Class information for:
Level 1: ABSORBING FILMS//ROTATING POLARIZER ANALYZER ELLIPSOMETER//ULTRATHIN DIELECTRIC LAYER

Basic class information
Class id #P Avg. number of
references		 Database coverage
of references
14389 772 17.2 57%


Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
2 4 MATERIALS SCIENCE, MULTIDISCIPLINARY//PHYSICS, APPLIED//PHYSICS, CONDENSED MATTER 2836879
637 3       SCULPTURED THIN FILMS//MUELLER MATRIX//GLANCING ANGLE DEPOSITION 12611
1771 2             LASER INDUCED DAMAGE//ELLIPSOMETRY//APPLIED OPTICS 6386
14389 1                   ABSORBING FILMS//ROTATING POLARIZER ANALYZER ELLIPSOMETER//ULTRATHIN DIELECTRIC LAYER 772

Terms with highest relevance score


rank Term termType Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 ABSORBING FILMS authKW 158209 1% 100% 4
2 ROTATING POLARIZER ANALYZER ELLIPSOMETER authKW 118657 0% 100% 3
3 ULTRATHIN DIELECTRIC LAYER authKW 118657 0% 100% 3
4 ELLIPSOMETRY authKW 117145 11% 3% 85
5 APPROXIMATION OF REFLECTION COEFFICIENT authKW 79104 0% 100% 2
6 ELLIPSOMETRY PLICAT address 79104 0% 100% 2
7 REAL TIME SPECTROSCOPIC ELLIPSOMETRY SE authKW 79104 0% 100% 2
8 ROTATING COMPENSATOR ELLIPSOMETER RCE authKW 79104 0% 100% 2
9 IR PYROMETRY authKW 71192 0% 60% 3
10 SPECTROSCOPIC ELLIPSOMETRY authKW 65370 5% 4% 42

Web of Science journal categories


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 Materials Science, Coatings & Films 10387 27% 0% 205
2 Physics, Applied 8323 66% 0% 506
3 Physics, Condensed Matter 1477 24% 0% 187
4 Optics 1415 19% 0% 145
5 Materials Science, Multidisciplinary 1174 29% 0% 225
6 Crystallography 894 10% 0% 75
7 Nanoscience & Nanotechnology 503 9% 0% 73
8 Engineering, Electrical & Electronic 353 15% 0% 114
9 Instruments & Instrumentation 278 7% 0% 52
10 Physics, Multidisciplinary 46 5% 0% 41

Address terms


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 ELLIPSOMETRY PLICAT 79104 0% 100% 2
2 ADV EPITAXY 39552 0% 100% 1
3 AI WARE 39552 0% 100% 1
4 CECOM NIGHT VIS ELECT SENSORS DIRECTORATE 39552 0% 100% 1
5 COND MATT PHYS 39552 0% 100% 1
6 CORPORATED RD 39552 0% 100% 1
7 IPEQ PHYS NANOSTRUCT 39552 0% 100% 1
8 MICROELE OPT MAT ELECT ENGN 39552 0% 100% 1
9 NANO TORY PROGRAM COE CENTURY 21 39552 0% 100% 1
10 OPT TECHNIUM 39552 0% 100% 1

Journals


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 THIN SOLID FILMS 15433 15% 0% 119
2 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 10301 9% 0% 66
3 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 7799 7% 0% 53
4 JOURNAL OF CRYSTAL GROWTH 5823 9% 0% 68
5 JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION 3834 4% 0% 31
6 APPLIED OPTICS 2885 7% 0% 51
7 REVIEW OF SCIENTIFIC INSTRUMENTS 2259 5% 0% 42
8 APPLIED PHYSICS LETTERS 663 6% 0% 45
9 JOURNAL OF ELECTRONIC MATERIALS 390 1% 0% 10
10 WAVES IN RANDOM AND COMPLEX MEDIA 337 0% 0% 2

Author Key Words


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class		 LCSH search Wikipedia search
1 ABSORBING FILMS 158209 1% 100% 4 Search ABSORBING+FILMS Search ABSORBING+FILMS
2 ROTATING POLARIZER ANALYZER ELLIPSOMETER 118657 0% 100% 3 Search ROTATING+POLARIZER+ANALYZER+ELLIPSOMETER Search ROTATING+POLARIZER+ANALYZER+ELLIPSOMETER
3 ULTRATHIN DIELECTRIC LAYER 118657 0% 100% 3 Search ULTRATHIN+DIELECTRIC+LAYER Search ULTRATHIN+DIELECTRIC+LAYER
4 ELLIPSOMETRY 117145 11% 3% 85 Search ELLIPSOMETRY Search ELLIPSOMETRY
5 APPROXIMATION OF REFLECTION COEFFICIENT 79104 0% 100% 2 Search APPROXIMATION+OF+REFLECTION+COEFFICIENT Search APPROXIMATION+OF+REFLECTION+COEFFICIENT
6 REAL TIME SPECTROSCOPIC ELLIPSOMETRY SE 79104 0% 100% 2 Search REAL+TIME+SPECTROSCOPIC+ELLIPSOMETRY+SE Search REAL+TIME+SPECTROSCOPIC+ELLIPSOMETRY+SE
7 ROTATING COMPENSATOR ELLIPSOMETER RCE 79104 0% 100% 2 Search ROTATING+COMPENSATOR+ELLIPSOMETER+RCE Search ROTATING+COMPENSATOR+ELLIPSOMETER+RCE
8 IR PYROMETRY 71192 0% 60% 3 Search IR+PYROMETRY Search IR+PYROMETRY
9 SPECTROSCOPIC ELLIPSOMETRY 65370 5% 4% 42 Search SPECTROSCOPIC+ELLIPSOMETRY Search SPECTROSCOPIC+ELLIPSOMETRY
10 REAL TIME MONITORING AND CONTROL 59325 0% 50% 3 Search REAL+TIME+MONITORING+AND+CONTROL Search REAL+TIME+MONITORING+AND+CONTROL

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.


Rank Reference # ref.
in cl.		 Shr. of ref. in
cl.		 Citations
1 CHO, YJ , CHEGAL, W , LEE, JP , CHO, HM , (2015) UNIVERSAL EVALUATIONS AND EXPRESSIONS OF MEASURING UNCERTAINTY FOR ROTATING-ELEMENT SPECTROSCOPIC ELLIPSOMETERS.OPTICS EXPRESS. VOL. 23. ISSUE 12. P. 16481 -16491 25 83% 0
2 CHO, YJ , CHEGAL, W , LEE, JP , CHO, HM , (2016) UNIVERSAL EVALUATION OF COMBINED STANDARD UNCERTAINTY FOR ROTATING-ELEMENT SPECTROSCOPIC ELLIPSOMETERS.OPTICS EXPRESS. VOL. 24. ISSUE 23. P. 26215 -26227 17 85% 0
3 ALKANOO, AA , TAYA, SA , EL-AGEZ, TM , (2015) EFFECT OF THE ORIENTATION OF THE FIXED ANALYZER ON THE ELLIPSOMETRIC PARAMETERS IN ROTATING POLARIZER AND COMPENSATOR ELLIPSOMETER WITH SPEED RATIO 1:1.OPTICAL AND QUANTUM ELECTRONICS. VOL. 47. ISSUE 7. P. 2039 -2053 15 94% 0
4 URBAN, FK , BARTON, D , (2015) NUMERICAL ELLIPSOMETRY: EXAMINATION OF GROWING NICKEL AND RHENIUM THIN FILMS USING N-K PLANE ANALYSIS AND EFFECTIVE NUMERICAL SUBSTRATES.THIN SOLID FILMS. VOL. 583. ISSUE . P. 239 -244 14 100% 0
5 TAYA, SA , EL-AGEZ, TM , ALKANOO, AA , (2014) A SPECTROSCOPIC ELLIPSOMETER USING ROTATING POLARIZER AND ANALYZER AT A SPEED RATIO 1:1 AND A COMPENSATOR.OPTICAL AND QUANTUM ELECTRONICS. VOL. 46. ISSUE 7. P. 883 -895 15 88% 1
6 TAYA, SA , EL-AGEZ, TM , (2013) ROTATING POLARIZER ANALYZER ELLIPSOMETER WITH A FIXED COMPENSATOR.OPTIK. VOL. 124. ISSUE 18. P. 3379-3383 13 100% 0
7 JACKSON, AW , PINSUKANJANA, PR , GOSSARD, AC , COLDREN, LA , (1997) IN SITU MONITORING AND CONTROL FOR MBE GROWTH OF OPTOELECTRONIC DEVICES.IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS. VOL. 3. ISSUE 3. P. 836-844 20 95% 10
8 GILLIOT, M , (2013) ERRORS IN INVERSION OF ELLIPSOMETRIC EQUATIONS FOR TRANSPARENT FILMS.THIN SOLID FILMS. VOL. 542. ISSUE . P. 300-305 12 100% 0
9 CHEGAL, W , LEE, JP , CHO, HM , HAN, SW , CHO, YJ , (2013) OPTIMIZING THE PRECISION OF A MULTICHANNEL THREE-POLARIZER SPECTROSCOPIC ELLIPSOMETER.JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION. VOL. 30. ISSUE 7. P. 1310-1319 13 87% 1
10 GILLIOT, M , (2012) EXTRACTION OF COMPLEX REFRACTIVE INDEX OF ABSORBING FILMS FROM ELLIPSOMETRY MEASUREMENT.THIN SOLID FILMS. VOL. 520. ISSUE 17. P. 5568-5574 14 82% 1

Classes with closest relation at Level 1


Rank Class id link
1 11862 NANOOPT PROPERTY//SPECTROSCOPIC ELLIPSOMETRY//DIELECTRIC FUNCTION
2 24490 IMAGING ELLIPSOMETRY//TOTAL INTERNAL REFLECTION ELLIPSOMETRY//IMAGING ELLIPSOMETER
3 15060 PLASMA PHYS PLASMA SOURCES//OPTICAL CONSTANTS//JOINT MODERN METROL
4 35110 OBLIQUE INCIDENCE REFLECTIVITY DIFFERENCE OIRD//OBLIQUE INCIDENCE REFLECTIVITY DIFFERENCE//SERIES PHOTODETECTOR FREQUENCY CIRCUIT SYSTEM
5 4033 REFLECTANCE ANISOTROPY SPECTROSCOPY//REFLECTANCE DIFFERENCE SPECTROSCOPY//REFLECTION ANISOTROPY SPECTROSCOPY
6 22452 AGGREGATED FILMS//ALUMINUM NANOFILM//INSITU ELLIPSOMETRY
7 21113 INFRARED ELLIPSOMETRY//BERLIN//BERREMAN EFFECT
8 26088 QUARTERWAVE RETARDERS//ABSORBING SUBSTRATE//BROAD AND WIDE ANGLE
9 5682 MUELLER MATRIX//SHENZHEN MINIMAL INVAS MED TECHNOL//POLARIMETRIC IMAGING
10 19470 PLANE PLASMA DISCHARGE//ENERGY INFLUX//DRY DEVELOPMENT

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