Class information for:
Level 1: CLEANROOM//MINIENVIRONMENT//FAN FILTER UNIT

Basic class information
Class id #P Avg. number of
references		 Database coverage
of references
31370 154 17.0 41%


Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
2 4 MATERIALS SCIENCE, MULTIDISCIPLINARY//PHYSICS, APPLIED//PHYSICS, CONDENSED MATTER 2836879
6 3       PHYSICS, APPLIED//IEEE TRANSACTIONS ON ELECTRON DEVICES//SILICON 155028
3149 2             CLEANROOM//PHOTORESIST REMOVAL//MINIENVIRONMENT 2235
31370 1                   CLEANROOM//MINIENVIRONMENT//FAN FILTER UNIT 154

Terms with highest relevance score


rank Term termType Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 CLEANROOM authKW 1809624 23% 25% 36
2 MINIENVIRONMENT authKW 1460078 6% 82% 9
3 FAN FILTER UNIT authKW 594848 2% 100% 3
4 FAN FILTER UNIT FFU authKW 594848 2% 100% 3
5 DEMAND CONTROLLED FILTRATION authKW 396565 1% 100% 2
6 MAKE UP AIR UNIT MAU authKW 396565 1% 100% 2
7 3D JET BEHAVIOR authKW 198283 1% 100% 1
8 450 DEGREES C FURNACE ANNEALING authKW 198283 1% 100% 1
9 AIR FLOW ANALYSES authKW 198283 1% 100% 1
10 AIRFLOW MAPPING authKW 198283 1% 100% 1

Web of Science journal categories


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 Construction & Building Technology 4017 27% 0% 42
2 Engineering, Civil 798 20% 0% 31
3 Engineering, Environmental 513 15% 0% 23
4 Physics, Applied 447 36% 0% 55
5 Engineering, Manufacturing 202 6% 0% 10
6 Energy & Fuels 104 9% 0% 14
7 Thermodynamics 83 6% 0% 10
8 Engineering, Electrical & Electronic 72 15% 0% 23
9 Engineering, Mechanical 72 8% 0% 12
10 Engineering, Chemical 45 8% 0% 13

Address terms


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 BUILT ENVIRONM VRT 6 29 198283 1% 100% 1
2 BUR ETUD RECH MECAN FLUIDES HOTEL TECHNOL 198283 1% 100% 1
3 CORONADO GENERATING STN 198283 1% 100% 1
4 GENIE PROCENVIRONM AGROALIMENTAIRE 198283 1% 100% 1
5 HITACHI PLANT SERV 198283 1% 100% 1
6 OSAKA HIGH TECH 198283 1% 100% 1
7 SEMICOND MFG TECHNOL OPERAT 198283 1% 100% 1
8 SEMICOND MFG TECHNOL OPERATMFG SYST TECHNOL 198283 1% 100% 1
9 THERMOFLUIDS TECHNOL 198283 1% 100% 1
10 TOTAL PROD 198283 1% 100% 1

Journals


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 BUILDING AND ENVIRONMENT 16015 13% 0% 20
2 PDA JOURNAL OF PHARMACEUTICAL SCIENCE AND TECHNOLOGY 11830 3% 1% 4
3 BUILDING SIMULATION 8780 3% 1% 4
4 MICROCONTAMINATION 7929 1% 4% 1
5 JOURNAL OF THE INSTITUTE OF ENVIRONMENTAL SCIENCES 6194 1% 3% 1
6 SOLID STATE TECHNOLOGY 3847 4% 0% 6
7 JOURNAL OF THE IES 3811 1% 2% 1
8 ENERGY AND BUILDINGS 3650 7% 0% 11
9 INTERNATIONAL JOURNAL OF ENGINEERING FLUID MECHANICS 2872 1% 1% 1
10 ASHRAE JOURNAL-AMERICAN SOCIETY OF HEATING REFRIGERATING AND AIR-CONDITIONING ENGINEERS 2676 1% 1% 2

Author Key Words


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class		 LCSH search Wikipedia search
1 CLEANROOM 1809624 23% 25% 36 Search CLEANROOM Search CLEANROOM
2 MINIENVIRONMENT 1460078 6% 82% 9 Search MINIENVIRONMENT Search MINIENVIRONMENT
3 FAN FILTER UNIT 594848 2% 100% 3 Search FAN+FILTER+UNIT Search FAN+FILTER+UNIT
4 FAN FILTER UNIT FFU 594848 2% 100% 3 Search FAN+FILTER+UNIT+FFU Search FAN+FILTER+UNIT+FFU
5 DEMAND CONTROLLED FILTRATION 396565 1% 100% 2 Search DEMAND+CONTROLLED+FILTRATION Search DEMAND+CONTROLLED+FILTRATION
6 MAKE UP AIR UNIT MAU 396565 1% 100% 2 Search MAKE+UP+AIR+UNIT+MAU Search MAKE+UP+AIR+UNIT+MAU
7 3D JET BEHAVIOR 198283 1% 100% 1 Search 3D+JET+BEHAVIOR Search 3D+JET+BEHAVIOR
8 450 DEGREES C FURNACE ANNEALING 198283 1% 100% 1 Search 450+DEGREES+C+FURNACE+ANNEALING Search 450+DEGREES+C+FURNACE+ANNEALING
9 AIR FLOW ANALYSES 198283 1% 100% 1 Search AIR+FLOW+ANALYSES Search AIR+FLOW+ANALYSES
10 AIRFLOW MAPPING 198283 1% 100% 1 Search AIRFLOW+MAPPING Search AIRFLOW+MAPPING

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.


Rank Reference # ref.
in cl.		 Shr. of ref. in
cl.		 Citations
1 NOH, KC , KIM, HS , OH, MD , (2010) STUDY ON CONTAMINATION CONTROL IN A MINIENVIRONMENT INSIDE CLEAN ROOM FOR YIELD ENHANCEMENT BASED ON PARTICLE CONCENTRATION MEASUREMENT AND AIRFLOW CFD SIMULATION.BUILDING AND ENVIRONMENT. VOL. 45. ISSUE 4. P. 825-831 12 100% 8
2 VAN DEN BRINK, AHTM , VAN SCHIJNDEL, AWM , (2012) IMPROVED CONTROL OF THE PRESSURE IN A CLEANROOM ENVIRONMENT.BUILDING SIMULATION. VOL. 5. ISSUE 1. P. 61-72 9 90% 3
3 LIN, T , TUNG, YC , HU, SC , LIN, CY , (2010) EFFECTS OF THE REMOVAL OF 0.1 MU M PARTICLES IN INDUSTRIAL CLEANROOMS WITH A FAN DRY COIL UNIT (FDCU) RETURN SYSTEM.AEROSOL AND AIR QUALITY RESEARCH. VOL. 10. ISSUE 6. P. 571 -580 10 77% 1
4 RAHAMAN, MD , KAIJU, H , KAWAGUCHI, N , ISHIBASHI, A , (2008) ULTRA-HIGH CLEANLINESS OF ISO CLASS MINUS 1 MEASURED IN TRIPLY CONNECTED CLEAN-UNIT SYSTEM PLATFORM.JAPANESE JOURNAL OF APPLIED PHYSICS. VOL. 47. ISSUE 7. P. 5712 -5716 8 89% 0
5 RAHAMAN, MD , GOMITA, K , KAWAGUCHI, N , KAIJU, H , KONDO, K , ISHIBASHI, A , (2007) HIGH CLEANLINESS OF PORTABLE CLEAN-UNIT-BOX TO UNITE CLEAN-UNIT SYSTEM PLATFORMS (CUSPS) AND CUSP UNITS.ELECTRONICS LETTERS. VOL. 43. ISSUE 24. P. 1356-1357 7 100% 1
6 HU, SC , KU, CW , SHIH, YC , HSU, K , (2009) DYNAMIC ANALYSIS ON PARTICLE CONCENTRATION INDUCED BY OPENING THE DOOR OF A FRONT OPENING UNIFIED POD (FOUP) THAT LOADED WITH 25 PIECES OF 300 MM WAFER MANUFACTURING PROCESSES.AEROSOL AND AIR QUALITY RESEARCH. VOL. 9. ISSUE 1. P. 139 -148 6 100% 2
7 XU, TF , (2008) CHARACTERIZATION OF MINIENVIRONMENTS IN A CLEANROOM: ASSESSING ENERGY PERFORMANCE AND ITS IMPLICATIONS.BUILDING AND ENVIRONMENT. VOL. 43. ISSUE 9. P. 1545-1552 6 100% 9
8 NOH, KC , LEE, HC , PK, JI , OH, MD , (2008) PREDICTION AND EVALUATION OF CLEANLINESS LEVELS INSIDE A MINI-ENVIRONMENT BY MEASURING MEAN AIR-AGE AND EFFECTIVE FLOW RATE.IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING. VOL. 21. ISSUE 2. P. 297-304 6 100% 1
9 LIN, T , HU, SC , XU, TF , (2015) DEVELOPING AN INNOVATIVE FAN DRY COIL UNIT (FDCU) RETURN SYSTEM TO IMPROVE ENERGY EFFICIENCY OF ENVIRONMENTAL CONTROL FOR MISSION CRITICAL CLEANROOMS.ENERGY AND BUILDINGS. VOL. 90. ISSUE . P. 94 -105 6 75% 0
10 LIN, T , TUNG, YC , HU, SC , CHEN, YJ , (2011) EXPERIMENTAL STUDY ON AIRFLOW CHARACTERISTICS AND TEMPERATURE DISTRIBUTION IN NON-UNIDIRECTIONAL CLEANROOMS FOR ELECTRONIC INDUSTRY.BUILDING AND ENVIRONMENT. VOL. 46. ISSUE 6. P. 1235 -1242 4 100% 2

Classes with closest relation at Level 1


Rank Class id link
1 19085 PHOTORESIST REMOVAL//RESIST REMOVAL//ORGANIC CONTAMINATION
2 8112 AIRCRAFT CABIN//ENVIRONM CONTROL SYST//ISOLATION ROOM
3 15013 VACUUM COOLING//AIR CURTAIN//IMMERSION VACUUM COOLING
4 25538 CESC SUSTAINABLE COMMUN//SUSTAINABLE COMMUN//FREIGHT LOGIST GRP
5 23860 TRACER GAS TEST//PUSH PULL VENTILATION//FUME HOOD
6 24020 DEFECT TOLERANCE//NEUROMORPHIC NETWORKS//CMOL
7 8494 HYDROGEN TERMINATION//NATIVE OXIDE//HYDRIDE SPECIES
8 33212 J AN SCI TECHNOL ORG//CYANIDE TREATMENT//DISPLAY TECHNOL DEV GRP
9 24686 LOW TEMPERATURE SILICON OXIDATION//DIRECTIONAL OXIDATION//HIGH RATE SILICON OXIDATION
10 14011 THERMOPHORESIS//PHOTOPHORESIS//THERMOPHORETIC VELOCITY

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