Class information for:
Level 1: METHYLTRICHLOROSILANE//HIGH TEMPERATURE CHEMICAL VAPOR DEPOSITION//ADV FIB COMPOSIT

Basic class information
Class id #P Avg. number of
references		 Database coverage
of references
23247 353 20.5 49%


Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
2 4 MATERIALS SCIENCE, MULTIDISCIPLINARY//PHYSICS, APPLIED//PHYSICS, CONDENSED MATTER 2836879
628 3       SILICON CARBIDE//4H SIC//SIC 13252
671 2             SILICON CARBIDE//4H SIC//SIC 13252
23247 1                   METHYLTRICHLOROSILANE//HIGH TEMPERATURE CHEMICAL VAPOR DEPOSITION//ADV FIB COMPOSIT 353

Terms with highest relevance score


rank Term termType Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 METHYLTRICHLOROSILANE authKW 288326 3% 33% 10
2 HIGH TEMPERATURE CHEMICAL VAPOR DEPOSITION authKW 115334 1% 67% 2
3 ADV FIB COMPOSIT address 86502 0% 100% 1
4 ANALYSIS OF GASEOUS SPECIES authKW 86502 0% 100% 1
5 AR DILUENT GAS authKW 86502 0% 100% 1
6 CNRS INPT ESA5071 address 86502 0% 100% 1
7 CO DEPOSITED SI authKW 86502 0% 100% 1
8 COMPETITIVE ADSORPTION MODEL authKW 86502 0% 100% 1
9 CVD MECHANISM authKW 86502 0% 100% 1
10 CVD MONITORING authKW 86502 0% 100% 1

Web of Science journal categories


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 Materials Science, Coatings & Films 3797 24% 0% 84
2 Materials Science, Ceramics 1750 14% 0% 50
3 Materials Science, Multidisciplinary 1066 39% 0% 139
4 Physics, Applied 608 28% 0% 100
5 Electrochemistry 269 8% 0% 28
6 Physics, Condensed Matter 195 14% 0% 50
7 Crystallography 187 7% 0% 24
8 Metallurgy & Metallurgical Engineering 80 6% 0% 21
9 METALLURGY & MINING 78 1% 0% 2
10 Physics, Multidisciplinary 60 8% 0% 27

Address terms


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 ADV FIB COMPOSIT 86502 0% 100% 1
2 CNRS INPT ESA5071 86502 0% 100% 1
3 E ORAT MAT ETUD STRUCT OPT ELE 86502 0% 100% 1
4 LCTSCNRS 86502 0% 100% 1
5 NAT DEF TECHNOL 86502 0% 100% 1
6 SPSCEAUB1 86502 0% 100% 1
7 STN C5 86502 0% 100% 1
8 UMRCNRSUJF 5614 86502 0% 100% 1
9 LOE CNRS 69199 1% 40% 2
10 CEASAFRAN 43250 0% 50% 1

Journals


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 CHEMICAL VAPOR DEPOSITION 14681 4% 1% 13
2 JOURNAL DE PHYSIQUE IV 3012 5% 0% 19
3 REVUE INTERNATIONALE DES HAUTES TEMPERATURES ET DES REFRACTAIRES 1676 1% 1% 2
4 JOURNAL OF THE AMERICAN CERAMIC SOCIETY 1640 5% 0% 19
5 SURFACE & COATINGS TECHNOLOGY 1587 5% 0% 19
6 HIGH TEMPERATURE AND MATERIALS SCIENCE 1252 0% 1% 1
7 THIN SOLID FILMS 1235 7% 0% 23
8 JOURNAL OF CRYSTAL GROWTH 1201 6% 0% 21
9 JOURNAL OF MATERIALS SCIENCE LETTERS 1117 3% 0% 12
10 JOURNAL OF INORGANIC MATERIALS 971 2% 0% 7

Author Key Words


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class		 LCSH search Wikipedia search
1 METHYLTRICHLOROSILANE 288326 3% 33% 10 Search METHYLTRICHLOROSILANE Search METHYLTRICHLOROSILANE
2 HIGH TEMPERATURE CHEMICAL VAPOR DEPOSITION 115334 1% 67% 2 Search HIGH+TEMPERATURE+CHEMICAL+VAPOR+DEPOSITION Search HIGH+TEMPERATURE+CHEMICAL+VAPOR+DEPOSITION
3 ANALYSIS OF GASEOUS SPECIES 86502 0% 100% 1 Search ANALYSIS+OF+GASEOUS+SPECIES Search ANALYSIS+OF+GASEOUS+SPECIES
4 AR DILUENT GAS 86502 0% 100% 1 Search AR+DILUENT+GAS Search AR+DILUENT+GAS
5 CO DEPOSITED SI 86502 0% 100% 1 Search CO+DEPOSITED+SI Search CO+DEPOSITED+SI
6 COMPETITIVE ADSORPTION MODEL 86502 0% 100% 1 Search COMPETITIVE+ADSORPTION+MODEL Search COMPETITIVE+ADSORPTION+MODEL
7 CVD MECHANISM 86502 0% 100% 1 Search CVD+MECHANISM Search CVD+MECHANISM
8 CVD MONITORING 86502 0% 100% 1 Search CVD+MONITORING Search CVD+MONITORING
9 CVD MTS 86502 0% 100% 1 Search CVD+MTS Search CVD+MTS
10 DEPOSITION RATE MEASUREMENTS 86502 0% 100% 1 Search DEPOSITION+RATE+MEASUREMENTS Search DEPOSITION+RATE+MEASUREMENTS

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.


Rank Reference # ref.
in cl.		 Shr. of ref. in
cl.		 Citations
1 CHOLLON, G , LANGLAIS, F , PLACIDE, M , WEISBECKER, P , (2012) TRANSIENT STAGES DURING THE CHEMICAL VAPOUR DEPOSITION OF SILICON CARBIDE FROM CH3SICL3/H-2: IMPACT ON THE PHYSICOCHEMICAL AND INTERFACIAL PROPERTIES OF THE COATINGS.THIN SOLID FILMS. VOL. 520. ISSUE 19. P. 6075 -6087 38 67% 2
2 DENG, JL , SU, KH , ZENG, QF , WANG, X , CHENG, LF , XU, YD , ZHANG, LT , (2009) THERMODYNAMICS OF THE PRODUCTION OF CONDENSED PHASES IN THE CVD OF METHYLTRICHLOROSILANE PYROLYSIS.CHEMICAL VAPOR DEPOSITION. VOL. 15. ISSUE 10-12. P. 281-290 39 57% 2
3 FUKUSHIMA, Y , SATO, N , FUNATO, Y , SUGIURA, H , HOTOZUKA, K , MOMOSE, T , SHIMOGAKI, Y , (2013) MULTI-SCALE ANALYSIS AND ELEMENTARY REACTION SIMULATION OF SIC-CVD USING CH3SICL3/H-2.ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY. VOL. 2. ISSUE 11. P. P492-P497 26 70% 0
4 GE, YB , GORDON, MS , BATTAGLIA, F , FOX, RO , (2007) THEORETICAL STUDY OF THE PYROLYSIS OF METHYLTRICHLOROSILANE IN THE GAS PHASE. 1. THERMODYNAMICS.JOURNAL OF PHYSICAL CHEMISTRY A. VOL. 111. ISSUE 8. P. 1462-1474 25 57% 17
5 YANG, Y , ZHANG, WG , (2009) KINETIC AND MICROSTRUCTURE OF SIC DEPOSITED FROM SICL4-CH4-H-2.CHINESE JOURNAL OF CHEMICAL ENGINEERING. VOL. 17. ISSUE 3. P. 419-426 16 84% 5
6 LU, CY , CHENG, LF , ZHAO, CN , ZHANG, LT , YE, F , (2012) EFFECTS OF RESIDENCE TIME AND REACTION CONDITIONS ON THE DEPOSITION OF SIC FROM METHYLTRICHLOROSILANE AND HYDROGEN.INTERNATIONAL JOURNAL OF APPLIED CERAMIC TECHNOLOGY. VOL. 9. ISSUE 3. P. 642-649 13 93% 1
7 ZHANG, WGG , HUTTINGER, KJ , (2001) CVD OF SIC FROM METHYLTRICHLOROSILANE. PART I: DEPOSITION RATES.CHEMICAL VAPOR DEPOSITION. VOL. 7. ISSUE 4. P. 167 -172 25 63% 22
8 DRIEUX, P , CHOLLON, G , JACQUES, S , ALLEMAND, A , CAVAGNAT, D , BUFFETEAU, T , (2013) EXPERIMENTAL STUDY OF THE CHEMICAL VAPOR DEPOSITION FROM CH3SIHCL2/H-2: APPLICATION TO THE SYNTHESIS OF MONOLITHIC SIC TUBES.SURFACE & COATINGS TECHNOLOGY. VOL. 230. ISSUE . P. 137-144 18 56% 2
9 YANG, Y , ZHANG, WG , (2009) CHEMICAL VAPOR DEPOSITION OF SIC AT DIFFERENT MOLAR RATIOS OF HYDROGEN TO METHYLTRICHLOROSILANE.JOURNAL OF CENTRAL SOUTH UNIVERSITY OF TECHNOLOGY. VOL. 16. ISSUE 5. P. 730 -737 14 74% 2
10 LU, CY , CHENG, LF , ZHAO, CN , ZHANG, LT , XU, YD , (2009) KINETICS OF CHEMICAL VAPOR DEPOSITION OF SIC FROM METHYLTRICHLOROSILANE AND HYDROGEN.APPLIED SURFACE SCIENCE. VOL. 255. ISSUE 17. P. 7495 -7499 14 70% 10

Classes with closest relation at Level 1


Rank Class id link
1 7015 3C SIC//MONOMETHYLSILANE//FG NANOTECHNOL
2 6651 CARBON CARBON COMPOSITES//CHEMICAL VAPOR INFILTRATION//PYROLYTIC CARBON
3 7332 CARBON CARBON COMPOSITES//CC COMPOSITES TECHNOL//C C COMPOSITES
4 10828 EPITAXIAL REACTOR//MOCVD REACTOR//PLANETARY REACTOR
5 11557 TRISO//COATED FUEL PARTICLE//COATED PARTICLE FUEL
6 5206 SIC NANOWIRES//SILICON CARBIDE NANOWIRES//CARBOTHERMAL REDUCTION
7 5652 AMORPHOUS SILICON CARBIDE//SILICON CARBON ALLOYS//A SIC H
8 2541 MICROPIPE//SUBLIMATION GROWTH//SEMICONDUCTING SILICON COMPOUNDS
9 13873 TDEAT//TITANIUM NITRIDE//CVD TIN
10 20305 SILICON CARBONITRIDE//SICN//SILICON CARBON NITRIDE

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