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Headings denoted with an asterisk ( * ) is retrieved from the course syllabus version Spring 2022
Content and learning outcomes
Course contents
This course treats the most important component in all integrated circuits - the MOSFET-transistor that is produced in silicon with nanometer dimensions. The focus is on low power CMOS-technology.
Course main content
Basic physics for the MOS-system and formulation of approximate current-voltage relations for the MOS-transistor. Compact physics based models for circuit simulation. Modelling of process corners.
Scaling theory and technology nodes for CMOS technology.
Modern CMOS device topologies, SOI and FinFET, 3D-structures including nanowire/sheet.
Power consumption, crosstalk and scaling of interconnects.
Memory technologies, charge based, resistive or based on other physical principles.
New technologies and applications as for instance spintronics, 2D-materials, and 3D-fabrication.
Circuit design for nanometer CMOS, ASIC, FPGA, design rules, robustness, testing, reliability, error analysis, variability on component, chip and wafer level.
Intended learning outcomes
After passing the course, the student shall be able to
describe properties and limitations of a MOSFET transistor in an advanced CMOS technology node
give an account of a methodological circuit design in nanometer CMOS technology that takes into account power consumption robustness, design rules, variations in device performance etc
justify the need of new component and circuit topologies including 3D-fabrication
give examples of components and materials that are appropriate to replace or would be complementary to silicon-based CMOS or charge based memories for example for low supply voltages or low power applications
use physical and compact modelling to design components with desirable properties equivalent to a future technology node
analyse and critically discuss research publications with regard to the relevance for technical development in the device field
discuss advanced semiconductor fabrication from a sustainability perspective with a focus on energy consumption and other finite resources and raw materials.
Detailed plan
Learning activities
Content
Preparations
Lecture 1
Introduction
Review Canvas Modules
Lecture 2
Basic Principles
Chapter 1 skip 1.7-9
Lecture 3
Scaling
Chapter 2 all sections
Lecture 4
Simulation
Canvas
Tutorial 1
NanoHub Lab
Canvas
Lecture 5
MOS manufacture
Chapter 3 with focus on 3.2.4 SOI, 3.3 Lithography, 3.8 planarization
Lecture 6
CMOS circuits
Chapter 4 with focus on 4.3 CMOS digital circuits and 4.6 Layout process
Lecture 7
Sustainability
Canvas, slide set by G. Malm
Tutorial 2
NanoHub Lab
Canvas
Lecture 8
Special devices and technologies including power device primer
Chapter 5.3-4 and online sources
Note 5.2 on imaging device not included 2024
Lecture 9
Low power
Chapter 8
8.2, 8.3, 8.4, 8.5 until 8.5.3.1
Skip 8.1, 8.5.3.2 and 8.6
Lecture 10
Memories
Chapter 6 and additional material from Taur & Ning, 3rd Ed., Chapter 12
(tentatively not given 2024)
VLSI and ASIC
Chapter 7
Lecture 11
Robustness
Chapter 9
Lecture 12
Testing etc
Chapter 10 and additional material in Canvas
Lecture 13
Roadmap
Chapter 11 and additional material in Canvas
Lecture 14
Emerging technologies including spintronics
Material in Canvas
Preparations before course start
Recommended prerequisites
A basic course in semiconductor devices or semiconductor physics.
Literature
Main reading
Harry Veendrick - Nanometer CMOS ICs, From Basics to ASICs, 2ed, 2017 (Canvas pdf)
We will also use chapter 4 from Energy Efficient Computing & Electronics, CRC Press 2019, co-authored by Gunnar Malm (Entire book or Chapter 4 download)
Software
The online tool NanoHub is used. Free login for students at KTH.
Support for students with disabilities
Students at KTH with a permanent disability can get support during studies from Funka:
LAB1 - Computer labs and home assignments, 3.0 credits, Grading scale: P, F
TEN1 - Oral exam, 4.5 credits, Grading scale: A, B, C, D, E, FX, F
Based on recommendation from KTH’s coordinator for disabilities, the examiner will decide how to adapt an examination for students with documented disability.
The examiner may apply another examination format when re-examining individual students.
The previous examination module ANN1 is replaced by TEN1 and LAB1.
The section below is not retrieved from the course syllabus:
Computer labs and home assignments ( LAB1 )
Some home assignments or lecture preparations will be given with submission in Canvas. Based on problems from the main text book.
The computer lab is based on applications in the online NanoHub portal. Written report(s) with a fixed template/headings are required. Submission according to deadlines in Canvas.
Oral exam ( TEN1 )
Will be organized in the exam week of period 4. Preparatory questions will be made available at the course start. Individual examination of about 30 minutes per student.
Grading criteria/assessment criteria
Grading criteria for all learning objectives will be posted in Canvas.
Opportunity to complete the requirements via supplementary examination
Late submissions of homework and lab reports will be considered within reasonable time frames until the end of the current academic year.
Re-examination is only offered according to the official exam schedule of KTH.
NO individual/special examination opportunities outside these periods will be offered.
Opportunity to raise an approved grade via renewed examination
"Plussning" is normally not offered in this course.
Alternatives to missed activities or tasks
Missed tasks cannot be completed until next course round.
Ethical approach
All members of a group are responsible for the group's work.
In any assessment, every student shall honestly disclose any help received and sources used.
In an oral assessment, every student shall be able to present and answer questions about the entire assignment and solution.
Further information
Changes of the course before this course offering
Some experimental lab work will be included for the first time. Schedule not decided yet. Will align with the simulations assignments.
Contacts
Communication during course
The teacher can be reached by email, phone or DM in Canvas during normal office hours.