Class information for:
Level 1: ELECTRON BEAM INDUCED DEPOSITION//FOCUSED ION BEAM//FOCUSED ELECTRON BEAM INDUCED DEPOSITION

Basic class information
Class id #P Avg. number of
references		 Database coverage
of references
4332 1803 23.8 72%


Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
2 4 MATERIALS SCIENCE, MULTIDISCIPLINARY//PHYSICS, APPLIED//PHYSICS, CONDENSED MATTER 2836879
314 3       ULTRAMICROSCOPY//MICROSCOPY//JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 39933
720 2             JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B//CHEMICALLY AMPLIFIED RESIST//JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY 12751
4332 1                   ELECTRON BEAM INDUCED DEPOSITION//FOCUSED ION BEAM//FOCUSED ELECTRON BEAM INDUCED DEPOSITION 1803

Terms with highest relevance score


rank Term termType Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 ELECTRON BEAM INDUCED DEPOSITION authKW 1104908 5% 75% 87
2 FOCUSED ION BEAM authKW 578702 11% 17% 197
3 FOCUSED ELECTRON BEAM INDUCED DEPOSITION authKW 512252 2% 92% 33
4 HIGH VOLTAGE ELE ON MICROSCOPY STN address 219911 2% 38% 34
5 FIB authKW 202467 5% 15% 82
6 FIB CVD authKW 186275 1% 100% 11
7 HELIUM ION MICROSCOPE authKW 158746 1% 63% 15
8 FOCUSED ION BEAM CHEMICAL VAPOR DEPOSITION FIB CVD authKW 157614 1% 85% 11
9 FOCUSED ION BEAM CHEMICAL VAPOR DEPOSITION authKW 152407 0% 100% 9
10 HELIUM ION MICROSCOPY authKW 130990 1% 37% 21

Web of Science journal categories


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with term
in class
1 Nanoscience & Nanotechnology 27306 41% 0% 748
2 Microscopy 23681 12% 1% 225
3 Physics, Applied 16763 61% 0% 1102
4 Engineering, Electrical & Electronic 3404 27% 0% 485
5 Materials Science, Multidisciplinary 3049 31% 0% 550
6 Materials Science, Coatings & Films 774 5% 0% 93
7 Instruments & Instrumentation 719 7% 0% 127
8 Physics, Condensed Matter 331 9% 0% 166
9 Optics 273 7% 0% 118
10 Engineering, Manufacturing 135 2% 0% 32

Address terms


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 HIGH VOLTAGE ELE ON MICROSCOPY STN 219911 2% 38% 34
2 LASTI 86265 2% 18% 29
3 NANOMECH NANOPATTERNING GRP 67736 0% 100% 4
4 ALIS BUSINESS UNIT 60476 0% 71% 5
5 ELE ON MICROSCOPY NANOANAL 51487 1% 18% 17
6 ION MICROSCOPY INNOVAT 45155 0% 67% 4
7 CARL ZEISS MICROSCOPY 38100 0% 75% 3
8 HIGH VOLTAGE ELECT MICROSCOPY STN 34564 0% 29% 7
9 CHEM 56 33868 0% 100% 2
10 CRANN ADV MICROSCOPY 33864 0% 50% 4

Journals


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 85074 16% 2% 289
2 MICROSCOPY AND MICROANALYSIS 18500 2% 2% 44
3 NANOTECHNOLOGY 16656 6% 1% 107
4 MICROELECTRONIC ENGINEERING 16255 5% 1% 99
5 PRAKTISCHE METALLOGRAPHIE-PRACTICAL METALLOGRAPHY 15511 1% 4% 24
6 BEILSTEIN JOURNAL OF NANOTECHNOLOGY 9252 1% 2% 24
7 SCANNING 6210 1% 1% 25
8 JOURNAL OF ELECTRON MICROSCOPY 6130 1% 1% 26
9 MICRON 5240 2% 1% 28
10 ULTRAMICROSCOPY 4093 2% 1% 37

Author Key Words


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class		 LCSH search Wikipedia search
1 ELECTRON BEAM INDUCED DEPOSITION 1104908 5% 75% 87 Search ELECTRON+BEAM+INDUCED+DEPOSITION Search ELECTRON+BEAM+INDUCED+DEPOSITION
2 FOCUSED ION BEAM 578702 11% 17% 197 Search FOCUSED+ION+BEAM Search FOCUSED+ION+BEAM
3 FOCUSED ELECTRON BEAM INDUCED DEPOSITION 512252 2% 92% 33 Search FOCUSED+ELECTRON+BEAM+INDUCED+DEPOSITION Search FOCUSED+ELECTRON+BEAM+INDUCED+DEPOSITION
4 FIB 202467 5% 15% 82 Search FIB Search FIB
5 FIB CVD 186275 1% 100% 11 Search FIB+CVD Search FIB+CVD
6 HELIUM ION MICROSCOPE 158746 1% 63% 15 Search HELIUM+ION+MICROSCOPE Search HELIUM+ION+MICROSCOPE
7 FOCUSED ION BEAM CHEMICAL VAPOR DEPOSITION FIB CVD 157614 1% 85% 11 Search FOCUSED+ION+BEAM+CHEMICAL+VAPOR+DEPOSITION+FIB+CVD Search FOCUSED+ION+BEAM+CHEMICAL+VAPOR+DEPOSITION+FIB+CVD
8 FOCUSED ION BEAM CHEMICAL VAPOR DEPOSITION 152407 0% 100% 9 Search FOCUSED+ION+BEAM+CHEMICAL+VAPOR+DEPOSITION Search FOCUSED+ION+BEAM+CHEMICAL+VAPOR+DEPOSITION
9 HELIUM ION MICROSCOPY 130990 1% 37% 21 Search HELIUM+ION+MICROSCOPY Search HELIUM+ION+MICROSCOPY
10 EBID 130258 1% 77% 10 Search EBID Search EBID

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.


Rank Reference # ref. in
cl.		 Shr. of ref. in
cl.		 Citations
1 UTKE, I , HOFFMANN, P , MELNGAILIS, J , (2008) GAS-ASSISTED FOCUSED ELECTRON BEAM AND ION BEAM PROCESSING AND FABRICATION.JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B. VOL. 26. ISSUE 4. P. 1197 -1276 283 64% 417
2 VAN DORP, WF , HAGEN, CW , (2008) A CRITICAL LITERATURE REVIEW OF FOCUSED ELECTRON BEAM INDUCED DEPOSITION.JOURNAL OF APPLIED PHYSICS. VOL. 104. ISSUE 8. P. - 136 87% 202
3 BOTMAN, A , MULDERS, JJL , HAGEN, CW , (2009) CREATING PURE NANOSTRUCTURES FROM ELECTRON-BEAM-INDUCED DEPOSITION USING PURIFICATION TECHNIQUES: A TECHNOLOGY PERSPECTIVE.NANOTECHNOLOGY. VOL. 20. ISSUE 37. P. - 119 86% 122
4 DE TERESA, JM , FERNANDEZ-PACHECO, A , CORDOBA, R , SERRANO-RAMON, L , SANGIAO, S , IBARRA, MR , (2016) REVIEW OF MAGNETIC NANOSTRUCTURES GROWN BY FOCUSED ELECTRON BEAM INDUCED DEPOSITION (FEBID).JOURNAL OF PHYSICS D-APPLIED PHYSICS. VOL. 49. ISSUE 24. P. - 110 64% 4
5 KIM, CS , AHN, SH , JANG, DY , (2012) REVIEW: DEVELOPMENTS IN MICRO/NANOSCALE FABRICATION BY FOCUSED ION BEAMS.VACUUM. VOL. 86. ISSUE 8. P. 1014 -1035 110 60% 32
6 RANDOLPH, SJ , FOWLKES, JD , RACK, PD , (2006) FOCUSED, NANOSCALE ELECTRON-BEAM-INDUCED DEPOSITION AND ETCHING.CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES. VOL. 31. ISSUE 3. P. 55 -89 79 65% 233
7 BELIC, D , SHAWRAV, MM , GAVAGNIN, M , STOGER-POLLACH, M , WANZENBOECK, HD , BERTAGNOLLI, E , (2015) DIRECT-WRITE DEPOSITION AND FOCUSED-ELECTRON-BEAM-INDUCED PURIFICATION OF GOLD NANOSTRUCTURES.ACS APPLIED MATERIALS & INTERFACES. VOL. 7. ISSUE 4. P. 2467 -2479 53 91% 8
8 SILVIS-CIVIDJIAN, N , HAGEN, CW , (2006) ADVANCES IN IMAGING AND ELECTRON PHYSICS, VOL 143.ADVANCES IN IMAGING AND ELECTRON PHYSICS, VOL 143. VOL. 143. ISSUE . P. 1 -235 126 51% 14
9 MURAKAMI, K , TAKAI, M , (2015) NANO ELECTRON SOURCE FABRICATED BY BEAM-INDUCED DEPOSITION AND ITS UNIQUE FEATURE.MICROELECTRONIC ENGINEERING. VOL. 132. ISSUE . P. 74 -82 69 70% 0
10 ROBERTS, NA , FOWLKES, JD , MAGEL, GA , RACK, PD , (2013) ENHANCED MATERIAL PURITY AND RESOLUTION VIA SYNCHRONIZED LASER ASSISTED ELECTRON BEAM INDUCED DEPOSITION OF PLATINUM.NANOSCALE. VOL. 5. ISSUE 1. P. 408 -415 48 92% 19

Classes with closest relation at Level 1


Rank Class id link
1 8222 LIQUID METAL ION SOURCE//ION BEAMS MAT//ALLOY LIQUID METAL ION SOURCES
2 28322 ULTRAMICROTOMY//LOW ANGLE ION MILLING//MAT SCI PROD TECHNOL
3 26307 SURFACE NANOHOLES//LEHRSTUHL ADHAS INTERPHASEN POLYMEREN//UNITE MICROELECT OPTOELECT POLYMERE
4 37125 TUNGSTEN NANOWIRES//ELECTROCHEMICAL NANOSYSTEM TECHNOLOGY//TITANIUM NANOWIRE
5 20107 ELECTRON TOMOGRAPHY//3D CHEMICAL ANALYSIS//3D MICROANALYSIS
6 21518 CARBON NANOTUBE TIPS//CARBON NANOTUBE PROBES//CARDIAC BIOPHYS BIOENGN
7 35151 ELECTRICAL NANOWELDING//NANOJOINING//NANOWELDING
8 21812 PT CR CO MULTILAYER//COCRPT TERNARY ALLOY//UPR 6412
9 18745 ELECTRON BEAM LITHOGRAPHY//HSQ//HYDROGEN SILSESQUIOXANE
10 7443 ION SPUTTERING//NANORIPPLES//RIPPLES

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