Class information for:
Level 1: SYNCHROTRON RADIATION STIMULATED ETCHING//ADV SCI TECHNOL IND//VACUUM UV PHOTOSCI

Basic class information
Class id #P Avg. number of
references		 Database coverage
of references
23066 359 17.3 66%


Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
2 4 MATERIALS SCIENCE, MULTIDISCIPLINARY//PHYSICS, APPLIED//PHYSICS, CONDENSED MATTER 2836879
6 3       PHYSICS, APPLIED//IEEE TRANSACTIONS ON ELECTRON DEVICES//SILICON 155028
899 2             SURFACE SCIENCE//SILICON//SCANNING TUNNELING MICROSCOPY 11316
23066 1                   SYNCHROTRON RADIATION STIMULATED ETCHING//ADV SCI TECHNOL IND//VACUUM UV PHOTOSCI 359

Terms with highest relevance score


rank Term termType Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 SYNCHROTRON RADIATION STIMULATED ETCHING authKW 255168 1% 100% 3
2 ADV SCI TECHNOL IND address 213919 9% 8% 31
3 VACUUM UV PHOTOSCI address 177427 3% 19% 11
4 FLUID FILTER authKW 170112 1% 100% 2
5 MICROFLUID FILTER authKW 170112 1% 100% 2
6 SYNCHROTRON RADIATION EXCITED GROWTH authKW 170112 1% 100% 2
7 SUBSTRATE TEMPERATURE DEPENDENCE authKW 153098 1% 60% 3
8 ETCHED PATTERN authKW 113407 1% 67% 2
9 SYNCHROTRON RADIATION ABLATION authKW 113407 1% 67% 2
10 SYNCHROTRON RADIATION ETCHING authKW 113407 1% 67% 2

Web of Science journal categories


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 Physics, Applied 3196 60% 0% 215
2 Materials Science, Coatings & Films 1870 17% 0% 60
3 Instruments & Instrumentation 764 15% 0% 54
4 Nuclear Science & Technology 463 11% 0% 40
5 Nanoscience & Nanotechnology 319 11% 0% 39
6 Physics, Nuclear 292 9% 0% 33
7 Spectroscopy 212 7% 0% 26
8 Physics, Condensed Matter 209 14% 0% 52
9 Engineering, Electrical & Electronic 180 15% 0% 55
10 Physics, Atomic, Molecular & Chemical 138 9% 0% 32

Address terms


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 ADV SCI TECHNOL IND 213919 9% 8% 31
2 VACUUM UV PHOTOSCI 177427 3% 19% 11
3 BEHLEN PHYS 225 85056 0% 100% 1
4 CHEM KAMITOMIOKA 85056 0% 100% 1
5 DOCTORAL PROGRAM MECH ENGN 85056 0% 100% 1
6 ENERGY DENS 85056 0% 100% 1
7 KAZUSA ARC 85056 0% 100% 1
8 KONINKLIJKE SHELL AMSTERDAM 85056 0% 100% 1
9 REACT DYNAM UNIT 85056 0% 100% 1
10 SCI TECH S SETAGAYA KU 85056 0% 100% 1

Journals


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 OPTOELECTRONICS-DEVICES AND TECHNOLOGIES 45289 2% 8% 7
2 MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 6493 4% 0% 16
3 JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 5070 12% 0% 43
4 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 2885 6% 0% 22
5 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 1821 5% 0% 19
6 JOURNAL OF SYNCHROTRON RADIATION 1769 2% 0% 8
7 JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA 1711 3% 0% 11
8 APPLIED SURFACE SCIENCE 1255 6% 0% 23
9 ELECTRONICS AND COMMUNICATIONS IN JAPAN 1121 1% 0% 3
10 NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 945 5% 0% 19

Author Key Words


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class		 LCSH search Wikipedia search
1 SYNCHROTRON RADIATION STIMULATED ETCHING 255168 1% 100% 3 Search SYNCHROTRON+RADIATION+STIMULATED+ETCHING Search SYNCHROTRON+RADIATION+STIMULATED+ETCHING
2 FLUID FILTER 170112 1% 100% 2 Search FLUID+FILTER Search FLUID+FILTER
3 MICROFLUID FILTER 170112 1% 100% 2 Search MICROFLUID+FILTER Search MICROFLUID+FILTER
4 SYNCHROTRON RADIATION EXCITED GROWTH 170112 1% 100% 2 Search SYNCHROTRON+RADIATION+EXCITED+GROWTH Search SYNCHROTRON+RADIATION+EXCITED+GROWTH
5 SUBSTRATE TEMPERATURE DEPENDENCE 153098 1% 60% 3 Search SUBSTRATE+TEMPERATURE+DEPENDENCE Search SUBSTRATE+TEMPERATURE+DEPENDENCE
6 ETCHED PATTERN 113407 1% 67% 2 Search ETCHED+PATTERN Search ETCHED+PATTERN
7 SYNCHROTRON RADIATION ABLATION 113407 1% 67% 2 Search SYNCHROTRON+RADIATION+ABLATION Search SYNCHROTRON+RADIATION+ABLATION
8 SYNCHROTRON RADIATION ETCHING 113407 1% 67% 2 Search SYNCHROTRON+RADIATION+ETCHING Search SYNCHROTRON+RADIATION+ETCHING
9 3D NANOPROTOTYPING 85056 0% 100% 1 Search 3D+NANOPROTOTYPING Search 3D+NANOPROTOTYPING
10 50 NM PATTERN ETCHING 85056 0% 100% 1 Search 50+NM+PATTERN+ETCHING Search 50+NM+PATTERN+ETCHING

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.


Rank Reference # ref.
in cl.		 Shr. of ref. in
cl.		 Citations
1 TSAI, WC , WANG, SK , HE, TM , CHOU, LC , HSIEH, YC , LIAO, KY , CHEN, HC , WEN, CR , (2011) CONTINUOUS-TIME PHOTON-STIMULATED DESORPTION SPECTROSCOPY STUDIES ON SOFT X-RAY-INDUCED REACTIONS OF CF3BR ADSORBED ON SI(111)-7X7.JOURNAL OF CHEMICAL PHYSICS. VOL. 135. ISSUE 16. P. - 29 67% 0
2 TSAI, WC , WANG, SK , CHOU, LC , CHEN, J , WU, YH , CHEN, HC , WEN, CR , (2010) PHOTOLYSIS OF SF6 ADSORBED ON SI(111)-7 X 7 BY MONOCHROMATIC SOFT X-RAY.SURFACE SCIENCE. VOL. 604. ISSUE 17-18. P. 1494 -1501 26 67% 2
3 WEN, CR , JANG, CY , CHOU, LC , CHEN, J , WU, YH , CHANG, SC , TSAI, WC , LIU, CC , WANG, SK , SHAI, Y , (2007) SOFT X-RAY PHOTOREACTIONS OF CF3CL ADSORBED ON SI(111)-7X7 STUDIED BY CONTINUOUS-TIME PHOTON-STIMULATED DESORPTION SPECTROSCOPY NEAR F(1S) EDGE.JOURNAL OF CHEMICAL PHYSICS. VOL. 127. ISSUE 11. P. - 23 77% 3
4 CHOU, LC , WEN, CR , (2006) CONTINUOUS-TIME CORE-LEVEL PHOTON-STIMULATED DESORPTION SPECTROSCOPY FOR MONITORING SOFT X-RAY-INDUCED REACTIONS OF MOLECULES ADSORBED ON A SINGLE-CRYSTAL SURFACE.PHYSICAL REVIEW B. VOL. 73. ISSUE 19. P. - 26 67% 4
5 CHOU, LC , JANG, CY , WU, YH , TSAI, WC , WANG, SK , CHEN, J , CHANG, SC , LIU, CC , SHAI, Y , WEN, CR , (2008) PHOTON-EXPOSURE-DEPENDENT PHOTON-STIMULATED DESORPTION FOR OBTAINING PHOTOLYSIS CROSS SECTION OF MOLECULES ADSORBED ON SURFACE BY MONOCHROMATIC SOFT X-RAY PHOTONS.JOURNAL OF CHEMICAL PHYSICS. VOL. 129. ISSUE 21. P. - 26 57% 1
6 ROSENBERG, RA , FRIGO, SP , SIMONS, JK , (1994) SYNCHROTRON-RADIATION-INDUCED REACTIONS ON SURFACES - MECHANISMS AND APPLICATIONS.APPLIED SURFACE SCIENCE. VOL. 79-80. ISSUE . P. 47 -56 38 56% 28
7 URISU, T , YOSHIGOE, A , IMAIZUMI, Y , (1996) SYNCHROTRON RADIATION-STIMULATED SEMICONDUCTOR PROCESS AND NEW PROSPECTS OF CORE ELECTRON EXCITATION PHOTOCHEMISTRY.OPTOELECTRONICS-DEVICES AND TECHNOLOGIES. VOL. 11. ISSUE 1. P. 57 -70 28 65% 8
8 NAKANISHI, K , SUZUKI, H , KATOH, T , IMAI, S , NAKAYAMA, Y , MIKI, H , (1999) DEPOSITION OF POLYETHYLENE THIN FILMS USING SYNCHROTRON RADIATION ABLATION.JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS. VOL. 38. ISSUE 2A. P. 863 -867 21 78% 3
9 YAMAGUCHI, A , KIDO, H , UKITA, Y , KISHIHARA, M , UTSUMI, Y , (2016) ANISOTROPIC PYROCHEMICAL MICROETCHING OF POLY(TETRAFLUOROETHYLENE) INITIATED BY SYNCHROTRON RADIATION-INDUCED SCISSION OF MOLECULE BONDS.APPLIED PHYSICS LETTERS. VOL. 108. ISSUE 5. P. - 13 72% 0
10 UKITA, Y , KISHIHARA, M , KANDA, K , MATSUI, S , MOCHIJI, K , UTSUMI, Y , (2008) FABRICATION OF POLY(TETRAFLUOROETHYLENE) MICROPARTS BY HIGH-ENERGY X-RAY-INDUCED ETCHING.JAPANESE JOURNAL OF APPLIED PHYSICS. VOL. 47. ISSUE 1. P. 337 -341 11 100% 1

Classes with closest relation at Level 1


Rank Class id link
1 24018 PHYSICOCHIM MOLEC ORSAY//SURFACE STRUCTURE AND ROUGHNESS//ADSORBATE SUBSTRATE INTERACTIONS
2 6615 HYDROGEN SURFACTANT//MANA SATELLITE//DISILANE
3 24432 DIMETHYLALUMINUM HYDRIDE//DIMETHYLALUMINUMHYDRIDE DMAH//SELECTIVE AL CVD
4 8898 FREEFORM FABRICAT S//NEMISIS TEAM//LCVD
5 11962 ELECTRON STIMULATED DESORPTION ESD//EXCITED STATE ALKALI ATOMS//ELECTRON STIMULATED DESORPTION
6 5594 SOLID STATE TECHNOLOGY//AFTER CORROSION//AL SI CU ETCHING
7 25993 PROBE CARD//COMPLIANT INTERCONNECTS//MEMS PROBE CARD
8 1171 CORE EXCITATION//JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA//PHOTON STIMULATED DESORPTION PSD
9 25406 MSOS O P STRUCTURE//SI2H6 GAS//SEMI INSULATING POLYCRYSTALLINE SILICON
10 20485 FLUORINATED AMORPHOUS CARBON//A C F//FLUORINATED AMORPHOUS CARBON FILMS

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