The course consists of 5 x 2 hours of lectures given in one week. The lectures will cover the basic principles of EBL and FIB, as well as the principles of Scanning Electron Microscopy (SEM). Students wishing to receive training at the EBL and or FIB console, will train with experienced users. Note that such training requires sponsorship of a research group to pay for the lab fees. Students not wishing to receive training, can do a literature study project.
- Electron Beam Lithography- principles and possibilities
- Focused Ion Beam nanofabrication.
- Advanced Exposure Strategies for EBL
- Principles of operation, Raith 150 and FEI Nova.
Lectures: 8 h, laboratory training ca. 25H