Class information for:
Level 1: WHITE LIGHT INTERFEROMETRY//WHITE LIGHT SCANNING INTERFEROMETRY//ELLIPSO HEIGHT TOPOMETRY

Basic class information
Class id #P Avg. number of
references		 Database coverage
of references
11434 982 16.3 64%


Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
10 4 OPTICS//PHYSICS, PARTICLES & FIELDS//PHYSICS, MULTIDISCIPLINARY 1131262
217 3       OPTICS//APPLIED OPTICS//OPTICAL ENGINEERING 50829
1223 2             PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY//THERMAL ERROR//COORDINATE MEASURING MACHINE 9117
11434 1                   WHITE LIGHT INTERFEROMETRY//WHITE LIGHT SCANNING INTERFEROMETRY//ELLIPSO HEIGHT TOPOMETRY 982

Terms with highest relevance score


rank Term termType Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 WHITE LIGHT INTERFEROMETRY authKW 543613 6% 32% 55
2 WHITE LIGHT SCANNING INTERFEROMETRY authKW 190446 1% 88% 7
3 ELLIPSO HEIGHT TOPOMETRY authKW 124374 0% 100% 4
4 STROBOSCOPIC INTERFEROMETRY authKW 124374 0% 100% 4
5 TECH OPT address 95782 3% 10% 30
6 ABSOLUTE POSITION MEASUREMENT authKW 93281 0% 100% 3
7 COHERENCE SCANNING authKW 93281 0% 100% 3
8 DYNAMIC PROFILOMETRY authKW 93281 0% 100% 3
9 LEHRSTUHL MESSTECH SENSOR address 93281 0% 100% 3
10 LINNIK INTERFEROMETER authKW 93281 0% 100% 3

Web of Science journal categories


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 Optics 27836 69% 0% 679
2 Instruments & Instrumentation 2251 16% 0% 153
3 Engineering, General 877 8% 0% 75
4 Engineering, Manufacturing 380 4% 0% 36
5 Physics, Applied 247 13% 0% 128
6 Engineering, Industrial 69 2% 0% 17
7 Engineering, Electrical & Electronic 55 7% 0% 70
8 Engineering, Mechanical 51 3% 0% 32
9 Nanoscience & Nanotechnology 43 3% 0% 32
10 Materials Science, Coatings & Films 13 1% 0% 13

Address terms


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 TECH OPT 95782 3% 10% 30
2 LEHRSTUHL MESSTECH SENSOR 93281 0% 100% 3
3 LENGTH 93269 1% 33% 9
4 PRECIS MECH CONTROL 83262 2% 18% 15
5 HGEBIET MESSTECH 69959 0% 75% 3
6 ELE OENGN INFORMAT TECHNOL 62187 0% 100% 2
7 ENGN MEASUREMENT 60291 1% 24% 8
8 INFORMAT PHOTON WAVE SIGNAL PROC 53295 1% 29% 6
9 PRECIS ENGN METROL 41457 0% 67% 2
10 REG JOINT PROJECT 41457 0% 67% 2

Journals


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 APPLIED OPTICS 33239 20% 1% 193
2 TM-TECHNISCHES MESSEN 19661 2% 3% 21
3 MEASUREMENT SCIENCE AND TECHNOLOGY 9932 5% 1% 54
4 OPTICS AND LASERS IN ENGINEERING 9252 3% 1% 32
5 OPTICAL ENGINEERING 6984 6% 0% 56
6 OPTICAL REVIEW 5476 2% 1% 19
7 OPTICS LETTERS 4954 7% 0% 69
8 OPTICS EXPRESS 4816 7% 0% 73
9 OPTICS COMMUNICATIONS 4676 6% 0% 63
10 TECHNISCHES MESSEN 4211 1% 1% 10

Author Key Words


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class		 LCSH search Wikipedia search
1 WHITE LIGHT INTERFEROMETRY 543613 6% 32% 55 Search WHITE+LIGHT+INTERFEROMETRY Search WHITE+LIGHT+INTERFEROMETRY
2 WHITE LIGHT SCANNING INTERFEROMETRY 190446 1% 88% 7 Search WHITE+LIGHT+SCANNING+INTERFEROMETRY Search WHITE+LIGHT+SCANNING+INTERFEROMETRY
3 ELLIPSO HEIGHT TOPOMETRY 124374 0% 100% 4 Search ELLIPSO+HEIGHT+TOPOMETRY Search ELLIPSO+HEIGHT+TOPOMETRY
4 STROBOSCOPIC INTERFEROMETRY 124374 0% 100% 4 Search STROBOSCOPIC+INTERFEROMETRY Search STROBOSCOPIC+INTERFEROMETRY
5 ABSOLUTE POSITION MEASUREMENT 93281 0% 100% 3 Search ABSOLUTE+POSITION+MEASUREMENT Search ABSOLUTE+POSITION+MEASUREMENT
6 COHERENCE SCANNING 93281 0% 100% 3 Search COHERENCE+SCANNING Search COHERENCE+SCANNING
7 DYNAMIC PROFILOMETRY 93281 0% 100% 3 Search DYNAMIC+PROFILOMETRY Search DYNAMIC+PROFILOMETRY
8 LINNIK INTERFEROMETER 93281 0% 100% 3 Search LINNIK+INTERFEROMETER Search LINNIK+INTERFEROMETER
9 MICRO TOPOMETRY 93281 0% 100% 3 Search MICRO+TOPOMETRY Search MICRO+TOPOMETRY
10 OPTICAL MATERIAL RECOGNITION 93281 0% 100% 3 Search OPTICAL+MATERIAL+RECOGNITION Search OPTICAL+MATERIAL+RECOGNITION

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.


Rank Reference # ref.
in cl.		 Shr. of ref. in
cl.		 Citations
1 DE GROOT, P , (2015) PRINCIPLES OF INTERFERENCE MICROSCOPY FOR THE MEASUREMENT OF SURFACE TOPOGRAPHY.ADVANCES IN OPTICS AND PHOTONICS. VOL. 7. ISSUE 1. P. 1 -65 42 52% 21
2 GHIM, YS , RHEE, HG , YANG, HS , LEE, YW , (2013) THIN-FILM THICKNESS PROFILE MEASUREMENT USING A MIRAU-TYPE LOW-COHERENCE INTERFEROMETER.MEASUREMENT SCIENCE AND TECHNOLOGY. VOL. 24. ISSUE 7. P. - 23 96% 4
3 ABDULHALIM, I , (2012) SPATIAL AND TEMPORAL COHERENCE EFFECTS IN INTERFERENCE MICROSCOPY AND FULL-FIELD OPTICAL COHERENCE TOMOGRAPHY.ANNALEN DER PHYSIK. VOL. 524. ISSUE 12. P. 787-804 38 53% 17
4 SHEN, MH , HWANG, CH , WANG, WC , (2015) USING HIGHER STEPS PHASE-SHIFTING ALGORITHMS AND LINEAR LEAST-SQUARES FITTING IN WHITE-LIGHT SCANNING INTERFEROMETRY.OPTICS AND LASERS IN ENGINEERING. VOL. 66. ISSUE . P. 165 -173 18 86% 3
5 LYAKIN, DV , RYABUKHO, VP , (2013) LONGITUDINAL CORRELATION PROPERTIES OF AN OPTICAL FIELD WITH BROAD ANGULAR AND FREQUENCY SPECTRA AND THEIR MANIFESTATION IN INTERFERENCE MICROSCOPY.QUANTUM ELECTRONICS. VOL. 43. ISSUE 10. P. 949 -957 22 71% 1
6 DEBNATH, SK , KOTHIYAL, MP , (2006) IMPROVED OPTICAL PROFILING USING THE SPECTRAL PHASE IN SPECTRALLY RESOLVED WHITE-LIGHT INTERFEROMETRY.APPLIED OPTICS. VOL. 45. ISSUE 27. P. 6965 -6972 18 100% 14
7 PAVLICEK, P , HALOUZKA, M , DUAN, ZH , TAKEDA, M , (2009) SPATIAL COHERENCE PROFILOMETRY ON TILTED SURFACES.APPLIED OPTICS. VOL. 48. ISSUE 34. P. H40 -H47 16 100% 5
8 JIANG, XQ , WANG, KW , GAO, F , MUHAMEDSALIH, H , (2010) FAST SURFACE MEASUREMENT USING WAVELENGTH SCANNING INTERFEROMETRY WITH COMPENSATION OF ENVIRONMENTAL NOISE.APPLIED OPTICS. VOL. 49. ISSUE 15. P. 2903 -2909 21 70% 20
9 ZHANG, K , TAO, L , CHENG, WK , LIU, JH , CHEN, ZP , (2014) AIR ETALON FACILITATED SIMULTANEOUS MEASUREMENT OF GROUP REFRACTIVE INDEX AND THICKNESS USING SPECTRAL INTERFEROMETRY.APPLIED OPTICS. VOL. 53. ISSUE 31. P. 7483 -7486 15 94% 0
10 MANDAL, R , COUPLAND, J , LEACH, R , MANSFIELD, D , (2014) COHERENCE SCANNING INTERFEROMETRY: MEASUREMENT AND CORRECTION OF THREE-DIMENSIONAL TRANSFER AND POINT-SPREAD CHARACTERISTICS.APPLIED OPTICS. VOL. 53. ISSUE 8. P. 1554-1563 13 100% 5

Classes with closest relation at Level 1


Rank Class id link
1 12982 ABSOLUTE DISTANCE MEASUREMENT//GAUGE BLOCK//AIR REFRACTIVE INDEX
2 23486 LASER INTERFERENCE MICROSCOPY//COHERENT PHASE MICROSCOPY//DYNAMIC PHASE MICROSCOPY
3 11225 DIFFERENTIAL CONFOCAL MICROSCOPY//NANO OPTOMECHATRON//DIRECT VIEW MICROSCOPY
4 805 SHEAROGRAPHY//SPECKLE INTERFEROMETRY//PHASE UNWRAPPING
5 422 OPTICAL COHERENCE TOMOGRAPHY//BIOMEDICAL OPTICS EXPRESS//OPTICAL COHERENCE TOMOGRAPHY OCT
6 22617 WAVE PLATE//PHASE RETARDANCE//OPTICAL ROTATION ANGLE
7 14877 FRINGE IDENTIFICATION//POLARIZATION INDUCED SIGNAL FADING//MICHELSON INTERFEROMETRIC SENSOR
8 17213 MEASUREMENT SENSOR//DEV KAJAANI//IMMERSION LIQUID METHOD
9 14610 AIR GAUGES//AIR GAUGING//CBN BASED COMPOSITE
10 24490 IMAGING ELLIPSOMETRY//TOTAL INTERNAL REFLECTION ELLIPSOMETRY//IMAGING ELLIPSOMETER

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