Class information for:
Level 1: LOCAL ANODIC OXIDATION//NANO OXIDATION//AFM LITHOGRAPHY

Basic class information
Class id #P Avg. number of
references		 Database coverage
of references
6514 1475 24.2 83%


Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
2 4 MATERIALS SCIENCE, MULTIDISCIPLINARY//PHYSICS, APPLIED//PHYSICS, CONDENSED MATTER 2836879
279 3       SELF ASSEMBLED MONOLAYER//MOLECULAR ELECTRONICS//NANOSCIENCE & NANOTECHNOLOGY 42929
482 2             ATOMIC FORCE MICROSCOPY//ATOMIC FORCE MICROSCOPE//AFM 15691
6514 1                   LOCAL ANODIC OXIDATION//NANO OXIDATION//AFM LITHOGRAPHY 1475

Terms with highest relevance score


rank Term termType Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 LOCAL ANODIC OXIDATION authKW 704678 3% 85% 40
2 NANO OXIDATION authKW 298903 1% 76% 19
3 AFM LITHOGRAPHY authKW 274354 2% 51% 26
4 NANOLITHOGRAPHY authKW 251213 6% 13% 92
5 SCANNING PROBE LITHOGRAPHY authKW 190983 2% 34% 27
6 AFM OXIDATION authKW 126787 0% 88% 7
7 ATOMIC FORCE MICROSCOPE authKW 113226 6% 6% 89
8 DIAMOND TIP authKW 104352 1% 46% 11
9 FRICTION INDUCED SELECTIVE ETCHING authKW 103501 0% 100% 5
10 NANOMACHINING authKW 88298 1% 27% 16

Web of Science journal categories


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 Physics, Applied 14021 62% 0% 911
2 Nanoscience & Nanotechnology 12570 31% 0% 463
3 Materials Science, Multidisciplinary 2881 32% 0% 479
4 Physics, Condensed Matter 1818 20% 0% 294
5 Microscopy 1358 3% 0% 50
6 Materials Science, Coatings & Films 669 5% 0% 78
7 Engineering, Electrical & Electronic 668 15% 0% 217
8 Chemistry, Physical 536 15% 0% 228
9 Chemistry, Multidisciplinary 364 13% 0% 191
10 Engineering, Manufacturing 119 2% 0% 27

Address terms


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 STATE PRECIS MEASURING TECH RUMENTS 62101 0% 100% 3
2 OFF 221 41401 0% 100% 2
3 MICROELECT MADRID 28399 2% 6% 23
4 EXPT PHYS FMFI 27599 0% 67% 2
5 MECH INTELLECTUAL SYST ENGN 27587 1% 17% 8
6 6 32 20700 0% 100% 1
7 ALIEN INRIA LILLE NORD EUROPE 20700 0% 100% 1
8 AT NANOFABRICAT CO 20700 0% 100% 1
9 BRIDGESTONE AMER 20700 0% 100% 1
10 CENS CRYSTALLOG 20700 0% 100% 1

Journals


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 16064 8% 1% 114
2 NANOTECHNOLOGY 8938 5% 1% 71
3 APPLIED PHYSICS LETTERS 5860 12% 0% 179
4 RECORD-AT&T BELL LABORATORIES 4138 0% 20% 1
5 ULTRAMICROSCOPY 3986 2% 1% 33
6 JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 2914 5% 0% 67
7 MICROELECTRONIC ENGINEERING 2444 2% 0% 35
8 JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY 2062 3% 0% 40
9 SCANNING 1739 1% 1% 12
10 NANOSCALE RESEARCH LETTERS 1348 1% 0% 17

Author Key Words


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class		 LCSH search Wikipedia search
1 LOCAL ANODIC OXIDATION 704678 3% 85% 40 Search LOCAL+ANODIC+OXIDATION Search LOCAL+ANODIC+OXIDATION
2 NANO OXIDATION 298903 1% 76% 19 Search NANO+OXIDATION Search NANO+OXIDATION
3 AFM LITHOGRAPHY 274354 2% 51% 26 Search AFM+LITHOGRAPHY Search AFM+LITHOGRAPHY
4 NANOLITHOGRAPHY 251213 6% 13% 92 Search NANOLITHOGRAPHY Search NANOLITHOGRAPHY
5 SCANNING PROBE LITHOGRAPHY 190983 2% 34% 27 Search SCANNING+PROBE+LITHOGRAPHY Search SCANNING+PROBE+LITHOGRAPHY
6 AFM OXIDATION 126787 0% 88% 7 Search AFM+OXIDATION Search AFM+OXIDATION
7 ATOMIC FORCE MICROSCOPE 113226 6% 6% 89 Search ATOMIC+FORCE+MICROSCOPE Search ATOMIC+FORCE+MICROSCOPE
8 DIAMOND TIP 104352 1% 46% 11 Search DIAMOND+TIP Search DIAMOND+TIP
9 FRICTION INDUCED SELECTIVE ETCHING 103501 0% 100% 5 Search FRICTION+INDUCED+SELECTIVE+ETCHING Search FRICTION+INDUCED+SELECTIVE+ETCHING
10 NANOMACHINING 88298 1% 27% 16 Search NANOMACHINING Search NANOMACHINING

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.


Rank Reference # ref. in
cl.		 Shr. of ref. in
cl.		 Citations
1 XIE, XN , CHUNG, HJ , SOW, CH , WEE, ATS , (2006) NANOSCALE MATERIALS PATTERNING AND ENGINEERING BY ATOMIC FORCE MICROSCOPY NANOLITHOGRAPHY.MATERIALS SCIENCE & ENGINEERING R-REPORTS. VOL. 54. ISSUE 1-2. P. 1 -48 121 57% 148
2 YAN, YD , GENG, YQ , HU, ZJ , (2015) RECENT ADVANCES IN AFM TIP-BASED NANOMECHANICAL MACHINING.INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE. VOL. 99. ISSUE . P. 1 -18 76 72% 4
3 KLEHN, B , KUNZE, U , (1999) NANOLITHOGRAPHY WITH AN ATOMIC FORCE MICROSCOPE BY MEANS OF VECTOR-SCAN CONTROLLED DYNAMIC PLOWING.JOURNAL OF APPLIED PHYSICS. VOL. 85. ISSUE 7. P. 3897 -3903 68 89% 71
4 LIU, H , HOEPPENER, S , SCHUBERT, US , (2016) NANOSCALE MATERIALS PATTERNING BY LOCAL ELECTROCHEMICAL LITHOGRAPHY.ADVANCED ENGINEERING MATERIALS. VOL. 18. ISSUE 6. P. 890 -902 65 61% 0
5 CAMBEL, V , SOLTYS, J , (2007) THE INFLUENCE OF SAMPLE CONDUCTIVITY ON LOCAL ANODIC OXIDATION BY THE TIP OF ATOMIC FORCE MICROSCOPE.JOURNAL OF APPLIED PHYSICS. VOL. 102. ISSUE 7. P. - 42 98% 5
6 YANG, ML , ZHENG, ZK , LIU, YQ , ZHANG, BL , (2006) KINETICS OF ATOMIC FORCE MICROSCOPE-BASED SCANNED PROBE OXIDATION ON AN OCTADECYLATED SILICON(111) SURFACE.JOURNAL OF PHYSICAL CHEMISTRY B. VOL. 110. ISSUE 21. P. 10365-10373 55 71% 15
7 TSENG, AA , (2011) REMOVING MATERIAL USING ATOMIC FORCE MICROSCOPY WITH SINGLE- AND MULTIPLE-TIP SOURCES.SMALL. VOL. 7. ISSUE 24. P. 3409 -3427 54 55% 28
8 NYFFENEGGER, RM , PENNER, RM , (1997) NANOMETER-SCALE SURFACE MODIFICATION USING THE SCANNING PROBE MICROSCOPE: PROGRESS SINCE 1991.CHEMICAL REVIEWS. VOL. 97. ISSUE 4. P. 1195 -1230 105 34% 208
9 YAN, YD , HE, Y , GENG, YQ , HU, ZJ , LI, H , (2016) REVIEW ON AFM TIP-BASED MECHANICAL NANOMACHINING: THE INFLUENCE OF THE INPUT MACHINING PARAMETERS ON THE OUTCOMES.CURRENT NANOSCIENCE. VOL. 12. ISSUE 6. P. 666 -675 35 78% 0
10 GARCIA, R , KNOLL, AW , RIEDO, E , (2014) ADVANCED SCANNING PROBE LITHOGRAPHY.NATURE NANOTECHNOLOGY. VOL. 9. ISSUE 8. P. 577 -587 44 38% 79

Classes with closest relation at Level 1


Rank Class id link
1 13949 DIP PEN NANOLITHOGRAPHY//DIP PEN NANOLITHOGRAPHY DPN//POLYMER PEN LITHOGRAPHY
2 11338 ATOM MANIPULATION//SINGLE ATOM MANIPULATION//COMPUTING SIMULATIONS
3 28300 NANOMANIPULATION//AFM NANOROBOT//MOL ROBOT
4 8524 SELF ASSEMBLED MONOLAYER//ORGANOSILANE SELF ASSEMBLED MONOLAYER//OCTADECYLTRICHLOROSILANE
5 11893 SCANNING THERMAL MICROSCOPY//MICRO THERMAL ANALYSIS//SCANNING THERMAL MICROSCOPE
6 31436 LM FFM//NANOPERIOD MULTILAYER FILM//MAGNETIC HARD DISK
7 21518 CARBON NANOTUBE TIPS//CARBON NANOTUBE PROBES//CARDIAC BIOPHYS BIOENGN
8 19410 NANOGAP ELECTRODES//NANOGAP//SURFACE CONDUCTION ELECTRON EMITTER
9 2223 FUTURE ENERGY IFES//ATOMIC FORCE ACOUSTIC MICROSCOPY//TAPPING MODE
10 36683 SOLID SOLUTION OF CARBON IN BETA SIC//MCECR PLASMA SPUTTERING//SINTERED IRON ORE CONCENTRATE

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