Class information for:
Level 1: PLASMA IMMERSION ION IMPLANTATION//PLASMA BASED ION IMPLANTATION//PLASMA SOURCE ION IMPLANTATION

Basic class information
Class id #P Avg. number of
references		 Database coverage
of references
8175 1283 17.1 71%


Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
2 4 MATERIALS SCIENCE, MULTIDISCIPLINARY//PHYSICS, APPLIED//PHYSICS, CONDENSED MATTER 2836879
378 3       SURFACE & COATINGS TECHNOLOGY//HIGH ENTROPY ALLOY//MATERIALS SCIENCE, COATINGS & FILMS 32127
1941 2             PLASMA NITRIDING//PLASMA IMMERSION ION IMPLANTATION//NITRIDING 5761
8175 1                   PLASMA IMMERSION ION IMPLANTATION//PLASMA BASED ION IMPLANTATION//PLASMA SOURCE ION IMPLANTATION 1283

Terms with highest relevance score


rank Term termType Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 PLASMA IMMERSION ION IMPLANTATION authKW 1873971 14% 44% 181
2 PLASMA BASED ION IMPLANTATION authKW 1078812 5% 67% 68
3 PLASMA SOURCE ION IMPLANTATION authKW 411340 3% 52% 33
4 SHUNTING ARC authKW 380773 1% 100% 16
5 PLASMA IMMERSION ION IMPLANTATION PIII authKW 346485 2% 47% 31
6 PLASMA BASED ION IMPLANTATION PBII authKW 277121 1% 61% 19
7 PIII authKW 270500 3% 32% 36
8 PLASMA DOPING PLAD authKW 236577 1% 76% 13
9 ION SHEATH authKW 233201 2% 47% 21
10 PBIID authKW 175239 1% 82% 9

Web of Science journal categories


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 Materials Science, Coatings & Films 28777 34% 0% 438
2 Physics, Applied 12844 63% 0% 812
3 Physics, Fluids & Plasmas 3634 13% 0% 172
4 Instruments & Instrumentation 2053 13% 0% 169
5 Nuclear Science & Technology 1437 10% 0% 134
6 Physics, Nuclear 1380 10% 0% 134
7 Physics, Atomic, Molecular & Chemical 715 10% 0% 134
8 Nanoscience & Nanotechnology 298 6% 0% 78
9 Materials Science, Multidisciplinary 131 11% 0% 136
10 Engineering, Electrical & Electronic 124 8% 0% 108

Address terms


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 702 171326 1% 40% 18
2 MAT COMPONENT DEV 142790 0% 100% 6
3 ASSOCIADO MAT SENSO 126919 1% 67% 8
4 ASSOC PLASMA 117155 1% 62% 8
5 PLASMA SCI MICROELECT 116608 1% 70% 7
6 ASSOCIADO PLASMA 112799 1% 30% 16
7 ASSOCIATED PLASMA 88933 2% 19% 20
8 STATE WELDING PROD TECHNOL 80308 1% 38% 9
9 PHYS MAT SCI 72073 13% 2% 166
10 ASSOCIADO PLASMAS 54082 0% 45% 5

Journals


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 SURFACE & COATINGS TECHNOLOGY 152705 27% 2% 352
2 IEEE TRANSACTIONS ON PLASMA SCIENCE 24000 8% 1% 99
3 NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 12812 10% 0% 131
4 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 5416 5% 0% 62
5 PLASMA SOURCES SCIENCE & TECHNOLOGY 3793 2% 1% 21
6 JOURNAL OF APPLIED PHYSICS 1734 7% 0% 91
7 JOURNAL OF PHYSICS D-APPLIED PHYSICS 1420 3% 0% 36
8 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 1367 2% 0% 29
9 NEW DIAMOND AND FRONTIER CARBON TECHNOLOGY 1362 0% 1% 4
10 VACUUM 1287 2% 0% 23

Author Key Words


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class		 LCSH search Wikipedia search
1 PLASMA IMMERSION ION IMPLANTATION 1873971 14% 44% 181 Search PLASMA+IMMERSION+ION+IMPLANTATION Search PLASMA+IMMERSION+ION+IMPLANTATION
2 PLASMA BASED ION IMPLANTATION 1078812 5% 67% 68 Search PLASMA+BASED+ION+IMPLANTATION Search PLASMA+BASED+ION+IMPLANTATION
3 PLASMA SOURCE ION IMPLANTATION 411340 3% 52% 33 Search PLASMA+SOURCE+ION+IMPLANTATION Search PLASMA+SOURCE+ION+IMPLANTATION
4 SHUNTING ARC 380773 1% 100% 16 Search SHUNTING+ARC Search SHUNTING+ARC
5 PLASMA IMMERSION ION IMPLANTATION PIII 346485 2% 47% 31 Search PLASMA+IMMERSION+ION+IMPLANTATION+PIII Search PLASMA+IMMERSION+ION+IMPLANTATION+PIII
6 PLASMA BASED ION IMPLANTATION PBII 277121 1% 61% 19 Search PLASMA+BASED+ION+IMPLANTATION+PBII Search PLASMA+BASED+ION+IMPLANTATION+PBII
7 PIII 270500 3% 32% 36 Search PIII Search PIII
8 PLASMA DOPING PLAD 236577 1% 76% 13 Search PLASMA+DOPING+PLAD Search PLASMA+DOPING+PLAD
9 ION SHEATH 233201 2% 47% 21 Search ION+SHEATH Search ION+SHEATH
10 PBIID 175239 1% 82% 9 Search PBIID Search PBIID

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.


Rank Reference # ref. in
cl.		 Shr. of ref. in
cl.		 Citations
1 PELLETIER, J , ANDERS, A , (2005) PLASMA-BLASED ION IMPLANTATION AND DEPOSITION: A REVIEW OF PHYSICS, TECHNOLOGY, AND APPLICATIONS.IEEE TRANSACTIONS ON PLASMA SCIENCE. VOL. 33. ISSUE 6. P. 1944 -1959 122 66% 72
2 WANG, JL , ZHANG, GL , WANG, YN , LIU, YF , LIU, CZ , YANG, S , (2004) SIMULATION METHODS OF ION SHEATH DYNAMICS IN PLASMA SOURCE ION IMPLANTATION.CHINESE SCIENCE BULLETIN. VOL. 49. ISSUE 8. P. 757-765 52 95% 3
3 CHU, PK , (2003) SEMICONDUCTOR APPLICATIONS OF PLASMA IMMERSION ION IMPLANTATION.PLASMA PHYSICS AND CONTROLLED FUSION. VOL. 45. ISSUE 5. P. 555 -570 45 88% 14
4 SHARIFIAN, M , (2013) NUMERICAL ANALYSIS OF MONOENERGETIC ELECTRONS ENERGY EFFECT ON DYNAMIC POTENTIAL PROFILE OF PLASMA SHEATH.JOURNAL OF PLASMA PHYSICS. VOL. 79. ISSUE . P. 509-512 31 82% 1
5 CHU, PK , (2004) RECENT DEVELOPMENTS AND APPLICATIONS OF PLASMA IMMERSION ION IMPLANTATION.JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B. VOL. 22. ISSUE 1. P. 289 -296 40 71% 74
6 CHU, PK , QIN, S , CHAN, C , CHEUNG, NW , LARSON, LA , (1996) PLASMA IMMERSION ION IMPLANTATION - A FLEDGLING TECHNIQUE FOR SEMICONDUCTOR PROCESSING.MATERIALS SCIENCE & ENGINEERING R-REPORTS. VOL. 17. ISSUE 6-7. P. 207 -280 52 60% 173
7 CHU, PK , CHAN, C , (2001) APPLICATIONS OF PLASMA IMMERSION ION IMPLANTATION IN MICROELECTRONICS - A BRIEF REVIEW.SURFACE & COATINGS TECHNOLOGY. VOL. 136. ISSUE 1-3. P. 151 -156 36 90% 19
8 ZHANG, GL , WU, XF , GU, WC , CHEN, GL , FENG, WR , NIU, EW , LI, L , LUE, GH , CHEN, H , FAN, SH , ET AL (2006) RESEARCH PROGRESS IN THE INNER SURFACE MODIFICATION OF METAL TUBES BY PLASMA PROCESSING.PROGRESS IN NATURAL SCIENCE-MATERIALS INTERNATIONAL. VOL. 16. ISSUE 11. P. 1119-1126 31 91% 0
9 SHARIFIAN, M , SADEGHI, Y , (2014) FDTD STUDY OF THE EFFECTS OF THE DOUBLY IONIZED IONS ON THE PLASMA IMMERSION ION IMPLANTATION PROCESS.JOURNAL OF PLASMA PHYSICS. VOL. 80. ISSUE . P. 215 -223 22 96% 0
10 ANDERS, A , (2002) FROM PLASMA IMMERSION ION IMPLANTATION TO DEPOSITION: A HISTORICAL PERSPECTIVE ON PRINCIPLES AND TRENDS.SURFACE & COATINGS TECHNOLOGY. VOL. 156. ISSUE 1-3. P. 3 -12 41 62% 46

Classes with closest relation at Level 1


Rank Class id link
1 3479 ION IMPLANTATION//RADIAT BEAM MAT ENGN//NITROGEN ION IMPLANTATION
2 1754 PLASMA NITRIDING//NITRIDING//EXPANDED AUSTENITE
3 7686 OXFORD UNIT//PLASMA SHEATHS//SHEATH
4 2571 VACUUM ARC//CATHODE SPOT//ELECT DI ARGE PLASMA
5 27538 FUSED HOLLOW CATHODE//HOLLOW CATHODE//PLASMA GRP
6 502 DIAMOND LIKE CARBON//DLC//DIAMOND LIKE CARBON DLC
7 35130 SELECTIVE REMOVAL OF ATOMS//99 AL2O3//CIENCIAS QUIMICAS FARMACEUTICAS ALIMENTOS
8 24840 JOINT BIOMAT REGENERAT MED//BIOMAT SUR E ENGN//ADV TECHNOL MAT
9 9830 LASER NITRIDING//TI 6AL 4V//TITANIUM ALLOY
10 12287 ECR PLASMA//UNIFORM PLASMA//ELECTRON CYCLOTRON RESONANCE DISCHARGE

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