172 | 0% | 100% | 2 | Search TWO+BODY+INTERATOMIC+POTENTIAL | Search TWO+BODY+INTERATOMIC+POTENTIAL |
3 | GAN | 84242 | 14% | 2% | 92 | Search GAN | Search GAN |
4 | N GAN | 75256 | 1% | 26% | 6 | Search N+GAN | Search N+GAN |
5 | PHOTOELECTROCHEMICAL ETCHING | 66571 | 1% | 23% | 6 | Search PHOTOELECTROCHEMICAL+ETCHING | Search PHOTOELECTROCHEMICAL+ETCHING |
6 | GALLIUM HYDROXIDE | 64113 | 0% | 67% | 2 | Search GALLIUM+HYDROXIDE | Search GALLIUM+HYDROXIDE |
7 | SEMICONDUCTOR PHOTOELECTRODE | 64113 | 0% | 67% | 2 | Search SEMICONDUCTOR+PHOTOELECTRODE | Search SEMICONDUCTOR+PHOTOELECTRODE |
8 | 1100 PLANE | 48086 | 0% | 100% | 1 | Search 1100+PLANE | Search 1100+PLANE |
9 | AFM SURFACE ROUGHNESS | 48086 | 0% | 100% | 1 | Search AFM+SURFACE+ROUGHNESS | Search AFM+SURFACE+ROUGHNESS |
10 | ALUMINUM SUBFLUORIDE | 48086 | 0% | 100% | 1 | Search ALUMINUM+SUBFLUORIDE | Search ALUMINUM+SUBFLUORIDE |
Core articles |
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c: (1) Number of references referring to publications in the class. (2) Share of total number of active references referring to publications in the class. (3) Age of the article. New articles get higher score than old articles. (4) Citation rate, normalized to year. |
Rank | Reference | # ref. in cl. |
Shr. of ref. in cl. |
Citations |
---|---|---|---|---|
1 | ADESIDA, I , YOUTSEY, C , PING, AT , KHAN, F , ROMANO, LT , BULMAN, G , (1999) DRY AND WET ETCHING FOR GROUP III-NITRIDES.MRS INTERNET JOURNAL OF NITRIDE SEMICONDUCTOR RESEARCH. VOL. 4. ISSUE . P. - | 36 | 90% | 8 |
2 | RAWAL, DS , ARORA, H , SEHGAL, BK , MURALIDHARAN, R , (2014) COMPARATIVE STUDY OF GAN MESA ETCH CHARACTERISTICS IN CL-2 BASED INDUCTIVELY COUPLED PLASMA WITH AR AND BCL3 AS ADDITIVE GASES.JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A. VOL. 32. ISSUE 3. P. - | 20 | 87% | 3 |
3 | RAWAL, DS , ARORA, H , AGARWAL, VR , VINAYAK, S , KAPOOR, A , SEHGAL, BK , MURALIDHARAN, R , SAHA, D , MALIK, HK , (2012) GAN ETCH RATE AND SURFACE ROUGHNESS EVOLUTION IN CL-2/AR BASED INDUCTIVELY COUPLED PLASMA ETCHING.THIN SOLID FILMS. VOL. 520. ISSUE 24. P. 7212-7218 | 21 | 88% | 3 |
4 | KIBRIA, MG , MI, Z , (2016) ARTIFICIAL PHOTOSYNTHESIS USING METAL/NONMETAL-NITRIDE SEMICONDUCTORS: CURRENT STATUS, PROSPECTS, AND CHALLENGES.JOURNAL OF MATERIALS CHEMISTRY A. VOL. 4. ISSUE 8. P. 2801 -2820 | 45 | 23% | 9 |
5 | BOUCHOULE, S , BOUBANGA-TOMBET, S , LE GRATIET, L , D'YERVILLE, ML , TORRES, J , CHEN, Y , COQUILLAT, D , (2007) REACTIVE ION ETCHING OF HIGH OPTICAL QUALITY GAN/SAPPHIRE PHOTONIC CRYSTAL SLAB USING CH4-H-2 CHEMISTRY.JOURNAL OF APPLIED PHYSICS. VOL. 101. ISSUE 4. P. - | 30 | 64% | 9 |
6 | KOMETANI, R , ISHIKAWA, K , TAKEDA, K , KONDO, H , SEKINE, M , HORI, M , (2013) A HIGH-TEMPERATURE NITROGEN PLASMA ETCHING FOR PRESERVING SMOOTH AND STOICHIOMETRIC GAN SURFACE.APPLIED PHYSICS EXPRESS. VOL. 6. ISSUE 5. P. - | 23 | 66% | 2 |
7 | OUBENSAID, EH , DULUARD, CY , PICHON, LE , PEREIRA, J , BOUFNICHEL, M , LEFAUCHEUX, P , DUSSART, R , RANSON, P , (2009) EFFECT OF THE ADDITION OF SF6 AND N-2 IN INDUCTIVELY COUPLED SICL4 PLASMA FOR GAN ETCHING.SEMICONDUCTOR SCIENCE AND TECHNOLOGY. VOL. 24. ISSUE 7. P. - | 16 | 84% | 2 |
8 | IM, YH , CHOI, CS , HAHN, YB , (2001) HIGH DENSITY PLASMA ETCHING OF GAN FILMS IN CL-2/AR DISCHARGES WITH A LOW-FREQUENCY-EXCITED DC BIAS.JOURNAL OF THE KOREAN PHYSICAL SOCIETY. VOL. 39. ISSUE 4. P. 617-621 | 17 | 100% | 1 |
9 | HAHN, YB , IM, YH , PARK, JS , NAHM, KS , LEE, YS , (2001) EFFECT OF DRY ETCHING CONDITIONS ON SURFACE MORPHOLOGY AND OPTICAL PROPERTIES OF GAN FILMS IN CHLORINE-BASED INDUCTIVELY COUPLED PLASMAS.JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A. VOL. 19. ISSUE 4. P. 1277-1281 | 17 | 94% | 11 |
10 | EDDY, CR , (1999) ETCH PROCESSING OF III-V NITRIDES.MRS INTERNET JOURNAL OF NITRIDE SEMICONDUCTOR RESEARCH. VOL. 4. ISSUE . P. - | 22 | 79% | 0 |
Classes with closest relation at Level 1 |