Publikationer av Joachim Oberhammer

Refereegranskade

Artiklar

[1]

A. Karimi et al., "A 220–260-GHz Silicon-Micromachined Waveguide MEMS Crossover Switch," IEEE transactions on microwave theory and techniques, s. 1-11, 2024.

[2]

B. Beuerle et al., "A CPW Probe to Rectangular Waveguide Transition for On-Wafer Micromachined Waveguide Characterization," IEEE Transactions on Terahertz Science and Technology, vol. 14, no. 1, s. 98-108, 2024.

[3]

A. Karimi et al., "A High-Performance 220–290 GHz Micromachined Waveguide Switch Based on Interference Between MEMS Reconfigurable Surfaces," IEEE Transactions on Terahertz Science and Technology, vol. 14, no. 2, s. 188-198, 2024.

[4]

K. Boonlom et al., "Advanced Studies on Optical Wireless Communications for in-Pipe Environments : Bandwidth Exploration and Thermal Management," IEEE Access, vol. 12, s. 80607-80632, 2024.

[5]

M. Reza Seidi Goldar, U. Shah och J. Oberhammer, "Analysis of a Minimalistic Imaging Radar Concept Employing Beam Shape Switching and Compressed Sensing," IEEE Transactions on Geoscience and Remote Sensing, vol. 62, 2024.

[6]

G. Savvides et al., "Curved HSIW : an affordable performance for non-planar millimeter-wave applications," Engineering Research Express, vol. 6, no. 3, 2024.

[7]

N. Xenidis et al., "Dichroic absorption of aligned graphene-augmented inorganic nanofibers in the terahertz regime," Applied Materials Today, vol. 39, 2024.

[8]

A. Karimi et al., "Full-Band Silicon-Micromachined E-Plane Waveguide Bend for Flange-to-Chip Connection," IEEE Transactions on Terahertz Science and Technology, vol. 14, no. 1, s. 130-133, 2024.

[9]

A. Madannejad et al., "High-Gain Circularly Polarized 500-750 GHz Lens Antenna Enabled by Silicon Micromachining," IEEE Transactions on Antennas and Propagation, vol. 72, no. 5, s. 4077-4085, 2024.

[10]

A. Karimi et al., "Silicon-Micromachined Subterahertz Frequency Beam-Steered Dual-Port Array Antenna," IEEE Transactions on Terahertz Science and Technology, vol. 14, no. 2, s. 258-268, 2024.

[11]

M. Mehrabi Gohari, O. Glubokov och J. Oberhammer, "Ultra-Narrowband Silicon-Micromachined Sub-THz Filter With Wide Spurious-Free Rejection Band Employing High-Q TM₃₃₀ Resonators," IEEE transactions on microwave theory and techniques, vol. 72, no. 6, s. 3554-3563, 2024.

[12]

A. Krivovitca et al., "Cross-Over Wire-Bonding for Millimeter-Wave Applications," IEEE Electron Device Letters, vol. 44, no. 12, s. 2019-2022, 2023.

[13]

B. Beuerle et al., "Integrating InP MMICs and Silicon Micromachined Waveguides for Sub-THz Systems," IEEE Electron Device Letters, vol. 44, no. 10, s. 1800-1803, 2023.

[14]

M. Mehrabi Gohari et al., "On-Chip Integration of Orthogonal Subsystems Enabled by Broadband Twist at 220–325 GHz," IEEE transactions on microwave theory and techniques, s. 1-0, 2023.

[15]

M. Seidi et al., "A Novel Demixing Algorithm for Joint Target Detection and Impulsive Noise Suppression," IEEE Communications Letters, vol. 26, no. 11, s. 2750-2754, 2022.

[16]

X. Zhao, O. Glubokov och J. Oberhammer, "A Silicon-Micromachined Waveguide Platform with Axial Ports for Integrated Sub-THz Filters," IEEE transactions on microwave theory and techniques, vol. 70, no. 2, s. 1221-1232, 2022.

[17]

C. Bartlett et al., "Compact Triangular-Cavity Singlet-Based Filters in Stackable Multi-Layer Technologies," IEEE Transactions on Terahertz Science and Technology, vol. 12, no. 5, s. 540-543, 2022.

[18]

P. A. Drozdz et al., "Highly efficient absorption of THz radiation using waveguide-integrated carbon nanotube/cellulose aerogels," APPLIED MATERIALS TODAY, vol. 29, 2022.

[19]

S. Smirnov et al., "Sub‐THz Phase Shifters Enabled by Photoconductive Single‐Walled Carbon Nanotube Layers," Advanced Photonics Research, s. 2200042-2200042, 2022.

[20]

J. Campion et al., "Ultra‐Wideband Integrated Graphene‐Based Absorbers for Terahertz Waveguide Systems," Advanced Electronic Materials, vol. 8, no. 9, s. 2200106-2200106, 2022.

[21]

M. Horberg et al., "A 110-170-GHz Non-Galvanic Interface for Integrating Silicon Micromachined Chips With Metallic Waveguide Systems," IEEE transactions on microwave theory and techniques, vol. 69, no. 8, s. 3667-3674, 2021.

[22]

A. Przewłoka et al., "Characterization of Silver Nanowire Layers in the Terahertz Frequency Range," Materials, vol. 14, no. 23, s. 7399, 2021.

[23]

X. Zhao och J. Oberhammer, "HF Under-Etching Prevention for Advanced THz Micromachined Waveguide Devices," Journal of microelectromechanical systems, vol. 30, no. 3, s. 334-336, 2021.

[24]

X. Zhao et al., "Micromachined Subterahertz Waveguide-Integrated Phase Shifter Utilizing Supermode Propagation," IEEE transactions on microwave theory and techniques, vol. 69, no. 7, s. 3219-3227, 2021.

[25]

J. Campion och J. Oberhammer, "Silicon Micromachined Waveguide Calibration Standards for Terahertz Metrology," IEEE transactions on microwave theory and techniques, vol. 69, no. 8, s. 3927-3942, 2021.

[26]

A. Gomez-Torrent et al., "A 38 dBi Gain, Low-Loss, Flat Array Antenna for 320 GHz to 400 GHz Enabled by Silicon-On-Insulator Micromachining," IEEE Transactions on Antennas and Propagation, vol. 68, no. 6, s. 4450-4458, 2020.

[27]

A. Gomez-Torrent et al., "A Low-Profile and High-Gain Frequency Beam Steering Subterahertz Antenna Enabled by Silicon Micromachining," IEEE Transactions on Antennas and Propagation, vol. 68, no. 2, s. 672-682, 2020.

[28]

A. Krivovitca et al., "Micromachined Silicon-Core Substrate-Integrated Waveguides at 220-330 GHz," IEEE transactions on microwave theory and techniques, vol. 68, no. 12, s. 5123-5131, 2020.

[29]

A. Gomez-Torrent, "Micromachined Waveguide Interposer for the Characterization of Multi-port Sub-THz Devices," Journal of Infrared, Millimeter and Terahertz Waves, 2020.

[30]

X. Zhao et al., "Silicon Micromachined D-Band Diplexer Using Releasable Filling Structure Technique," IEEE transactions on microwave theory and techniques, vol. 68, no. 8, s. 3448-3460, 2020.

[31]

O. Glubokov et al., "Investigation of Fabrication Accuracy and Repeatability of High-Q Silicon-Micromachined Narrowband Sub-THz Waveguide Filters," IEEE transactions on microwave theory and techniques, vol. 67, no. 9, s. 3696-3706, 2019.

[32]

O. Glubokov et al., "Micromachined Filters at 450 GHz With 1% Fractional Bandwidth and Unloaded Q Beyond 700," IEEE Transactions on Terahertz Science and Technology, vol. 9, no. 1, 2019.

[33]

P. B. Makhalov, D. Lioubtchenko och J. Oberhammer, "Semiconductor-Metal-Grating Slow Wave Amplifier for Sub-THz Frequency Range," IEEE Transactions on Electron Devices, vol. 66, no. 10, s. 4413-4418, 2019.

[34]

S. Smirnov, D. Lioubtchenko och J. Oberhammer, "Single-walled carbon nanotube layers for millimeter-wave beam steering," Nanoscale, 2019.

[35]

J. Campion et al., "Toward Industrial Exploitation of THz Frequencies : Integration of SiGe MMICs in Silicon-Micromachined Waveguide Systems," IEEE Transactions on Terahertz Science and Technology, vol. 9, no. 6, s. 624-636, 2019.

[36]

S. Smirnov et al., "Wavelength-dependent photoconductivity of single-walled carbon nanotube layers," RSC Advances, vol. 9, no. 26, s. 14677-14682, 2019.

[37]

B. Beuerle et al., "A Very Low Loss 220–325 GHz Silicon Micromachined Waveguide Technology," IEEE Transactions on Terahertz Science and Technology, vol. 8, no. 2, s. 248-250, 2018.

[38]

A. Gomez-Torrent, U. Shah och J. Oberhammer, "Compact silicon-micromachined wideband 220 – 330 GHz turnstile orthomode transducer," IEEE Transactions on Terahertz Science and Technology, vol. 9, no. 1, s. 38-46, 2018.

[39]

I. V. Anoshkin et al., "Freeze-Dried Carbon Nanotube Aerogels for High-Frequency Absorber Applications," ACS Applied Materials and Interfaces, vol. 10, no. 23, s. 19806-19811, 2018.

[40]

U. Shah et al., "Low Loss High Linearity RF Interposers Enabled by Through-Glass Vias," IEEE Microwave and Wireless Components Letters, vol. 28, no. 11, s. 960-962, 2018.

[41]

S. Smirnov et al., "Optically controlled dielectric properties of single-walled carbon nanotubes for terahertz wave applications," Nanoscale, vol. 10, no. 26, s. 12291-12296, 2018.

[42]

U. Shah et al., "A 500–750 GHz RF MEMS Waveguide Switch," IEEE Transactions on Terahertz Science and Technology, vol. 7, no. 3, s. 326-334, 2017.

[43]

F. Töpfer, L. Emtestam och J. Oberhammer, "Long-Term Monitoring of Skin Recovery by Micromachined Microwave Near-Field Probe," IEEE Microwave and Wireless Components Letters, vol. 27, no. 6, s. 605-607, 2017.

[44]

H. Frid et al., "Optimization of Micromachined Millimeter-Wave Planar Silicon Lens Antennas with Concentric and Shifted Matching Regions," Progress In Electromagnetics Research C, vol. 79, s. 17-29, 2017.

[45]

U. Shah et al., "Submillimeter-Wave 3.3-bit RF MEMS Phase Shifter Integrated in Micromachined Waveguide," IEEE Transactions on Terahertz Science and Technology, vol. 6, no. 5, s. 706-715, 2016.

[46]

S. J. Bleiker et al., "High-Aspect-Ratio Through Silicon Vias for High-Frequency Application Fabricated by Magnetic Assembly of Gold-Coated Nickel Wires," IEEE Transactions on Components, Packaging, and Manufacturing Technology, vol. 5, no. 1, s. 21-27, 2015.

[47]

F. Töpfer, S. Dudorov och J. Oberhammer, "Millimeter-Wave Near-Field Probe Designed for High-Resolution Skin Cancer Diagnosis," IEEE transactions on microwave theory and techniques, vol. 63, no. 6, s. 2050-2059, 2015.

[48]

F. Töpfer och J. Oberhammer, "Millimeter-Wave Tissue Diagnostics : The most promising fields for medical applications," IEEE Microwave Magazine, vol. 16, no. 4, s. 97-113, 2015.

[49]

U. Shah, M. Sterner och J. Oberhammer, "Analysis of Linearity Deterioration in Multidevice RF MEMS Circuits," IEEE Transactions on Electron Devices, vol. 61, no. 5, s. 1529-1535, 2014.

[50]

D. Dancila et al., "Millimeter wave silicon micromachined waveguide probe as an aid for skin diagnosis - results of measurements on phantom material with varied water content," Skin research and technology, vol. 20, no. 1, s. 116-123, 2014.

[51]

U. Shah et al., "Permeability Enhancement by Multilayer Ferromagnetic Composites for Magnetic-Core On-Chip Inductors," IEEE Microwave and Wireless Components Letters, vol. 24, no. 10, s. 677-679, 2014.

[52]

T. Ebefors och J. Oberhammer, "Through-Silicon Vias and 3D Inductors for RF Applications," Microwave journal (International ed.), vol. 57, no. 2, s. 80, 2014.

[53]

Z. Baghchehsaraei et al., "Waveguide-integrated MEMS-based phase shifter for phased array antenna," IET Microwaves, Antennas & Propagation, vol. 8, no. 4, s. 235-243, 2014.

[54]

U. Shah, M. Sterner och J. Oberhammer, "High-Directivity MEMS-Tunable Directional Couplers for 10–18-GHz Broadband Applications," IEEE transactions on microwave theory and techniques, vol. 61, no. 9, s. 3236-3246, 2013.

[55]

Z. Baghchehsaraei et al., "Integration of microwave MEMS devices into rectangular waveguide with conductive polymer interposers," Journal of Micromechanics and Microengineering, vol. 23, no. 12, s. 125020, 2013.

[56]

Z. Baghchehsaraei et al., "MEMS reconfigurable millimeter-wave surface for V-band rectangular-waveguide switch," International Journal of Microwave and Wireless Technologies, vol. 5, no. 3, s. 341-349, 2013.

[57]

U. Shah, M. Sterner och J. Oberhammer, "Multi-Position RF MEMS Tunable Capacitors Using Laterally Moving Sidewalls of 3-D Micromachined Transmission Lines," IEEE transactions on microwave theory and techniques, vol. 61, no. 6, s. 2340-2352, 2013.

[58]

Z. Baghchehsaraei och J. Oberhammer, "Parameter Analysis of Millimeter-Wave Waveguide Switch Based on a MEMS-Reconfigurable Surface," IEEE transactions on microwave theory and techniques, vol. 61, no. 12, s. 4396-4406, 2013.

[59]

M. Sterner och J. Oberhammer, "Symmetrical Anti-Directional Metallization for Stress-Compensation of Transfer-Bonded Monocrystalline Silicon Membranes," Journal of microelectromechanical systems, vol. 22, no. 1, s. 195-205, 2013.

[60]

N. Somjit och J. Oberhammer, "Three-dimensional micromachined silicon-substrate integrated millimetre-wave helical antennas," IET Microwaves, Antennas & Propagation, vol. 7, no. 4, s. 291-298, 2013.

[61]

N. Somjit och J. Oberhammer, "Design Approach for Return-Loss Optimisation of Multi-Stage Millimetre-Wave MEMS Dielectric-Block Phase Shifters," IET Microwaves, Antennas & Propagation, vol. 6, s. 1429-1436, 2012.

[62]

D. Chicherin et al., "Analog-type millimeter-wave phase shifters based on MEMS tunable high-impedance surface and dielectric rod waveguide," International Journal of Microwave and Wireless Technologies, vol. 3, no. 5, s. 533-538, 2011.

[63]

M. Sterner et al., "Electrochemically Assisted Maskless Selective Removal of Metal Layers for Three-Dimensional Micromachined SOI RF MEMS Transmission Lines and Devices," Journal of microelectromechanical systems, vol. 20, no. 4, s. 899-908, 2011.

[64]

M. Sterner et al., "Microwave MEMS Devices Designed for Process Robustness and Operational Reliability," International Journal of Microwave and Wireless Technology, vol. 3, no. 5, s. 547-563, 2011.

[65]

N. Somjit, G. Stemme och J. Oberhammer, "Power Handling Analysis of High-Power W-Band All-Silicon MEMS Phase Shifters," IEEE Transactions on Electron Devices, vol. 58, no. 5, s. 1548-1555, 2011.

[66]

N. Somjit, G. Stemme och J. Oberhammer, "Deep-Reactive-Ion-Etched Wafer-Scale-Transferred All-Silicon Dielectric-Block Millimeter-Wave MEMS Phase Shifters," Journal of microelectromechanical systems, vol. 19, no. 1, s. 120-128, 2010.

[67]

M. Sterner et al., "Static Zero-Power-Consumption Coplanar Waveguide Embedded DC-to-RF Metal-Contact MEMS Switches in Two-Port and Three-Port Configuration," IEEE Transactions on Electron Devices, vol. 57, no. 7, s. 1659-1669, 2010.

[68]

N. Somjit, G. Stemme och J. Oberhammer, "Binary-Coded 4.25-bit W-Band Monocrystalline-Silicon MEMS Multistage Dielectric-Block Phase Shifters," IEEE transactions on microwave theory and techniques, vol. 57, no. 11, s. 2834-2840, 2009.

[69]

F. Ke, J. Miao och J. Oberhammer, "A Ruthenium-Based Multimetal-Contact RF MEMS Switch With a Corrugated Diaphragm," Journal of microelectromechanical systems, vol. 17, no. 6, s. 1447-1459, 2008.

[70]

M. Tang, A. Q. Liu och J. Oberhammer, "A silicon-on-glass single-pole-double-throw (SPDT) switching circuit integrated with a silicon-core metal-coated transmission line," Journal of Micromechanics and Microengineering, vol. 18, no. 9, 2008.

[71]

S. Braun, J. Oberhammer och G. Stemme, "Row/column addressing scheme for large electrostatic actuator MEMS switch arrays and optimization of the operational reliability by statistical analysis," Journal of microelectromechanical systems, vol. 17, no. 5, s. 1104-1113, 2008.

[72]

S. Braun, J. Oberhammer och G. Stemme, "Single-chip MEMS 5x5 and 20x20 double-pole single-throw switch arrays for automating telecommunication networks," Journal of Micromechanics and Microengineering, vol. 18, no. 1, s. 015014, 2008.

[73]

A. B. Yu et al., "Characterization and optimization of dry releasing for the fabrication of RF MEMS capacitive switches," Journal of Micromechanics and Microengineering, vol. 17, no. 10, s. 2024-2030, 2007.

[74]

P. Gkotsis et al., "Thin film crystal growth template removal : Application to stress reduction in lead zirconate titanate microstructures," Applied Physics Letters, vol. 91, no. 16, 2007.

[75]

J. Oberhammer, A. Q. Liu och G. Stemme, "Time-efficient quasi-static algorithm for simulation of complex single-sided clamped electrostatic actuators," Journal of microelectromechanical systems, vol. 16, no. 2, s. 373-382, 2007.

[76]

J. Oberhammer och G. Stemme, "Active opening force and passive contact force electrostatic switches for soft metal contact materials," Journal of microelectromechanical systems, vol. 15, no. 5, s. 1235-1242, 2006.

[77]

J. Oberhammer et al., "Mechanically tri-stable, true single-pole-double-throw (SPDT) switches," Journal of Micromechanics and Microengineering, vol. 16, no. 11, s. 2251-2258, 2006.

[78]

J. Oberhammer och G. Stemme, "BCB contact printing for patterned adhesive full-wafer bonded 0-level packages," Journal of microelectromechanical systems, vol. 14, no. 2, s. 419-425, 2005.

[79]

J. Oberhammer och G. Stemme, "Design and fabrication aspects of an S-shaped film actuator based DC to RF MEMS switch," Journal of microelectromechanical systems, vol. 13, no. 3, s. 421-428, 2004.

[80]

J. Oberhammer och G. Stemme, "Low-voltage high-isolation DC-to-RF MEMS switch based on an S-shaped film actuator," IEEE Transactions on Electron Devices, vol. 51, no. 1, s. 149-155, 2004.

[81]

J. Oberhammer, F. Niklaus och G. Stemme, "Sealing of adhesive bonded devices on wafer level," Sensors and Actuators A-Physical, vol. 110, no. 1-3, s. 407-412, 2004.

[82]

J. Oberhammer, F. Niklaus och G. Stemme, "Selective wafer-level adhesive bonding with benzocyclobutene for fabrication of cavities," Sensors and Actuators A-Physical, vol. 105, no. 3, s. 297-304, 2003.

Konferensbidrag

[83]

M. Reza Seidi Goldar, A. Karimi och J. Oberhammer, "A Novel Frequency-Sweeping Scanning Notch Beam Radar at 238-248 GHz," i EuRAD 2024, 2024 21st European Radar Conference, 22-27 September 2024, Paris, France, 2024.

[84]

M. Rezaei Golghand et al., "Analysis of the Interaction of laser-induced Solid-State Plasma with Electromagnetic Waves in Silicon Waveguides at 67-220 GHz," i Proceedings 18th European Conference on Antennas and Propagation (EuCAP), 2024.

[85]

A. Madannejad et al., "Graded Index Lens Antenna in Silicon Micromachining with Circular Polarization at 500-750 GHz," i 27th European Microwave Conference (EuMC 2024), Paris, France, 24-26 Sep 2024, 2024.

[86]

A. Madannejad et al., "High-Gain and Circular Polarization Silicon-Micromachined Lens Antennas at 500-750 GHz," i 18th European Conference on Antennas and Propagation, EuCAP 2024, 2024.

[87]

A. Karimi, U. Shah och J. Oberhammer, "Micromachined Waveguide-Integrated Sub-THz Crossover Switch," i 2024 IEEE/MTT-S International Microwave Symposium, IMS 2024, 2024, s. 227-230.

[88]

M. Mehrabi Gohari, O. Glubokov och J. Oberhammer, "Novel Negative Coupling Structure for Rectangular Waveguide Cavity Filters," i Proceedings IEEE International Microwave Filter Workshop IMFW 2024, 2024.

[89]

O. Glubokov et al., "On Modelling of Balanced Filters," i IThe 2nd IEEE International Microwave Filter Workshop (IMFW), February 21-23, 2024 Cocoa Beach, Florida, USA, 2024.

[90]

M. Rezaei Golghand et al., "Attenuation of Electromagnetic waves in Plasma in Ku band," i Swedish Microwave Days 2023, 2023.

[91]

S. An et al., "Automotive In-Cabin Object Detection and Passenger Monitoring with Sub-THz Radar System," i Swedish Microwave Days 2023, 2023.

[92]

A. Madannejad och J. Oberhammer, "Channel Bounding modeling for THz Communication," i Swedish Microwave days 2023, 2023.

[93]

A. Karimi, U. Shah och J. Oberhammer, "Compact High-isolation Sub-THz Micro-electromechanical SPST Switch," i 2023 53rd European Microwave Conference, EuMC 2023, 2023.

[94]

O. Glubokov et al., "On Modelling of Balanced Filters," i 2024 Ieee International Microwave Filter Workshop, IMFW, 2023, s. 183-186.

[95]

A. Karimi, U. Shah och J. Oberhammer, "Silicon-Micromachined THz Radar Frontend," i Swedish Microwave Days 2023, 2023.

[96]

A. Karimi, U. Shah och J. Oberhammer, "Sub-THz Silicon-Micromachined Reconfigurable Beam-Steering Frontend," i 2023 53rd European Microwave Conference, EuMC 2023, 2023.

[97]

A. Karimi, U. Shah och J. Oberhammer, "Sub-THz Single-Pole-Single-Thru Microelectromechanical Switch," i Swedish Microwave Days, KTH, Stockholm, 23-25 May 2023, 2023.

[98]

N. Xenidis et al., "Waveguide Measurements of Highly Anisotropic Graphene Augmented Inorganic Nanofibers," i 2023 53rd European Microwave Conference, EuMC 2023, 2023, s. 576-579.

[99]

O. Glubokov et al., "Compact W-band Silicon-Micromachined Filters with Increased Fabrication Robustness," i 2022 IEEE/MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM (IMS 2022), 2022, s. 329-332.

[100]

A. Karimi och J. Oberhammer, "Design of an Amplitude-Tapered Corporate-Feed Slot Array Antenna with Reduced Side-Lobe Level for Silicon Micromachining," i 2022 16TH EUROPEAN CONFERENCE ON ANTENNAS AND PROPAGATION (EUCAP), 2022.

[101]

S. Smirnov et al., "Generation of High-order Modes in Sub-THz Dielectric Waveguides by Misalignment of the Transition Structure," i 2022 IEEE/MTT-S International Microwave Symposium - IMS 2022, 2022, s. 479-482.

[102]

M. Reza Seidi Goldar, J. Hassanpour och J. Oberhammer, "Concept analysis of a frequency-sweeping delta/sigma beam-switching radar using machine learning," i 2021 18Th European Radar Conference (EURAD), 2021, s. 145-148.

[103]

O. Glubokov et al., "Micromachined Bandpass Filters with Enhanced Stopband Performance and Q-factor of 950 at 700 GHz," i Proceedings IEEE MTT-S International Microwave Symposium Digest, 2021, s. 204-206.

[104]

A. Przewłoka et al., "Single-walled carbon nanotube phase shifters for low THz frequencies," i The 11th International Conference on Metamaterials, Photonic Crystals and Plasmonics, META 2021, 2021, s. 1058-1059.

[105]

J. Campion et al., "Ultra-wideband waveguide embedded graphene-based THz absorber," i The 11th International Conference on Metamaterials, Photonic Crystals and Plasmonics, META 2021, 2021, s. 926-927.

[106]

P. Drozdz et al., "W-band waveguide embedded nanofiber absorber," i 2021 46Th International Conference On Infrared, Millimeter And Terahertz Waves (IRMMW-THZ), 2021.

[107]

A. Gomez-Torrent, U. Shah och J. Oberhammer, "Silicon Micromachined Receiver Calibration Waveguide Switch for THz Frequencies," i International Symposium on Space Terahertz Technology (ISSTT),Gothenburg, Sweden, April 15-17, 2019, 2020.

[108]

X. Zhao, O. Glubokov och J. Oberhammer, "Silicon-on-Insulator based Micromachining Technology for Sub-Terahertz Waveguide Devices," i 2020 IEEE Asia-pacific Microwave Conference (APMC), 2020, s. 920-922.

[109]

Y. Li et al., "D-band SiGe transceiver modules based on silicon-micromachined integration," i Asia-Pacific Microwave Conference Proceedings, APMC, 2019, s. 883-885.

[110]

S. Smirnov et al., "Dielectric Rod Antenna Array for Photonic-Based Sub-Terahertz Beamforming," i International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz, 2019.

[111]

Z. Xinghai et al., "Highly compact silicon micromachined filter with axial ports at sub-terahertz band," i Asia-Pacific Microwave Conference Proceedings, APMC, 2019, s. 768-770.

[112]

D. Dancila et al., "Leaky Wave Antenna at 300 GHz in Silicon Micromachined Waveguide Technology," i 2019 44th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), 2019.

[113]

J. Oberhammer, "Overview and recent achievements in silicon micromachining for THz systems," i Proceedings of European Microwave Conference in Central Europe, EuMCE 2019, 2019, s. 23-26.

[114]

A. Morales et al., "Photonic-Based Beamforming System for Sub-THz Wireless Communications," i 2019 European Microwave Conference in Central Europe (EuMCE), Prague, Czech Republic, May 13-15 2019, 2019, s. 253-256.

[115]

J. Campion, U. Shah och J. Oberhammer, "Silicon-Micromachined Waveguide Calibration Shims for Terahertz Frequencies," i Proceedings 2019 IEEE MTT-S International Microwave Symposium (IMS), 2019.

[116]

U. Shah, A. Gomez Torrent och J. Oberhammer, "Ultra-Compact Micromachined Beam-Steering Antenna Front-End for High-Resolution Sub-Terahertz Radar," i 2019 44th International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW-THz), 2019.

[117]

W. Kuramoto et al., "Wideband Design of a 350GHz-band Corporate-feed Waveguide Slot Array Antenna using Gold-coating Silicon Wafers with Different Thickness," i 2019 International Symposium on Antennas and Propagation, ISAP 2019 - Proceedings, 2019.

[118]

Z. S. He et al., "A 140 GHz Transmitter with an Integrated Chip-to-Waveguide Transition using 130nm SiGe BiCMOS Process," i 2018 ASIA-PACIFIC MICROWAVE CONFERENCE PROCEEDINGS (APMC), 2018, s. 28-30.

[119]

A. Gomez-Torrent, U. Shah och J. Oberhammer, "A Silicon Micromachined 220-330 GHz Turnstile Orthomode Transducer (OMT) in a Low-Loss Micromachining Fabrication Platform," i The 8th ESA Workshop on Millimetre-Wave Technology and Applications, 10-12 December 2018, ESA/ESTEC, Noordwijk, The Netherlands, 2018.

[120]

U. Shah och J. Oberhammer, "A Very High Isolation (>50 dB) and Low Insertion Loss (<0.55 dB) 140-220 GHz MEMSWaveguide Switch," i The 8th ESA Workshop on Millimetre-Wave Technology and Applications, 2018.

[121]

A. Gomez-Torrent, U. Shah och J. Oberhammer, "Advanced Millimetre-Wave Waveguide Components Enabled by Silicon Micromachining," i Swedish Microwave Days, 2018.

[122]

J. Campion et al., "An Ultra Low-Loss Silicon-Micromachined Waveguide Filter for D-Band Telecommunication Applications," i 2018 IEEE/MTT-S International Microwave Symposium, 2018, s. 583-586.

[123]

S. Smirnov et al., "Carbon Nanotube Layer Modeling for Computer Simulation of Optically Controlled Phase Shifters," i 2018 48th European Microwave Conference (EuMC), 2018, s. 827-830.

[124]

B. Beuerle et al., "Low-Loss Silicon Micromachined Waveguides Above 100 GHz Utilising Multiple H-plane Splits," i Proceedings of the 48th European Microwave Conference, Madrid, October 1-3, 2018, 2018, s. 1041-1044.

[125]

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B. Beuerle, U. Shah och J. Oberhammer, "Micromachined Waveguides with Integrated Silicon Absorbers and Attenuators at 220–325 GHz," i IEEE MTT-S International Microwave Symposium, IEEE conference proceedings, 2018, 2018.

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J. Oberhammer, "THz MEMS - Micromachining enabling new solutions at millimeter and submillimeter-wave frequencies (invited paper)," i Asia-Pacific Microwave Conference Proceedings, APMC, 2018, s. 81-84.

[132]

A. Gomez-Torrent, U. Shah och J. Oberhammer, "Wideband 220 – 330 GHz Turnstile OMT Enabled by Silicon Micromachining," i 2018 IEEE MTT-S International Microwave Symposium (IMS), 2018, s. 1511-1514.

[133]

R. Malmqvist et al., "A 220-325 GHz Low-Loss Micromachined Waveguide Power Divider," i Proceedings of the 2017 Asia-Pacific Microwave Conference (APMC), 2017, s. 291-294.

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J. Svedin et al., "A 230-300 GHz Low-Loss Micromachined Waveguide Hybrid Coupler," i Proceedings of the 47th European Microwave Conference,, 2017, s. 616-619.

[135]

A. Hassona et al., "A non-galvanic D-band MMIC-to-waveguide transition using eWLB packaging technology," i 2017 IEEE MTT-S International Microwave Symposium (IMS), 2017, s. 510-512.

[136]

J. Campion, U. Shah och J. Oberhammer, "Elliptical alignment holes enabling accurate direct assembly of micro-chips to standard waveguide flanges at sub-THz frequencies," i 2017 IEEE MTT-S International Microwave Symposium (IMS), 2017, s. 1262-1265.

[137]

B. Beuerle et al., "Integrated Micromachined Waveguide Absorbers at 220 – 325 GHz," i Proceedings of the 47th European Microwave Conference, Nuremberg, October 8-13, 2017, 2017, s. 695-698.

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D. Dancila et al., "Micromachined Cavity Resonator Sensors for on Chip Material Characterisation in the 220–330 GHz band," i Proceedings of the 47th European Microwave Conference, Nuremberg, October 8-13, 2017, 2017, s. 938-941.

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[140]

P. B. Makhalov, D. Lioubtchenko och J. Oberhammer, "Simulations of a semiconductor/metal-grating slow-wave amplifier for sub-THz range," i 2017 42nd International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz, 2017.

[141]

P. B. Makhalov, D. Lioubtchenko och J. Oberhammer, "Study of the slow-wave interaction in a three valley semiconductor in high electric fields," i 42nd International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz, 2017.

[142]

D. V. Lioubtchenko et al., "W-band phase shifter based on optimized optically controlled carbon nanotube layer," i 2017 IEEE MTT-S International Microwave Symposium (IMS), 2017, s. 1188-1191.

[143]

U. Shah et al., "500-550 GHz Waveguide Integrated RF MEMS Phase Sifter," i GigaHertz Symposium 2016, Swedish Microwave days. 15-16 March., 2016.

[144]

U. Shah et al., "500-750 GHz submillimeter-wave MEMS waveguide switch," i 2016 IEEE MTT-S International Microwave Symposium (IMS), 2016.

[145]

F. Töpfer, L. Emtestam och J. Oberhammer, "Diagnosis of malignant melanoma by micromachined near-field millimeter-wave probe," i International Conference on Infrared, Millimeter, and Terahertz Waves, IRMMW-THz, 2016.

[146]

U. Shah et al., "Micromachined Waveguide Integrated RF MEMS Switch Operating between 500-750 GHz," i The 17th edition of the International Symposium on RF-MEMS and RF-MICROSYSTEMS (MEMSWAVE 2016), 2016.

[147]

J. Oberhammer, "THz MEMS - Micromachining enabling new solutions at millimeter and submillimeter frequencies," i 2016 Global Symposium on Millimeter Waves, GSMM 2016 and ESA Workshop on Millimetre-Wave Technology and Applications, 2016.

[148]

J. Liljeholm et al., "Through-Glass-Via Enabling Low Loss High-Linearity RF Components," i 11th Micronano System Workshop 2016 (MSW 2016), 2016.

[149]

U. Shah et al., "500-600 GHz RF MEMS Based Tunable Stub Integrated in Micromachined Rectangular Waveguide," i 2015 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM (IMS), 2015.

[150]

U. Shah et al., "500-600 GHz Submillimeter-Wave 3.3 bit RF MEMS Phase Shifter Integrated in Micromachined Waveguide," i Microwave Symposium (IMS), 2015 IEEE MTT-S International, 2015, s. 1-4.

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U. Shah et al., "Micromachined Waveguide Integrated RF MEMS Phase Sifter Operating between 500-600 GHz," i 16th edition of the International Symposium on RF-MEMS and RF-MICROSYSTEMS. 29 june -1 July, 2015.

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J. Liljeholm et al., "Multilayer ferromagnetic composites enabling on-chip magnetic-core inductors beyond 1 GHZ," i Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on, 2015, s. 811-814.

[153]

F. Töpfer, L. Emtestam och J. Oberhammer, "Dermatological verification of micromachined millimeter-wave skin-cancer probe," i IEEE MTT-S International Microwave Symposium Digest, 2014.

[154]

Z. Baghchehsaraei och J. Oberhammer, "MEMS-reconfigurable wavguide iris for switchable V-band cavity resonators," i 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), 2014, s. 206-209.

[155]

Z. Baghchehsaraei, J. Åberg och J. Oberhammer, "Mems-reconfigurable millimeter-wave surfaces for waveguide switches, irises and resonators," i The GigaHertz 2014 Symposium, 2014.

[156]

F. Töpfer, S. Dudorov och J. Oberhammer, "2-Dimensional near-field millimeter-wave scanning with micromachined probe for skin cancer diagnosis," i Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on, 2013, s. 1057-1060.

[157]

U. Shah, M. Sterner och J. Oberhammer, "Analysis of linearity degradation in multi-stage RF MEMS circuits," i Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on, 2013, s. 749-752.

[158]

U. Shah och J. Oberhammer, "Characterization of High-Q Laterally Moving RF MEMS Tuneable Capacitor," i European Microwave Week 2013, EuMW 2013 - Conference Proceedings; EuMC 2013 : 43rd European Microwave Conference, 2013, s. 1323-1326.

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U. Shah och J. Oberhammer, "Characterization of High-Q Laterally Moving RF MEMS Tuneable Capacitor," i 2013 8TH EUROPEAN MICROWAVE INTEGRATED CIRCUITS CONFERENCE (EUMIC), 2013, s. 352-355.

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F. Töpfer et al., "Micromachined near-field millimeter-wave medical sensor for skin cancer diagnosis," i 2013 7th European Conference on Antennas and Propagation (EuCAP), 2013, s. 1550-1553.

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Z. Baghchehsaraei et al., "Millimeter-Wave SPST Waveguide Switch Based on Reconfigurable MEMS Surface," i 2013 IEEE MTT-S International Microwave Symposium Digest (IMS), 2013, s. 6697774.

[162]

J. Oberhammer et al., "Monocrystalline‐Silicon Microwave MEMS," i Proceedings of PIERS 2013 in Stockholm, August 12-15, 2013, 2013, s. 1933-1941.

[163]

U. Shah, M. Sterner och J. Oberhammer, "Nonlinearity Determination and Linearity Degradation in RF MEMS Multi-Device Circuits," i 14th International Symposium on RF MEMS and RF Microsystems (MEMSWAVE 2013); Potsdam, Germany, July 1-3, 2013, 2013.

[164]

Z. Baghchehsaraei och J. Oberhammer, "V-Band Single-Pole-Single-Throw Mems Rectangular waveguide Switch," i MME 2013 24th Micromechanics and Microsystems Europe Conference, 2013.

[165]

U. Shah, M. Sterner och J. Oberhammer, "Basic Concept of Tuneable MEMS Directional Couplers for Ultra‐Wideband Applications," i 13th International Symposium on RF MEMS and RF Microsystems (MEMSWAVE 2012),02-04 July 2012, Antalya, Turkey, 2012.

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U. Shah, M. Sterner och J. Oberhammer, "Compact MEMS reconfigurable ultra-wideband 10-18 GHz directional couplers," i Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2012, s. 684-687.

[167]

A. Vorobyov et al., "Iris-based 2-bit waveguide phase shifters and transmit-array for automotive radar applications," i Proceedings of 6th European Conference on Antennas and Propagation, EuCAP 2012, 2012, s. 3711-3715.

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[171]

F. Töpfer, S. Dudorov och J. Oberhammer, "Micromachined 100GHz near-field measurement probe for high-resolution microwave skin-cancer diagnosis," i IEEE MTT-S International Microwave Symposium Digest : 2012 IEEE MTT-S International Microwave Symposium, IMS 2012; Montreal, QC; Canada; 17 June 2012 through 22 June 2012, 2012, s. 6259671.

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S. Dudorov, F. Töpfer och J. Oberhammer, "Micromachined-silicon W-band planar-lens antenna with metamaterial free-space matching," i Microwave Symposium Digest (MTT), 2012 IEEE MTT-S International, 2012, s. 6259654.

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N. Somjit, G. Stemme och J. Oberhammer, "Performance optimization of multi-stage MEMS W-band dielectric-block phase-shifters," i European Microwave Week 2012: "Space for Microwaves", EuMW 2012, Conference Proceedings - 7th European Microwave Integrated Circuits Conference, EuMIC 2012, 2012, s. 433-436.

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N. Somjit och J. Oberhammer, "Semiconductor-Substrate Integrated 3D-Micromachined W-Band Helical Antennas," i Antennas and Propagation Society International Symposium (APSURSI), 2012 IEEE, 2012, s. 6349415.

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N. Somjit, G. Stemme och J. Oberhammer, "Thermal Characteristics and Power-Handling Capability of High-Power Millimeter-Wave MEMS Dielectric-Block Phase Shifters," i Gigahertz Symposium 2012. Stockholm, Sweden. March 6-7 2012, 2012.

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G. E. H. Shhade et al., "Antenne à ondes de fuite à balayage angulaireà fréquence fixe à 77GHz," i 17èmes Journées Nationales Micro-ondes, 2011.

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U. Shah, M. Sterner och J. Oberhammer, "Basic Concepts of Moving-Sidewall Tuneable Capacitors for RF MEMS Reconfigurable Filters," i 6th European Microwave Integrated Circuits (EuMIC) Conference, 2011, s. 526-529.

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U. Shah, M. Sterner och J. Oberhammer, "Basic Concepts of Moving-Sidewall Tuneable Capacitors for RF MEMS Reconfigurable Filters," i 2011 41ST EUROPEAN MICROWAVE CONFERENCE, 2011, s. 1087-1090.

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U. Shah, M. Sterner och J. Oberhammer, "Quasi-Analog Multi-Step Tuning of Laterally-Moving Capacitive Elements Integrated in 3D MEMS Transmission Lines," i 12th International Symposium on RF MEMS and RF Microsystems, Athens, June 27-29, 2011, 2011.

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N. Somjit, G. Stemme och J. Oberhammer, "Comparison of Thermal Characteristics of Novel RF MEMS Dielectric-Block Phase Shifter to Conventional MEMS Phase-Shifter Concepts," i European Microwave Week 2010, EuMW2010 : Connecting the World, Conference Proceedings, 2010, s. 509-512.

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M. Sterner et al., "Integration of microwave MEMS reconfigurable reflective surfaces in rectangular waveguide stubs," i 2010 Asia-Pacific Microwave Conference, APMC 2010, 2010, s. 1825-1828.

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N. Somjit, G. Stemme och J. Oberhammer, "Investigation of Power Handling Capability of Conventional and Novel All-Silicon RF MEMS Phase Shifters," i 11th International Symposium on RF MEMS and RF Microsystems (MEMSWAVE 2010). Otranto, Italy. June 28-30 2010, 2010.

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D. Chicherin et al., "MEMS based high-impedance surface for millimetre wave dielectric rod waveguide phase shifter," i European Microwave Week 2010, EuMW2010 : Connecting the World, Conference Proceedings - European Microwave Conference, EuMC 2010, 2010, s. 950-953.

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D. Chicherin et al., "MEMS tunable metamaterials surfaces and their applications," i APMC 2010 : 2010 Asia-Pacific Microwave Conference proceedings : Dec. 7-10 Yokohama, Japan, 2010, s. 239-242.

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J. Oberhammer, M. Sterner och N. Somjit, "Monocrystalline-Silicon Microwave MEMS Devices," i Advanced Materials And Technologies For Micro/Nano-Devices, Sensors And Actuators, 2010, s. 89-100.

[194]

N. Somjit, G. Stemme och J. Oberhammer, "Novel Low-loss 4.25-Bit All-Silicon Millimeter-Wave MEMS Phase Shifters for High-Performance W-Band Applications," i The 8th Micronano System Workshop. Stockholm, SWE. 04 May 2010 - 05 May 2010, 2010.

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U. Shah et al., "RF MEMS tuneable capacitors based on moveable sidewalls in 3D micromachined coplanar transmission lines," i Microwave Conference Proceedings (APMC), 2010 Asia-Pacific, 2010, s. 1821-1824.

[196]

N. Somjit, G. Stemme och J. Oberhammer, "Ultra-Wideband Low-loss All-Silicon MEMS Phase Shifters for High-Performance Electronic Beam-Steering Applications," i GigaHertz Symposium 2010. Lund, SWE. March 9-10 2010, 2010.

[197]

N. Somjit, G. Stemme och J. Oberhammer, "Novel concept of microwave mems reconfigurable 7X45^o multi-stage dielectric-block phase shifter," i Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems, 2009, s. 15-18.

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N. Somjit, G. Stemme och J. Oberhammer, "Phase Error and Nonlinearity Investigation of Millimeter-Wave MEMS 7-Stage Dielectric-Block Phase Shifters," i 2009 European microwave conference : Vols 1-3, 2009, s. 1872-1875.

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N. Somjit, G. Stemme och J. Oberhammer, "Phase Error and Nonlinearity Investigation of Millimeter-Wave MEMS 7-Stage Dielectric-Block Phase Shifters," i 2009 EUROPEAN MICROWAVE INTEGRATED CIRCUITS CONFERENCE (EUMIC 2009), 2009, s. 519-522.

[200]

M. Sterner et al., "RF MEMS high-impedance tuneable metamaterials for millimeter-wave beam steering," i Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems, 2009, s. 896-899.

[201]

F. Ke, J. Miao och J. Oberhammer, "Ruthenium/Gold hard-surface/low-resistivity contact metallization for polymer-encapsulated microswitch with stress-reduced corrugated SIN/SIO2 diaphragm," i Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems, 2009, s. 860-863.

[202]

M. Sterner, G. Stemme och J. Oberhammer, "Wafer counter-bonding for integrating CTE-mismatched substrates and its application to MEMS tuneable metamaterials," i TRANSDUCERS 2009 : 15th International Conference on Solid-State Sensors, 2009, s. 1722-1725.

[203]

M. Sterner et al., "Maskless selective electrochemically assisted wet etching of metal layers for 3D micromachined SOI RF MEMS devices," i MEMS 2008 : 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2008, s. 383-386.

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D. Chicherin et al., "Micro-fabricated High-impedance Surface for Millimeter Wave Beam Steering Applications," i 33RD INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER AND TERAHERTZ WAVES : VOLS 1 AND 2, 2008, s. 574-576.

[205]

J. Oberhammer et al., "Microwave MEMS activities at the Royal Institute of Technology," i GigaHertz Symposium 2008. Göteborg, SWE. 5-6 March 2008, 2008.

[206]

N. Somjit, G. Stemme och J. Oberbammer, "Novel RF MEMS Mechanically Tunable Dielectric Phase Shifter," i 33RD INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER AND TERAHERTZ WAVES : VOLS 1 AND 2, 2008, s. 643-644.

[207]

N. Somjit, G. Stemme och J. Oberhammer, "Reconfigurable Three-Dimensional Micromachined Dielectric-Loaded CPW Phase-Shifter," i 9th International Symposium on RF MEMS and RF Microsystems. Heraklion, Greece. 1-3 July 2008, 2008.

[208]

D. Chicherin et al., "Rectangular metal waveguide phase shifter controlled with MEMS high-impedance surface," i Proc. of the XXXI Finnish URSI Convention on Radio Science Electromagnetics 2008, 2008.

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J. Oberhammer och G. Stemme, "Accuracy of quasi-static simulation methods as compared to full-dynamic analysis of nonlinear electrostatic MEMS actuators," i PROCEEDINGS OF THE IEEE TWENTIETH ANNUAL INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS : VOLS 1 AND 2, 2007, s. 5-8.

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M. Sterner et al., "Coplanar-waveguide embedded mechanically-bistable DC-to-RF MEMS switches," i 2007 IEEE/MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST : VOLS 1-6, 2007, s. 359-362.

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P. Gkotsis et al., "Crystal growth template removal : application to stress reduction in PZT microstructures," i Proc. International Symposium on Integrated Ferroelectrics 2007, 2007.

[212]

M. Sterner et al., "Deep-reactive-ion-etched 3D transmission lines with integrated mechanically multi-stable SPST and SPDT RF MEMS switches," i Proc. International Symposium on RF MEMS and RF Microsystems MEMSWAVE 2007, 2007.

[213]

S. Braun, J. Oberhammer och G. Stemme, "MEMS single-chip 5x5 and 20x20 double-switch arrays for telecommunication networks," i IEEE 20th International Conference on Micro Electro Mechanical Systems, 2007. MEMS, 2007, s. 811-814.

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M. Sterner et al., "Mechanically bi-stable in-plane switch with dual-stiffness actuators," i TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS : VOLS 1 AND 2, 2007, s. U709-U710.

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M. Stemer et al., "Mechanically tri-stable SPDT metal-contact MEMS switch embedded in 3D transmission line," i European Microwave Week 2007 Conference Proceedings, EuMW 2007 - 2nd European Microwave Integrated Circuits Conference, EuMIC 2007, 2007, s. 153-156.

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M. Sterner et al., "Mechanically tri-stable SPDT metal-contact MEMS switch embedded in 3D transmission line," i Proceedings of the 37th European Microwave Conference, EUMC, 2007, s. 1225-1228.

[217]

S. Braun, J. Oberhammer och G. Stemme, "MEMS single-chip microswitch array for re-configuration of telecommunication networks," i 2006 European Microwave Conference : Vols 1-4, 2006, s. 315-318.

[218]

J. Oberhammer et al., "Mechanically tri-stable in-line single-pole-double-throw all-metal switch," i MEMS 2006 : 19th IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest, 2006, s. 898-901.

[219]

J. Oberhammer och G. Stemme, "Passive contact force and active opening force electrostatic switches for soft metal contact materials," i MEMS 2006 : 19th IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest, 2006, s. 162-165.

[220]

M. Mowlér et al., "A 2-bit reconfigurable meander slot antenna with RF-MEMS switches," i Antennas and Propagation Society International Symposium, 2005 IEEE : volym 2A, 2005, s. 396-399.

[221]

J. Oberhammer, A. Q. Liu och G. Stemme, "Numerical algorithm for quasi-static nonlinear simulation of touch-mode actuators with complex geometries and pre-stressed materials," i Transducers '05, Digest of Technical Papers, Vols 1 and 2, 2005, s. 2119-2122.

[222]

J. Oberhammer och G. Stemme, "Contact printing for improved bond-strength of patterned adhesive full-wafer bonded 0-level packages," i MEMS 2004 : 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2004, s. 713-716.

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J. Oberhammer och G. Stemme, "S-shaped film actuator for low-voltage high-isolation mems metal contact switches," i MEMS 2004: 17TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2004, s. 637-640.

[224]

J. Oberhammer och G. Stemme, "Incrementally etched electrical feedthroughs for wafer-level transfer of glass lid packages," i BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS : VOLS 1 AND 2, 2003, s. 1832-1835.

[225]

J. Oberhammer, B. Lindmark och G. Stemme, "RF characterization of low-voltage high-isolation MEMS series switch based on a S-shaped film actuator," i PROCEEDINGS OF THE INTERNATIONAL 2003 SBMO/IEEE MTT-S INTERNATIONAL MICROWAVE AND OPTOELECTRONICS CONFERENCE - IMOC 2003 : VOLS I AND II, 2003, s. 537-540.

[226]

J. Oberhammer, F. Niklaus och G. Stemme, "Sealing of Adhesive Bonded Devices on Wafer Level," i Proc. Eurosensors XVI, 2002, s. 298-299.

[227]

J. Oberhammer, F. Niklaus och G. Stemme, "Selective Wafer Level Adhesive Bonding with Benzocyclobutene," i Proc. Micromechanics Europe MME 2001, 2001, s. 54-57.

Kapitel i böcker

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R. Malmqvist et al., "Reconfigurable RF Circuits and RF-MEMS," i Microwave and Millimeter Wave Circuits and Systems : Emerging Design, Technologies, and Applications, : John Wiley & Sons, 2012, s. 325-356.

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N. Somjit, G. Stemme och J. Oberhammer, "Reconfigurable Three-Dimensional Micromachined Dielectric-Loaded CPW Phase Shifter," i Series in Micro and Nanoengineering : New developments in micro electro mechanical systems for radio frequency and millimeter wave applications, George Konstantinidis, Alexandru Müller, Dan Dascălu, Robert Plana red., 15. uppl. : Publishing House of the Romanian Academy, 2009, s. 163-167.

Icke refereegranskade

Konferensbidrag

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D. Dancila et al., "Leaky Wave Antenna at 300 GHz in KTH’s Micromachined Waveguide Technology," i AntennEMB Symposium 2018, 2018.

[231]

J. Campion et al., "Low-Loss Hollow and Silicon-Core Micromachined Waveguide Technologies Above 100 GHz," i GigaHertz Symposium 2018, Swedish Microwave Days 24-25 June, Lund, Sweden, 2018.

[232]

J. Oberhammer et al., "3D silicon micromachining – an enabling technology for high-performance millimeter and submillimeter-wave frequencies reconfigurable satellite front-ends," i 38th ESA Antenna Workshop on Innovative Antenna Systems and Technologies for Future Space Missions, 3-6 October 2017 Noordwijk, The Netherlands, 2017.

[233]

F. Töpfer, S. Dudorov och J. Oberhammer, "Characterization of high-resolution millimeter-wave measurement probe for skin tissue analysis," i 13th International Symposium on RF-MEMS and RF-Microsystems (MEMSWAVE 2012), 2012.

[234]

F. Töpfer et al., "High-resolution microwave skin cancer diagnostic tool based on micromachined interface," i Micronano System Workshop (MSW) 2012, 2012.

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M. Sterner et al., "MEMS-tunable high-impedance surface millimeter-wave phase shifterfor dielectric-rod antenna beam forming," i GigaHertz 2012, 2012.

[236]

U. Shah, M. Sterner och J. Oberhammer, "RF MEMS RECONFIGURABLE FILTERS BASED ON MOVABLE SIDEWALLS OF A 3D MICROMACHINED TRANSMISSION LINE," i GigaHertz Symposium 2012, 2012.

[237]

U. Shah, M. Sterner och J. Oberhammer, "TUNEABLE DIRECTIONAL COUPLERS IN 3D MICROMACHINEDTRANSMISSION LINE FOR ULTRA-WIDEBAND APPLICATIONS," i GigaHertz Symposium 2012, 2012.

[238]

J. Oberhammer et al., "Microwave MEMS Activities at KTH- Royal Institute of Technology," i 8th Micronano System Workshop 2010 (MSW 2010). Stockholm, Sweden. May 4-5, 2010, 2010.

[239]

M. Sterner et al., "Millimeter-Wave RF MEMS Reconfigurable High-Impedance Surfaces for Radar Applications," i GigaHertz Symposium 2010, 2010.

[240]

M. Sterner, G. Stemme och J. Oberhammer, "Nanometer-scale flatness and reliability investigation of stress-compensated symmetrically-metallized monocrystalline-silicon multi-layer membranes," i 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2010, s. 959-962.

[241]

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