Course main content:
Lectures:
The course consists of one lecture at the course start, which presents a classification of different MEMS/NEMS integration and packaging approaches. In addition, the students will attend presentations on details of specific MEMS/NEMS integration and packaging approaches given by the other course participants. All course moments have mandatory participation.
Homework:
MEMS/NEMS integration and packaging can be categorized in a number of different approaches. At the start of the course each student will be assigned two or three different approaches for MEMS/NEMS integration and/or packaging. Related to the assigned approaches, the student will review the scientific literature and summarize the important underlying concepts (3-4 pages for each integration/packaging approach). All summary reports from the students will be assembled by the course leader in form of a review report. Each student will then assess the assembled report. The students (including the course leader) will present and discuss in a group session with all course participants, their respective comments and based on this feed-back each student will re-work and res-submit their respective summary report. The feed-back and re-work process will be iterated until all summary reports reach a good quality. The process will result in a final state-of-the-art “review report”.
Other:
At least one group discussion with all course participants and the course leader will take place, in which the participants provide constructive feed-back on the summaries of the other course participants. Mandatory participation.
Presentations:
Each student will give a presentation to all course participants related to two or three MEMS/NEMS integration/packaging approaches, and subsequently a group discussion related to the presentation will take place. Mandatory participation.
Other:
At least one group discussion with all course participants and the course leader will take place, in which the participants provide constructive feed-back on the summaries of the other course participants. Mandatory participation.
Presentations:
Each student will give a presentation to all course participants related to two or three MEMS/NEMS integration/packaging approaches, and subsequently a group discussion related to the presentation will take place. Mandatory participation.