Class information for:
Level 2: PLASMA POLYMERIZATION//LOW K//PLASMA PROCESSES AND POLYMERS

Basic class information
Class id #P Avg. number of
references		 Database coverage
of references
1545 7423 25.2 64%


Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
2 4 MATERIALS SCIENCE, MULTIDISCIPLINARY//PHYSICS, APPLIED//PHYSICS, CONDENSED MATTER 2836879
567 3       PLASMA POLYMERIZATION//PLASMA PROCESSES AND POLYMERS//RADIATION GRAFTING 16936
1545 2             PLASMA POLYMERIZATION//LOW K//PLASMA PROCESSES AND POLYMERS 7423
2036 1                   LOW K//LOW K DIELECTRICS//LOW K MATERIALS 2378
2163 1                   PLASMA POLYMERIZATION//PLASMA PROCESSES AND POLYMERS//PLASMA POLYMER 2336
15587 1                   INITIATED CHEMICAL VAPOR DEPOSITION//ICVD//POLYP XYLYLENE 703
20485 1                   FLUORINATED AMORPHOUS CARBON//A C F//FLUORINATED AMORPHOUS CARBON FILMS 458
21018 1                   C S AU FILM//HF DISSOCIATION//MOBILITY COALESCENCE 436
22357 1                   PLASMA POLYMERIZATION//GEORGE SUDARSHAN PHYS COMP SCI//RF PLASMA POLYMERIZATION 384
24420 1                   DEPOSITION POLYMERIZATION//VAPOR DEPOSITION POLYMERIZATION//INTEGRATED SHADOW MASK 313
31436 1                   LM FFM//NANOPERIOD MULTILAYER FILM//MAGNETIC HARD DISK 153
33525 1                   IONCONDUCTIVE MEMBRANE//PROTON TRANSPORT NUMBER//ALCOHOL PLASMA POLYMERIZATION 123
36951 1                   SUPERCONDUCTORS OXIDES INNOVAT MAT DEVIC//MAT SCI SEVILLE ICMSE//NANOTECHNOL SUR ES 70
36998 1                   SELF ASSEMBLED PHOSPHOLIPID LAYER//PLASMA POLYMERIZED PROPARGYL ALCOHOL//PLASMA IRRADIATION 69

Terms with highest relevance score


rank Term termType Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 PLASMA POLYMERIZATION authKW 1396472 8% 57% 597
2 LOW K authKW 452617 3% 56% 198
3 PLASMA PROCESSES AND POLYMERS journal 408267 5% 25% 400
4 PLASMA POLYMER authKW 370587 2% 63% 144
5 LOW K DIELECTRICS authKW 274255 2% 60% 112
6 LOW K MATERIALS authKW 166988 1% 63% 65
7 PLASMA POLYMERISATION authKW 162718 1% 65% 61
8 PLASMA PROC TECHNOL address 146187 1% 83% 43
9 SIOC H FILMS authKW 139797 0% 100% 34
10 LOW DIELECTRIC CONSTANT authKW 126312 1% 39% 79

Web of Science journal categories


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with term
in class
1 Materials Science, Coatings & Films 61755 21% 1% 1558
2 Physics, Applied 44571 50% 0% 3698
3 Polymer Science 17251 19% 0% 1405
4 Physics, Condensed Matter 10470 21% 0% 1570
5 Materials Science, Multidisciplinary 9150 27% 0% 1978
6 Nanoscience & Nanotechnology 6157 11% 0% 782
7 Physics, Fluids & Plasmas 5545 7% 0% 532
8 Electrochemistry 1866 5% 0% 360
9 Materials Science, Biomaterials 1489 3% 0% 192
10 Engineering, Electrical & Electronic 1196 10% 0% 742

Address terms


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 PLASMA PROC TECHNOL 146187 1% 83% 43
2 SUR E SCI PLASMA TECHNOL 87799 1% 43% 50
3 NANO THIN FILM MAT 85628 0% 77% 27
4 LOG TECHNOL DEV 83274 1% 43% 47
5 MAWSON 64015 1% 18% 86
6 SUR E INTER E ANAL 45924 0% 62% 18
7 NANOTHIN FILM MAT 35532 0% 79% 11
8 MECH ENERGY PROD ENGN 33939 0% 52% 16
9 XPEQT 33303 0% 90% 9
10 MACROMOL PHYS 32248 1% 14% 57

Journals


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 PLASMA PROCESSES AND POLYMERS 408267 5% 25% 400
2 THIN SOLID FILMS 34980 8% 2% 560
3 MICROELECTRONIC ENGINEERING 23202 3% 2% 241
4 SURFACE & COATINGS TECHNOLOGY 19173 4% 2% 304
5 CHEMICAL VAPOR DEPOSITION 14288 1% 6% 59
6 APPLIED POLYMER SYMPOSIA 13638 0% 24% 14
7 PLASMAS AND POLYMERS 11829 0% 26% 11
8 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 11541 3% 1% 202
9 PLASMA CHEMISTRY AND PLASMA PROCESSING 9568 1% 4% 58
10 JOURNAL OF THE ELECTROCHEMICAL SOCIETY 6700 3% 1% 227

Author Key Words


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class		 LCSH search Wikipedia search
1 PLASMA POLYMERIZATION 1396472 8% 57% 597 Search PLASMA+POLYMERIZATION Search PLASMA+POLYMERIZATION
2 LOW K 452617 3% 56% 198 Search LOW+K Search LOW+K
3 PLASMA POLYMER 370587 2% 63% 144 Search PLASMA+POLYMER Search PLASMA+POLYMER
4 LOW K DIELECTRICS 274255 2% 60% 112 Search LOW+K+DIELECTRICS Search LOW+K+DIELECTRICS
5 LOW K MATERIALS 166988 1% 63% 65 Search LOW+K+MATERIALS Search LOW+K+MATERIALS
6 PLASMA POLYMERISATION 162718 1% 65% 61 Search PLASMA+POLYMERISATION Search PLASMA+POLYMERISATION
7 SIOC H FILMS 139797 0% 100% 34 Search SIOC+H+FILMS Search SIOC+H+FILMS
8 LOW DIELECTRIC CONSTANT 126312 1% 39% 79 Search LOW+DIELECTRIC+CONSTANT Search LOW+DIELECTRIC+CONSTANT
9 PECVD 93781 2% 13% 173 Search PECVD Search PECVD
10 HEXAMETHYLDISILOXANE 89328 1% 43% 50 Search HEXAMETHYLDISILOXANE Search HEXAMETHYLDISILOXANE

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.


Rank Reference # ref. in
cl.		 Shr. of ref. in
cl.		 Citations
1 VOLKSEN, W , MILLER, RD , DUBOIS, G , (2010) LOW DIELECTRIC CONSTANT MATERIALS.CHEMICAL REVIEWS. VOL. 110. ISSUE 1. P. 56-110 197 51% 254
2 ALF, ME , ASATEKIN, A , BARR, MC , BAXAMUSA, SH , CHELAWAT, H , OZAYDIN-INCE, G , PETRUCZOK, CD , SREENIVASAN, R , TENHAEFF, WE , TRUJILLO, NJ , ET AL (2010) CHEMICAL VAPOR DEPOSITION OF CONFORMAL, FUNCTIONAL, AND RESPONSIVE POLYMER FILMS.ADVANCED MATERIALS. VOL. 22. ISSUE 18. P. 1993 -2027 205 46% 114
3 KING, SW , (2015) DIELECTRIC BARRIER, ETCH STOP, AND METAL CAPPING MATERIALS FOR STATE OF THE ART AND BEYOND METAL INTERCONNECTS.ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY. VOL. 4. ISSUE 1. P. N3029 -N3047 210 46% 9
4 THIRY, D , KONSTANTINIDIS, S , CORNIL, J , SNYDERS, R , (2016) PLASMA DIAGNOSTICS FOR THE LOW-PRESSURE PLASMA POLYMERIZATION PROCESS: A CRITICAL REVIEW.THIN SOLID FILMS. VOL. 606. ISSUE . P. 19 -44 139 70% 1
5 BAKLANOV, MR , DE MARNEFFE, JF , SHAMIRYAN, D , URBANOWICZ, AM , SHI, HL , RAKHIMOVA, TV , HUANG, H , HO, PS , (2013) PLASMA PROCESSING OF LOW-K DIELECTRICS.JOURNAL OF APPLIED PHYSICS. VOL. 113. ISSUE 4. P. - 109 69% 89
6 LIONTI, K , VOLKSEN, W , MAGBITANG, T , DARNON, M , DUBOIS, G , (2015) TOWARD SUCCESSFUL INTEGRATION OF POROUS LOW-K MATERIALS: STRATEGIES ADDRESSING PLASMA DAMAGE.ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY. VOL. 4. ISSUE 1. P. N3071 -N3083 81 93% 11
7 MAEX, K , BAKLANOV, MR , SHAMIRYAN, D , IACOPI, F , BRONGERSMA, SH , YANOVITSKAYA, ZS , (2003) LOW DIELECTRIC CONSTANT MATERIALS FOR MICROELECTRONICS.JOURNAL OF APPLIED PHYSICS. VOL. 93. ISSUE 11. P. 8793 -8841 91 62% 952
8 COCLITE, AM , HOWDEN, RM , BORRELLI, DC , PETRUCZOK, CD , YANG, R , YAGUE, JL , UGUR, A , CHEN, N , LEE, S , JO, WJ , ET AL (2013) 25TH ANNIVERSARY ARTICLE: CVD POLYMERS: A NEW PARADIGM FOR SURFACE MODIFICATION AND DEVICE FABRICATION.ADVANCED MATERIALS. VOL. 25. ISSUE 38. P. 5392-5422 95 64% 28
9 WU, C , LI, Y , BAKLANOV, MR , CROES, K , (2015) ELECTRICAL RELIABILITY CHALLENGES OF ADVANCED LOW-K DIELECTRICS.ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY. VOL. 4. ISSUE 1. P. N3065 -N3070 56 98% 7
10 SIOW, KS , BRITCHER, L , KUMAR, S , GRIESSER, HJ , (2006) PLASMA METHODS FOR THE GENERATION OF CHEMICALLY REACTIVE SURFACES FOR BIOMOLECULE IMMOBILIZATION AND CELL COLONIZATION - A REVIEW.PLASMA PROCESSES AND POLYMERS. VOL. 3. ISSUE 6-7. P. 392 -418 84 54% 464

Classes with closest relation at Level 2


Rank Class id link
1 1149 RADIATION GRAFTING//SOLID STATE ENGN//PLASMA TREATMENT
2 1021 DIAMOND LIKE CARBON//CARBON NITRIDE//DLC
3 1077 PLASMA ETCHING//JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A//JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
4 1119 PROTEIN ADSORPTION//MATERIALS SCIENCE, BIOMATERIALS//BLOOD COMPATIBILITY
5 2485 ELECTROMIGRATION//ELECTROMIGRATION EM//SOLID STATE DEWETTING
6 478 DIELECTRIC BARRIER DISCHARGE//NON THERMAL PLASMA//ATMOSPHERIC PRESSURE PLASMA
7 474 FLASH MEMORY//SONOS//NEGATIVE BIAS TEMPERATURE INSTABILITY NBTI
8 4113 DIRECT FLUORINATION//DIFFUSION PREDICTION//ETHYL FATTY ESTERS
9 3149 CLEANROOM//PHOTORESIST REMOVAL//MINIENVIRONMENT
10 3695 BENZOCYCLOBUTENE//O QUINODIMETHANE//ORTHO QUINODIMETHANES

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