Class information for:
Level 1: PROTON BEAM WRITING//NUCLEAR MICROPROBE//ION BEAM PLICAT

Basic class information
Class id #P Avg. number of
references		 Database coverage
of references
8129 1289 16.7 64%


Bar chart of Publication_year

Last years might be incomplete

Hierarchy of classes
The table includes all classes above and classes immediately below the current class.


Cluster id Level Cluster label #P
2 4 MATERIALS SCIENCE, MULTIDISCIPLINARY//PHYSICS, APPLIED//PHYSICS, CONDENSED MATTER 2836879
277 3       NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS//JOURNAL OF SYNCHROTRON RADIATION//NUCLEAR SCIENCE & TECHNOLOGY 43290
2028 2             NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS//PIXE//NUCLEAR MICROPROBE 5411
8129 1                   PROTON BEAM WRITING//NUCLEAR MICROPROBE//ION BEAM PLICAT 1289

Terms with highest relevance score


rank Term termType Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 PROTON BEAM WRITING authKW 1731233 6% 89% 82
2 NUCLEAR MICROPROBE authKW 795309 8% 34% 98
3 ION BEAM PLICAT address 762831 7% 37% 87
4 NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS journal 551286 66% 3% 854
5 QUADRUPOLE LENS authKW 364415 2% 77% 20
6 PROBE FORMING SYSTEM authKW 333104 1% 94% 15
7 CIBA address 252625 2% 33% 32
8 MEV ION BEAM LITHOGRAPHY authKW 236875 1% 100% 10
9 STIM authKW 213878 3% 27% 34
10 SCANNING TRANSMISSION ION MICROSCOPY authKW 213182 1% 75% 12

Web of Science journal categories


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 Nuclear Science & Technology 82192 73% 0% 946
2 Instruments & Instrumentation 70632 73% 0% 935
3 Physics, Nuclear 69176 69% 0% 884
4 Physics, Atomic, Molecular & Chemical 37839 67% 0% 860
5 Physics, Applied 341 13% 0% 171
6 Nanoscience & Nanotechnology 181 5% 0% 64
7 Microscopy 140 1% 0% 16
8 Spectroscopy 55 2% 0% 32
9 Engineering, Electrical & Electronic 39 6% 0% 78
10 Physics, Particles & Fields 29 3% 0% 33

Address terms


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 ION BEAM PLICAT 762831 7% 37% 87
2 CIBA 252625 2% 33% 32
3 NUCL MICROSCOPY 206697 2% 36% 24
4 LOUISIANA ACCELERATOR 130271 1% 50% 11
5 TAKASAKI ADV RADIAT 115500 2% 16% 31
6 NUCL PHYS SPM UNIT 94750 0% 100% 4
7 RCNM 75799 0% 80% 4
8 MICROANALYT 55989 1% 13% 18
9 IST IPFN 42635 0% 60% 3
10 NUCL MICROSCOPY GRP 42635 0% 60% 3

Journals


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class
1 NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 551286 66% 3% 854
2 NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH 1966 1% 1% 15
3 SCANNING MICROSCOPY 1193 1% 1% 8
4 PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY 905 1% 0% 8
5 MICROELECTRONIC ENGINEERING 900 2% 0% 20
6 MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 837 1% 0% 11
7 TECHNICAL PHYSICS 493 1% 0% 11
8 IEEE TRANSACTIONS ON NUCLEAR SCIENCE 481 1% 0% 19
9 JOURNAL OF MICROMECHANICS AND MICROENGINEERING 410 1% 0% 10
10 X-RAY SPECTROMETRY 402 0% 0% 6

Author Key Words


Rank Term Chi square Shr. of publ. in
class containing
term		 Class's shr. of
term's tot. occurrences		 #P with
term in
class		 LCSH search Wikipedia search
1 PROTON BEAM WRITING 1731233 6% 89% 82 Search PROTON+BEAM+WRITING Search PROTON+BEAM+WRITING
2 NUCLEAR MICROPROBE 795309 8% 34% 98 Search NUCLEAR+MICROPROBE Search NUCLEAR+MICROPROBE
3 QUADRUPOLE LENS 364415 2% 77% 20 Search QUADRUPOLE+LENS Search QUADRUPOLE+LENS
4 PROBE FORMING SYSTEM 333104 1% 94% 15 Search PROBE+FORMING+SYSTEM Search PROBE+FORMING+SYSTEM
5 MEV ION BEAM LITHOGRAPHY 236875 1% 100% 10 Search MEV+ION+BEAM+LITHOGRAPHY Search MEV+ION+BEAM+LITHOGRAPHY
6 STIM 213878 3% 27% 34 Search STIM Search STIM
7 SCANNING TRANSMISSION ION MICROSCOPY 213182 1% 75% 12 Search SCANNING+TRANSMISSION+ION+MICROSCOPY Search SCANNING+TRANSMISSION+ION+MICROSCOPY
8 PROTON BEAM WRITING PBW 165813 1% 100% 7 Search PROTON+BEAM+WRITING+PBW Search PROTON+BEAM+WRITING+PBW
9 ION MICROBEAM 160115 1% 52% 13 Search ION+MICROBEAM Search ION+MICROBEAM
10 PROTON BEAM MICROMACHINING 151597 1% 80% 8 Search PROTON+BEAM+MICROMACHINING Search PROTON+BEAM+MICROMACHINING

Core articles
The table includes core articles in the class. The following variables is taken into account for the relevance score of an article in a cluster c:
(1) Number of references referring to publications in the class.
(2) Share of total number of active references referring to publications in the class.
(3) Age of the article. New articles get higher score than old articles.
(4) Citation rate, normalized to year.


Rank Reference # ref.
in cl.		 Shr. of ref. in
cl.		 Citations
1 VAN KAN, JA , MALAR, P , WANG, YH , (2014) RESIST MATERIALS FOR PROTON BEAM WRITING: A REVIEW.APPLIED SURFACE SCIENCE. VOL. 310. ISSUE . P. 100 -111 43 69% 10
2 KOLINKO, SV , PONOMAREV, AG , (2016) EFFECT OF MAGNETIC QUADRUPOLE LENS ALIGNMENT ON A NUCLEAR MICROPROBE RESOLUTION.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS. VOL. 373. ISSUE . P. 110 -116 22 92% 0
3 MICHELET, C , BARBERET, P , MORETTO, P , SEZNEC, H , (2015) DEVELOPMENT AND APPLICATIONS OF STIM- AND PIXE-TOMOGRAPHY: A REVIEW.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS. VOL. 363. ISSUE . P. 55 -60 29 67% 2
4 PARAJULI, RK , MATSUBARA, Y , SARUYA, R , AKUTZU, N , MIURA, S , KADA, W , KAWABATA, S , SATOH, T , KOKA, M , YAMADA, N , ET AL (2016) FABRICATION AND EVALUATION OF FLEXIBLE MACH-ZEHNDER WAVEGUIDE STRUCTURE EMBEDDED IN A POLY(DIMETHYLSILOXANE) THIN FILM USING A PROTON MICROBEAM.JAPANESE JOURNAL OF APPLIED PHYSICS. VOL. 55. ISSUE 6. P. - 22 88% 0
5 KADA, W , MIURA, K , KATO, H , SARUYA, R , KUBOTA, A , SATOH, T , KOKA, M , ISHII, Y , KAMIYA, T , NISHIKAWA, H , ET AL (2015) DEVELOPMENT OF EMBEDDED MACH-ZEHNDER OPTICAL WAVEGUIDE STRUCTURES IN POLYDIMETHYLSILOXANE THIN FILMS BY PROTON BEAM WRITING.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS. VOL. 348. ISSUE . P. 218 -222 19 95% 2
6 YAO, Y , VAN KAN, JA , (2015) AUTOMATIC BEAM FOCUSING IN THE 2ND GENERATION PBW LINE AT SUB-10 NM LINE RESOLUTION.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS. VOL. 348. ISSUE . P. 203 -208 20 87% 3
7 WANG, YH , MALAR, P , VAN KAN, JA , (2014) RESIST EVALUATION FOR PROTON BEAM WRITING, NI MOLD FABRICATION AND NANO-REPLICATION.MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS. VOL. 20. ISSUE 10-11. P. 2079 -2088 22 79% 0
8 DIERING, D , SPEMANN, D , LENZNER, J , MULLER, S , BONTGEN, T , VON WENCKSTERN, H , (2013) GREYSCALE PROTON BEAM WRITING IN P-TYPE GALLIUM ARSENIDE.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS. VOL. 306. ISSUE . P. 275-280 18 95% 3
9 WATT, F , BREESE, MBH , BETTIOL, AA , VAN KAN, JA , (2007) PROTON BEAM WRITING.MATERIALS TODAY. VOL. 10. ISSUE 6. P. 20 -29 28 58% 97
10 YNSA, MD , SHAO, P , KULKARNI, SR , LIU, NN , VAN KAN, JA , (2011) EXPOSURE PARAMETERS IN PROTON BEAM WRITING FOR KMPR AND EPO CORE NEGATIVE TONE PHOTORESISTS.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS. VOL. 269. ISSUE 20. P. 2409 -2412 20 87% 3

Classes with closest relation at Level 1


Rank Class id link
1 7779 NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS//PROTON MICROPROBE//PIXE
2 4672 NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS//ION BEAM ANALYSIS//ELASTIC RECOIL DETECTION
3 12062 PIXE//EXTERNAL BEAM//SILVER COINS
4 20884 CHANNELED PARTICLE//CESIA SETTORE RETI COMUNICAZ//TRANSMISSION CHANNELING
5 33839 LOW ENERGY RECOILS//VAPOUR SOURCE//RECOIL SPECTROMETER
6 6134 BYSTANDER EFFECT//RADIATION INDUCED BYSTANDER EFFECT//NON TARGETED EFFECTS
7 23315 THIN WINDOW EPMA//LOW Z PARTICLE EPMA//LOW Z PARTICLE ELECTRON PROBE X RAY MICROANALYSIS
8 21913 STENCIL LITHOGRAPHY//NANOSYST MFG//STRESS INDUCED DEFORMATION
9 9922 DIAMOND DETECTORS//CVD DIAMOND//DEIN
10 18745 ELECTRON BEAM LITHOGRAPHY//HSQ//HYDROGEN SILSESQUIOXANE

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