Class information for:
Level 1: LIBWE//LASER ETCHING//LASER INDUCED BACKSIDE WET ETCHING

Basic class information
Class id #P Avg. number of
references		 Database coverage
of references
21663 410 19.3 72%


Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
2 4 MATERIALS SCIENCE, MULTIDISCIPLINARY//PHYSICS, APPLIED//PHYSICS, CONDENSED MATTER 2836879
509 3       LASER INDUCED BREAKDOWN SPECTROSCOPY//LIBS//LASER ABLATION 21553
894 2             LASER CUTTING//FEMTOSECOND LASER//LASER CLEANING 11346
21663 1                   LIBWE//LASER ETCHING//LASER INDUCED BACKSIDE WET ETCHING 410

Terms with highest relevance score


rank Term termType Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 LIBWE authKW 973146 3% 93% 14
2 LASER ETCHING authKW 490176 5% 31% 21
3 LASER INDUCED BACKSIDE WET ETCHING authKW 372378 1% 100% 5
4 LIBDE authKW 372378 1% 100% 5
5 FUSED SILICA authKW 319051 9% 11% 38
6 BACKSIDE ETCHING authKW 310313 1% 83% 5
7 VISIBLE LIBWE authKW 297902 1% 100% 4
8 TWIN LIBWE authKW 223427 1% 100% 3
9 DIELECTRIC MASK authKW 170227 1% 57% 4
10 LASER INDUCED BACKSIDE WET ETCHING LIBWE authKW 167569 1% 75% 3

Web of Science journal categories


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 Physics, Applied 5497 73% 0% 298
2 Materials Science, Coatings & Films 2937 20% 0% 80
3 Optics 1528 26% 0% 107
4 Materials Science, Multidisciplinary 1462 42% 0% 174
5 Physics, Condensed Matter 727 23% 0% 96
6 Nanoscience & Nanotechnology 579 13% 0% 55
7 Chemistry, Physical 380 22% 0% 92
8 Materials Science, Ceramics 69 3% 0% 12
9 Engineering, Manufacturing 28 2% 0% 7
10 Engineering, Electrical & Electronic 17 7% 0% 27

Address terms


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 PLICAT PLASMA PHOTON 143216 1% 38% 5
2 GRP LASER PHYS 109225 4% 9% 17
3 ION BEAM TECH 99299 0% 67% 2
4 OPT QUANTUM ELECT 94615 7% 4% 30
5 AGC FLAT GLASS RUSSIA 74476 0% 100% 1
6 BEREICH PLASMABASIERTE EUV STRAHLUNGSQUELLEN NI 74476 0% 100% 1
7 CHIM INORGAN CVD 74476 0% 100% 1
8 ENVIRONM PHYS LASER SPECTOSCOPY 74476 0% 100% 1
9 INFORMAT TECHNOL ELECT ENGN MECHATRON 74476 0% 100% 1
10 INSITUTE SUSTAINABLE CHEM 74476 0% 100% 1

Journals


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 JOURNAL OF LASER MICRO NANOENGINEERING 146354 8% 6% 34
2 APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING 29661 18% 1% 74
3 APPLIED SURFACE SCIENCE 11327 18% 0% 73
4 JOURNAL OF LASER APPLICATIONS 3936 2% 1% 7
5 GLASTECHNISCHE BERICHTE-GLASS SCIENCE AND TECHNOLOGY 553 0% 0% 2
6 OPTICS AND LASERS IN ENGINEERING 535 1% 0% 5
7 JOURNAL OF THE EUROPEAN OPTICAL SOCIETY-RAPID PUBLICATIONS 523 0% 0% 2
8 GLASS AND CERAMICS 516 1% 0% 3
9 JOURNAL OF MICROMECHANICS AND MICROENGINEERING 474 1% 0% 6
10 LASER FOCUS WORLD 420 1% 0% 3

Author Key Words


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class		 LCSH search Wikipedia search
1 LIBWE 973146 3% 93% 14 Search LIBWE Search LIBWE
2 LASER ETCHING 490176 5% 31% 21 Search LASER+ETCHING Search LASER+ETCHING
3 LASER INDUCED BACKSIDE WET ETCHING 372378 1% 100% 5 Search LASER+INDUCED+BACKSIDE+WET+ETCHING Search LASER+INDUCED+BACKSIDE+WET+ETCHING
4 LIBDE 372378 1% 100% 5 Search LIBDE Search LIBDE
5 FUSED SILICA 319051 9% 11% 38 Search FUSED+SILICA Search FUSED+SILICA
6 BACKSIDE ETCHING 310313 1% 83% 5 Search BACKSIDE+ETCHING Search BACKSIDE+ETCHING
7 VISIBLE LIBWE 297902 1% 100% 4 Search VISIBLE+LIBWE Search VISIBLE+LIBWE
8 TWIN LIBWE 223427 1% 100% 3 Search TWIN+LIBWE Search TWIN+LIBWE
9 DIELECTRIC MASK 170227 1% 57% 4 Search DIELECTRIC+MASK Search DIELECTRIC+MASK
10 LASER INDUCED BACKSIDE WET ETCHING LIBWE 167569 1% 75% 3 Search LASER+INDUCED+BACKSIDE+WET+ETCHING+LIBWE Search LASER+INDUCED+BACKSIDE+WET+ETCHING+LIBWE

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.


Rank Reference # ref.
in cl.		 Shr. of ref. in
cl.		 Citations
1 NIINO, H , KAWAGUCHI, Y , SATO, T , NARAZAKI, A , KUROSAKI, R , (2008) SURFACE MICROSTRUCTURING OF INCLINED TRENCH STRUCTURES OF SILICA GLASS BY LASER-INDUCED BACKSIDE WET ETCHING.JOURNAL OF LASER MICRO NANOENGINEERING. VOL. 3. ISSUE 3. P. 182 -185 64 97% 1
2 NIINO, H , KAWAGUCHI, Y , SATO, T , NARAZAKI, A , KUROSAKI, R , (2007) SURFACE MICRO STRUCTURING OF SILICA GLASS BY LASER-INDUCED BACKSIDE WET ETCHING WITH A DPSS UV LASER.APPLIED SURFACE SCIENCE. VOL. 253. ISSUE 19. P. 8287-8291 48 98% 12
3 VASS, C , KISS, B , KOPNICZKY, J , HOPP, B , (2013) ETCHING OF FUSED SILICA FIBER BY METALLIC LASER-INDUCED BACKSIDE WET ETCHING TECHNIQUE.APPLIED SURFACE SCIENCE. VOL. 278. ISSUE . P. 241 -244 40 100% 2
4 SATO, T , KAWAGUCHI, Y , KUROSAKI, R , NARAZAKI, A , WATANABE, W , NIINO, H , (2011) LASER-INDUCED BACKSIDE WET ETCHING EMPLOYING GREEN DPSS LASER AND LIQUID METALLIC ABSORBER.JOURNAL OF LASER MICRO NANOENGINEERING. VOL. 6. ISSUE 3. P. 204 -208 38 100% 4
5 SATO, T , KUROSAKI, R , KAWAGUCHI, Y , NARAZAKI, A , NIINO, H , (2010) FABRICATION OF MULTIPLE SLANTED MICROSTRUCTURES ON SILICA GLASS BY LASER-INDUCED BACKSIDE WET ETCHING.JOURNAL OF LASER MICRO NANOENGINEERING. VOL. 5. ISSUE 3. P. 256 -262 37 93% 4
6 NIINO, H , KAWAGUCHI, Y , SATO, T , NARAZAKI, A , GUMPENBERGER, T , KUROSAKI, R , (2006) LASER ABLATION OF TOLUENE LIQUID FOR SURFACE MICRO-STRUCTURING OF SILICA GLASS.APPLIED SURFACE SCIENCE. VOL. 252. ISSUE 13. P. 4387-4391 37 97% 25
7 NIINO, H , KAWAGUCHI, Y , SATO, T , NARAZAKI, A , GUMPENBERGER, T , KUROSAKI, R , (2006) SURFACE MICRO-STRUCTURING OF SILICA GLASS BY LASER-INDUCED BACKSIDE WET ETCHING WITH NS-PULSED UV LASER AT A HIGH REPETITION RATE.JOURNAL OF LASER MICRO NANOENGINEERING. VOL. 1. ISSUE 1. P. 39 -43 34 100% 10
8 EHRHARDT, M , LORENZ, P , ZIMMER, K , (2012) SURFACE MODIFICATION BY LASER ETCHING USING A SURFACE-ADSORBED LAYER.THIN SOLID FILMS. VOL. 520. ISSUE 9. P. 3629-3633 26 96% 4
9 SATO, T , KAWAGUCHI, Y , KUROSAKI, R , NARAZAKI, A , WATANABE, W , NIINO, H , (2012) VARIATION IN THE ETCH RATE OF LIBWE FABRICATING DEEP MICROTRENCHES.JOURNAL OF LASER MICRO NANOENGINEERING. VOL. 7. ISSUE 1. P. 81 -86 31 79% 2
10 VASS, C , BUDAI, J , SCHAY, Z , HOPP, B , (2010) INTERPRETATION AND MODELING OF LASER-INDUCED BACKSIDE WET ETCHING PROCEDURE.JOURNAL OF LASER MICRO NANOENGINEERING. VOL. 5. ISSUE 1. P. 43 -47 29 88% 7

Classes with closest relation at Level 1


Rank Class id link
1 37122 F 2 LASER//DIELECTRIC TANGENT//MU RAMAN SPECTROMETRY
2 27344 WET ETCHING OF GLASS//DEEP GLASS ETCHING//NI HARD MASK
3 5453 LASER IMPLANTATION//EXCIMER LASER ABLATION//EXCIMER LASER
4 18399 LASER MICRO CLADDING//LASER INDUCED CHEMICAL LIQUID PHASE DEPOSITION//LCLD
5 2355 FEMTOSECOND LASER//LASER MICROPROC GRP//PHOTON CRAFT PROJECT
6 1214 FEMTOSECOND LASER//LIPSS//FEMTOSECOND LASER ABLATION
7 8312 MICROLENS ARRAY//MICROLENS//MICRO OPTICS
8 37449 MULTIPLE PULSED LASER RADIATION//CARBONATED NANO STRUCTURED HYDROXYAPATITE//CONTROLLED VOLUME VAPORIZATION
9 8635 LASER INDUCED DAMAGE//LASER INDUCED DAMAGE THRESHOLD//RD OPT THIN FILM COATINGS
10 4267 LASER CUTTING//LASER DRILLING//CO2 LASER CUTTING

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