Class information for:
Level 1: GAS PUFF TARGET//EUV SOURCE//LASER PRODUCED PLASMA

Basic class information
Class id #P Avg. number of
references		 Database coverage
of references
12923 872 20.2 66%


Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
2 4 MATERIALS SCIENCE, MULTIDISCIPLINARY//PHYSICS, APPLIED//PHYSICS, CONDENSED MATTER 2836879
277 3       NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS//JOURNAL OF SYNCHROTRON RADIATION//NUCLEAR SCIENCE & TECHNOLOGY 43290
1283 2             X RAY OPTICS//X RAY MICROSCOPY//ZONE PLATE 8701
12923 1                   GAS PUFF TARGET//EUV SOURCE//LASER PRODUCED PLASMA 872

Terms with highest relevance score


rank Term termType Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 GAS PUFF TARGET authKW 493263 2% 78% 18
2 EUV SOURCE authKW 428944 2% 88% 14
3 LASER PRODUCED PLASMA authKW 322627 7% 16% 58
4 DISCHARGE PRODUCED PLASMA authKW 283629 1% 90% 9
5 ADV INTERDISCIPLINARY SCI address 183320 3% 22% 24
6 EXTREME ULTRAVIOLET authKW 175936 4% 15% 34
7 EUV LITHOGRAPHY authKW 165393 3% 16% 29
8 DEBRIS MITIGATION authKW 157564 1% 50% 9
9 MAT EXTREME ENVIRONM address 145647 2% 20% 21
10 COLLECTOR OPTICS authKW 140065 0% 100% 4

Web of Science journal categories


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 Physics, Applied 6088 53% 0% 466
2 Optics 3704 28% 0% 242
3 Physics, Fluids & Plasmas 1139 9% 0% 81
4 Instruments & Instrumentation 724 10% 0% 85
5 Nanoscience & Nanotechnology 515 9% 0% 79
6 Engineering, Electrical & Electronic 235 12% 0% 105
7 Physics, Multidisciplinary 174 8% 0% 71
8 Physics, Atomic, Molecular & Chemical 110 6% 0% 50
9 Nuclear Science & Technology 72 3% 0% 30
10 Physics, Nuclear 57 3% 0% 28

Address terms


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 ADV INTERDISCIPLINARY SCI 183320 3% 22% 24
2 MAT EXTREME ENVIRONM 145647 2% 20% 21
3 OPT TECHNOL INNOVAT OPTIC 125055 1% 71% 5
4 PHYS AS 105048 0% 100% 3
5 PLASMA MAT INTERACT GRP 79577 1% 45% 5
6 LASER ENGN 76692 8% 3% 69
7 GRP PLICAT PLASMAS 70032 0% 100% 2
8 HIRATSUKA DEV 70032 0% 100% 2
9 OPT CORE 70032 0% 100% 2
10 EUVA 63027 0% 60% 3

Journals


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS 27366 3% 3% 27
2 APPLIED PHYSICS B-LASERS AND OPTICS 5051 4% 0% 33
3 JOURNAL OF MICROLITHOGRAPHY MICROFABRICATION AND MICROSYSTEMS 3593 1% 2% 5
4 REVIEW OF SCIENTIFIC INSTRUMENTS 2839 6% 0% 50
5 APPLIED PHYSICS LETTERS 2423 10% 0% 89
6 MICROELECTRONIC ENGINEERING 2295 3% 0% 26
7 JOURNAL OF APPLIED PHYSICS 2069 9% 0% 81
8 JOURNAL OF PHYSICS D-APPLIED PHYSICS 1889 4% 0% 34
9 JOURNAL OF LASER MICRO NANOENGINEERING 1479 1% 1% 5
10 LASER AND PARTICLE BEAMS 1244 1% 0% 9

Author Key Words


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class		 LCSH search Wikipedia search
1 GAS PUFF TARGET 493263 2% 78% 18 Search GAS+PUFF+TARGET Search GAS+PUFF+TARGET
2 EUV SOURCE 428944 2% 88% 14 Search EUV+SOURCE Search EUV+SOURCE
3 LASER PRODUCED PLASMA 322627 7% 16% 58 Search LASER+PRODUCED+PLASMA Search LASER+PRODUCED+PLASMA
4 DISCHARGE PRODUCED PLASMA 283629 1% 90% 9 Search DISCHARGE+PRODUCED+PLASMA Search DISCHARGE+PRODUCED+PLASMA
5 EXTREME ULTRAVIOLET 175936 4% 15% 34 Search EXTREME+ULTRAVIOLET Search EXTREME+ULTRAVIOLET
6 EUV LITHOGRAPHY 165393 3% 16% 29 Search EUV+LITHOGRAPHY Search EUV+LITHOGRAPHY
7 DEBRIS MITIGATION 157564 1% 50% 9 Search DEBRIS+MITIGATION Search DEBRIS+MITIGATION
8 COLLECTOR OPTICS 140065 0% 100% 4 Search COLLECTOR+OPTICS Search COLLECTOR+OPTICS
9 PLASMA DEBRIS 140065 0% 100% 4 Search PLASMA+DEBRIS Search PLASMA+DEBRIS
10 EXTREME ULTRAVIOLET SOURCE 140061 1% 67% 6 Search EXTREME+ULTRAVIOLET+SOURCE Search EXTREME+ULTRAVIOLET+SOURCE

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.


Rank Reference # ref.
in cl.		 Shr. of ref. in
cl.		 Citations
1 O'SULLIVAN, G , LI, BW , D'ARCY, R , DUNNE, P , HAYDEN, P , KILBANE, D , MCCORMACK, T , OHASHI, H , O'REILLY, F , SHERIDAN, P , ET AL (2015) SPECTROSCOPY OF HIGHLY CHARGED IONS AND ITS RELEVANCE TO EUV AND SOFT X-RAY SOURCE DEVELOPMENT.JOURNAL OF PHYSICS B-ATOMIC MOLECULAR AND OPTICAL PHYSICS. VOL. 48. ISSUE 14. P. - 43 78% 5
2 O'SULLIVAN, G , KILBANE, D , D'ARCY, R , (2012) RECENT PROGRESS IN SOURCE DEVELOPMENT FOR EXTREME UV LITHOGRAPHY.JOURNAL OF MODERN OPTICS. VOL. 59. ISSUE 10. P. 855 -872 36 90% 5
3 ROY, A , HARILAL, SS , POLEK, MP , HASSAN, SM , ENDO, A , HASSANEIN, A , (2014) INFLUENCE OF LASER PULSE DURATION ON EXTREME ULTRAVIOLET AND ION EMISSION FEATURES FROM TIN PLASMAS.PHYSICS OF PLASMAS. VOL. 21. ISSUE 3. P. - 28 88% 8
4 COONS, RW , HARILAL, SS , CAMPOS, D , HASSANEIN, A , (2010) ANALYSIS OF ATOMIC AND ION DEBRIS FEATURES OF LASER-PRODUCED SN AND LI PLASMAS.JOURNAL OF APPLIED PHYSICS. VOL. 108. ISSUE 6. P. - 30 81% 12
5 NISHIHARA, K , SUNAHARA, A , SASAKI, A , NUNAMI, M , TANUMA, H , FUJIOKA, S , SHIMADA, Y , FUJIMA, K , FURUKAWA, H , KATO, T , ET AL (2008) PLASMA PHYSICS AND RADIATION HYDRODYNAMICS IN DEVELOPING AN EXTREME ULTRAVIOLET LIGHT SOURCE FOR LITHOGRAPHY.PHYSICS OF PLASMAS. VOL. 15. ISSUE 5. P. - 27 79% 49
6 O'SULLIVAN, G , LI, BW , DUNNE, P , HAYDEN, P , KILBANE, D , LOKASANI, R , LONG, E , OHASHI, H , O'REILLY, F , SHEIL, J , ET AL (2015) SOURCES FOR BEYOND EXTREME ULTRAVIOLET LITHOGRAPHY AND WATER WINDOW IMAGING.PHYSICA SCRIPTA. VOL. 90. ISSUE 5. P. - 22 81% 2
7 ABHARI, RS , ROLLINGER, B , GIOVANNINI, AZ , MORRIS, O , HENDERSON, I , ELLWI, SS , (2012) LASER-PRODUCED PLASMA LIGHT SOURCE FOR EXTREME-ULTRAVIOLET LITHOGRAPHY APPLICATIONS.JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS. VOL. 11. ISSUE 2. P. - 23 82% 11
8 MATSUKUMA, H , HOSODA, T , SUZUKI, Y , YOGO, A , YANAGIDA, T , KODAMA, T , NISHIMURA, H , (2016) FAR-INFRARED-LIGHT SHADOWGRAPHY FOR HIGH EXTRACTION EFFICIENCY OF EXTREME ULTRAVIOLET LIGHT FROM A CO2-LASER-GENERATED TIN PLASMA.APPLIED PHYSICS LETTERS. VOL. 109. ISSUE 5. P. - 18 90% 1
9 SIZYUK, T , HASSANEIN, A , (2014) OPTIMIZING LASER PRODUCED PLASMAS FOR EFFICIENT EXTREME ULTRAVIOLET AND SOFT X-RAY LIGHT SOURCES.PHYSICS OF PLASMAS. VOL. 21. ISSUE 8. P. - 19 90% 3
10 HARILAL, SS , MILOSHEVSKY, GV , SIZYUK, T , HASSANEIN, A , (2013) EFFECTS OF EXCITATION LASER WAVELENGTH ON LY-ALPHA AND HE-ALPHA LINE EMISSION FROM NITROGEN PLASMAS.PHYSICS OF PLASMAS. VOL. 20. ISSUE 1. P. - 27 64% 5

Classes with closest relation at Level 1


Rank Class id link
1 22144 EUV LITHOG//EXTREME ULTRAVIOLET LITHOGRAPHY//EUVL
2 16094 STARS INDIVIDUAL RE 0503 289//QUASISPIN//SPECTRAL LINE IDENTIFICATION
3 1903 X RAY LASER//SOFT X RAY LASER//SPECT ATOM ION
4 2805 MULTILAYER MIRROR//PRECIS OPT ENGN//MULTILAYERS
5 30199 TRANSMISSION GRATING//FREESTANDING TRANSMISSION GRATING//HIGH TEMP HIGH DENS PLASMA PHYS
6 10979 HIGH ENERGY DENSITY PHYSICS//RADIATIVE OPACITY//SCREENED HYDROGENIC MODEL
7 16800 STXM//X RAY MICROSCOPY//BIMR
8 7837 X RAY OPTICS//ZONE PLATE//X RAY MICROSCOPY
9 10270 MULTICHARGED IONS SPE A DATA//ABT RONTGENOPT//ULTRASHORT X RAY PULSES
10 22514 LASER FUSION ROCKET//LASER PRODUCED PLASMA//THREE DIMENSIONAL HYBRID CODE

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