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Device and Circuit Fabrication

Semiconductor devices are the keys to building any electronic circuit. Our research ranges from nanometer scaled silicon and germanium MOSFETs to high voltage silicon carbide (SiC) devices and photonic devices like lasers and UV-detectors.

The strength of our infrastructure is that we can fabricate and characterize state-of-the art devices and circuits in-house, which is one of the leading university cleanrooms in Europe. High temperature integrated circuits in SiC operating at 600°C have been demonstrated, as well as 15 kV SiC power switches.

Involved faculty

Anders Hallén
Anders Hallén professor
Mattias Hammar
Mattias Hammar professor
Per-Erik Hellström
Per-Erik Hellström professor
Sergiy Khartsev
Sergiy Khartsev researcher
Carl-Mikael Zetterling
Carl-Mikael Zetterling professor
Mikael Östling
Mikael Östling senior professor