Class information for:
Level 1: NANOIMPRINT//NANOIMPRINT LITHOGRAPHY//IMPRINT LITHOGRAPHY

Basic class information
Class id #P Avg. number of
references		 Database coverage
of references
2012 2387 20.1 81%


Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
2 4 MATERIALS SCIENCE, MULTIDISCIPLINARY//PHYSICS, APPLIED//PHYSICS, CONDENSED MATTER 2836879
279 3       SELF ASSEMBLED MONOLAYER//MOLECULAR ELECTRONICS//NANOSCIENCE & NANOTECHNOLOGY 42929
2054 2             NANOIMPRINT//NANOIMPRINT LITHOGRAPHY//DIP PEN NANOLITHOGRAPHY 5330
2012 1                   NANOIMPRINT//NANOIMPRINT LITHOGRAPHY//IMPRINT LITHOGRAPHY 2387

Terms with highest relevance score


rank Term termType Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 NANOIMPRINT authKW 1479034 10% 47% 245
2 NANOIMPRINT LITHOGRAPHY authKW 1380662 11% 42% 256
3 IMPRINT LITHOGRAPHY authKW 420515 2% 60% 55
4 UV NANOIMPRINT authKW 373046 1% 83% 35
5 HOT EMBOSSING authKW 352888 4% 31% 89
6 UV NIL authKW 319754 1% 83% 30
7 MICROELECTRONIC ENGINEERING journal 285137 20% 5% 475
8 ANTISTICKING LAYER authKW 256391 1% 95% 21
9 UV NANOIMPRINT LITHOGRAPHY authKW 193860 1% 63% 24
10 LASTI address 171171 2% 28% 47

Web of Science journal categories


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with term
in class
1 Nanoscience & Nanotechnology 67016 56% 0% 1339
2 Physics, Applied 29684 70% 0% 1674
3 Engineering, Electrical & Electronic 13953 45% 0% 1075
4 Optics 7165 24% 0% 563
5 Materials Science, Multidisciplinary 4348 32% 0% 752
6 Polymer Science 1090 9% 0% 218
7 Instruments & Instrumentation 509 5% 0% 129
8 Engineering, Manufacturing 447 3% 0% 63
9 Physics, Condensed Matter 417 9% 0% 216
10 Mechanics 272 5% 0% 113

Address terms


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 LASTI 171171 2% 28% 47
2 GRACE POLYMER PROC 79689 0% 69% 9
3 ELECT INFORMAT MEDIA ENGN 75210 1% 29% 20
4 MICROSTRUCT ENGN 73996 0% 64% 9
5 NANOMECH SYST 71487 2% 14% 40
6 TECHNOL DEV OPERAT 57554 0% 75% 6
7 NANOTECHNOL PLICAT POLYMERS 51162 0% 100% 4
8 PL ELECT 48569 3% 5% 75
9 NANO CONVERGENCE MFG SYST 42930 1% 22% 15
10 UBIQUITOUS MEMS MICRO ENGN 42469 1% 24% 14

Journals


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 MICROELECTRONIC ENGINEERING 285137 20% 5% 475
2 JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY 99878 5% 6% 123
3 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 79671 13% 2% 322
4 MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 23168 3% 2% 78
5 JOURNAL OF MICROMECHANICS AND MICROENGINEERING 20752 4% 2% 95
6 JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS 13143 1% 3% 31
7 JAPANESE JOURNAL OF APPLIED PHYSICS 10916 5% 1% 117
8 NANOTECHNOLOGY 8444 4% 1% 88
9 JOURNAL OF MICROLITHOGRAPHY MICROFABRICATION AND MICROSYSTEMS 6348 0% 5% 11
10 INTERNATIONAL POLYMER PROCESSING 2261 1% 1% 16

Author Key Words


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class		 LCSH search Wikipedia search
1 NANOIMPRINT 1479034 10% 47% 245 Search NANOIMPRINT Search NANOIMPRINT
2 NANOIMPRINT LITHOGRAPHY 1380662 11% 42% 256 Search NANOIMPRINT+LITHOGRAPHY Search NANOIMPRINT+LITHOGRAPHY
3 IMPRINT LITHOGRAPHY 420515 2% 60% 55 Search IMPRINT+LITHOGRAPHY Search IMPRINT+LITHOGRAPHY
4 UV NANOIMPRINT 373046 1% 83% 35 Search UV+NANOIMPRINT Search UV+NANOIMPRINT
5 HOT EMBOSSING 352888 4% 31% 89 Search HOT+EMBOSSING Search HOT+EMBOSSING
6 UV NIL 319754 1% 83% 30 Search UV+NIL Search UV+NIL
7 ANTISTICKING LAYER 256391 1% 95% 21 Search ANTISTICKING+LAYER Search ANTISTICKING+LAYER
8 UV NANOIMPRINT LITHOGRAPHY 193860 1% 63% 24 Search UV+NANOIMPRINT+LITHOGRAPHY Search UV+NANOIMPRINT+LITHOGRAPHY
9 NANOIMPRINT LITHOGRAPHY NIL 166251 1% 50% 26 Search NANOIMPRINT+LITHOGRAPHY+NIL Search NANOIMPRINT+LITHOGRAPHY+NIL
10 THERMAL NANOIMPRINT 154010 1% 71% 17 Search THERMAL+NANOIMPRINT Search THERMAL+NANOIMPRINT

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.


Rank Reference # ref. in
cl.		 Shr. of ref. in
cl.		 Citations
1 SCHIFT, H , (2008) NANOIMPRINT LITHOGRAPHY: AN OLD STORY IN MODERN TIMES? A REVIEW.JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B. VOL. 26. ISSUE 2. P. 458 -480 130 84% 305
2 GUO, LJ , (2007) NANOIMPRINT LITHOGRAPHY: METHODS AND MATERIAL REQUIREMENTS.ADVANCED MATERIALS. VOL. 19. ISSUE 4. P. 495 -513 71 76% 738
3 MATSUI, S , HIROSHIMA, H , HIRAI, Y , NAKAGAWA, M , (2015) INNOVATIVE UV NANOIMPRINT LITHOGRAPHY USING A CONDENSABLE ALTERNATIVE CHLOROFLUOROCARBON ATMOSPHERE.MICROELECTRONIC ENGINEERING. VOL. 133. ISSUE . P. 134 -155 82 84% 4
4 SCHIFT, H , (2015) NANOIMPRINT LITHOGRAPHY: 2D OR NOT 2D? A REVIEW.APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING. VOL. 121. ISSUE 2. P. 415 -435 85 69% 6
5 YI, PY , WU, H , ZHANG, CP , PENG, LF , LAI, XM , (2015) ROLL-TO-ROLL UV IMPRINTING LITHOGRAPHY FOR MICRO/NANOSTRUCTURES.JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B. VOL. 33. ISSUE 6. P. - 98 58% 1
6 LAN, HB , LIU, HZ , (2013) UV-NANOIMPRINT LITHOGRAPHY: STRUCTURE, MATERIALS AND FABRICATION OF FLEXIBLE MOLDS.JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY. VOL. 13. ISSUE 5. P. 3145 -3172 59 86% 26
7 DUMOND, JJ , LOW, HY , (2012) RECENT DEVELOPMENTS AND DESIGN CHALLENGES IN CONTINUOUS ROLLER MICRO- AND NANOIMPRINTING.JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B. VOL. 30. ISSUE 1. P. - 62 79% 40
8 KOOY, N , MOHAMED, K , PIN, LT , GUAN, OS , (2014) A REVIEW OF ROLL-TO-ROLL NANOIMPRINT LITHOGRAPHY.NANOSCALE RESEARCH LETTERS. VOL. 9. ISSUE . P. - 45 88% 31
9 YOON, H , LEE, H , LEE, WB , (2014) TOWARD RESIDUAL-LAYER-FREE NANOIMPRINT LITHOGRAPHY IN LARGE-AREA FABRICATION.KOREA-AUSTRALIA RHEOLOGY JOURNAL. VOL. 26. ISSUE 1. P. 39 -48 59 78% 5
10 PENG, LF , DENG, YJ , YI, PY , LAI, XM , (2014) MICRO HOT EMBOSSING OF THERMOPLASTIC POLYMERS: A REVIEW.JOURNAL OF MICROMECHANICS AND MICROENGINEERING. VOL. 24. ISSUE 1. P. - 74 48% 34

Classes with closest relation at Level 1


Rank Class id link
1 9443 MICROCONTACT PRINTING//SOFT LITHOGRAPHY//MICROMOLDING IN CAPILLARIES
2 18745 ELECTRON BEAM LITHOGRAPHY//HSQ//HYDROGEN SILSESQUIOXANE
3 13675 MICRO INJECTION MOLDING//MICRO INJECTION MOULDING//WELD LINE
4 8312 MICROLENS ARRAY//MICROLENS//MICRO OPTICS
5 37582 SECONDARY SPUTTERING LITHOGRAPHY//TEMPLATE INDUCED GROWTH//COVERSLIP MICROCOVER GLASS
6 20620 GLASS PRESSING//GLASS MOLDING//TV PANEL
7 11311 SU 8//MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS//JOURNAL OF MICROMECHANICS AND MICROENGINEERING
8 24020 DEFECT TOLERANCE//NEUROMORPHIC NETWORKS//CMOL
9 21913 STENCIL LITHOGRAPHY//NANOSYST MFG//STRESS INDUCED DEFORMATION
10 22103 BACKLIGHT//BACKLIGHT UNIT BLU//LIGHT GUIDE PLATE

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