Class information for:
Level 1: ECR HYDROGEN PLASMA//ELECTROMAGNETIC GREENS FUNCTION//IN SITU VACUUM PROCESS

Basic class information
Class id #P Avg. number of
references		 Database coverage
of references
13299 847 20.9 59%


Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
2 4 MATERIALS SCIENCE, MULTIDISCIPLINARY//PHYSICS, APPLIED//PHYSICS, CONDENSED MATTER 2836879
47 3       PHYSICS, APPLIED//JOURNAL OF CRYSTAL GROWTH//PHYSICS, CONDENSED MATTER 93961
1210 2             GALLIUM ARSENIDE//GAAS//REFLECTANCE ANISOTROPY SPECTROSCOPY 9166
13299 1                   ECR HYDROGEN PLASMA//ELECTROMAGNETIC GREENS FUNCTION//IN SITU VACUUM PROCESS 847

Terms with highest relevance score


rank Term termType Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 ECR HYDROGEN PLASMA authKW 72099 0% 100% 2
2 ELECTROMAGNETIC GREENS FUNCTION authKW 72099 0% 100% 2
3 IN SITU VACUUM PROCESS authKW 72099 0% 100% 2
4 ATOMIC HYDROGEN CLEANING authKW 72095 0% 50% 4
5 OXIDE DESORPTION authKW 72095 0% 50% 4
6 GA2O authKW 48065 0% 67% 2
7 HIGFET authKW 48065 0% 67% 2
8 ATOMIC HYDROGEN authKW 43198 2% 7% 17
9 SEMICOND INTEGRATED CIRCUIT address 40552 0% 38% 3
10 ACID POLISHED authKW 36050 0% 100% 1

Web of Science journal categories


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 Physics, Applied 5270 51% 0% 429
2 Physics, Condensed Matter 3879 36% 0% 306
3 Materials Science, Coatings & Films 2975 14% 0% 117
4 Chemistry, Physical 507 19% 0% 159
5 Nanoscience & Nanotechnology 379 8% 0% 68
6 Crystallography 357 6% 0% 52
7 Materials Science, Multidisciplinary 287 16% 0% 135
8 Engineering, Electrical & Electronic 211 12% 0% 99
9 Spectroscopy 101 4% 0% 31
10 Physics, Multidisciplinary 91 6% 0% 55

Address terms


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 SEMICOND INTEGRATED CIRCUIT 40552 0% 38% 3
2 DIPARTIMENTO FIS VIA G CAMPI 213A 36050 0% 100% 1
3 NANOELE ON ABORAT 36050 0% 100% 1
4 PHYS ETATS CONDENSES GRP CNRS URA 783 36050 0% 100% 1
5 REPUBL CHINA TAIWAN INT PROGRAM 36050 0% 100% 1
6 GRP FIS SUPERFICIES 20597 0% 29% 2
7 ENEA TIB 18024 0% 50% 1
8 LMS CNRS 18024 0% 50% 1
9 OPTOELECT MICROWAVE DEVICES DEV 18024 0% 50% 1
10 STRUCT FUNCT PROPERTY GRP 18024 0% 50% 1

Journals


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 SURFACE SCIENCE 12520 11% 0% 97
2 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY 9855 2% 2% 18
3 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 7481 7% 0% 59
4 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 7099 6% 0% 53
5 JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA 5046 3% 0% 29
6 JOURNAL OF CRYSTAL GROWTH 2837 6% 0% 50
7 JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS 1840 3% 0% 25
8 PHYSICAL REVIEW B 1188 9% 0% 77
9 SOUTH AFRICAN JOURNAL OF PHYSICS - SUID-AFRIKAANSE TYDSKRIF VIR FISIKA 734 0% 2% 1
10 VACUUM 720 2% 0% 14

Author Key Words


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class		 LCSH search Wikipedia search
1 ECR HYDROGEN PLASMA 72099 0% 100% 2 Search ECR+HYDROGEN+PLASMA Search ECR+HYDROGEN+PLASMA
2 ELECTROMAGNETIC GREENS FUNCTION 72099 0% 100% 2 Search ELECTROMAGNETIC+GREENS+FUNCTION Search ELECTROMAGNETIC+GREENS+FUNCTION
3 IN SITU VACUUM PROCESS 72099 0% 100% 2 Search IN+SITU+VACUUM+PROCESS Search IN+SITU+VACUUM+PROCESS
4 ATOMIC HYDROGEN CLEANING 72095 0% 50% 4 Search ATOMIC+HYDROGEN+CLEANING Search ATOMIC+HYDROGEN+CLEANING
5 OXIDE DESORPTION 72095 0% 50% 4 Search OXIDE+DESORPTION Search OXIDE+DESORPTION
6 GA2O 48065 0% 67% 2 Search GA2O Search GA2O
7 HIGFET 48065 0% 67% 2 Search HIGFET Search HIGFET
8 ATOMIC HYDROGEN 43198 2% 7% 17 Search ATOMIC+HYDROGEN Search ATOMIC+HYDROGEN
9 ACID POLISHED 36050 0% 100% 1 Search ACID+POLISHED Search ACID+POLISHED
10 AES MOLECULAR BEAM EPITAXY MBE 36050 0% 100% 1 Search AES+MOLECULAR+BEAM+EPITAXY+MBE Search AES+MOLECULAR+BEAM+EPITAXY+MBE

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.


Rank Reference # ref.
in cl.		 Shr. of ref. in
cl.		 Citations
1 NANNARONE, S , PEDIO, M , (2003) HYDROGEN CHEMISORPTION ON III-V SEMICONDUCTOR SURFACES.SURFACE SCIENCE REPORTS. VOL. 51. ISSUE 1-8. P. 1 -149 53 56% 17
2 INAOKA, T , (2001) EVOLUTION OF ELEMENTARY EXCITATIONS AT A DOPED POLAR SEMICONDUCTOR SURFACE IN A DEPLETION-LAYER FORMATION PROCESS.PHYSICAL REVIEW B. VOL. 63. ISSUE 16. P. - 37 73% 0
3 JONES, TS , SCHWEITZER, MO , RICHARDSON, NV , BELL, GR , MCCONVILLE, CF , (1995) DEPLETION LAYERS, PLASMON DISPERSION, AND THE EFFECTS OF TEMPERATURE IN DEGENERATE INSB(100) - A STUDY BY ELECTRON-ENERGY-LOSS SPECTROSCOPY.PHYSICAL REVIEW B. VOL. 51. ISSUE 24. P. 17675-17680 29 97% 8
4 TAKESHITA, N , INAOKA, T , (2010) EVOLUTION OF ELECTRON STATES AT AN N-TYPE INSB SURFACE IN A DEPLETION-LAYER FORMATION PROCESS: EFFECT OF NONPARABOLICITY OF THE CONDUCTION-BAND DISPERSION.JOURNAL OF APPLIED PHYSICS. VOL. 107. ISSUE 3. P. - 27 54% 0
5 SZUBER, J , TOMKIEWICZ, P , WINKLER, A , (2006) COMPARATIVE STUDY OF THE GAAS(100) SURFACE CLEANED BY ATOMIC HYDROGEN.APPLIED SURFACE SCIENCE. VOL. 252. ISSUE 21. P. 7647 -7658 27 57% 14
6 PROIX, F , (1991) DISSOCIATION EFFECTS OF H AND H-2+ ON CLEAN III-V COMPOUNDS.PHYSICA B-CONDENSED MATTER. VOL. 170. ISSUE 1-4. P. 457-468 30 83% 14
7 BELL, GR , KAIJAKS, NS , DIXON, RJ , MCCONVILLE, CF , (1998) ATOMIC HYDROGEN CLEANING OF POLAR III-V SEMICONDUCTOR SURFACES.SURFACE SCIENCE. VOL. 401. ISSUE 2. P. 125 -137 28 64% 47
8 INAOKA, T , (1996) CARRIER-CONCENTRATION DEPENDENCE OF PLASMON-POLAR PHONON COUPLING AT SEMICONDUCTOR SURFACES.SURFACE SCIENCE. VOL. 351. ISSUE 1-3. P. 259-276 21 91% 1
9 PUN, AF , ZHENG, JP , (2007) UTILIZING GALLIUM ARSENIDE SACRIFICIAL FILMS TO INHIBIT SURFACE ROUGHENING DURING THE THERMAL DESORPTION OF GALLIUM ARSENIDE.ELECTROCHEMICAL AND SOLID STATE LETTERS. VOL. 10. ISSUE 6. P. H189-H192 18 69% 3
10 INAOKA, T , (1996) STRUCTURE OF COUPLED CARRIER PLASMON-POLAR PHONON MODES AT SEMICONDUCTOR SURFACES.SURFACE SCIENCE. VOL. 357. ISSUE 1-3. P. 87 -91 17 100% 1

Classes with closest relation at Level 1


Rank Class id link
1 8029 SULFUR PASSIVATION//INTERFACE CONTROL LAYER//NH42S X TREATMENT
2 2100 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY//WEBSTER//JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
3 10794 CONDUCTANCE TRANSIENTS//INDIUM PHOSPHIDE100//INSULATOR DAMAGE
4 28325 OVAL DEFECTS//INDIRECT GAP ALGAAS EPILAYERS//SEEIE
5 4033 REFLECTANCE ANISOTROPY SPECTROSCOPY//REFLECTANCE DIFFERENCE SPECTROSCOPY//REFLECTION ANISOTROPY SPECTROSCOPY
6 5846 FUJIMI KU//JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B//DRY ETCHING
7 6482 III V MOSFET//GAAS MOSFET//INGAAS
8 17559 ALKALI METALS//CEA SERV RECH SUR ES IRRADIAT MAT//SURFACE SCIENCE
9 15961 HBEREICH CHEM BIOL 2//GRP CRM SCI RADIAT//GRP CANADIAN HLTH RADIAT SCI
10 14532 SELECTIVE AREA GROWTH//SELECTIVE EPITAXY//TERTIARYBUTYLCHLORIDE

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