Class information for:
Level 1: ELECTRON BEAM ANNEALING//RAFTER//ION BEAM SYNTHESIS

Basic class information
Class id #P Avg. number of
references		 Database coverage
of references
26620 250 17.7 63%


Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
2 4 MATERIALS SCIENCE, MULTIDISCIPLINARY//PHYSICS, APPLIED//PHYSICS, CONDENSED MATTER 2836879
628 3       SILICON CARBIDE//4H SIC//SIC 13252
671 2             SILICON CARBIDE//4H SIC//SIC 13252
26620 1                   ELECTRON BEAM ANNEALING//RAFTER//ION BEAM SYNTHESIS 250

Terms with highest relevance score


rank Term termType Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 ELECTRON BEAM ANNEALING authKW 1522057 7% 69% 18
2 RAFTER address 449691 4% 41% 9
3 ION BEAM SYNTHESIS authKW 390819 8% 16% 20
4 ION BEAM SYNTHESIS IBS authKW 325707 2% 67% 4
5 PB DIFFUSION authKW 325707 2% 67% 4
6 DUAL LOW ENERGY ION IMPLANTATION authKW 244283 1% 100% 2
7 NANOBOULDER authKW 244283 1% 100% 2
8 PB IMPLANTATION authKW 244283 1% 100% 2
9 SI NANOWHISKERS authKW 244283 1% 100% 2
10 SILICON NANOWHISKERS authKW 244283 1% 100% 2

Web of Science journal categories


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 Instruments & Instrumentation 2447 31% 0% 78
2 Nuclear Science & Technology 2170 28% 0% 69
3 Physics, Nuclear 2030 27% 0% 68
4 Materials Science, Coatings & Films 1587 18% 0% 46
5 Physics, Applied 1312 47% 0% 117
6 Physics, Atomic, Molecular & Chemical 1072 26% 0% 66
7 Materials Science, Multidisciplinary 445 31% 0% 78
8 Physics, Condensed Matter 401 22% 0% 56
9 Nanoscience & Nanotechnology 99 8% 0% 19
10 Engineering, Electrical & Electronic 28 9% 0% 22

Address terms


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 RAFTER 449691 4% 41% 9
2 UNESCO UNISA AFNET NANOSCI NANOTECHNOL 244283 1% 100% 2
3 FNRF 195421 2% 40% 4
4 AM JAIN 162854 1% 67% 2
5 ASSOCAITES UNITCNIMCSIC 122141 0% 100% 1
6 ELECT EME 122141 0% 100% 1
7 IONENSTRAHLPHYS MT FOR 122141 0% 100% 1
8 CEA DSM IRAMIS CNRS 61070 0% 50% 1
9 CNMUNITAT ASSOCIADA 61070 0% 50% 1
10 UNITAT ASSOCIADA CNM 54282 1% 22% 2

Journals


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 16898 26% 0% 66
2 PHILIPS TECHNICAL REVIEW 1525 0% 1% 1
3 THIN SOLID FILMS 1071 7% 0% 18
4 SURFACE & COATINGS TECHNOLOGY 891 5% 0% 12
5 CURRENT APPLIED PHYSICS 704 2% 0% 5
6 MIKROCHIMICA ACTA 662 2% 0% 4
7 FRESENIUS JOURNAL OF ANALYTICAL CHEMISTRY 350 2% 0% 4
8 APPLIED SURFACE SCIENCE 333 4% 0% 10
9 SOVIET POWDER METALLURGY AND METAL CERAMICS 330 0% 0% 1
10 VACUUM 313 2% 0% 5

Author Key Words


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class		 LCSH search Wikipedia search
1 ELECTRON BEAM ANNEALING 1522057 7% 69% 18 Search ELECTRON+BEAM+ANNEALING Search ELECTRON+BEAM+ANNEALING
2 ION BEAM SYNTHESIS 390819 8% 16% 20 Search ION+BEAM+SYNTHESIS Search ION+BEAM+SYNTHESIS
3 ION BEAM SYNTHESIS IBS 325707 2% 67% 4 Search ION+BEAM+SYNTHESIS+IBS Search ION+BEAM+SYNTHESIS+IBS
4 PB DIFFUSION 325707 2% 67% 4 Search PB+DIFFUSION Search PB+DIFFUSION
5 DUAL LOW ENERGY ION IMPLANTATION 244283 1% 100% 2 Search DUAL+LOW+ENERGY+ION+IMPLANTATION Search DUAL+LOW+ENERGY+ION+IMPLANTATION
6 NANOBOULDER 244283 1% 100% 2 Search NANOBOULDER Search NANOBOULDER
7 PB IMPLANTATION 244283 1% 100% 2 Search PB+IMPLANTATION Search PB+IMPLANTATION
8 SI NANOWHISKERS 244283 1% 100% 2 Search SI+NANOWHISKERS Search SI+NANOWHISKERS
9 SILICON NANOWHISKERS 244283 1% 100% 2 Search SILICON+NANOWHISKERS Search SILICON+NANOWHISKERS
10 SIC LAYER 183209 1% 50% 3 Search SIC+LAYER Search SIC+LAYER

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.


Rank Reference # ref.
in cl.		 Shr. of ref. in
cl.		 Citations
1 MARKWITZ, A , BAUMANN, H , DAVY, P , JOHNSON, PB , (2008) DIFFUSION OF PB IN CARBON ION-IMPLANTED SILICON: DISCOVERY OF A NEW CRYSTALLINE PHASE AFTER ELECTRON BEAM ANNEALING.VACUUM. VOL. 82. ISSUE 11. P. 1306-1311 22 73% 1
2 VELISA, G , TROCELLIER, P , THOME, L , VAUBAILLON, S , MIRO, S , SERRUYS, Y , BORDAS, E , MESLIN, E , MYLONAS, S , COULON, PE , ET AL (2013) TAILORING OF SIC NANOPRECIPITATES FORMED IN SI.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS. VOL. 307. ISSUE . P. 165 -170 21 66% 1
3 NUSSUPOV, KK , BEISENKHANOV, NB , VALITOVA, IV , MIT, KA , MUKHAMEDSHINA, DM , DMITRIEVA, EA , (2008) STRUCTURE PROPERTIES OF CARBON IMPLANTED SILICON LAYERS.JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS. VOL. 19. ISSUE . P. S254-S262 16 94% 1
4 MARKWITZ, A , FANG, F , JOHNSON, PB , (2011) DUAL N/PB ION-IMPLANTED SI: TEMPERATURE DEPENDENCE OF THE NOVEL SHIFT OF THE PB PEAK UNDER ELECTRON BEAM ANNEALING.APPLIED SURFACE SCIENCE. VOL. 257. ISSUE 11. P. 4856-4862 15 83% 1
5 BEISENKHANOV, NB , (2011) CRYSTALLIZATION OF BETA-SIC IN THIN SICX LAYERS (X=0.03-1.40) SYNTHESIZED BY MULTIPLE IMPLANTATION OF CARBON IONS INTO SILICON.TECHNICAL PHYSICS. VOL. 56. ISSUE 2. P. 274-281 14 88% 0
6 MARKWITZ, A , FANG, F , KAISER, J , CARDER, DA , KENNEDY, J , ZULICKE, U , JOHNSON, PB , (2010) ELECTRON BEAM ANNEALING OF FE+ IMPLANTED SI NANOSTRUCTURES.JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY. VOL. 10. ISSUE 10. P. 6556-6561 14 67% 3
7 NUSUPOV, KK , BEISENKHANOV, NB , VALITOVA, IV , DMITRIEVA, EA , ZHUMAGALIULY, D , SHILENKO, EA , (2006) STRUCTURAL STUDIES OF THIN SILICON LAYERS REPEATEDLY IMPLANTED BY CARBON IONS.PHYSICS OF THE SOLID STATE. VOL. 48. ISSUE 7. P. 1255-1267 12 86% 0
8 POUDEL, PR , ROUT, B , DIERCKS, DR , STRZHEMECHNY, YM , MCDANIEL, FD , (2011) FLUENCE DEPENDANT FORMATION OF BETA-SIC BY ION IMPLANTATION AND THERMAL ANNEALING.APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING. VOL. 104. ISSUE 1. P. 183-188 17 52% 3
9 LINDNER, JKN , (2003) HIGH-DOSE CARBON IMPLANTATIONS INTO SILICON: FUNDAMENTAL STUDIES FOR NEW TECHNOLOGICAL TRICKS.APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING. VOL. 77. ISSUE 1. P. 27 -38 24 44% 22
10 NUSSUPOV, KK , BEISENKHANOV, NB , ZHARIKOV, SK , BEISEMBETOV, IK , KENZHALIEV, BK , AKHMETOV, TK , SEITOV, BZ , (2014) STRUCTURE AND COMPOSITION OF SILICON CARBIDE FILMS SYNTHESIZED BY ION IMPLANTATION.PHYSICS OF THE SOLID STATE. VOL. 56. ISSUE 11. P. 2307 -2321 16 48% 0

Classes with closest relation at Level 1


Rank Class id link
1 12826 SIMOX//CONTACTLESS I V METHOD//BURIED OXIDE LAYER
2 7015 3C SIC//MONOMETHYLSILANE//FG NANOTECHNOL
3 35001 KICKER//FAST RISE//BEAM TRANSPORT LINES
4 27183 NEGATIVE ION IMPLANTATION//DELTA LAYERED NANOPARTICLES//SOL GEL TITANIUM OXIDE FILM
5 5652 AMORPHOUS SILICON CARBIDE//SILICON CARBON ALLOYS//A SIC H
6 7583 SICF SIC COMPOSITES//SIC SIC COMPOSITE//ADV ENERGY
7 15875 SIGEC//SI1 YCY//SI1 X YGEXCY
8 37133 SICGE//SI 6H SIC HETEROJUNCTION//SI 6H SIC
9 20305 SILICON CARBONITRIDE//SICN//SILICON CARBON NITRIDE
10 37707 MIAB WELDING//CATEDRA ROBOT SI SUDARE//MAGNETICALLY IMPELLED ARC BUTT MIAB WELDING

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