Class information for:
Level 1: ELECT ELECT MAT TECHNOL//CELL ADVANCING METHOD//LC ANALOGUE

Basic class information
Class id #P Avg. number of
references		 Database coverage
of references
23603 340 23.2 43%


Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
0 4 BIOCHEMISTRY & MOLECULAR BIOLOGY//CELL BIOLOGY//ONCOLOGY 4064930
458 3       DICTYOSTELIUM//DICTYOSTELIUM DISCOIDEUM//ACTIN 24720
2540 2             CELLULAR AUTOMATA//JOURNAL OF CELLULAR AUTOMATA//PHYSARUM POLYCEPHALUM 3756
23603 1                   ELECT ELECT MAT TECHNOL//CELL ADVANCING METHOD//LC ANALOGUE 340

Terms with highest relevance score


rank Term termType Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 ELECT ELECT MAT TECHNOL address 718458 5% 50% 16
2 CELL ADVANCING METHOD authKW 269428 1% 100% 3
3 LC ANALOGUE authKW 269428 1% 100% 3
4 GATE EDGE METAMORPHOSES authKW 179619 1% 100% 2
5 CELLULAR AUTOMATA authKW 149571 20% 2% 68
6 COMPUTAT ELECT address 124342 2% 23% 6
7 TOPOGRAPHY SIMULATION authKW 124342 2% 23% 6
8 3 D MICROELECTROMECHANICAL SYSTEMS MEMS DESIGN authKW 89809 0% 100% 1
9 3D STRING ALGORITHM authKW 89809 0% 100% 1
10 AMORPHUS PHYSICAL MODELS authKW 89809 0% 100% 1

Web of Science journal categories


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 Computer Science, Interdisciplinary Applications 1494 18% 0% 62
2 Computer Science, Hardware & Architecture 1363 11% 0% 39
3 Computer Science, Theory & Methods 948 15% 0% 51
4 Engineering, Electrical & Electronic 911 31% 0% 107
5 Physics, Multidisciplinary 342 16% 0% 54
6 Computer Science, Software Engineering 332 8% 0% 26
7 Physics, Mathematical 254 8% 0% 28
8 Nanoscience & Nanotechnology 204 9% 0% 31
9 Engineering, Manufacturing 169 4% 0% 14
10 Physics, Applied 152 16% 0% 55

Address terms


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 ELECT ELECT MAT TECHNOL 718458 5% 50% 16
2 COMPUTAT ELECT 124342 2% 23% 6
3 COMP SCI INFORMAT MANAGEMENT CSIM 89809 0% 100% 1
4 ENGN COMPLEX SYST LISC 89809 0% 100% 1
5 ENGN TELECOMUNICACOESE CONTROLE 89809 0% 100% 1
6 HIGH PERFORMANCE COMPUTING NETWORKING 89809 0% 100% 1
7 PANEPISTIMIOUPOLI DUTH XANTHI 89809 0% 100% 1
8 POS EEGN ELETR 89809 0% 100% 1
9 PROGRAM MESTRADO INFORMAT 89809 0% 100% 1
10 WORKING GRP CYBER PHYS SYST 89809 0% 100% 1

Journals


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 IEEE TRANSACTIONS ON COMPUTER-AIDED DESIGN OF INTEGRATED CIRCUITS AND SYSTEMS 15544 9% 1% 29
2 FUTURE GENERATION COMPUTER SYSTEMS-THE INTERNATIONAL JOURNAL OF GRID COMPUTING AND ESCIENCE 12747 1% 3% 5
3 IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING 8256 4% 1% 12
4 PHYSICA D 5917 2% 1% 7
5 JOURNAL OF THE RADIO RESEARCH LABORATORY 1574 0% 2% 1
6 SIMULATION PRACTICE AND THEORY 1574 0% 2% 1
7 JOURNAL OF THE KOREAN PHYSICAL SOCIETY 1288 4% 0% 15
8 MODELLING AND SIMULATION IN MATERIALS SCIENCE AND ENGINEERING 1099 1% 0% 5
9 MICROELECTRONIC ENGINEERING 1055 3% 0% 11
10 IEEE INTERNATIONAL SOLID STATE CIRCUITS CONFERENCE 853 0% 1% 1

Author Key Words


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class		 LCSH search Wikipedia search
1 CELL ADVANCING METHOD 269428 1% 100% 3 Search CELL+ADVANCING+METHOD Search CELL+ADVANCING+METHOD
2 LC ANALOGUE 269428 1% 100% 3 Search LC+ANALOGUE Search LC+ANALOGUE
3 GATE EDGE METAMORPHOSES 179619 1% 100% 2 Search GATE+EDGE+METAMORPHOSES Search GATE+EDGE+METAMORPHOSES
4 CELLULAR AUTOMATA 149571 20% 2% 68 Search CELLULAR+AUTOMATA Search CELLULAR+AUTOMATA
5 TOPOGRAPHY SIMULATION 124342 2% 23% 6 Search TOPOGRAPHY+SIMULATION Search TOPOGRAPHY+SIMULATION
6 3 D MICROELECTROMECHANICAL SYSTEMS MEMS DESIGN 89809 0% 100% 1 Search 3+D+MICROELECTROMECHANICAL+SYSTEMS+MEMS+DESIGN Search 3+D+MICROELECTROMECHANICAL+SYSTEMS+MEMS+DESIGN
7 3D STRING ALGORITHM 89809 0% 100% 1 Search 3D+STRING+ALGORITHM Search 3D+STRING+ALGORITHM
8 AMORPHUS PHYSICAL MODELS 89809 0% 100% 1 Search AMORPHUS+PHYSICAL+MODELS Search AMORPHUS+PHYSICAL+MODELS
9 AUTOMATIC VLSI IMPLEMENTATION 89809 0% 100% 1 Search AUTOMATIC+VLSI+IMPLEMENTATION Search AUTOMATIC+VLSI+IMPLEMENTATION
10 BATTLEFIELD MANAGEMENT SIMULATION 89809 0% 100% 1 Search BATTLEFIELD+MANAGEMENT+SIMULATION Search BATTLEFIELD+MANAGEMENT+SIMULATION

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.


Rank Reference # ref.
in cl.		 Shr. of ref. in
cl.		 Citations
1 SIRAKOULIS, GC , (2004) A TCAD SYSTEM FOR VLSI IMPLEMENTATION OF THE CVD PROCESS USING VHDL.INTEGRATION-THE VLSI JOURNAL. VOL. 37. ISSUE 1. P. 63-81 25 63% 20
2 NEUREUTHER, AR , THANAILAKIS, A , HAGOUEL, PI , KARAFYLLIDIS, I , (2000) AN EFFICIENT PHOTORESIST DEVELOPMENT SIMULATOR BASED ON CELLULAR AUTOMATA WITH EXPERIMENTAL VERIFICATION.IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING. VOL. 13. ISSUE 1. P. 61 -75 19 83% 26
3 SIRAKOULIS, GC , KARAFYLLIDIS, I , (2005) A SELF-REGULATION MECHANISM OF THE RESIST DEVELOPMENT PROCESS IN INTEGRATED CIRCUIT FABRICATION AND ITS PHASE-SPACE PICTURE.JOURNAL OF COMPUTER-AIDED MATERIALS DESIGN. VOL. 12. ISSUE 1. P. 35 -56 16 73% 0
4 KARAFYLLIDIS, I , (1999) A THREE-DIMENSIONAL PHOTORESIST ETCHING SIMULATOR FOR TCAD.MODELLING AND SIMULATION IN MATERIALS SCIENCE AND ENGINEERING. VOL. 7. ISSUE 2. P. 157 -168 13 100% 11
5 PROGIAS, P , SIRAKOULIS, GC , (2013) AN FPGA PROCESSOR FOR MODELLING WILDFIRE SPREADING.MATHEMATICAL AND COMPUTER MODELLING. VOL. 57. ISSUE 5-6. P. 1436-1452 17 49% 12
6 SIRAKOULIS, GC , KARAFYLLIDIS, I , THANAILAKIS, A , (2002) A CELLULAR AUTOMATON METHODOLOGY FOR THE SIMULATION OF INTEGRATED CIRCUIT FABRICATION PROCESSES.FUTURE GENERATION COMPUTER SYSTEMS-THE INTERNATIONAL JOURNAL OF ESCIENCE. VOL. 18. ISSUE 5. P. 639 -657 19 61% 5
7 SIRAKOULIS, GC , KARAFYLLIDIS, I , THANAILAKIS, A , (2001) STUDY OF THE EFFECT OF NON-PLANARITY AND DEFECTS ON THE GEOMETRICAL ACCURACY OF SEMICONDUCTOR SURFACE STRUCTURES USING A CA(-)TCAD SYSTEM.MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY. VOL. 80. ISSUE 1-3. P. 68 -72 11 92% 0
8 SIRAKOULIS, GC , KARAFYLLIDIS, I , THANAILAKIS, A , (2001) A TCAD TOOL FOR THE SIMULATION OF THE CVD PROCESS BASED ON CELLULAR AUTOMATA.JOURNAL DE PHYSIQUE IV. VOL. 11. ISSUE PR3. P. 205-212 13 76% 1
9 SIRAKOULIS, GC , KARAFYLLIDIS, I , MARDIRIS, V , THANAILAKIS, A , (2000) STUDY OF THE EFFECTS OF PHOTORESIST SURFACE ROUGHNESS AND DEFECTS ON DEVELOPED PROFILES.SEMICONDUCTOR SCIENCE AND TECHNOLOGY. VOL. 15. ISSUE 2. P. 98 -107 11 92% 2
10 SIRAKOULIS, GC , KARAFYLLIDIS, I , MARDIRIS, V , THANAILAKIS, A , (1999) STUDY OF LITHOGRAPHY PROFILES DEVELOPED ON NON-PLANAR SI SURFACES.NANOTECHNOLOGY. VOL. 10. ISSUE 4. P. 421 -427 11 92% 12

Classes with closest relation at Level 1


Rank Class id link
1 35880 PROTON HOPPING//SUPERCOMP SOFTWARE//ICMMG
2 5293 JOURNAL OF CELLULAR AUTOMATA//CELLULAR AUTOMATA//ELEMENTARY CELLULAR AUTOMATA
3 21308 BEAM CHANNEL TRANSISTOR//MEMORY DEVICE BUSINESS//IMPURITY ENHANCED OXIDATION
4 33066 REGIONAL OBSERVABILITY//A S UFR//MACS GRP
5 34650 CHAIR PROGRAMMING SYST//SERV ENGN DISTRIBUTED SYST//LOOSE PROGRAMMING
6 10360 OPTICAL LITHOGRAPHY//PHASE SHIFTING MASK//OPTICAL PROXIMITY CORRECTION
7 12940 ANALOG PLACEMENT//CIRCUIT SIZING//ANALOG CIRCUIT SYNTHESIS
8 34597 UMR C5521//SUPPORT POSITION OPTIMIZATION//STATICALLY DETERMINATE BEAMS
9 11111 TEOS PECVD//TEOS//FEATURE SCALE
10 11950 ANISOTROPIC ETCHING//MICRONANOSYST ENGN//MEMS MICRO NANO SYST

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