FIB-SEM FEI Nova 600 Nanolab (Hultgren)
The Nova 600 NanoLab is a Dual-Beam system (combining ultra-high-resolution SEM and Focused Ion Beam). This is a complete nanotechnology lab in a single tool, which enables nanoscale chemical synthesis, top-down machining, deposition, nanoscale prototyping, 2D and 3D-characterization and analysis of nanostructures below 100 nm. It combines ultra-high-resolution field emission scanning electron microscopy, precise focused ion beam etch and deposition and analysis.
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