Class information for:
Level 1: SMART CUT//ION CUT//GETTERING

Basic class information
Class id #P Avg. number of
references		 Database coverage
of references
11988 939 18.7 72%


Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
2 4 MATERIALS SCIENCE, MULTIDISCIPLINARY//PHYSICS, APPLIED//PHYSICS, CONDENSED MATTER 2836879
6 3       PHYSICS, APPLIED//IEEE TRANSACTIONS ON ELECTRON DEVICES//SILICON 155028
648 2             OXYGEN PRECIPITATION//OXYGEN PRECIPITATES//GETTERING 13601
11988 1                   SMART CUT//ION CUT//GETTERING 939

Terms with highest relevance score


rank Term termType Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 SMART CUT authKW 537542 2% 72% 23
2 ION CUT authKW 524604 2% 73% 22
3 GETTERING authKW 364611 6% 21% 54
4 HYDROGEN IMPLANTATION authKW 312733 2% 42% 23
5 SURFACE BLISTERING authKW 199168 1% 88% 7
6 HE AND H ION IMPLANTATION authKW 130070 0% 100% 4
7 SI HE authKW 130070 0% 100% 4
8 SMART CUT TECHNOLOGY authKW 130070 0% 100% 4
9 HELIUM IMPLANTATION authKW 120233 1% 26% 14
10 ION CUTTING authKW 116131 1% 71% 5

Web of Science journal categories


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 Physics, Applied 6339 53% 0% 494
2 Nuclear Science & Technology 4006 20% 0% 184
3 Physics, Nuclear 3350 18% 0% 172
4 Instruments & Instrumentation 3145 19% 0% 175
5 Physics, Atomic, Molecular & Chemical 1772 18% 0% 169
6 Physics, Condensed Matter 1736 24% 0% 224
7 Materials Science, Multidisciplinary 967 25% 0% 232
8 Materials Science, Coatings & Films 309 5% 0% 43
9 Engineering, Electrical & Electronic 166 10% 0% 97
10 Nanoscience & Nanotechnology 71 4% 0% 37

Address terms


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 UMR6630 79803 1% 27% 9
2 GRP NMAT 74322 0% 57% 4
3 ION BEAM PL GRP 65035 0% 100% 2
4 LOW DIMENS NANOSTRUCT 58529 0% 60% 3
5 ANALOG MIXED SIGNAL TECHNOL 57804 0% 44% 4
6 CERI 51889 2% 9% 17
7 DEVICE PERFORMANCE 43355 0% 67% 2
8 LTFC 43355 0% 67% 2
9 AEROSP MECH MECH ENGN AMME J07 32518 0% 100% 1
10 AEROSP MECH MECHATRON ENGN AMME J07 32518 0% 100% 1

Journals


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 SOLID STATE PHENOMENA 31214 5% 2% 46
2 NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 28695 18% 1% 167
3 APPLIED PHYSICS LETTERS 4968 14% 0% 131
4 JOURNAL OF APPLIED PHYSICS 3599 12% 0% 110
5 MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY 2949 3% 0% 26
6 ELECTROCHEMICAL AND SOLID STATE LETTERS 901 1% 0% 11
7 VACUUM 745 2% 0% 15
8 JOURNAL OF ELECTRONIC MATERIALS 728 2% 0% 15
9 SEMICONDUCTORS 674 1% 0% 12
10 MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING 618 1% 0% 8

Author Key Words


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class		 LCSH search Wikipedia search
1 SMART CUT 537542 2% 72% 23 Search SMART+CUT Search SMART+CUT
2 ION CUT 524604 2% 73% 22 Search ION+CUT Search ION+CUT
3 GETTERING 364611 6% 21% 54 Search GETTERING Search GETTERING
4 HYDROGEN IMPLANTATION 312733 2% 42% 23 Search HYDROGEN+IMPLANTATION Search HYDROGEN+IMPLANTATION
5 SURFACE BLISTERING 199168 1% 88% 7 Search SURFACE+BLISTERING Search SURFACE+BLISTERING
6 HE AND H ION IMPLANTATION 130070 0% 100% 4 Search HE+AND+H+ION+IMPLANTATION Search HE+AND+H+ION+IMPLANTATION
7 SI HE 130070 0% 100% 4 Search SI+HE Search SI+HE
8 SMART CUT TECHNOLOGY 130070 0% 100% 4 Search SMART+CUT+TECHNOLOGY Search SMART+CUT+TECHNOLOGY
9 HELIUM IMPLANTATION 120233 1% 26% 14 Search HELIUM+IMPLANTATION Search HELIUM+IMPLANTATION
10 ION CUTTING 116131 1% 71% 5 Search ION+CUTTING Search ION+CUTTING

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.


Rank Reference # ref.
in cl.		 Shr. of ref. in
cl.		 Citations
1 TERREAULT, B , (2007) HYDROGEN BLISTERING OF SILICON: PROGRESS IN FUNDAMENTAL UNDERSTANDING.PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE. VOL. 204. ISSUE 7. P. 2129 -2184 72 65% 63
2 SINGH, R , CHRISTIANSEN, SH , MOUTANABBIR, O , GOSELE, U , (2010) THE PHENOMENOLOGY OF ION IMPLANTATION-INDUCED BLISTERING AND THIN-LAYER SPLITTING IN COMPOUND SEMICONDUCTORS.JOURNAL OF ELECTRONIC MATERIALS. VOL. 39. ISSUE 10. P. 2177-2189 48 94% 8
3 DAGHBOUJ, N , CHERKASHIN, N , DARRAS, FX , PAILLARD, V , FNAIECH, M , CLAVERIE, A , (2016) EFFECT OF THE ORDER OF HE+ AND H+ ION CO-IMPLANTATION ON DAMAGE GENERATION AND THERMAL EVOLUTION OF COMPLEXES, PLATELETS, AND BLISTERS IN SILICON.JOURNAL OF APPLIED PHYSICS. VOL. 119. ISSUE 13. P. - 27 96% 0
4 FENG, XQ , HUANG, Y , (2004) MECHANICS OF SMART-CUT((R)) TECHNOLOGY.INTERNATIONAL JOURNAL OF SOLIDS AND STRUCTURES. VOL. 41. ISSUE 16-17. P. 4299-4320 37 79% 43
5 WANG, Z , GAO, YJ , LI, MK , ZHU, F , ZHANG, DC , LIU, CL , (2013) HE AND H SEQUENTIAL IMPLANTATION INDUCED SURFACE BLISTERING AND THE EXFOLIATION OF SI COVERED WITH AN OXIDE LAYER.CHINESE PHYSICS C. VOL. 37. ISSUE 1. P. - 21 100% 0
6 MOUTANABBIR, O , SCHOLZ, R , GOSELE, U , GUITTOUM, A , JUNGMANN, M , BUTTERLING, M , KRAUSE-REHBERG, R , ANWAND, W , EGGER, W , SPERR, P , (2010) EXPERIMENTAL ELUCIDATION OF VACANCY COMPLEXES ASSOCIATED WITH HYDROGEN ION-INDUCED SPLITTING OF BULK GAN.PHYSICAL REVIEW B. VOL. 81. ISSUE 11. P. - 32 68% 11
7 HASANUZZAMAN, M , HADDARA, YM , KNIGHTS, AP , (2012) A MATHEMATICAL MODEL FOR VOID EVOLUTION IN SILICON BY HELIUM IMPLANTATION AND SUBSEQUENT ANNEALING PROCESS.JOURNAL OF APPLIED PHYSICS. VOL. 112. ISSUE 6. P. - 27 75% 1
8 DAI, JY , WEI, X , XUE, ZY , DI, ZF , ZHANG, M , (2014) ORDER AND TEMPERATURE DEPENDENCE OF SURFACE BLISTERING IN H AND HE CO-IMPLANTED GE.THIN SOLID FILMS. VOL. 557. ISSUE . P. 115-119 19 100% 1
9 ZHU, F , LIU, CL , GAO, YJ , WANG, Z , WANG, J , (2012) SURFACE DAMAGE VERSUS DEFECT MICROSTRUCTURES IN HE AND H ION CO-IMPLANTED SI3N4/SI.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS. VOL. 286. ISSUE . P. 148-153 20 95% 0
10 CHERKASHIN, N , REBOH, S , LUBK, A , HYTCH, MJ , CLAVERIE, A , (2013) STRAIN IN HYDROGEN-IMPLANTED SI INVESTIGATED USING DARK-FIELD ELECTRON HOLOGRAPHY.APPLIED PHYSICS EXPRESS. VOL. 6. ISSUE 9. P. - 19 86% 6

Classes with closest relation at Level 1


Rank Class id link
1 5113 HYDROGEN IN SILICON//MULTIVACANCY//HYDROGEN ATOM TREATMENT
2 12826 SIMOX//CONTACTLESS I V METHOD//BURIED OXIDE LAYER
3 5504 WAFER BONDING//ANODIC BONDING//DIRECT BONDING
4 771 TRANSIENT ENHANCED DIFFUSION//SHALLOW JUNCTION//SWAMP
5 4246 GETTERING//DLTS//GETTERING EFFICIENCY
6 8986 IBIEC//AMORPHOUS POCKET//SOLID PHASE EPITAXIAL GROWTH
7 36089 CHARACTERISTIC TESTING METHOD//DIFFUS TEAM//GATE TURN OFF GTO THYRISTORS
8 6003 JOURNAL OF NUCLEAR MATERIALS//HELIUM BUBBLE//HE VACANCY CLUSTER
9 21285 SOFT ERROR MAPPING//HIGH ENERGY ION IMPLANTATION//DYNAMIC RANDOM ACCESS MEMORY
10 6817 SOVIET PHYSICS SEMICONDUCTORS-USSR//LIFETIME CONTROL//DLTS

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