Class information for:
Level 1: SURFACE NANOHOLES//LEHRSTUHL ADHAS INTERPHASEN POLYMEREN//UNITE MICROELECT OPTOELECT POLYMERE

Basic class information
Class id #P Avg. number of
references		 Database coverage
of references
26307 258 17.7 58%


Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
2 4 MATERIALS SCIENCE, MULTIDISCIPLINARY//PHYSICS, APPLIED//PHYSICS, CONDENSED MATTER 2836879
314 3       ULTRAMICROSCOPY//MICROSCOPY//JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 39933
720 2             JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B//CHEMICALLY AMPLIFIED RESIST//JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY 12751
26307 1                   SURFACE NANOHOLES//LEHRSTUHL ADHAS INTERPHASEN POLYMEREN//UNITE MICROELECT OPTOELECT POLYMERE 258

Terms with highest relevance score


rank Term termType Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 SURFACE NANOHOLES authKW 236708 1% 100% 2
2 LEHRSTUHL ADHAS INTERPHASEN POLYMEREN address 157804 1% 67% 2
3 UNITE MICROELECT OPTOELECT POLYMERE address 157804 1% 67% 2
4 UNITE MICROELECT OPTOELECT POLYME address 133144 1% 38% 3
5 1 MEVSI DAMAGE authKW 118354 0% 100% 1
6 2D PBG authKW 118354 0% 100% 1
7 3 NM LINES AND SPACES authKW 118354 0% 100% 1
8 AL AND AL ALLOYS authKW 118354 0% 100% 1
9 ATOMIC FABRICATION authKW 118354 0% 100% 1
10 ATOMISTIC FABRICATION authKW 118354 0% 100% 1

Web of Science journal categories


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 Physics, Applied 2313 60% 0% 155
2 Microscopy 1568 9% 0% 22
3 Nanoscience & Nanotechnology 907 21% 0% 53
4 Physics, Condensed Matter 485 24% 0% 62
5 Materials Science, Multidisciplinary 390 29% 0% 75
6 Nuclear Science & Technology 245 10% 0% 25
7 Metallurgy & Metallurgical Engineering 198 10% 0% 26
8 Engineering, Electrical & Electronic 168 17% 0% 44
9 Materials Science, Coatings & Films 124 5% 0% 14
10 Instruments & Instrumentation 114 7% 0% 19

Address terms


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 LEHRSTUHL ADHAS INTERPHASEN POLYMEREN 157804 1% 67% 2
2 UNITE MICROELECT OPTOELECT POLYMERE 157804 1% 67% 2
3 UNITE MICROELECT OPTOELECT POLYME 133144 1% 38% 3
4 DESARROLLO TECNOL IND QUIM CONICET 118354 0% 100% 1
5 ELECT MATH OPT 118354 0% 100% 1
6 MINACOMCNRSUMR 6172 118354 0% 100% 1
7 NANOSTRUCT TECHNOL GRP 118354 0% 100% 1
8 PECUMR 6283LUNAM 118354 0% 100% 1
9 POLE LIMOUSIN SCI TECHNOL INFORMAT COMMUN 118354 0% 100% 1
10 UMOP 67624 2% 14% 4

Journals


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 7739 13% 0% 33
2 PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES 2629 3% 0% 9
3 INSTITUTE OF PHYSICS CONFERENCE SERIES 2364 5% 0% 14
4 PHILOSOPHICAL MAGAZINE LETTERS 2005 3% 0% 7
5 JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 1088 7% 0% 17
6 ULTRAMICROSCOPY 754 2% 0% 6
7 PHILOSOPHICAL MAGAZINE 735 2% 0% 5
8 NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 522 5% 0% 12
9 MICROELECTRONIC ENGINEERING 410 2% 0% 6
10 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 399 3% 0% 7

Author Key Words


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class		 LCSH search Wikipedia search
1 SURFACE NANOHOLES 236708 1% 100% 2 Search SURFACE+NANOHOLES Search SURFACE+NANOHOLES
2 1 MEVSI DAMAGE 118354 0% 100% 1 Search 1+MEVSI+DAMAGE Search 1+MEVSI+DAMAGE
3 2D PBG 118354 0% 100% 1 Search 2D+PBG Search 2D+PBG
4 3 NM LINES AND SPACES 118354 0% 100% 1 Search 3+NM+LINES+AND+SPACES Search 3+NM+LINES+AND+SPACES
5 AL AND AL ALLOYS 118354 0% 100% 1 Search AL+AND+AL+ALLOYS Search AL+AND+AL+ALLOYS
6 ATOMIC FABRICATION 118354 0% 100% 1 Search ATOMIC+FABRICATION Search ATOMIC+FABRICATION
7 ATOMISTIC FABRICATION 118354 0% 100% 1 Search ATOMISTIC+FABRICATION Search ATOMISTIC+FABRICATION
8 CRITICAL VOLTAGES 118354 0% 100% 1 Search CRITICAL+VOLTAGES Search CRITICAL+VOLTAGES
9 DENSITY OF VALENCE STATES 118354 0% 100% 1 Search DENSITY+OF+VALENCE+STATES Search DENSITY+OF+VALENCE+STATES
10 ECR ETCHING AT LOW TEMPERATURE 118354 0% 100% 1 Search ECR+ETCHING+AT+LOW+TEMPERATURE Search ECR+ETCHING+AT+LOW+TEMPERATURE

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.


Rank Reference # ref.
in cl.		 Shr. of ref. in
cl.		 Citations
1 DEY, RK , CUI, B , (2014) ELECTRON BEAM LITHOGRAPHY WITH FEEDBACK USING IN SITU SELF-DEVELOPED RESIST.NANOSCALE RESEARCH LETTERS. VOL. 9. ISSUE . P. - 13 62% 1
2 CHEN, GS , HUMPHREYS, CJ , (1999) STUDY OF SAMPLE THICKNESS DEPENDENCE IN ELECTRON-BEAM IRRADIATION OF SELF-DEVELOPING INORGANIC MATERIALS.JOURNAL OF APPLIED PHYSICS. VOL. 85. ISSUE 1. P. 148-152 11 100% 5
3 HOWITT, DG , CHEN, SJ , GIERHART, BC , SMITH, RL , COLLINS, SD , (2008) THE ELECTRON BEAM HOLE DRILLING OF SILICON NITRIDE THIN FILMS.JOURNAL OF APPLIED PHYSICS. VOL. 103. ISSUE 2. P. - 11 58% 26
4 CHEN, GS , (1999) INVESTIGATION OF ELECTRON-BEAM-INDUCED PHASE TRANSITIONS IN AMORPHOUS ALUMINUM TRIFLUORIDE THIN FILMS USING TRANSMISSION ELECTRON MICROSCOPY.JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A. VOL. 17. ISSUE 2. P. 403-410 11 79% 8
5 KIM, HM , LEE, MH , KIM, KB , (2011) THEORETICAL AND EXPERIMENTAL STUDY OF NANOPORE DRILLING BY A FOCUSED ELECTRON BEAM IN TRANSMISSION ELECTRON MICROSCOPY.NANOTECHNOLOGY. VOL. 22. ISSUE 27. P. - 13 45% 10
6 DEY, RK , CUI, B , (2013) STITCHING ERROR REDUCTION IN ELECTRON BEAM LITHOGRAPHY WITH IN-SITU FEEDBACK USING SELF-DEVELOPING RESIST.JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B. VOL. 31. ISSUE 6. P. - 8 67% 0
7 CHEN, GS , LEE, PY , BOOTHROYD, CB , HUMPHREYS, CJ , (2002) CRYSTALLIZATION TRANSFORMATIONS IN VACUUM-DEPOSITED AMORPHOUS ALUMINUM FLUORIDE SELF-DEVELOPING THIN-FILM RESISTS INDUCED BY ELECTRON-BEAM IRRADIATION.JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A. VOL. 20. ISSUE 3. P. 986-990 7 100% 4
8 KIZUKA, T , KAWASAKI, M , (2001) A SINGLE VACANCY CHAIN AND ITS BUNDLE IN MAGNESIUM OXIDE AS LINE-TYPE LATTICE DEFECTS.JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS. VOL. 40. ISSUE 1. P. 428-429 8 89% 1
9 KIZUKA, T , YANAKA, T , (1999) ATOMIC-SCALE ELECTRON BEAM PROCESSING.JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS. VOL. 38. ISSUE 3A. P. 1595-1595 7 100% 2
10 CHEN, SJ , HOWITT, DG , GIERHART, BC , SMITH, RL , COLLINS, SD , (2009) THE APPLICATIONS OF IN SITU ELECTRON ENERGY LOSS SPECTROSCOPY TO THE STUDY OF ELECTRON BEAM NANOFABRICATION.MICROSCOPY AND MICROANALYSIS. VOL. 15. ISSUE 3. P. 204 -212 9 56% 4

Classes with closest relation at Level 1


Rank Class id link
1 35841 QAS//2 CHLORO 1 1 2 TRIFLUOROETHYL METHYL ETHER//ANHYDROUS FLUORINE GAS
2 18745 ELECTRON BEAM LITHOGRAPHY//HSQ//HYDROGEN SILSESQUIOXANE
3 19821 ALKALI ION MIGRATION//ETUD MAT PROC ACTIF//LECL
4 8222 LIQUID METAL ION SOURCE//ION BEAMS MAT//ALLOY LIQUID METAL ION SOURCES
5 29494 FERROMAGNETIC SINGLE ELECTRON TRANSISTOR//FERROMAGNETIC TUNNEL JUNCTION//TUNNEL MAGNETORESISTANCE
6 4332 ELECTRON BEAM INDUCED DEPOSITION//FOCUSED ION BEAM//FOCUSED ELECTRON BEAM INDUCED DEPOSITION
7 5528 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B//PROXIMITY EFFECT CORRECTION//ELECTRON BEAM LITHOGRAPHY
8 23789 INTERNAL MULTIPLICATIVE NOISE//ADSORBED MONOATOMIC LAYERS//ALLGEMEINE METALLKUNDE METTALPHYS
9 18797 PODOLSK BRANCH//TUNGSTEN ATOMS//TIME RESOLVED HREM
10 10021 MICROSCOPY//ULTRAMICROSCOPY//EFTEM

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