The course consists of practical training on ten micro or nanofabrication tools. The choice of tools should reflect necessary tools to independently be able to fabricate and evaluate a micro or nanostructure.
FEK3300 Applied Micro- and Nanofabrication 15.0 credits
Information per course offering
Course offerings are missing for current or upcoming semesters.
Course syllabus as PDF
Please note: all information from the Course syllabus is available on this page in an accessible format.
Course syllabus FEK3300 (Spring 2019–)Headings with content from the Course syllabus FEK3300 (Spring 2019–) are denoted with an asterisk ( )
Content and learning outcomes
Course contents
Intended learning outcomes
After the completed course the student shall be able to:
- Describe how a set microfabrication tool or processes work and critically assess performance limitations.
- Master operation of these microfabrication tools or processes.
- Evaluate fabrication results from these tools and processes.
- Fabricate micro or nanostructures independently.
Literature and preparations
Specific prerequisites
This course is open for students enrolled in the KTH EES third-cycle study program.
Recommended prerequisites
EK2350 Microsystem technology or similar course.
Literature
You can find information about course literature either in the course memo for the course offering or in the course room in Canvas.
Examination and completion
Grading scale
P, F
Examination
- EXA1 - Examination, 15.0 credits, grading scale: P, F
Based on recommendation from KTH’s coordinator for disabilities, the examiner will decide how to adapt an examination for students with documented disability.
The examiner may apply another examination format when re-examining individual students.
If the course is discontinued, students may request to be examined during the following two academic years.
Other requirements for final grade
To pass the course successful tool license or equivalent on ten microfabrication and characterization tools for micro or nanofabrication is required. The choice of tools should cover at least one pattern definition tool, one material removal tool, one material deposition tool and one characterization tool.
Examiner
Ethical approach
- All members of a group are responsible for the group's work.
- In any assessment, every student shall honestly disclose any help received and sources used.
- In an oral assessment, every student shall be able to present and answer questions about the entire assignment and solution.
Further information
Course room in Canvas
Registered students find further information about the implementation of the course in the course room in Canvas. A link to the course room can be found under the tab Studies in the Personal menu at the start of the course.
Offered by
Education cycle
Third cycle