FE-SEM Zeiss Ultra 55 GEMINI (Kista)
Zeiss Ultra 55 GEMINI is a high-resolution field-emission SEM. It comprises an in-lens SE detector, a fully integrated energy and angle selective backscattered electron (EsB) detector and an Everhart-Thornley type of detector. Accelerating voltage is in range of 0.1-30kV, with resolution 1.0 nm at 15 kV, 1.7nm at 1 kV, 3.5nm at 0.2kV and 4.0nm at 0.1 kV. Magnification is from 12× to 900 000×.

The Zeiss Ultra 55 can deliver information on topography, crystallography, and the magnetic field of the sample. It is equipped with large five axes motorized eucentric stage, highly efficient In-lens SE detector for high contrast surface imaging, EsB detector for compositional information, ultra-stable high current mode for x-ray analysis (EDS) and EBSD applications. The capability of having multiple detectors makes it a very versatile tool providing valuable solutions for different applications.
To booking page for FE-SEM Zeiss Ultra 55 GEMINI
Main contact person: Fei Ye (feiy@kth.se).
Location: Isafjordsgatan 22, Kista Electrum Laboratory,
Department of Applied Physics, www.aphys.kth.se
Division of Materials and Nanophysics, www.aphys.kth.se/mnp