Class information for:
Level 1: NANOMETROLOGY//MICRO CMM//NANOPOSITIONING AND NANOMEASURING MACHINE

Basic class information
Class id #P Avg. number of
references		 Database coverage
of references
11774 955 19.4 59%


Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
10 4 OPTICS//PHYSICS, PARTICLES & FIELDS//PHYSICS, MULTIDISCIPLINARY 1131262
217 3       OPTICS//APPLIED OPTICS//OPTICAL ENGINEERING 50829
1223 2             PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY//THERMAL ERROR//COORDINATE MEASURING MACHINE 9117
11774 1                   NANOMETROLOGY//MICRO CMM//NANOPOSITIONING AND NANOMEASURING MACHINE 955

Terms with highest relevance score


rank Term termType Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 NANOMETROLOGY authKW 601429 6% 35% 54
2 MICRO CMM authKW 577105 2% 95% 19
3 NANOPOSITIONING AND NANOMEASURING MACHINE authKW 322389 1% 92% 11
4 PROC MEASUREMENT SENSOR TECHNOL address 256470 2% 42% 19
5 TIP CHARACTERIZATION authKW 245939 1% 77% 10
6 CRITICAL DIMENSION ATOMIC FORCE MICROSCOPE authKW 195831 1% 88% 7
7 OPTICAL DIFFRACTOMETER authKW 191836 1% 100% 6
8 TIP CHARACTERIZER authKW 191836 1% 100% 6
9 PITCH CALIBRATION authKW 133218 1% 83% 5
10 METROLOGICAL ATOMIC FORCE MICROSCOPE authKW 127891 0% 100% 4

Web of Science journal categories


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 Instruments & Instrumentation 20604 46% 0% 438
2 Engineering, General 10189 25% 0% 239
3 Engineering, Manufacturing 3164 10% 0% 97
4 Microscopy 2613 6% 0% 55
5 Nanoscience & Nanotechnology 2508 18% 0% 171
6 Physics, Applied 2032 31% 0% 297
7 Engineering, Electrical & Electronic 587 17% 0% 159
8 Engineering, Industrial 326 3% 0% 33
9 Optics 247 8% 0% 77
10 Materials Science, Multidisciplinary 191 13% 0% 126

Address terms


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 PROC MEASUREMENT SENSOR TECHNOL 256470 2% 42% 19
2 PRECIS NANOSYST 95918 0% 100% 3
3 MEASUREMENT TESTING EAST CHINA 95912 1% 50% 6
4 ULTRA PRECIS OPTOELECT RUMENT 76727 1% 40% 6
5 CHAIR MFG METROL 71937 0% 75% 3
6 MEASUREMENT CALIBRAT 71937 0% 75% 3
7 ULTRA PRECIS OPTOELECT RUMENTS 63945 0% 100% 2
8 SOLID NANOTECHNOL 63941 0% 50% 4
9 SHANGHAI MEASUREMENT TESTING TECHNOL 63937 1% 33% 6
10 ABT FERTIGUNGSMESSTECH 57548 0% 60% 3

Journals


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 MEASUREMENT SCIENCE AND TECHNOLOGY 110556 19% 2% 177
2 TM-TECHNISCHES MESSEN 110206 5% 7% 49
3 TECHNISCHES MESSEN 34050 3% 4% 28
4 PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY 15256 3% 2% 26
5 JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS 13698 2% 2% 20
6 CIRP ANNALS-MANUFACTURING TECHNOLOGY 13439 3% 1% 31
7 MICROTECNIC 10656 0% 33% 1
8 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 7803 7% 0% 64
9 ULTRAMICROSCOPY 3833 3% 0% 26
10 REVIEW OF SCIENTIFIC INSTRUMENTS 3619 6% 0% 59

Author Key Words


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class		 LCSH search Wikipedia search
1 NANOMETROLOGY 601429 6% 35% 54 Search NANOMETROLOGY Search NANOMETROLOGY
2 MICRO CMM 577105 2% 95% 19 Search MICRO+CMM Search MICRO+CMM
3 NANOPOSITIONING AND NANOMEASURING MACHINE 322389 1% 92% 11 Search NANOPOSITIONING+AND+NANOMEASURING+MACHINE Search NANOPOSITIONING+AND+NANOMEASURING+MACHINE
4 TIP CHARACTERIZATION 245939 1% 77% 10 Search TIP+CHARACTERIZATION Search TIP+CHARACTERIZATION
5 CRITICAL DIMENSION ATOMIC FORCE MICROSCOPE 195831 1% 88% 7 Search CRITICAL+DIMENSION+ATOMIC+FORCE+MICROSCOPE Search CRITICAL+DIMENSION+ATOMIC+FORCE+MICROSCOPE
6 OPTICAL DIFFRACTOMETER 191836 1% 100% 6 Search OPTICAL+DIFFRACTOMETER Search OPTICAL+DIFFRACTOMETER
7 TIP CHARACTERIZER 191836 1% 100% 6 Search TIP+CHARACTERIZER Search TIP+CHARACTERIZER
8 PITCH CALIBRATION 133218 1% 83% 5 Search PITCH+CALIBRATION Search PITCH+CALIBRATION
9 METROLOGICAL ATOMIC FORCE MICROSCOPE 127891 0% 100% 4 Search METROLOGICAL+ATOMIC+FORCE+MICROSCOPE Search METROLOGICAL+ATOMIC+FORCE+MICROSCOPE
10 NANOMEASURING MACHINE 127891 0% 100% 4 Search NANOMEASURING+MACHINE Search NANOMEASURING+MACHINE

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.


Rank Reference # ref.
in cl.		 Shr. of ref. in
cl.		 Citations
1 HUSSAIN, D , AHMAD, K , SONG, JM , XIE, H , (2017) ADVANCES IN THE ATOMIC FORCE MICROSCOPY FOR CRITICAL DIMENSION METROLOGY.MEASUREMENT SCIENCE AND TECHNOLOGY. VOL. 28. ISSUE 1. P. - 89 48% 0
2 YACOOT, A , KOENDERS, L , (2011) RECENT DEVELOPMENTS IN DIMENSIONAL NANOMETROLOGY USING AFMS.MEASUREMENT SCIENCE AND TECHNOLOGY. VOL. 22. ISSUE 12. P. - 59 45% 16
3 LI, RJ , FAN, KC , MIAO, JW , HUANG, QX , TAO, S , GONG, EM , (2014) AN ANALOGUE CONTACT PROBE USING A COMPACT 3D OPTICAL SENSOR FOR MICRO/NANO COORDINATE MEASURING MACHINES.MEASUREMENT SCIENCE AND TECHNOLOGY. VOL. 25. ISSUE 9. P. - 21 91% 4
4 DANZEBRINK, HU , KOENDERS, L , WILKENING, G , YACOOT, A , KUNZMANN, H , (2006) ADVANCES IN SCANNING FORCE MICROSCOPY FOR DIMENSIONAL METROLOGY.CIRP ANNALS-MANUFACTURING TECHNOLOGY. VOL. 55. ISSUE 2. P. 841 -878 57 37% 52
5 THALMANN, R , MELI, F , KUNG, A , (2016) STATE OF THE ART OF TACTILE MICRO COORDINATE METROLOGY.APPLIED SCIENCES-BASEL. VOL. 6. ISSUE 5. P. - 16 100% 1
6 CUI, JW , LI, JY , FENG, KP , TAN, JB , ZHANG, J , (2016) A 3D FIBER PROBE BASED ON ORTHOGONAL MICRO FOCAL-LENGTH COLLIMATION AND FIBER BRAGG GRATING.MEASUREMENT SCIENCE AND TECHNOLOGY. VOL. 27. ISSUE 7. P. - 18 95% 0
7 LI, RJ , FAN, KC , HUANG, QX , ZHOU, H , GONG, EM , XIANG, M , (2016) A LONG-STROKE 3D CONTACT SCANNING PROBE FOR MICRO/NANO COORDINATE MEASURING MACHINE.PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY. VOL. 43. ISSUE . P. 220 -229 17 89% 1
8 KITTA, J , FUJIMOTO, H , GONDA, S , AZUMA, Y , MISUMI, I , MAEDA, K , KUROSAWA, T , ITO, Y , OMOTE, K , NAKAYAMA, Y , ET AL (2012) 25 NM PITCH COMPARISON BETWEEN A TRACEABLE X-RAY DIFFRACTOMETER AND A METROLOGICAL ATOMIC FORCE MICROSCOPE.MEASUREMENT SCIENCE AND TECHNOLOGY. VOL. 23. ISSUE 1. P. - 20 87% 4
9 DAI, GL , NEUGEBAUER, M , STEIN, M , BUTEFISCH, S , NEUSCHAEFER-RUBE, U , (2016) OVERVIEW OF 3D MICRO- AND NANOCOORDINATE METROLOGY AT PTB.APPLIED SCIENCES-BASEL. VOL. 6. ISSUE 9. P. - 16 89% 0
10 ITO, S , KIKUCHI, H , CHEN, YL , SHIMIZU, Y , GAO, W , TAKAHASHI, K , KANAYAMA, T , ARAKAWA, K , HAYASHI, A , (2016) A MICRO-COORDINATE MEASUREMENT MACHINE (CMM) FOR LARGE-SCALE DIMENSIONAL MEASUREMENT OF MICRO-SLITS.APPLIED SCIENCES-BASEL. VOL. 6. ISSUE 5. P. - 18 78% 0

Classes with closest relation at Level 1


Rank Class id link
1 13090 HETERODYNE INTERFEROMETER//HETERODYNE INTERFEROMETRY//FRINGE INTERPOLATION
2 2223 FUTURE ENERGY IFES//ATOMIC FORCE ACOUSTIC MICROSCOPY//TAPPING MODE
3 28300 NANOMANIPULATION//AFM NANOROBOT//MOL ROBOT
4 21518 CARBON NANOTUBE TIPS//CARBON NANOTUBE PROBES//CARDIAC BIOPHYS BIOENGN
5 5661 LOCAL TUNNELING BARRIER HEIGHT//LOCAL TUNNELING BARRIER HEIGHT LBH//LOCAL WORK FUNCTION
6 6023 ATOMIC FORCE MICROSCOPY//NANODISSECTION//CRYO AFM
7 6367 REVERSE ENGINEERING//COORDINATE MEASURING MACHINE//CMM
8 3406 FLEXURE HINGE//PIEZOELECTRIC ACTUATOR//NANOPOSITIONING
9 11434 WHITE LIGHT INTERFEROMETRY//WHITE LIGHT SCANNING INTERFEROMETRY//ELLIPSO HEIGHT TOPOMETRY
10 14610 AIR GAUGES//AIR GAUGING//CBN BASED COMPOSITE

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