Class information for:
Level 1: SU 8//MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS//JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Basic class information
Class id #P Avg. number of
references		 Database coverage
of references
11311 991 20.9 65%


Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
2 4 MATERIALS SCIENCE, MULTIDISCIPLINARY//PHYSICS, APPLIED//PHYSICS, CONDENSED MATTER 2836879
279 3       SELF ASSEMBLED MONOLAYER//MOLECULAR ELECTRONICS//NANOSCIENCE & NANOTECHNOLOGY 42929
3017 2             DIAZONIUM SALTS//SU 8//ELECTROGRAFTING 2527
11311 1                   SU 8//MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS//JOURNAL OF MICROMECHANICS AND MICROENGINEERING 991

Terms with highest relevance score


rank Term termType Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 SU 8 authKW 1144873 13% 29% 127
2 MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS journal 269663 17% 5% 171
3 JOURNAL OF MICROMECHANICS AND MICROENGINEERING journal 192991 19% 3% 186
4 LIGA authKW 180224 3% 21% 28
5 DEEP X RAY LITHOGRAPHY authKW 169067 2% 37% 15
6 UV LIGA authKW 162706 1% 41% 13
7 MIKROSTRUKTURTECH address 130777 2% 19% 22
8 SU 8 REMOVAL authKW 123245 0% 100% 4
9 DEVICE TECHNOL GRP address 123237 1% 50% 8
10 SU8 authKW 116742 1% 32% 12

Web of Science journal categories


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 Nanoscience & Nanotechnology 33730 62% 0% 611
2 Instruments & Instrumentation 13267 36% 0% 360
3 Engineering, Electrical & Electronic 11673 63% 0% 621
4 Physics, Applied 9159 61% 0% 604
5 Materials Science, Multidisciplinary 4204 46% 0% 455
6 Mechanics 2713 19% 0% 186
7 Optics 653 12% 0% 118
8 Engineering, Mechanical 149 5% 0% 48
9 Electrochemistry 79 3% 0% 30
10 Engineering, Manufacturing 78 2% 0% 18

Address terms


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 MIKROSTRUKTURTECH 130777 2% 19% 22
2 DEVICE TECHNOL GRP 123237 1% 50% 8
3 DMT IMS 69324 0% 75% 3
4 PLICAT MICRO ENGN 69324 0% 75% 3
5 MICROSTRUCT GRP 64184 1% 42% 5
6 CNR INORGAN METHODOL PLASMAS 61622 0% 100% 2
7 MICRO NANO INTEGRATED DEVICES 61622 0% 100% 2
8 SING ORE MIT ALLIANCE INNOVAT MFG SYST TECHNOL 61622 0% 100% 2
9 IMMR 54771 0% 44% 4
10 CHEM MAT PROC MODELING 41080 0% 67% 2

Journals


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 269663 17% 5% 171
2 JOURNAL OF MICROMECHANICS AND MICROENGINEERING 192991 19% 3% 186
3 MICROELECTRONIC ENGINEERING 25110 9% 1% 91
4 MICROSYSTEM TECHNOLOGIES 13691 0% 22% 2
5 SENSORS AND ACTUATORS A-PHYSICAL 10740 6% 1% 59
6 MICROMACHINES 9142 1% 2% 13
7 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 8999 3% 1% 28
8 VERPACKUNGS RUNDSCHAU 5134 0% 17% 1
9 JOURNAL OF MICROLITHOGRAPHY MICROFABRICATION AND MICROSYSTEMS 4553 1% 2% 6
10 JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS 3290 1% 1% 10

Author Key Words


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class		 LCSH search Wikipedia search
1 SU 8 1144873 13% 29% 127 Search SU+8 Search SU+8
2 LIGA 180224 3% 21% 28 Search LIGA Search LIGA
3 DEEP X RAY LITHOGRAPHY 169067 2% 37% 15 Search DEEP+X+RAY+LITHOGRAPHY Search DEEP+X+RAY+LITHOGRAPHY
4 UV LIGA 162706 1% 41% 13 Search UV+LIGA Search UV+LIGA
5 SU 8 REMOVAL 123245 0% 100% 4 Search SU+8+REMOVAL Search SU+8+REMOVAL
6 SU8 116742 1% 32% 12 Search SU8 Search SU8
7 3 D MICROMESH STRUCTURES 92433 0% 100% 3 Search 3+D+MICROMESH+STRUCTURES Search 3+D+MICROMESH+STRUCTURES
8 CONFORMAL MASK 92433 0% 100% 3 Search CONFORMAL+MASK Search CONFORMAL+MASK
9 KMPR 85582 1% 56% 5 Search KMPR Search KMPR
10 SU 8 RESIST 79222 1% 43% 6 Search SU+8+RESIST Search SU+8+RESIST

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.


Rank Reference # ref.
in cl.		 Shr. of ref. in
cl.		 Citations
1 KIM, BJ , MENG, E , (2016) REVIEW OF POLYMER MEMS MICROMACHINING.JOURNAL OF MICROMECHANICS AND MICROENGINEERING. VOL. 26. ISSUE 1. P. - 77 30% 5
2 HIRAI, Y , SUGANO, K , TSUCHIYA, T , TABATA, O , (2010) EMBEDDED MICROSTRUCTURE FABRICATION USING DEVELOPER-PERMEABILITY OF SEMI-CROSS-LINKED NEGATIVE RESIST.JOURNAL OF MICROELECTROMECHANICAL SYSTEMS. VOL. 19. ISSUE 5. P. 1058-1069 38 81% 5
3 ABGRALL, P , CONEDERA, V , CAMON, H , GUE, AM , NGUYEN, NT , (2007) SU-8 AS A STRUCTURAL MATERIAL FOR LABS-ON-CHIPS AND MICROELECTROMECHANICAL SYSTEMS.ELECTROPHORESIS. VOL. 28. ISSUE 24. P. 4539 -4551 48 54% 116
4 DEL CAMPO, A , GREINER, C , (2007) SU-8: A PHOTORESIST FOR HIGH-ASPECT-RATIO AND 3D SUBMICRON LITHOGRAPHY.JOURNAL OF MICROMECHANICS AND MICROENGINEERING. VOL. 17. ISSUE 6. P. R81-R95 54 40% 233
5 HIRAI, Y , SUGANO, K , TSUCHIYA, T , TABATA, O , (2010) A THREE-DIMENSIONAL MICROSTRUCTURING TECHNIQUE EXPLOITING THE POSITIVE PHOTORESIST PROPERTY.JOURNAL OF MICROMECHANICS AND MICROENGINEERING. VOL. 20. ISSUE 6. P. - 29 71% 4
6 WANGLER, N , GUTZWEILER, L , KALKANDJIEV, K , MULLER, C , MAYENFELS, F , REINECKE, H , ZENGERLE, R , PAUST, N , (2011) HIGH-RESOLUTION PERMANENT PHOTORESIST LAMINATE TMMF FOR SEALED MICROFLUIDIC STRUCTURES IN BIOLOGICAL APPLICATIONS.JOURNAL OF MICROMECHANICS AND MICROENGINEERING. VOL. 21. ISSUE 9. P. - 25 69% 18
7 MAKAROVA, OV , YANG, GH , AMSTUTZ, PT , TANG, CM , (2008) FABRICATION OF ANTISCATTER GRIDS AND COLLIMATORS FOR X-RAY AND GAMMA-RAY IMAGING BY LITHOGRAPHY AND ELECTROFORMING.MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS. VOL. 14. ISSUE 9-11. P. 1613 -1619 19 100% 7
8 GRIFFITHS, SK , LOSEY, MW , HACHMAN, JT , SKALA, DM , HUNTER, LL , YANG, NYC , BOEHME, DR , KORELLIS, JS , AIGELDINGER, G , LU, WY , ET AL (2005) RESIST SUBSTRATE STUDIES FOR LIGA MICROFABRICATION WITH APPLICATION TO A NEW ANODIZED ALUMINUM SUBSTRATE.JOURNAL OF MICROMECHANICS AND MICROENGINEERING. VOL. 15. ISSUE 9. P. 1700-1712 22 88% 9
9 CHUANG, T , FANG, T , JIANG, M , LEI, W , SHEW, B , FU, C , (2012) MOTION-PATH-BASED THREE-DIMENSIONAL X-RAY FREE-FORM MICROMACHINING SYSTEM.JOURNAL OF MICROMECHANICS AND MICROENGINEERING. VOL. 22. ISSUE 8. P. - 19 76% 1
10 XUE, P , BAO, JN , CHUAH, YJ , MENON, NV , ZHANG, YL , KANG, YJ , (2014) PROTEIN COVALENTLY CONJUGATED SU-8 SURFACE FOR THE ENHANCEMENT OF MESENCHYMAL STEM CELL ADHESION AND PROLIFERATION.LANGMUIR. VOL. 30. ISSUE 11. P. 3110-3117 24 55% 6

Classes with closest relation at Level 1


Rank Class id link
1 33424 CARBON MEMS//PYROLYZED POLYMER//C MEMS
2 36467 MICRO PORE OPTICS//GE MONOCHROMATOR//LOBSTER EYE OPTICS
3 25993 PROBE CARD//COMPLIANT INTERCONNECTS//MEMS PROBE CARD
4 21006 FLUIDIC INTERCONNECT//MICRONANO INNOVAT MINI//CIRCULAR MICROFLUIDICS
5 8312 MICROLENS ARRAY//MICROLENS//MICRO OPTICS
6 27344 WET ETCHING OF GLASS//DEEP GLASS ETCHING//NI HARD MASK
7 21913 STENCIL LITHOGRAPHY//NANOSYST MFG//STRESS INDUCED DEFORMATION
8 21960 NANOCHANNEL MEMBRANES//DOUBLET MECHANICS//FLOAT CASTING
9 20023 ELECTROSTATIC SUSPENSION//MICROMOTOR//ELECTROSTATIC MOTOR
10 13289 MICROGRIPPER//MICROASSEMBLY//THERMAL ACTUATOR

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