Class information for:
Level 1: MULTILAYER MIRROR//PRECIS OPT ENGN//MULTILAYERS

Basic class information
Class id #P Avg. number of
references		 Database coverage
of references
2805 2144 20.2 59%


Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
2 4 MATERIALS SCIENCE, MULTIDISCIPLINARY//PHYSICS, APPLIED//PHYSICS, CONDENSED MATTER 2836879
277 3       NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS//JOURNAL OF SYNCHROTRON RADIATION//NUCLEAR SCIENCE & TECHNOLOGY 43290
1283 2             X RAY OPTICS//X RAY MICROSCOPY//ZONE PLATE 8701
2805 1                   MULTILAYER MIRROR//PRECIS OPT ENGN//MULTILAYERS 2144

Terms with highest relevance score


rank Term termType Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 MULTILAYER MIRROR authKW 279919 2% 44% 45
2 PRECIS OPT ENGN address 272958 3% 30% 63
3 MULTILAYERS authKW 139788 10% 5% 218
4 GOLD address 128152 1% 60% 15
5 X RAY EUV OPTICS authKW 120323 1% 65% 13
6 X RAY MULTILAYERS authKW 114867 1% 73% 11
7 X RAY MIRROR authKW 110614 1% 30% 26
8 X RAY REFLECTIVITY authKW 108507 3% 12% 64
9 MO SI MULTILAYERS authKW 101264 0% 89% 8
10 CHIM PHYS MAT RAYONNEMENT address 94371 3% 12% 55

Web of Science journal categories


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 Optics 10108 29% 0% 625
2 Physics, Applied 7874 40% 0% 852
3 Materials Science, Coatings & Films 3240 9% 0% 198
4 Instruments & Instrumentation 2822 12% 0% 258
5 Physics, Condensed Matter 2029 18% 0% 381
6 Spectroscopy 1728 8% 0% 179
7 Nuclear Science & Technology 901 7% 0% 144
8 Physics, Nuclear 693 6% 0% 131
9 Materials Science, Multidisciplinary 430 13% 0% 283
10 Physics, Particles & Fields 375 5% 0% 113

Address terms


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 PRECIS OPT ENGN 272958 3% 30% 63
2 GOLD 128152 1% 60% 15
3 CHIM PHYS MAT RAYONNEMENT 94371 3% 12% 55
4 SIBERIAN SR 88723 0% 69% 9
5 LUXOR 85431 1% 50% 12
6 SOFT XRAY MICROSCOPY 75944 0% 67% 8
7 UMR 7614 72505 2% 10% 49
8 IPOE 65092 0% 57% 8
9 DC DE 59334 0% 83% 5
10 CNRS UMR 7614 58574 1% 34% 12

Journals


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 APPLIED OPTICS 19935 10% 1% 222
2 JOURNAL OF SYNCHROTRON RADIATION 4426 1% 1% 31
3 OPTICAL ENGINEERING 4249 3% 0% 65
4 NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT 3930 5% 0% 109
5 THIN SOLID FILMS 3710 5% 0% 99
6 JOURNAL DE PHYSIQUE IV 2727 2% 0% 45
7 JOURNAL OF APPLIED PHYSICS 2698 7% 0% 147
8 REVIEW OF SCIENTIFIC INSTRUMENTS 2472 3% 0% 74
9 REVUE DE PHYSIQUE APPLIQUEE 2095 1% 1% 14
10 JOURNAL DE PHYSIQUE III 1898 1% 1% 12

Author Key Words


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class		 LCSH search Wikipedia search
1 MULTILAYER MIRROR 279919 2% 44% 45 Search MULTILAYER+MIRROR Search MULTILAYER+MIRROR
2 MULTILAYERS 139788 10% 5% 218 Search MULTILAYERS Search MULTILAYERS
3 X RAY EUV OPTICS 120323 1% 65% 13 Search X+RAY+EUV+OPTICS Search X+RAY+EUV+OPTICS
4 X RAY MULTILAYERS 114867 1% 73% 11 Search X+RAY+MULTILAYERS Search X+RAY+MULTILAYERS
5 X RAY MIRROR 110614 1% 30% 26 Search X+RAY+MIRROR Search X+RAY+MIRROR
6 X RAY REFLECTIVITY 108507 3% 12% 64 Search X+RAY+REFLECTIVITY Search X+RAY+REFLECTIVITY
7 MO SI MULTILAYERS 101264 0% 89% 8 Search MO+SI+MULTILAYERS Search MO+SI+MULTILAYERS
8 EXTREME ULTRAVIOLET 89342 2% 17% 38 Search EXTREME+ULTRAVIOLET Search EXTREME+ULTRAVIOLET
9 EUV MULTILAYER 85443 0% 100% 6 Search EUV+MULTILAYER Search EUV+MULTILAYER
10 SOFT X RAY RANGE 85443 0% 100% 6 Search SOFT+X+RAY+RANGE Search SOFT+X+RAY+RANGE

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.


Rank Reference # ref. in
cl.		 Shr. of ref. in
cl.		 Citations
1 LOUIS, E , YAKSHIN, AE , TSARFATI, T , BIJKERK, F , (2011) NANOMETER INTERFACE AND MATERIALS CONTROL FOR MULTILAYER EUV-OPTICAL APPLICATIONS.PROGRESS IN SURFACE SCIENCE. VOL. 86. ISSUE 11-12. P. 255 -294 67 64% 37
2 MAJKOVA, E , JERGEL, M , YAMAMOTO, M , TSURU, T , LUBY, S , SIFFALOVIC, P , (2007) ADVANCED NANOMETER-SIZE STRUCTURES.ACTA PHYSICA SLOVACA. VOL. 57. ISSUE 6. P. 911 -1074 109 39% 1
3 BARTHELMESS, M , BAJT, S , (2011) THERMAL AND STRESS STUDIES OF NORMAL INCIDENCE MO/B4C MULTILAYERS FOR A 6.7 NM WAVELENGTH.APPLIED OPTICS. VOL. 50. ISSUE 11. P. 1610 -1619 36 86% 23
4 PERSHYN, YP , GULLIKSON, EM , KONDRATENKO, VV , MAMON, VV , REUTSKAYA, SA , VORONOV, DL , ZUBAREV, EN , ARTYUKOV, IA , VINOGRADOV, AV , (2013) EFFECT OF WORKING GAS PRESSURE ON INTERLAYER MIXING IN MAGNETRON-DEPOSITED MO/SI MULTILAYERS.OPTICAL ENGINEERING. VOL. 52. ISSUE 9. P. - 39 71% 1
5 BAI, HL , JIANG, EY , WU, P , LOU, ZD , (1999) SOFT X-RAY OPTICAL MULTILAYER MIRRORS.CHINESE SCIENCE BULLETIN. VOL. 44. ISSUE 12. P. 1057-1064 39 95% 0
6 PIROZHKOV, AS , RAGOZIN, EN , (2015) APERIODIC MULTILAYER STRUCTURES IN SOFT X-RAY OPTICS.PHYSICS-USPEKHI. VOL. 58. ISSUE 11. P. 1095 -1105 30 77% 1
7 PERSHIN, YP , SEVRYUKOVA, VA , ZUBAREV, EM , KONDRATENKO, VV , DERGUN, SM , (2011) IMPACT OF WORKING-GAS PRESSURE ON FORMATION OF INTERMIXED ZONES IN MO/SI MULTILAYER X-RAY MIRRORS FABRICATED BY MAGNETRON SPUTTERING.METALLOFIZIKA I NOVEISHIE TEKHNOLOGII. VOL. 33. ISSUE 11. P. 1513-1528 26 96% 0
8 CHOUEIKANI, F , BRIDOU, F , LAGARDE, B , MELTCHAKOV, E , POLACK, F , MERCERE, P , DELMOTTE, F , (2013) X-RAY PROPERTIES AND INTERFACE STUDY OF B4C/MO AND B4C/MO2C PERIODIC MULTILAYERS.APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING. VOL. 111. ISSUE 1. P. 191 -198 23 96% 5
9 BURCKLEN, C , SOUFLI, R , DENNETIERE, D , POLACK, F , CAPITANIO, B , GULLIKSON, E , MELTCHAKOV, E , THOMASSET, M , JEROME, A , DE ROSSI, S , ET AL (2016) CR/B4C MULTILAYER MIRRORS: STUDY OF INTERFACES AND X-RAY REFLECTANCE.JOURNAL OF APPLIED PHYSICS. VOL. 119. ISSUE 12. P. - 21 91% 1
10 MELTCHAKOV, E , HECQUET, C , ROULLIAY, M , DE ROSSI, S , MENESGUEN, Y , JEROME, A , BRIDOU, F , VARNIERE, F , RAVET-KRILL, MF , DELMOTTE, F , (2010) DEVELOPMENT OF AL-BASED MULTILAYER OPTICS FOR EUV.APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING. VOL. 98. ISSUE 1. P. 111-117 24 92% 15

Classes with closest relation at Level 1


Rank Class id link
1 33607 EBIT IL//PHOTON IRRADIATION EFFECTS//MOVING COIL ACTUATOR
2 22144 EUV LITHOG//EXTREME ULTRAVIOLET LITHOGRAPHY//EUVL
3 24217 X RAY TELESCOPE//ELECTROFORMED OPTICS//SPACE VEHICLES INSTRUMENTATION DETECTORS
4 12923 GAS PUFF TARGET//EUV SOURCE//LASER PRODUCED PLASMA
5 18252 NEUTRON SPECULAR REFLECTION//MAGNETIC REFERENCE LAYER//PHASE PROBLEM
6 12305 TOTAL EXTERNAL REFLECTION//X RAY STANDING WAVES//BACKSCATTERING DIFFRACTION
7 24473 BK MOL SCI//LEHRSTUHL FUNKT MAT//DONGGUK MED
8 13165 GASSENDI//VARIED LINE SPACING GRATING//SPHERICAL GRATING MONOCHROMATOR
9 30199 TRANSMISSION GRATING//FREESTANDING TRANSMISSION GRATING//HIGH TEMP HIGH DENS PLASMA PHYS
10 7837 X RAY OPTICS//ZONE PLATE//X RAY MICROSCOPY

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