Class information for:
Level 1: TDEAT//TITANIUM NITRIDE//CVD TIN

Basic class information
Class id #P Avg. number of
references		 Database coverage
of references
13873 808 20.6 56%


Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
2 4 MATERIALS SCIENCE, MULTIDISCIPLINARY//PHYSICS, APPLIED//PHYSICS, CONDENSED MATTER 2836879
378 3       SURFACE & COATINGS TECHNOLOGY//HIGH ENTROPY ALLOY//MATERIALS SCIENCE, COATINGS & FILMS 32127
527 2             SURFACE & COATINGS TECHNOLOGY//MATERIALS SCIENCE, COATINGS & FILMS//TITANIUM NITRIDE 14964
13873 1                   TDEAT//TITANIUM NITRIDE//CVD TIN 808

Terms with highest relevance score


rank Term termType Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 TDEAT authKW 157456 1% 83% 5
2 TITANIUM NITRIDE authKW 140797 8% 6% 65
3 CVD TIN authKW 120926 0% 80% 4
4 MAT CHEM COATINGS address 120926 0% 80% 4
5 TDMAT authKW 104642 1% 46% 6
6 TINX FILMS authKW 100770 0% 67% 4
7 PACVD authKW 97421 3% 12% 21
8 ALKOXIDE SOLUTION authKW 86373 0% 57% 4
9 HARD METALLURGICAL COATINGS authKW 75580 0% 100% 2
10 MOALD authKW 75580 0% 100% 2

Web of Science journal categories


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 Materials Science, Coatings & Films 21343 37% 0% 299
2 Physics, Applied 4115 46% 0% 373
3 Materials Science, Multidisciplinary 1699 34% 0% 271
4 Physics, Condensed Matter 697 17% 0% 138
5 Electrochemistry 656 8% 0% 66
6 METALLURGY & MINING 558 1% 0% 8
7 Materials Science, Ceramics 289 4% 0% 33
8 Nanoscience & Nanotechnology 205 6% 0% 51
9 Metallurgy & Metallurgical Engineering 182 6% 0% 48
10 Chemistry, Inorganic & Nuclear 44 4% 0% 30

Address terms


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 MAT CHEM COATINGS 120926 0% 80% 4
2 OBERFLACHENTECH PLASMATECH WERKSTOFFENTWIC 75568 1% 25% 8
3 DIGITAL SEMICOND 50385 0% 67% 2
4 ANGLAGENTECH 37790 0% 100% 1
5 ARTMENT MAT ENGN 37790 0% 100% 1
6 BROWN 170 37790 0% 100% 1
7 CNRS UPR8521 37790 0% 100% 1
8 CREA PS 37790 0% 100% 1
9 ENSEIGNEMENT RECH ANGERS 37790 0% 100% 1
10 ESA5071 37790 0% 100% 1

Journals


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 MODERN MACHINE SHOP 18894 0% 50% 1
2 SURFACE & COATINGS TECHNOLOGY 18304 12% 1% 97
3 THIN SOLID FILMS 6278 10% 0% 78
4 CHEMICAL VAPOR DEPOSITION 4578 1% 1% 11
5 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 3807 5% 0% 38
6 JOURNAL OF THE ELECTROCHEMICAL SOCIETY 3609 7% 0% 54
7 JOURNAL DE PHYSIQUE IV 2637 3% 0% 27
8 NEUE HUTTE 1411 0% 1% 4
9 POWDER METALLURGY INTERNATIONAL 1254 0% 1% 4
10 JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 1129 4% 0% 31

Author Key Words


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class		 LCSH search Wikipedia search
1 TDEAT 157456 1% 83% 5 Search TDEAT Search TDEAT
2 TITANIUM NITRIDE 140797 8% 6% 65 Search TITANIUM+NITRIDE Search TITANIUM+NITRIDE
3 CVD TIN 120926 0% 80% 4 Search CVD+TIN Search CVD+TIN
4 TDMAT 104642 1% 46% 6 Search TDMAT Search TDMAT
5 TINX FILMS 100770 0% 67% 4 Search TINX+FILMS Search TINX+FILMS
6 PACVD 97421 3% 12% 21 Search PACVD Search PACVD
7 ALKOXIDE SOLUTION 86373 0% 57% 4 Search ALKOXIDE+SOLUTION Search ALKOXIDE+SOLUTION
8 HARD METALLURGICAL COATINGS 75580 0% 100% 2 Search HARD+METALLURGICAL+COATINGS Search HARD+METALLURGICAL+COATINGS
9 MOALD 75580 0% 100% 2 Search MOALD Search MOALD
10 MOCVD TIN 75580 0% 100% 2 Search MOCVD+TIN Search MOCVD+TIN

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.


Rank Reference # ref.
in cl.		 Shr. of ref. in
cl.		 Citations
1 SPEE, CIMA , DRIESSEN, JPAM , KUYPERS, AD , (1995) LOW-TEMPERATURE DEPOSITION OF TIN CERAMIC MATERIAL BY METAL-ORGANIC AND/OR PLASMA-ENHANCED CVD.JOURNAL DE PHYSIQUE IV. VOL. 5. ISSUE C5. P. 719-734 59 87% 14
2 RODRIGUEZ-REYES, JCF , TEPLYAKOV, AV , (2007) CHEMISTRY OF DIFFUSION BARRIER FILM FORMATION: ADSORPTION AND DISSOCIATION OF TETRAKIS(DIMETHYLAMINO)TITANIUM ON SI(100)-2 X 1.JOURNAL OF PHYSICAL CHEMISTRY C. VOL. 111. ISSUE 12. P. 4800-4808 44 63% 15
3 SEN, K , BANU, T , DEBNATH, T , GHOSH, D , DAS, AK , (2014) TOWARDS A COMPREHENSIVE UNDERSTANDING OF THE CHEMICAL VAPOR DEPOSITION OF TITANIUM NITRIDE USING TI(NME2)(4): A DENSITY FUNCTIONAL THEORY APPROACH.DALTON TRANSACTIONS. VOL. 43. ISSUE 23. P. 8877 -8887 32 53% 2
4 PANDA, S , KIM, J , WEILLER, BH , ECONOMOU, DJ , HOFFMAN, DM , (1999) LOW TEMPERATURE CHEMICAL VAPOR DEPOSITION OF TITANIUM NITRIDE FILMS FROM TETRAKIS(ETHYLMETHYLAMIDO)TITANIUM AND AMMONIA.THIN SOLID FILMS. VOL. 357. ISSUE 2. P. 125 -131 29 88% 19
5 KAFIZAS, A , CARMALT, CJ , PARKIN, IP , (2013) CVD AND PRECURSOR CHEMISTRY OF TRANSITION METAL NITRIDES.COORDINATION CHEMISTRY REVIEWS. VOL. 257. ISSUE 13-14. P. 2073 -2119 49 30% 29
6 GONG, YS , TU, R , GOTO, T , (2010) LASER CHEMICAL VAPOR DEPOSITION OF TITANIUM NITRIDE FILMS WITH TETRAKIS (DIETHYLAMIDO) TITANIUM AND AMMONIA SYSTEM.SURFACE & COATINGS TECHNOLOGY. VOL. 204. ISSUE 14. P. 2111-2117 24 71% 1
7 WANG, ST , ZHANG, Z , (2003) PREPARATION OF TITANIUM NITRIDE BY CHEMICAL VAPOR DEPOSITION.PROGRESS IN CHEMISTRY. VOL. 15. ISSUE 5. P. 374-378 37 53% 0
8 AMATO-WIERDA, C , NORTON, ET , WIERDA, DA , (1999) LOW TEMPERATURE CHEMICAL VAPOR DEPOSITION OF TITANIUM NITRIDE THIN FILMS WITH HYDRAZINE AND TETRAKIS(DIMETHYLAMIDO)TITANIUM.ELECTROCHEMICAL AND SOLID STATE LETTERS. VOL. 2. ISSUE 12. P. 613 -615 23 88% 3
9 DRIESSEN, JPAM , KUYPERS, AD , SCHOONMAN, J , (2000) GAS-PHASE CHEMISTRY IN UP-SCALED PLASMA ENHANCED METAL-ORGANIC CHEMICAL-VAPOR DEPOSITION OF TIN AND TI(C,N) ON TOOL STEEL.JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A. VOL. 18. ISSUE 4. P. 1971-1976 19 100% 3
10 ASSAUD, L , PITZSCHEL, K , HANBUCKEN, M , SANTINACCI, L , (2014) HIGHLY-CONFORMAL TIN THIN FILMS GROWN BY THERMAL AND PLASMA-ENHANCED ATOMIC LAYER DEPOSITION.ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY. VOL. 3. ISSUE 7. P. P253 -P258 19 66% 4

Classes with closest relation at Level 1


Rank Class id link
1 2390 TITANIUM NITRIDE//ZIRCONIUM NITRIDE//ZRN
2 3427 DIFFUSION BARRIER//CU METALLIZATION//TANTALUM NITRIDE
3 28739 TIN CERAMICS//TIN NANOPOWDER//RATE CONTROLLED SINTERING
4 37229 FINITE LIFE COATING//MD 3083//ABRASIVENESS
5 14696 TI B N//TIBN//TITANIUM DIBORIDE COATING
6 16292 CVD W//TUNGSTEN THIN FILMS//CVD IRON
7 23247 METHYLTRICHLOROSILANE//HIGH TEMPERATURE CHEMICAL VAPOR DEPOSITION//ADV FIB COMPOSIT
8 2435 ATOMIC LAYER DEPOSITION//ALD//MOLECULAR LAYER DEPOSITION
9 22040 ZIRCONIUM OXYNITRIDE//TINXOY//TITANIUM OXYNITRIDE
10 26012 THERMO REACTIVE DEPOSITION//NIOBIUM CARBIDE COATING//VC COATING

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