Class information for:
Level 1: ARGON PLUS OXYGEN MIXTURE GAS//LATERAL CRYSTALLINE GROWTH//RUMENTAL FRONTIER

Basic class information
Class id #P Avg. number of
references		 Database coverage
of references
17136 615 19.0 57%


Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
2 4 MATERIALS SCIENCE, MULTIDISCIPLINARY//PHYSICS, APPLIED//PHYSICS, CONDENSED MATTER 2836879
6 3       PHYSICS, APPLIED//IEEE TRANSACTIONS ON ELECTRON DEVICES//SILICON 155028
1299 2             SIGE//STRAINED SI//VIRTUAL SUBSTRATE 8578
17136 1                   ARGON PLUS OXYGEN MIXTURE GAS//LATERAL CRYSTALLINE GROWTH//RUMENTAL FRONTIER 615

Terms with highest relevance score


rank Term termType Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 ARGON PLUS OXYGEN MIXTURE GAS authKW 198599 1% 100% 4
2 LATERAL CRYSTALLINE GROWTH authKW 66198 0% 67% 2
3 RUMENTAL FRONTIER address 66198 0% 67% 2
4 ELECT TECHNOL EDUC address 66194 1% 33% 4
5 BURIED INTERIACE authKW 49650 0% 100% 1
6 CESIUM ION BEAMS authKW 49650 0% 100% 1
7 CONTAMINANTS IN THE FILMS authKW 49650 0% 100% 1
8 CRYSTALLINE SILICIUM LAYER authKW 49650 0% 100% 1
9 CRYSTALLINE TO AMORPHOUS PHASE TRANSITION authKW 49650 0% 100% 1
10 DELTA DOPED SILICON authKW 49650 0% 100% 1

Web of Science journal categories


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 Physics, Applied 6767 66% 0% 407
2 Materials Science, Coatings & Films 3894 18% 0% 113
3 Physics, Condensed Matter 1266 25% 0% 154
4 Materials Science, Multidisciplinary 604 24% 0% 149
5 Crystallography 505 8% 0% 51
6 Instruments & Instrumentation 268 7% 0% 45
7 Nuclear Science & Technology 176 6% 0% 35
8 Physics, Nuclear 116 5% 0% 30
9 Nanoscience & Nanotechnology 75 5% 0% 29
10 Engineering, Electrical & Electronic 60 8% 0% 52

Address terms


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 RUMENTAL FRONTIER 66198 0% 67% 2
2 ELECT TECHNOL EDUC 66194 1% 33% 4
3 ELE INTELLIGENT SYST 49650 0% 100% 1
4 FREDEROCL SEITZ MAT 49650 0% 100% 1
5 GRP RECH ENGN MILIEUX IONISES 49650 0% 100% 1
6 INEP IVTAN ASSOC 49650 0% 100% 1
7 LOBACHEVSKI PHYSICOTECH 49650 0% 100% 1
8 NI LOBACHEVSKII PHYSICOTECH SCI 49650 0% 100% 1
9 SILIZIUM PHOTOVOLTAIK IONENSTRAHL 49650 0% 100% 1
10 MECH DESIGN SYST ENGN 31913 0% 21% 3

Journals


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 THIN SOLID FILMS 4881 10% 0% 60
2 KRISTALLOGRAFIYA 4149 3% 0% 18
3 CHEMICAL WEEK 2915 0% 2% 3
4 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 2913 5% 0% 29
5 APPLIED PHYSICS LETTERS 2676 13% 0% 78
6 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 2301 5% 0% 28
7 JOURNAL OF APPLIED PHYSICS 1787 10% 0% 63
8 NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 1371 5% 0% 30
9 JOURNAL OF CRYSTAL GROWTH 1303 5% 0% 29
10 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS 1171 0% 1% 2

Author Key Words


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class		 LCSH search Wikipedia search
1 ARGON PLUS OXYGEN MIXTURE GAS 198599 1% 100% 4 Search ARGON+PLUS+OXYGEN+MIXTURE+GAS Search ARGON+PLUS+OXYGEN+MIXTURE+GAS
2 LATERAL CRYSTALLINE GROWTH 66198 0% 67% 2 Search LATERAL+CRYSTALLINE+GROWTH Search LATERAL+CRYSTALLINE+GROWTH
3 BURIED INTERIACE 49650 0% 100% 1 Search BURIED+INTERIACE Search BURIED+INTERIACE
4 CESIUM ION BEAMS 49650 0% 100% 1 Search CESIUM+ION+BEAMS Search CESIUM+ION+BEAMS
5 CONTAMINANTS IN THE FILMS 49650 0% 100% 1 Search CONTAMINANTS+IN+THE+FILMS Search CONTAMINANTS+IN+THE+FILMS
6 CRYSTALLINE SILICIUM LAYER 49650 0% 100% 1 Search CRYSTALLINE+SILICIUM+LAYER Search CRYSTALLINE+SILICIUM+LAYER
7 CRYSTALLINE TO AMORPHOUS PHASE TRANSITION 49650 0% 100% 1 Search CRYSTALLINE+TO+AMORPHOUS+PHASE+TRANSITION Search CRYSTALLINE+TO+AMORPHOUS+PHASE+TRANSITION
8 DELTA DOPED SILICON 49650 0% 100% 1 Search DELTA+DOPED+SILICON Search DELTA+DOPED+SILICON
9 DELTA FUNCTION DOPING 49650 0% 100% 1 Search DELTA+FUNCTION+DOPING Search DELTA+FUNCTION+DOPING
10 DIHYDRIDE SURFACE 49650 0% 100% 1 Search DIHYDRIDE+SURFACE Search DIHYDRIDE+SURFACE

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.


Rank Reference # ref.
in cl.		 Shr. of ref. in
cl.		 Citations
1 GOSSMANN, HJ , SCHUBERT, EF , (1993) DELTA DOPING IN SILICON.CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES. VOL. 18. ISSUE 1. P. 1 -67 76 41% 61
2 LEE, NE , XUE, G , GREENE, JE , (1996) EPITAXIAL SI(001) GROWN AT 80-750 DEGREES C BY ION-BEAM SPUTTER DEPOSITION: CRYSTAL GROWTH, DOPING, AND ELECTRONIC PROPERTIES.JOURNAL OF APPLIED PHYSICS. VOL. 80. ISSUE 2. P. 769-780 30 71% 11
3 YURASOV, DV , DROZDOV, MN , MUREL, AV , SHALEEV, MV , ZAKHAROV, ND , NOVIKOV, AV , (2011) USAGE OF ANTIMONY SEGREGATION FOR SELECTIVE DOPING OF SI IN MOLECULAR BEAM EPITAXY.JOURNAL OF APPLIED PHYSICS. VOL. 109. ISSUE 11. P. - 19 66% 2
4 MARTON, D , BOYD, KJ , RABALAIS, JW , (1998) SYNERGETIC EFFECTS IN ION BEAM ENERGY AND SUBSTRATE TEMPERATURE DURING HYPERTHERMAL PARTICLE FILM DEPOSITION.JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A. VOL. 16. ISSUE 3. P. 1321-1326 20 74% 15
5 LEE, NE , (1999) SPATIAL ENERGY DISTRIBUTIONS OF SPUTTERED ATOMS AND REFLECTED PARTICLES DURING KR+ AND AR+ ION BEAM SPUTTERING OF SI AND GE.JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS. VOL. 38. ISSUE 12A. P. 6936 -6941 19 66% 3
6 REINIG, P , FENSKE, F , SELLE, B , BOHNE, W , ROHRICH, J , SIEBER, I , FUHS, W , (2004) LOW-TEMPERATURE SILICON HOMOEPITAXIAL GROWTH BY PULSED MAGNETRON SPUTTERING.APPLIED SURFACE SCIENCE. VOL. 227. ISSUE 1-4. P. 114-121 16 64% 8
7 FENSKE, F , GORKA, B , (2009) HIGHLY PHOSPHORUS-DOPED CRYSTALLINE SI LAYERS GROWN BY PULSE-MAGNETRON SPUTTER DEPOSITION.JOURNAL OF APPLIED PHYSICS. VOL. 105. ISSUE 7. P. - 15 60% 1
8 MARKERT, LC , GREENE, JE , NI, WX , HANSSON, GV , SUNDGREN, JE , (1991) CONCENTRATION TRANSIENT ANALYSIS OF ANTIMONY SURFACE SEGREGATION DURING SI(001) MOLECULAR-BEAM EPITAXY.THIN SOLID FILMS. VOL. 206. ISSUE 1-2. P. 59-63 18 90% 2
9 GOSSMANN, HJ , SCHUBERT, EF , EAGLESHAM, DJ , CERULLO, M , (1990) LOW-TEMPERATURE SI MOLECULAR-BEAM EPITAXY - SOLUTION TO THE DOPING PROBLEM.APPLIED PHYSICS LETTERS. VOL. 57. ISSUE 23. P. 2440-2442 23 68% 38
10 GREENE, JE , LEE, NE , (1997) SI(001) EPITAXY FROM HYPERTHERMAL BEAMS: CRYSTAL GROWTH, DOPING, AND ELECTRONIC PROPERTIES.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS. VOL. 121. ISSUE 1-4. P. 58-64 16 76% 5

Classes with closest relation at Level 1


Rank Class id link
1 28095 GAAS1 XGE2X//ASYMMETRIC BANDGAP BOWING//FERROQUADRUPOLAR PHASE
2 7126 ATOMIC LAYER DOPING//SELECTIVE EPITAXIAL GROWTH//SI EPITAXIAL GROWTH
3 5738 STRAINED SI1 XGEX SI QUANTUM WELLS//SEGREGANT ASSISTED GROWTH//SI BASED NANOSTRUCTURES
4 5225 SI100 SURFACE//SURFACE SCIENCE//SURFACTANT MEDIATED EPITAXY
5 11353 DELTA DOPING//MULTISUBBAND ELECTRON MOBILITY//DELTA DOPED QUANTUM WELLS
6 37264 SI O SUPERLATTICE//OXYGEN ATOMIC LAYER//CARRIER CONDUCTION MECHANISM
7 6615 HYDROGEN SURFACTANT//MANA SATELLITE//DISILANE
8 27183 NEGATIVE ION IMPLANTATION//DELTA LAYERED NANOPARTICLES//SOL GEL TITANIUM OXIDE FILM
9 8986 IBIEC//AMORPHOUS POCKET//SOLID PHASE EPITAXIAL GROWTH
10 4857 SI110//SURFACE SCIENCE//SI111 7 X 7

Go to start page