Class information for:
Level 1: LIQUID METAL ION SOURCE//ION BEAMS MAT//ALLOY LIQUID METAL ION SOURCES

Basic class information
Class id #P Avg. number of
references		 Database coverage
of references
8222 1278 16.9 52%


Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
2 4 MATERIALS SCIENCE, MULTIDISCIPLINARY//PHYSICS, APPLIED//PHYSICS, CONDENSED MATTER 2836879
314 3       ULTRAMICROSCOPY//MICROSCOPY//JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 39933
720 2             JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B//CHEMICALLY AMPLIFIED RESIST//JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY 12751
8222 1                   LIQUID METAL ION SOURCE//ION BEAMS MAT//ALLOY LIQUID METAL ION SOURCES 1278

Terms with highest relevance score


rank Term termType Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 LIQUID METAL ION SOURCE authKW 546643 2% 74% 31
2 ION BEAMS MAT address 119457 0% 100% 5
3 ALLOY LIQUID METAL ION SOURCES authKW 95566 0% 100% 4
4 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B journal 79429 18% 1% 235
5 FOCUSED ION BEAM authKW 78211 5% 5% 61
6 NERIME PROCESS authKW 71674 0% 100% 3
7 SECT PL PHYS address 56869 1% 24% 10
8 FEEP authKW 54606 0% 57% 4
9 BOOSTER PRINCIPLE authKW 47783 0% 100% 2
10 LIQUID METAL CONE authKW 47783 0% 100% 2

Web of Science journal categories


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 Physics, Applied 13965 66% 0% 843
2 Nanoscience & Nanotechnology 6761 25% 0% 319
3 Engineering, Electrical & Electronic 2660 28% 0% 359
4 Instruments & Instrumentation 1883 13% 0% 162
5 Microscopy 1648 4% 0% 51
6 Nuclear Science & Technology 918 9% 0% 109
7 Physics, Nuclear 572 7% 0% 90
8 Materials Science, Coatings & Films 550 5% 0% 66
9 Optics 363 8% 0% 107
10 Physics, Atomic, Molecular & Chemical 260 7% 0% 88

Address terms


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 ION BEAMS MAT 119457 0% 100% 5
2 SECT PL PHYS 56869 1% 24% 10
3 MICROENGN NANOTECHNOL GRP 26874 0% 38% 3
4 SECT SOLID STATE PHYS 24366 1% 6% 17
5 CDPURA 250DTD 23891 0% 100% 1
6 DAVE 104 23891 0% 100% 1
7 ELECT ENGN RADIO 23891 0% 100% 1
8 ENGN MAT PHYS EMP 23891 0% 100% 1
9 FESTKORPERELEKTRON MIKROSTUCKTURZENTRUM 23891 0% 100% 1
10 INTEGRATED DEVICES CIRCUITS IDC 23891 0% 100% 1

Journals


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 79429 18% 1% 235
2 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY 9748 2% 2% 22
3 MICROELECTRONIC ENGINEERING 6300 4% 1% 52
4 JOURNAL DE PHYSIQUE 5734 4% 1% 48
5 VACUUM 5033 4% 0% 45
6 JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS 4911 4% 0% 50
7 NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 4382 6% 0% 77
8 JOURNAL OF PHYSICS D-APPLIED PHYSICS 3139 4% 0% 53
9 ULTRAMICROSCOPY 2851 2% 0% 26
10 SCANNING ELECTRON MICROSCOPY 2761 1% 1% 11

Author Key Words


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class		 LCSH search Wikipedia search
1 LIQUID METAL ION SOURCE 546643 2% 74% 31 Search LIQUID+METAL+ION+SOURCE Search LIQUID+METAL+ION+SOURCE
2 ALLOY LIQUID METAL ION SOURCES 95566 0% 100% 4 Search ALLOY+LIQUID+METAL+ION+SOURCES Search ALLOY+LIQUID+METAL+ION+SOURCES
3 FOCUSED ION BEAM 78211 5% 5% 61 Search FOCUSED+ION+BEAM Search FOCUSED+ION+BEAM
4 NERIME PROCESS 71674 0% 100% 3 Search NERIME+PROCESS Search NERIME+PROCESS
5 FEEP 54606 0% 57% 4 Search FEEP Search FEEP
6 BOOSTER PRINCIPLE 47783 0% 100% 2 Search BOOSTER+PRINCIPLE Search BOOSTER+PRINCIPLE
7 LIQUID METAL CONE 47783 0% 100% 2 Search LIQUID+METAL+CONE Search LIQUID+METAL+CONE
8 TIN LIQUID METAL ION SOURCE 47783 0% 100% 2 Search TIN+LIQUID+METAL+ION+SOURCE Search TIN+LIQUID+METAL+ION+SOURCE
9 WRITING IMPLANTATION 47783 0% 100% 2 Search WRITING+IMPLANTATION Search WRITING+IMPLANTATION
10 3 DIMENSIONAL DEVICES 23891 0% 100% 1 Search 3+DIMENSIONAL+DEVICES Search 3+DIMENSIONAL+DEVICES

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.


Rank Reference # ref.
in cl.		 Shr. of ref. in
cl.		 Citations
1 BISCHOFF, L , MAZAROV, P , BRUCHHAUS, L , GIERAK, J , (2016) LIQUID METAL ALLOY ION SOURCES-AN ALTERNATIVE FOR FOCUSSED ION BEAM TECHNOLOGY.APPLIED PHYSICS REVIEWS. VOL. 3. ISSUE 2. P. - 87 63% 1
2 ORLOFF, J , (1993) HIGH-RESOLUTION FOCUSED ION-BEAMS.REVIEW OF SCIENTIFIC INSTRUMENTS. VOL. 64. ISSUE 5. P. 1105-1130 86 70% 178
3 MELNGAILIS, J , (1987) FOCUSED ION-BEAM TECHNOLOGY AND APPLICATIONS.JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B. VOL. 5. ISSUE 2. P. 469-495 72 74% 354
4 MUHLE, R , (1992) HIGH-FIELD ION SOURCES AND APPLICATIONS.REVIEW OF SCIENTIFIC INSTRUMENTS. VOL. 63. ISSUE 5. P. 3040 -3049 60 79% 6
5 FORBES, RG , (1997) UNDERSTANDING HOW THE LIQUID-METAL ION SOURCE WORKS.VACUUM. VOL. 48. ISSUE 1. P. 85-97 36 90% 37
6 CZARCZYNSKI, W , ZNAMIROWSKI, Z , (1993) LIQUID-METAL ION SOURCES.VACUUM. VOL. 44. ISSUE 11-12. P. 1095-1099 42 93% 2
7 MARIANOWSKI, K , OHNWEILER, T , PLIES, E , (2014) EXPERIMENTAL RESULTS USING AN IMPROVED LOW-ENERGY FOCUSSED ION BEAM COLUMN WITH BOOSTER PRINCIPLE AND FREE-STANDING TARGET.OPTIK. VOL. 125. ISSUE 12. P. 2954-2958 19 90% 0
8 DRIESEL, W , DIETZSCH, C , MUHLE, R , (1996) IN SITU OBSERVATION OF THE TIP SHAPE OF AUGE LIQUID ALLOY ION SOURCES USING A HIGH VOLTAGE TRANSMISSION ELECTRON MICROSCOPE.JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B. VOL. 14. ISSUE 5. P. 3367-3380 29 94% 20
9 MAIR, GLR , (1996) ELECTROHYDRODYNAMIC INSTABILITIES AND THE ENERGY SPREAD OF IONS DRAWN FROM LIQUID METALS.JOURNAL OF PHYSICS D-APPLIED PHYSICS. VOL. 29. ISSUE 8. P. 2186-2192 22 100% 10
10 WORTMANN, M , LUDWIG, A , MEIJER, J , REUTER, D , WIECK, AD , (2013) HIGH-RESOLUTION MASS SPECTROMETER FOR LIQUID METAL ION SOURCES.REVIEW OF SCIENTIFIC INSTRUMENTS. VOL. 84. ISSUE 9. P. - 18 75% 0

Classes with closest relation at Level 1


Rank Class id link
1 4332 ELECTRON BEAM INDUCED DEPOSITION//FOCUSED ION BEAM//FOCUSED ELECTRON BEAM INDUCED DEPOSITION
2 21913 STENCIL LITHOGRAPHY//NANOSYST MFG//STRESS INDUCED DEFORMATION
3 26307 SURFACE NANOHOLES//LEHRSTUHL ADHAS INTERPHASEN POLYMEREN//UNITE MICROELECT OPTOELECT POLYMERE
4 16154 PROD DESIGN TECHNOL//CORE LENS//THIN LENS APPROXIMATION
5 5528 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B//PROXIMITY EFFECT CORRECTION//ELECTRON BEAM LITHOGRAPHY
6 19858 TECHNICAL PHYSICS//OPTICALLY INHOMOGENEOUS MEDIUM//STRUCTURED LASER RADIATION
7 14691 SINGLE ATOM TIP//SUR E MODIFICAT//FACETING
8 17997 SIMS MICROSCOPY//ION MICROSCOPY//NEUTRON CAPTURE RADIOGRAPHY
9 20392 CANONICAL ABERRATION THEORY//OPT PHYS ELECT ENGN//MAGNETIC SPECTROMETERS
10 6628 ELECTROSPRAY//ELECTROHYDRODYNAMIC ATOMIZATION//ELECTROSTATIC ATOMIZATION

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